JP2021500233A - 熱膨張係数を用いた薄膜電極分離方法 - Google Patents
熱膨張係数を用いた薄膜電極分離方法 Download PDFInfo
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Abstract
Description
11 第1薄膜
20 スピンコーティング機
30 ホットプレート
40 熱照射部
70 電極
100 基板
200 フォトレジスト
201 フォトレジスト膜
300 金属
400 パッシベーション層
Claims (7)
- 基板上に第1溶液を塗布するステップと、
前記基板上に塗布された第1溶液を硬化するステップと、
前記基板を所定時間の間放置して前記基板上に第1熱膨張係数を有する第1薄膜が形成されるステップと、
前記第1薄膜が形成された基板上にフォトレジストをコーティングするステップと、
前記基板上にコーティングされたフォトレジストを硬化して第2熱膨張係数を有するフォトレジスト膜を形成するステップと、
前記フォトレジスト膜上に金属及びパッシベーション層を形成するステップと、
前記フォトレジスト膜と前記第1薄膜の互いに異なる熱膨張係数値の差を用いて前記フォトレジスト膜を前記第1薄膜から分離するステップとを含む熱膨張係数を用いた薄膜電極分離方法。 - 前記基板上に第1溶液を塗布するステップで、
前記第1溶液を前記基板上にスピンコーティングして塗布することを特徴とする、請求項1に記載の熱膨張係数を用いた薄膜電極分離方法。 - 前記第1溶液を硬化するステップで、
前記第1溶液が塗布された前記基板をホットプレート上で、互いに異なる温度と時間で複数の硬化工程で硬化させることを特徴とする、請求項1に記載の熱膨張係数を用いた薄膜電極分離方法。 - 前記第1溶液を硬化するステップで、
前記第1溶液が塗布された前記基板を60℃温度で30分間加熱するステップと、
前記第1溶液が塗布された前記基板を80℃温度で30分間加熱するステップと、
前記第1溶液が塗布された前記基板を150℃温度で30分間加熱するステップと、
前記第1溶液が塗布された前記基板を230℃温度で30分間加熱するステップと、
前記第1溶液が塗布された前記基板を300℃温度で30分間加熱するステップとを含むことを特徴とする、請求項3に記載の熱膨張係数を用いた薄膜電極分離方法。 - 前記第1溶液はTPI(temporary Polyimide)溶液であることを特徴とする、請求項1に記載の熱膨張係数を用いた薄膜電極分離方法。
- 前記第1薄膜の第1熱膨張係数は3であり、
前記フォトレジスト膜の第2熱膨張係数は50以上であることを特徴とする、請求項5に記載の熱膨張係数を用いた薄膜電極分離方法。 - 前記フォトレジスト膜を前記第1薄膜から分離するステップで、
レーザーまたはカッターを用いて前記フォトレジスト膜の隅部にスクラッチを形成した後、フォルセプスで剥がすことを特徴とする、請求項1に記載の熱膨張係数を用いた薄膜電極分離方法。
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KR10-2017-0165750 | 2017-12-05 | ||
PCT/KR2018/008921 WO2019112141A1 (ko) | 2017-12-05 | 2018-08-07 | 열팽창 계수를 이용한 박막전극 분리 방법 |
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CN115849298B (zh) * | 2023-01-18 | 2023-05-09 | 胜科纳米(苏州)股份有限公司 | 一种具有梳齿结构芯片的梳齿层去除方法 |
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US11056339B1 (en) | 2021-07-06 |
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