JP2021163959A - デバイス封止方法、デバイス封止装置、および半導体製品の製造方法 - Google Patents

デバイス封止方法、デバイス封止装置、および半導体製品の製造方法 Download PDF

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Publication number
JP2021163959A
JP2021163959A JP2021015586A JP2021015586A JP2021163959A JP 2021163959 A JP2021163959 A JP 2021163959A JP 2021015586 A JP2021015586 A JP 2021015586A JP 2021015586 A JP2021015586 A JP 2021015586A JP 2021163959 A JP2021163959 A JP 2021163959A
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JP
Japan
Prior art keywords
sealing
sheet
shaped
encapsulant
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2021015586A
Other languages
English (en)
Japanese (ja)
Inventor
伸也 秋月
Shinya Akizuki
雅之 山本
Masayuki Yamamoto
幸敏 長谷
Yukitoshi Hase
聡洋 村山
Akihiro Murayama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nitto Seiki Co Ltd
Nitto Denko Corp
Original Assignee
Nitto Seiki Co Ltd
Nitto Denko Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nitto Seiki Co Ltd, Nitto Denko Corp filed Critical Nitto Seiki Co Ltd
Priority to TW110108451A priority Critical patent/TW202205454A/zh
Priority to KR1020210038472A priority patent/KR20210122131A/ko
Priority to CN202110334553.0A priority patent/CN113471085A/zh
Publication of JP2021163959A publication Critical patent/JP2021163959A/ja
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
    • H01L21/561—Batch processing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/29—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
    • H01L23/293—Organic, e.g. plastic
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
    • H01L23/3107—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
    • H01L23/3121—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed a substrate forming part of the encapsulation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2933/00—Details relating to devices covered by the group H01L33/00 but not provided for in its subgroups
    • H01L2933/0008—Processes
    • H01L2933/0033—Processes relating to semiconductor body packages
    • H01L2933/005—Processes relating to semiconductor body packages relating to encapsulations

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
  • Casting Or Compression Moulding Of Plastics Or The Like (AREA)
JP2021015586A 2020-03-30 2021-02-03 デバイス封止方法、デバイス封止装置、および半導体製品の製造方法 Pending JP2021163959A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
TW110108451A TW202205454A (zh) 2020-03-30 2021-03-10 元件密封方法、元件密封裝置及半導體製品的製造方法
KR1020210038472A KR20210122131A (ko) 2020-03-30 2021-03-25 디바이스 밀봉 방법, 디바이스 밀봉 장치, 및 반도체 제품의 제조 방법
CN202110334553.0A CN113471085A (zh) 2020-03-30 2021-03-29 器件密封方法、器件密封装置和半导体产品的制造方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2020060317 2020-03-30
JP2020060317 2020-03-30

Publications (1)

Publication Number Publication Date
JP2021163959A true JP2021163959A (ja) 2021-10-11

Family

ID=78003733

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021015586A Pending JP2021163959A (ja) 2020-03-30 2021-02-03 デバイス封止方法、デバイス封止装置、および半導体製品の製造方法

Country Status (3)

Country Link
JP (1) JP2021163959A (ko)
KR (1) KR20210122131A (ko)
TW (1) TW202205454A (ko)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6506680B2 (ja) 2015-11-09 2019-04-24 Ｔｏｗａ株式会社 樹脂封止装置及び樹脂封止方法

Also Published As

Publication number Publication date
TW202205454A (zh) 2022-02-01
KR20210122131A (ko) 2021-10-08

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