JP2021148520A - 光学検査装置 - Google Patents
光学検査装置 Download PDFInfo
- Publication number
- JP2021148520A JP2021148520A JP2020047078A JP2020047078A JP2021148520A JP 2021148520 A JP2021148520 A JP 2021148520A JP 2020047078 A JP2020047078 A JP 2020047078A JP 2020047078 A JP2020047078 A JP 2020047078A JP 2021148520 A JP2021148520 A JP 2021148520A
- Authority
- JP
- Japan
- Prior art keywords
- light
- wavelength
- ray
- optical inspection
- region
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 178
- 238000007689 inspection Methods 0.000 title claims abstract description 102
- 238000001514 detection method Methods 0.000 claims abstract description 82
- 238000003384 imaging method Methods 0.000 claims description 101
- 238000004458 analytical method Methods 0.000 claims description 36
- 239000000463 material Substances 0.000 claims description 7
- 239000000470 constituent Substances 0.000 claims description 5
- 230000005856 abnormality Effects 0.000 claims description 3
- 230000003595 spectral effect Effects 0.000 claims description 2
- 230000010365 information processing Effects 0.000 description 23
- 230000004048 modification Effects 0.000 description 23
- 238000012986 modification Methods 0.000 description 23
- 238000010586 diagram Methods 0.000 description 12
- 238000012545 processing Methods 0.000 description 10
- 230000007246 mechanism Effects 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 238000003466 welding Methods 0.000 description 3
- 239000004925 Acrylic resin Substances 0.000 description 2
- 229920000178 Acrylic resin Polymers 0.000 description 2
- 239000003086 colorant Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000005304 optical glass Substances 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 229920003023 plastic Polymers 0.000 description 2
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 2
- 239000004417 polycarbonate Substances 0.000 description 2
- 229920000515 polycarbonate Polymers 0.000 description 2
- 239000004926 polymethyl methacrylate Substances 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 238000004611 spectroscopical analysis Methods 0.000 description 2
- 241001025261 Neoraja caerulea Species 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000002457 bidirectional effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 238000004590 computer program Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005315 distribution function Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/10—Investigating individual particles
- G01N15/14—Optical investigation techniques, e.g. flow cytometry
- G01N15/1429—Signal processing
- G01N15/1433—Signal processing using image recognition
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/10—Investigating individual particles
- G01N15/14—Optical investigation techniques, e.g. flow cytometry
- G01N15/1434—Optical arrangements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/47—Scattering, i.e. diffuse reflection
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/85—Investigating moving fluids or granular solids
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/10—Investigating individual particles
- G01N2015/1006—Investigating individual particles for cytology
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N2021/178—Methods for obtaining spatial resolution of the property being measured
- G01N2021/1785—Three dimensional
- G01N2021/1787—Tomographic, i.e. computerised reconstruction from projective measurements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N2021/3129—Determining multicomponents by multiwavelength light
- G01N2021/3137—Determining multicomponents by multiwavelength light with selection of wavelengths after the sample
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/314—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry with comparison of measurements at specific and non-specific wavelengths
- G01N2021/317—Special constructive features
- G01N2021/3177—Use of spatially separated filters in simultaneous way
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/47—Scattering, i.e. diffuse reflection
- G01N2021/4704—Angular selective
- G01N2021/4711—Multiangle measurement
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
- G01N21/4133—Refractometers, e.g. differential
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/47—Scattering, i.e. diffuse reflection
- G01N21/49—Scattering, i.e. diffuse reflection within a body or fluid
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Biochemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Dispersion Chemistry (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Engineering & Computer Science (AREA)
- Signal Processing (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
Description
図1は、本実施形態の光学検査装置1Aの一例を示す模式図である。図2は、図1の光学検査装置1Aの矢印Z方向に沿った断面図である。
s<f ・・・(1)
Δθ=s/f ・・・(2)
上記実施形態では、第1波長選択領域32Aは、第1波長領域の光線Lを透過し、第1波長領域以外の波長領域である第2波長領域の光線Lを非透過である形態を一例として説明した。また、第2波長選択領域32Bは、第1波長領域および第2波長領域の光線Lを非透過である場合を一例として説明した。
上記第1の実施形態では、照射部10から照射された光線Rが被検体Sを通過することで、該光線Rが被検体Sで散乱される形態を、一例として説明した。そして、上記第1の実施形態では、光学検査装置1Aは、通過による散乱光である光線Lを検出する形態を一例として説明した。しかし、光線Rが被検体Sで反射されることで、該光線Rが被検体Sで散乱される形態であってもよい。そして、光学検査装置1は、反射による散乱光である光線Lを検出する形態であってもよい。
上記第1の実施形態では、光選択部30に設けられた複数の波長選択領域32が、互いに異なる波長領域の光線Lを選択的に透過する形態を、一例として説明した。しかし、複数の波長選択領域32は、互いに異なる波長領域の光線Lを選択的に反射する形態であってもよい。
上記実施形態では、光選択部30が2つの波長選択領域32を有する形態を一例として説明した。しかし、光選択部30は、第1結像素子20の光軸Zに対する方位角が互いに異なる複数の波長選択領域32を備えた構成であればよく、2つの波長選択領域32を有する形態に限定されない。
本実施形態では、特有の構成の照射部を備えた形態を説明する。
本実施形態では、結像素子を更に備えた形態を説明する。
なお、光学検査装置1は、光源10Aから検出素子40へ到る光線が、ミラーを介して折り畳まれた構成であってもよい。
10 照射部
10A 光源
10B 導光体
10C リフレクタ
20 第1結像素子
30、34 光選択部
32 波長選択領域
40 検出素子
52B 解析部
70 第2結像素子
80 DMD
Claims (14)
- 互いに異なる波長領域の光線を選択的に透過または反射する、複数の波長選択領域を有する光選択部と、
前記光選択部を介して受光面に到達した光線の散乱特性情報を検出する検出素子と、
被検体で散乱された散乱光を、前記光選択部を介して前記受光面に入射させる第1結像素子と、
を備え、
複数の前記波長選択領域は、前記第1結像素子の光軸に対する方位角が互いに異なる、
光学検査装置。 - 前記光選択部は、
前記第1結像素子の焦点面に配置される、
請求項1に記載の光学検査装置。 - 前記検出素子は、
前記受光面に到達した光線の、互いに異なる波長領域の分光画像を前記散乱特性情報として撮像する、
請求項1または請求項2に記載の光学検査装置。 - 前記検出素子は、
前記光選択部に設けられた前記波長選択領域の数以上の数の波長領域に分光した、前記分光画像を撮像する、
請求項3に記載の光学検査装置。 - 前記光選択部を透過または反射した光線を前記受光面に結像させる第2結像素子、
を更に備える、請求項1〜請求項4の何れか1項に記載の光学検査装置。 - 光源と、
光源から出射された光線の平行光を前記被検体に照射する光学素子と、
を有する照射部を更に備える、
請求項1〜請求項5の何れか1項に記載の光学検査装置。 - 前記光学素子は、
リフレクタと、
前記光源から出射された光線を前記リフレクタの焦点に導光する導光体と、
を有する、
請求項6に記載の光学検査装置。 - 前記散乱特性情報を解析する解析部を備える、
請求項1〜請求項7の何れか1項に記載の光学検査装置。 - 前記解析部は、
前記被検体の、距離情報、屈折率分布、散乱強度、表面形状、構成材料、および立体構造、の少なくとも1つの解析結果を導出する、
請求項8に記載の光学検査装置。 - 前記解析部は、
前記散乱特性情報と、リファレンス特性情報と、の比較結果に基づいて、前記被検体の異常を検知する、
請求項8または請求項9に記載の光学検査装置。 - 前記被検体は、
生細胞またはレーザ溶接領域を含む物体である、
請求項1〜請求項10の何れか1項に記載の光学検査装置。 - 複数の前記波長選択領域は、選択的に透過または反射する波長よりも大きい、
請求項1に記載の光学検査装置。 - 複数の前記波長選択領域は、前記第1結像素子の焦点距離よりも小さい、
請求項1に記載の光学検査装置。 - 複数の前記波長選択領域は、異なる2つの前記波長選択領域を光線が通過する際、一方の光線の波長領域に含まれない識別波長を他方の光線が持つように作用し、
前記検出素子は前記識別波長を検知できる、
請求項1に記載の光学検査装置。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2020047078A JP7309640B2 (ja) | 2020-03-18 | 2020-03-18 | 光学検査装置 |
US17/006,935 US20210293723A1 (en) | 2020-03-18 | 2020-08-31 | Optical inspection device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2020047078A JP7309640B2 (ja) | 2020-03-18 | 2020-03-18 | 光学検査装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2021148520A true JP2021148520A (ja) | 2021-09-27 |
JP7309640B2 JP7309640B2 (ja) | 2023-07-18 |
Family
ID=77746669
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2020047078A Active JP7309640B2 (ja) | 2020-03-18 | 2020-03-18 | 光学検査装置 |
Country Status (2)
Country | Link |
---|---|
US (1) | US20210293723A1 (ja) |
JP (1) | JP7309640B2 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2023139658A (ja) * | 2022-03-22 | 2023-10-04 | 株式会社東芝 | 光学検査方法、光学検査プログラム、処理装置、及び、光学検査装置 |
Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS556323A (en) * | 1978-06-29 | 1980-01-17 | Fujitsu Ltd | Matching device for optical communication |
JP2005339879A (ja) * | 2004-05-25 | 2005-12-08 | Olympus Corp | 照明素子、照明ユニット及び撮像装置 |
JP2006024681A (ja) * | 2004-07-07 | 2006-01-26 | Nikon Corp | 位置計測装置及び方法並びに露光装置及び方法 |
JP2010096559A (ja) * | 2008-10-15 | 2010-04-30 | Konica Minolta Sensing Inc | 2次元分光測定装置 |
JP2015132509A (ja) * | 2014-01-10 | 2015-07-23 | 凸版印刷株式会社 | 画像データ取得システム及び画像データ取得方法 |
JP2016075590A (ja) * | 2014-10-07 | 2016-05-12 | 公立大学法人北九州市立大学 | シュリーレン断層撮影装置及び三次元圧縮性噴流評価方法 |
JP2017072888A (ja) * | 2015-10-05 | 2017-04-13 | 三菱電機株式会社 | 移動体識別装置及び移動体識別方法 |
JP2017101934A (ja) * | 2015-11-30 | 2017-06-08 | キヤノン株式会社 | 処理装置、処理システム、撮像装置、処理方法、処理プログラムおよび記録媒体 |
WO2017164134A1 (ja) * | 2016-03-23 | 2017-09-28 | コニカミノルタ株式会社 | 二次元測色装置 |
JP2019124542A (ja) * | 2018-01-15 | 2019-07-25 | 株式会社東芝 | 光学検査装置及び光学検査方法 |
Family Cites Families (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014075780A (ja) * | 2012-09-14 | 2014-04-24 | Ricoh Co Ltd | 撮像装置及び撮像システム |
JP2014095688A (ja) * | 2012-10-09 | 2014-05-22 | Ricoh Co Ltd | 撮像装置及び撮像システム |
JP6322939B2 (ja) * | 2012-12-03 | 2018-05-16 | 株式会社リコー | 撮像システム及び色検査システム |
US10191022B2 (en) * | 2013-03-15 | 2019-01-29 | Uvia Group Llc | Gas imager employing an array imager pixels with order filters |
JP6340884B2 (ja) * | 2013-06-19 | 2018-06-13 | 株式会社リコー | 測定装置、測定システム及び測定方法 |
US9706116B2 (en) * | 2013-10-31 | 2017-07-11 | Ricoh Co., Ltd. | Plenoptic color imaging system with enhanced resolution |
US9453995B2 (en) * | 2013-12-03 | 2016-09-27 | Lloyd Douglas Clark | Electronically variable illumination filter for microscopy |
JP6536877B2 (ja) * | 2014-07-31 | 2019-07-03 | パナソニックIpマネジメント株式会社 | 撮像装置および撮像システム |
JP6384183B2 (ja) * | 2014-08-05 | 2018-09-05 | 株式会社リコー | 試料測定装置および試料測定プログラム |
KR102323208B1 (ko) * | 2014-11-03 | 2021-11-08 | 삼성전자주식회사 | 수직 적층 구조를 갖는 분광기 및 이를 포함하는 비침습형 생체 센서 |
US10117579B2 (en) * | 2014-11-14 | 2018-11-06 | Ricoh Company, Ltd. | Simultaneous capture of filtered images of the eye |
US20160241797A1 (en) * | 2015-02-17 | 2016-08-18 | Canon Kabushiki Kaisha | Devices, systems, and methods for single-shot high-resolution multispectral image acquisition |
EP4375631A2 (en) * | 2015-05-29 | 2024-05-29 | Rebellion Photonics, Inc. | Hydrogen sulfide imaging system |
KR102106937B1 (ko) * | 2016-02-19 | 2020-05-07 | 에이에스엠엘 네델란즈 비.브이. | 구조체 측정 방법, 검사 장치, 리소그래피 시스템, 디바이스 제조 방법 및 그 안에 사용되는 파장-선택 필터 |
CN107135380B (zh) * | 2016-02-29 | 2019-05-28 | 华为技术有限公司 | 一种彩色成像装置以及获取彩色图像的方法 |
US11115573B2 (en) * | 2016-06-29 | 2021-09-07 | United States Of America As Represented By The Administrator Of Nasa | Hyperspectral plenoptic camera |
JP6975897B2 (ja) * | 2016-12-27 | 2021-12-01 | パナソニックIpマネジメント株式会社 | 画像生成装置及び撮像装置 |
JPWO2018143340A1 (ja) * | 2017-02-02 | 2020-01-09 | パイオニア株式会社 | 分光カメラ、撮像方法、プログラム及び記録媒体 |
JP6816572B2 (ja) * | 2017-03-09 | 2021-01-20 | 株式会社リコー | 色測定装置、色測定方法及びプログラム |
US11193824B2 (en) * | 2017-09-14 | 2021-12-07 | Arizona Board Of Regents On Behalf Of The University Of Arizona | Compact spectrometer devices, methods, and applications |
CN112840643B (zh) * | 2018-10-09 | 2022-01-14 | 富士胶片株式会社 | 摄像装置 |
US11249289B2 (en) * | 2019-01-25 | 2022-02-15 | Bodkin Design And Engineering Llc | Spectral imager and spectral imaging method |
CN115152205A (zh) * | 2020-02-28 | 2022-10-04 | 富士胶片株式会社 | 摄像装置及方法 |
-
2020
- 2020-03-18 JP JP2020047078A patent/JP7309640B2/ja active Active
- 2020-08-31 US US17/006,935 patent/US20210293723A1/en active Pending
Patent Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS556323A (en) * | 1978-06-29 | 1980-01-17 | Fujitsu Ltd | Matching device for optical communication |
JP2005339879A (ja) * | 2004-05-25 | 2005-12-08 | Olympus Corp | 照明素子、照明ユニット及び撮像装置 |
JP2006024681A (ja) * | 2004-07-07 | 2006-01-26 | Nikon Corp | 位置計測装置及び方法並びに露光装置及び方法 |
JP2010096559A (ja) * | 2008-10-15 | 2010-04-30 | Konica Minolta Sensing Inc | 2次元分光測定装置 |
JP2015132509A (ja) * | 2014-01-10 | 2015-07-23 | 凸版印刷株式会社 | 画像データ取得システム及び画像データ取得方法 |
JP2016075590A (ja) * | 2014-10-07 | 2016-05-12 | 公立大学法人北九州市立大学 | シュリーレン断層撮影装置及び三次元圧縮性噴流評価方法 |
JP2017072888A (ja) * | 2015-10-05 | 2017-04-13 | 三菱電機株式会社 | 移動体識別装置及び移動体識別方法 |
JP2017101934A (ja) * | 2015-11-30 | 2017-06-08 | キヤノン株式会社 | 処理装置、処理システム、撮像装置、処理方法、処理プログラムおよび記録媒体 |
WO2017164134A1 (ja) * | 2016-03-23 | 2017-09-28 | コニカミノルタ株式会社 | 二次元測色装置 |
JP2019124542A (ja) * | 2018-01-15 | 2019-07-25 | 株式会社東芝 | 光学検査装置及び光学検査方法 |
Non-Patent Citations (1)
Title |
---|
東野 文男: "シュリーレン可視化技術 ", 日本航空宇宙学会誌, vol. 第47巻,第550号, JPN6022046191, 1999, pages 240 - 245, ISSN: 0005021769 * |
Also Published As
Publication number | Publication date |
---|---|
US20210293723A1 (en) | 2021-09-23 |
JP7309640B2 (ja) | 2023-07-18 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
TWI427265B (zh) | 測量裝置 | |
JP6818702B2 (ja) | 光学検査装置及び光学検査方法 | |
JP7191801B2 (ja) | 光学検査装置 | |
JP6954142B2 (ja) | 画像検査装置および照明装置 | |
KR102125483B1 (ko) | 공초점 계측 장치 | |
US11758278B2 (en) | Optical apparatus | |
TW202104882A (zh) | 具有非圓形光瞳的檢查系統 | |
JP7309640B2 (ja) | 光学検査装置 | |
JP6818487B2 (ja) | スペクトルの測定方法 | |
US20220404579A1 (en) | Imaging apparatus | |
JP2019095252A (ja) | 検査対象物の境界部を検査する方法及びその検査装置 | |
CN112683817A (zh) | 光谱分析装置 | |
US11333492B2 (en) | Optical device, information processing method, and computer program product | |
US9322776B2 (en) | Method and system for imaging a target | |
CN116137888A (zh) | 光学装置、信息处理方法以及程序 | |
JP7043577B2 (ja) | 光学検査装置、方法及びプログラム | |
JP6187153B2 (ja) | 検査装置 | |
JP7463313B2 (ja) | 光学検査方法、光学検査装置、および光学検査プログラム | |
US20230314335A1 (en) | Optical inspection method, non-transitory storage medium storing optical inspection program, processing device, and optical inspection apparatus | |
CN212567282U (zh) | 一种检测装置及检测设备 | |
KR20170131085A (ko) | 다중 광학계를 이용한 복합 검사장치 | |
JP6843778B2 (ja) | 物体の表面検査装置 | |
JP2023139653A (ja) | 光学検査装置、処理装置、光学検査方法、及び、光学検査プログラム | |
TW202235852A (zh) | 利用短波紅外線波長之光學計量 | |
CN116818657A (zh) | 光学检查方法、光学检查程序、处理装置以及光学检查装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20220224 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20221031 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20221101 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20221209 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20230117 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20230227 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20230328 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20230526 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20230606 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20230705 |
|
R151 | Written notification of patent or utility model registration |
Ref document number: 7309640 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R151 |