JP2021145142A - 貫通電極基板 - Google Patents
貫通電極基板 Download PDFInfo
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- JP2021145142A JP2021145142A JP2021095747A JP2021095747A JP2021145142A JP 2021145142 A JP2021145142 A JP 2021145142A JP 2021095747 A JP2021095747 A JP 2021095747A JP 2021095747 A JP2021095747 A JP 2021095747A JP 2021145142 A JP2021145142 A JP 2021145142A
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- substrate
- columnar conductor
- electrode
- semiconductor chip
- hole
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- 239000000758 substrate Substances 0.000 claims abstract description 131
- 239000004020 conductor Substances 0.000 claims abstract description 104
- 239000004065 semiconductor Substances 0.000 claims abstract description 57
- 230000000149 penetrating effect Effects 0.000 claims abstract description 6
- 229910052710 silicon Inorganic materials 0.000 claims description 28
- 239000010703 silicon Substances 0.000 claims description 28
- 239000011347 resin Substances 0.000 claims description 8
- 229920005989 resin Polymers 0.000 claims description 8
- 230000007547 defect Effects 0.000 abstract description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 25
- 238000000034 method Methods 0.000 description 17
- 239000000463 material Substances 0.000 description 14
- 238000007747 plating Methods 0.000 description 12
- 239000011521 glass Substances 0.000 description 10
- 229910052751 metal Inorganic materials 0.000 description 8
- 239000002184 metal Substances 0.000 description 8
- 238000009713 electroplating Methods 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- 238000004544 sputter deposition Methods 0.000 description 5
- 230000007423 decrease Effects 0.000 description 4
- 239000003513 alkali Substances 0.000 description 3
- 229910010272 inorganic material Inorganic materials 0.000 description 3
- 239000011147 inorganic material Substances 0.000 description 3
- 238000010030 laminating Methods 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 239000011368 organic material Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 2
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 238000009751 slip forming Methods 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910020286 SiOxNy Inorganic materials 0.000 description 1
- 229910020776 SixNy Inorganic materials 0.000 description 1
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000004380 ashing Methods 0.000 description 1
- 239000002585 base Substances 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 239000002241 glass-ceramic Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 239000009719 polyimide resin Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000005488 sandblasting Methods 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 238000010008 shearing Methods 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 description 1
- -1 voids Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Images
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- Production Of Multi-Layered Print Wiring Board (AREA)
- Printing Elements For Providing Electric Connections Between Printed Circuits (AREA)
Abstract
Description
H1≧H2+8μm
11 …基板
12 …貫通孔
13 …第1導電層
14、14A、14B …貫通電極
15 …柱状導電体
16 …第1絶縁層
17 …第2導電層
20 …半導体チップ
Claims (6)
- 第1面と前記第1面に対して反対の側の第2面とを有し、前記第1面と前記第2面と貫通する貫通孔を有する樹脂基板と、
前記貫通孔に配置された貫通電極と、
前記樹脂基板上に実装され、前記貫通電極に電気的に接続された半導体チップと、
前記貫通電極と連続し、かつ、前記樹脂基板から突出した柱状導電体と、
を有する貫通電極基板。 - 前記柱状導電体の幅は、前記貫通孔の開口幅よりも大きい、請求項1に記載の貫通電極基板。
- 前記柱状導電体の周囲に配置された絶縁層をさらに備える、請求項1または2に記載の貫通電極基板。
- 前記半導体チップ、前記柱状導電体、及び前記絶縁層が前記樹脂基板の同じ面に配置されており、前記半導体チップの接続部が前記樹脂基板とは反対側に位置しており、前記柱状導電体と前記半導体チップの前記接続部とが、前記絶縁層上に配置された導電層を介して接続されている、請求項3に記載の貫通電極基板。
- 前記柱状導電体から前記半導体チップまでの距離は、前記柱状導電体の高さの1倍以上である、請求項4に記載の貫通電極基板。
- 前記半導体チップと前記導電層との間に前記絶縁層が配置されており、前記半導体チップと前記導電層との間の前記絶縁層の厚みが8μm以上である、請求項4又は5に記載の貫通電極基板。
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JP2021095747A JP2021145142A (ja) | 2017-03-02 | 2021-06-08 | 貫通電極基板 |
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JP2017039770A JP6897163B2 (ja) | 2017-03-02 | 2017-03-02 | 貫通電極基板及びその製造方法 |
JP2021095747A JP2021145142A (ja) | 2017-03-02 | 2021-06-08 | 貫通電極基板 |
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JP2017039770A Division JP6897163B2 (ja) | 2017-03-02 | 2017-03-02 | 貫通電極基板及びその製造方法 |
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JP2021095747A Pending JP2021145142A (ja) | 2017-03-02 | 2021-06-08 | 貫通電極基板 |
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Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20150262875A1 (en) * | 2014-03-13 | 2015-09-17 | Qualcomm Incorporated | Systems and methods of forming a reduced capacitance device |
CN105097720A (zh) * | 2015-06-30 | 2015-11-25 | 南通富士通微电子股份有限公司 | 封装结构的形成方法 |
-
2017
- 2017-03-02 JP JP2017039770A patent/JP6897163B2/ja active Active
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2021
- 2021-06-08 JP JP2021095747A patent/JP2021145142A/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20150262875A1 (en) * | 2014-03-13 | 2015-09-17 | Qualcomm Incorporated | Systems and methods of forming a reduced capacitance device |
CN105097720A (zh) * | 2015-06-30 | 2015-11-25 | 南通富士通微电子股份有限公司 | 封装结构的形成方法 |
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Publication number | Publication date |
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JP2018147972A (ja) | 2018-09-20 |
JP6897163B2 (ja) | 2021-06-30 |
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