JP2021136342A - 貼合装置および貼合方法 - Google Patents
貼合装置および貼合方法 Download PDFInfo
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Abstract
Description
図1は、第1実施形態による貼合装置の構成の一例を示す断面図である。貼合装置1は、半導体ウェハW1と半導体ウェハW2とを貼り合わせて一体の半導体ウェハにする装置である。貼合装置1は、例えば、SOI(Silicon On Insulator)基板の作成、あるいは、半導体ウェハW1、W2の配線同士の接合等に用いられる。
図8は、第1実施形態の変形例1に従った貼合装置の構成例を示す平面図である。上記第1実施形態では、気体供給部13の気体供給口OP13は、ホルダ12の中心から最も遠い最外部にある開口OP8に対応しており、気体供給口OP13の数は、開口OP8の数と同数になっている。これに対し、本変形例1によれば、気体供給口OP13は、開口OP8に対応して設けられた気体供給口OP13aと、互いに隣接する2つの開口OP8の間に対応して設けられた気体供給口OP13bとを含む。このように、気体供給部13は、開口OP8よりも多くの気体供給口OP13を有していてもよい。
図9は、第1実施形態の変形例2に従った貼合装置の構成例を示す平面図である。変形例2では、気体供給口OP13は、互いに隣接する2つの開口OP8の間に対応して複数の気体供給口OP13bを有する。従って、気体供給部13は、変形例1と同様に開口OP8よりも多くの気体供給口OP13を有し、かつ、隣接する気体供給口OP13a間に気体供給口OP13bを1つ含む変形例1の気体供給口OP13よりも多くの気体供給口OP13を有する。変形例2では、隣接する気体供給口OP13a間に、2つの気体供給口OP13bが設けられている。しかし、隣接する気体供給口OP13a間に設けられる気体供給口OP13bの数はこれに限定されず、3個以上であってもよい。ただし、上述の通り、気体供給口OP13a、13bは、半導体ウェハW1、W2の貼合面に略均等に気体を吹き付けるために、ホルダ12の中心に対して同心円上に略均等に配置されていることが好ましい。
図10は、第1実施形態の変形例3に従った貼合装置の構成例を示す平面図である。変形例3では、開口OP8の数が第1実施形態の開口OP8の数より少ない。これに伴い、開口OP8に対応する気体供給口OP13の数も第1実施形態の気体供給口OP13の数より少なくなっている。例えば、開口OP8および気体供給口OP13の数は、それぞれ3つである。ただし、上述の通り、気体供給口OP13は、半導体ウェハW1、W2の貼合面に略均等に気体を吹き付けるために、ホルダ12の中心に対して同心円上に略均等に配置されていることが好ましい。開口OP8および気体供給口OP13の数は、特に限定されず、5つ以上であってもよい。
図11は、第1実施形態の変形例4に従った貼合装置の構成例を示す平面図である。ホルダ12の中心から最も遠い開口OP8は、開口OP8a、OP8bを含む。開口OP8a、OP8bは、ホルダ12の中心に対して同心円上に略均等に配置されている。しかし、開口OP8aは、開口OP8bの後に真空引きを停止する。従って、開口OP8a、OP8bは、同一の同心円上に配置されているものの、吸着停止のタイミングがずれている。開口OP8aが半導体ウェハW2を最後まで吸着している開口部となるので、気体供給口OP13は、開口OP8aに対応して設けられていればよい。このように、気体供給口OP13は、ホルダ12の中心から最も遠い最外の開口OP8a、OP8bの少なくとも一部に対応する場合もある。
図12は、第2実施形態による貼合装置の構成例を示す平面図である。第2実施形態では、気体供給部13は、ホルダ11上には設けられておらず、外部配管Pexで構成されている。外部配管Pexの主要部分は、ホルダ11、12の外部に設けられ、気体供給源SRC1からの気体を気体供給口OP13から半導体ウェハW1と半導体ウェハW2との貼合部に供給する。外部配管Pexは、ホルダ11の外縁に沿っては設けられておらず、従って環状には構成されていない。また、気体供給部13は、ホルダ11の外縁上に空洞部H13を有しない。
図13は、上記実施形態の貼合装置を用いて貼合された半導体チップの例を示す断面図である。半導体チップ21は、第1回路領域を有する第1半導体基板2の一部からなる制御回路チップ22と、第2回路領域を有する第2半導体基板3の一部からなるアレイチップ23とを備えている。半導体チップ21は、貼合装置1を用いて複数の半導体ウェハを貼合した後、半導体ウェハを切断して個片化することにより作製される。従って、制御回路チップ22とアレイチップ23とは貼合されている。
Claims (5)
- 第1基板を保持する第1ホルダと、
第2基板を吸着し該第2基板の中心に対して同心円上に略均等に配置された複数の吸着部を有する第2ホルダであって、前記第2基板を前記第1基板に対向させて貼り合わせる第2ホルダと、
前記第1基板と前記第2基板との貼合位置に向かって気体を供給する複数の第1気体供給口を有する第1気体供給部とを備え、
前記複数の第1気体供給口は、前記複数の吸着部のうち前記第2ホルダの中心から最も遠い最外吸着部の少なくとも一部に対応し、かつ、該中心に対して同心円上に略均等に配置されている、貼合装置。 - 前記第1気体供給口に対応する前記最外吸着部は、前記第1および第2基板を貼り合わせるときに前記複数の吸着部のうち前記第2基板を最後まで吸着している吸着部である、請求項1に記載の貼合装置。
- 前記複数の第1気体供給口は、前記第2基板が前記最外吸着部から離れるときに、前記第1基板と前記第2基板との貼合の伸展方向に対して対向方向に気体を供給する、請求項1または請求項2に記載の貼合装置。
- 前記第2ホルダは、前記複数の吸着部の一部として、前記最外吸着部よりも前記中心近くに配置され前記第2ホルダと前記第2基板との間の気体を吸引するポンプに接続され、かつ、前記第2ホルダと前記第2基板との間に気体を供給する気体供給源に接続された複数の開口を有する、請求項1から請求項3のいずれか一項に記載の貼合装置。
- 第1基板を保持する第1ホルダと、第2基板を吸着し該第2基板を前記第1基板に対向させて貼り合わせる第2ホルダと、前記第1基板と前記第2基板との貼合位置に向かって気体を供給する第1気体供給部とを備えた貼合装置を用いた貼合方法であって、
前記第1基板を前記第1ホルダに搭載し、
前記第2基板を前記第2ホルダに吸着させ、
前記第2基板を前記第1基板に対向させ、
前記第2基板を前記第1基板へ貼り合わせるときに、前記第1基板と前記第2基板との貼合位置に向かって該第2基板の外周に略均等に気体を供給することを具備する貼合方法。
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