JP2021072354A5 - - Google Patents
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- Publication number
- JP2021072354A5 JP2021072354A5 JP2019197773A JP2019197773A JP2021072354A5 JP 2021072354 A5 JP2021072354 A5 JP 2021072354A5 JP 2019197773 A JP2019197773 A JP 2019197773A JP 2019197773 A JP2019197773 A JP 2019197773A JP 2021072354 A5 JP2021072354 A5 JP 2021072354A5
- Authority
- JP
- Japan
- Prior art keywords
- light
- optical system
- illumination optical
- imprint material
- imprint
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005286 illumination Methods 0.000 claims description 33
- 230000003287 optical effect Effects 0.000 claims description 33
- 239000000463 material Substances 0.000 claims description 30
- 239000000758 substrate Substances 0.000 claims description 14
- 210000001747 pupil Anatomy 0.000 claims description 9
- 230000001678 irradiating effect Effects 0.000 claims description 5
- 230000002194 synthesizing effect Effects 0.000 claims description 5
- 238000000034 method Methods 0.000 claims 4
- 239000004973 liquid crystal related substance Substances 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019197773A JP7379091B2 (ja) | 2019-10-30 | 2019-10-30 | インプリント装置、インプリント方法、及び物品の製造方法 |
| KR1020200139936A KR20210052293A (ko) | 2019-10-30 | 2020-10-27 | 임프린트 장치, 임프린트 방법 및 물품 제조 방법 |
| US17/083,150 US11480872B2 (en) | 2019-10-30 | 2020-10-28 | Imprint apparatus, imprint method, and method for manufacturing article |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019197773A JP7379091B2 (ja) | 2019-10-30 | 2019-10-30 | インプリント装置、インプリント方法、及び物品の製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2021072354A JP2021072354A (ja) | 2021-05-06 |
| JP2021072354A5 true JP2021072354A5 (enExample) | 2022-10-17 |
| JP7379091B2 JP7379091B2 (ja) | 2023-11-14 |
Family
ID=75687506
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019197773A Active JP7379091B2 (ja) | 2019-10-30 | 2019-10-30 | インプリント装置、インプリント方法、及び物品の製造方法 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US11480872B2 (enExample) |
| JP (1) | JP7379091B2 (enExample) |
| KR (1) | KR20210052293A (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI771623B (zh) * | 2018-11-08 | 2022-07-21 | 日商佳能股份有限公司 | 壓印裝置和產品製造方法 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8361371B2 (en) | 2008-02-08 | 2013-01-29 | Molecular Imprints, Inc. | Extrusion reduction in imprint lithography |
| SG156564A1 (en) * | 2008-04-09 | 2009-11-26 | Asml Holding Nv | Lithographic apparatus and device manufacturing method |
| JP5686779B2 (ja) * | 2011-10-14 | 2015-03-18 | キヤノン株式会社 | インプリント装置、それを用いた物品の製造方法 |
| JP6827785B2 (ja) * | 2016-11-30 | 2021-02-10 | キヤノン株式会社 | インプリント装置、インプリント方法、および物品の製造方法 |
| JP7027099B2 (ja) * | 2017-09-29 | 2022-03-01 | キヤノン株式会社 | インプリント装置及び物品の製造方法 |
| US10663869B2 (en) * | 2017-12-11 | 2020-05-26 | Canon Kabushiki Kaisha | Imprint system and imprinting process with spatially non-uniform illumination |
| JP7030533B2 (ja) * | 2018-01-15 | 2022-03-07 | キオクシア株式会社 | インプリント装置、インプリント方法、及び半導体装置の製造方法 |
-
2019
- 2019-10-30 JP JP2019197773A patent/JP7379091B2/ja active Active
-
2020
- 2020-10-27 KR KR1020200139936A patent/KR20210052293A/ko active Pending
- 2020-10-28 US US17/083,150 patent/US11480872B2/en active Active
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