SG10201802884SA - Imprint apparatus and method of manufacturing article - Google Patents
Imprint apparatus and method of manufacturing articleInfo
- Publication number
- SG10201802884SA SG10201802884SA SG10201802884SA SG10201802884SA SG10201802884SA SG 10201802884S A SG10201802884S A SG 10201802884SA SG 10201802884S A SG10201802884S A SG 10201802884SA SG 10201802884S A SG10201802884S A SG 10201802884SA SG 10201802884S A SG10201802884S A SG 10201802884SA
- Authority
- SG
- Singapore
- Prior art keywords
- mirror elements
- imprint apparatus
- imprint
- manufacturing article
- substrate
- Prior art date
Links
Landscapes
- Shaping Of Tube Ends By Bending Or Straightening (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
OF THE DISCLOSURE IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE The present invention provides an imprint apparatus that performs an imprint process of forming a pattern of an imprint material on a processing target region on a substrate by using a mold, including a digital mirror device including two-dimensionally arrayed mirror elements and configured to irradiate the substrate with light reflected by the mirror elements, a measurement unit configured to measure, for each of a plurality of segments obtained by dividing a region in which the mirror elements are arrayed so as to include a plurality of the mirror elements, a light amount of light emitted from each segment, and a control unit configured to control the mirror elements included in each segment based on a measurement result of the measurement unit. (Figure 1)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017081437 | 2017-04-17 | ||
JP2018017577A JP6606567B2 (en) | 2017-04-17 | 2018-02-02 | Imprint apparatus and article manufacturing method |
Publications (1)
Publication Number | Publication Date |
---|---|
SG10201802884SA true SG10201802884SA (en) | 2018-11-29 |
Family
ID=64277007
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG10201802884SA SG10201802884SA (en) | 2017-04-17 | 2018-04-05 | Imprint apparatus and method of manufacturing article |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP6606567B2 (en) |
SG (1) | SG10201802884SA (en) |
TW (1) | TWI720301B (en) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7204464B2 (en) * | 2018-12-12 | 2023-01-16 | キヤノン株式会社 | IMPRINT METHOD, IMPRINT APPARATUS, AND ARTICLE MANUFACTURING METHOD |
JP7194010B2 (en) * | 2018-12-20 | 2022-12-21 | キヤノン株式会社 | Imprint apparatus and article manufacturing method |
JP7179655B2 (en) * | 2019-03-14 | 2022-11-29 | キヤノン株式会社 | IMPRINT APPARATUS, IMPRINT METHOD, AND ARTICLE MANUFACTURING METHOD |
JP7337670B2 (en) * | 2019-11-15 | 2023-09-04 | キヤノン株式会社 | IMPRINT APPARATUS, IMPRINT METHOD, AND ARTICLE MANUFACTURING METHOD |
JP7407579B2 (en) | 2019-12-04 | 2024-01-04 | キヤノン株式会社 | Imprint device, imprint method, and article manufacturing method |
JP7431659B2 (en) | 2020-05-01 | 2024-02-15 | キヤノン株式会社 | Imprint method, imprint device and article manufacturing method |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4827513B2 (en) * | 2005-12-09 | 2011-11-30 | キヤノン株式会社 | Processing method |
US7978308B2 (en) * | 2006-05-15 | 2011-07-12 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US8345242B2 (en) * | 2008-10-28 | 2013-01-01 | Molecular Imprints, Inc. | Optical system for use in stage control |
JP6045363B2 (en) * | 2012-01-27 | 2016-12-14 | キヤノン株式会社 | Imprint apparatus and article manufacturing method using the same |
JP6418773B2 (en) * | 2013-05-14 | 2018-11-07 | キヤノン株式会社 | Imprint apparatus, imprint method, and article manufacturing method |
JP6362399B2 (en) * | 2013-05-30 | 2018-07-25 | キヤノン株式会社 | Imprint apparatus, imprint method, and article manufacturing method |
JP6306830B2 (en) * | 2013-06-26 | 2018-04-04 | キヤノン株式会社 | Imprint apparatus and article manufacturing method |
JP6294680B2 (en) * | 2014-01-24 | 2018-03-14 | キヤノン株式会社 | Imprint apparatus and article manufacturing method |
KR102166879B1 (en) * | 2014-03-10 | 2020-10-16 | 어플라이드 머티어리얼스, 인코포레이티드 | Pixel blending for multiple charged-particle beam lithography |
JP6282298B2 (en) * | 2015-06-10 | 2018-02-21 | キヤノン株式会社 | Imprint apparatus, imprint method, and article manufacturing method |
-
2018
- 2018-02-02 JP JP2018017577A patent/JP6606567B2/en active Active
- 2018-03-22 TW TW107109780A patent/TWI720301B/en active
- 2018-04-05 SG SG10201802884SA patent/SG10201802884SA/en unknown
Also Published As
Publication number | Publication date |
---|---|
JP2018182300A (en) | 2018-11-15 |
TW201838790A (en) | 2018-11-01 |
JP6606567B2 (en) | 2019-11-13 |
TWI720301B (en) | 2021-03-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
SG10201802884SA (en) | Imprint apparatus and method of manufacturing article | |
WO2016085334A3 (en) | Apparatus for producing an object by means of additive manufacturing and method for calibrating an apparatus | |
WO2016079496A3 (en) | Additive manufacturing apparatuses and related methods with special scanning strategies | |
CY1121502T1 (en) | APPLIANCE AND METHOD OF PRODUCTION OF COATING TILES HAVING VARIOUS COLOR SURFACE SURFACE | |
JP2015233071A5 (en) | ||
MX2017011601A (en) | Methods, systems and apparatus for sorting and processing analytes. | |
GB2538410A (en) | Generating three-dimensional objects | |
TW201614227A (en) | X-ray thin film inspection apparatus | |
SG10201910033TA (en) | Method and apparatus for detecting facet region, wafer producing method, and laser processing apparatus | |
MX2018000277A (en) | System and method for measuring reflected optical distortion in contoured glass sheets. | |
TW201614191A (en) | Surface profilometry device and method for monitoring wafers during processing | |
MY185331A (en) | Imprint apparatus and method of manufacturing article | |
EA201500785A1 (en) | METHOD AND INSTALLATION FOR THE MANUFACTURE OF THE CONTAINING LYNNOCELLULOSE OF A PLATE MATERIAL | |
JP2018182300A5 (en) | ||
UY35969A (en) | A FIBER BASED PRODUCT | |
SG10201807415PA (en) | Pattern forming apparatus, deciding method, program, information processing apparatus, and article manufacturing method | |
MX2017017056A (en) | System and method for developing three-dimensional surface information corresponding to a contoured glass sheet. | |
EA201791376A1 (en) | METHOD OF OBTAINING PLASTIC MOUNTING PARTS FOR VEHICLE | |
MX2016016342A (en) | Sensor arrangement, measuring device and measuring method. | |
JP2014203935A5 (en) | ||
EP3101476A3 (en) | Imprint apparatus, imprint method, and article manufacturing method | |
SG10201913252WA (en) | Instrumented substrate apparatus for acquiring measurement parameters in high temperature process applications | |
IL272372A (en) | Substrate, metrology apparatus and associated methods for a lithographic process | |
PL3877358T3 (en) | Process for producing substituted amino alcohols | |
AR108391A1 (en) | COVERED FOOD PRODUCTS |