JP2020077797A5 - - Google Patents

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Publication number
JP2020077797A5
JP2020077797A5 JP2018210925A JP2018210925A JP2020077797A5 JP 2020077797 A5 JP2020077797 A5 JP 2020077797A5 JP 2018210925 A JP2018210925 A JP 2018210925A JP 2018210925 A JP2018210925 A JP 2018210925A JP 2020077797 A5 JP2020077797 A5 JP 2020077797A5
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JP
Japan
Prior art keywords
light
imprint
substrate
curing
modulated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2018210925A
Other languages
English (en)
Japanese (ja)
Other versions
JP7202148B2 (ja
JP2020077797A (ja
Filing date
Publication date
Priority claimed from JP2018210925A external-priority patent/JP7202148B2/ja
Priority to JP2018210925A priority Critical patent/JP7202148B2/ja
Application filed filed Critical
Priority to EP24170999.7A priority patent/EP4398040A3/en
Priority to EP19205896.4A priority patent/EP3650937B1/en
Priority to TW108138996A priority patent/TWI771623B/zh
Priority to US16/673,804 priority patent/US11226554B2/en
Priority to CN201911076450.8A priority patent/CN111158212B/zh
Priority to KR1020190141428A priority patent/KR102641226B1/ko
Publication of JP2020077797A publication Critical patent/JP2020077797A/ja
Priority to US17/544,447 priority patent/US11921423B2/en
Publication of JP2020077797A5 publication Critical patent/JP2020077797A5/ja
Publication of JP7202148B2 publication Critical patent/JP7202148B2/ja
Application granted granted Critical
Priority to US18/390,910 priority patent/US12372866B2/en
Priority to KR1020240025586A priority patent/KR102687480B1/ko
Priority to KR1020240094126A priority patent/KR20240115792A/ko
Priority to US19/255,673 priority patent/US20250328073A1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2018210925A 2018-11-08 2018-11-08 インプリント装置および物品製造方法 Active JP7202148B2 (ja)

Priority Applications (12)

Application Number Priority Date Filing Date Title
JP2018210925A JP7202148B2 (ja) 2018-11-08 2018-11-08 インプリント装置および物品製造方法
EP24170999.7A EP4398040A3 (en) 2018-11-08 2019-10-29 Imprint apparatus and product manufacturing method
EP19205896.4A EP3650937B1 (en) 2018-11-08 2019-10-29 Imprint apparatus and product manufacturing method
TW108138996A TWI771623B (zh) 2018-11-08 2019-10-29 壓印裝置和產品製造方法
US16/673,804 US11226554B2 (en) 2018-11-08 2019-11-04 Imprint apparatus and product manufacturing method
CN201911076450.8A CN111158212B (zh) 2018-11-08 2019-11-06 压印装置和产品制造方法
KR1020190141428A KR102641226B1 (ko) 2018-11-08 2019-11-07 임프린트 장치 및 물품 제조 방법
US17/544,447 US11921423B2 (en) 2018-11-08 2021-12-07 Imprint apparatus and product manufacturing method
US18/390,910 US12372866B2 (en) 2018-11-08 2023-12-20 Imprint apparatus and product manufacturing method
KR1020240025586A KR102687480B1 (ko) 2018-11-08 2024-02-22 임프린트 장치, 물품 제조 방법, 및 임프린트 방법
KR1020240094126A KR20240115792A (ko) 2018-11-08 2024-07-17 임프린트 장치, 물품 제조 방법, 및 임프린트 방법
US19/255,673 US20250328073A1 (en) 2018-11-08 2025-06-30 Imprint apparatus and product manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2018210925A JP7202148B2 (ja) 2018-11-08 2018-11-08 インプリント装置および物品製造方法

Publications (3)

Publication Number Publication Date
JP2020077797A JP2020077797A (ja) 2020-05-21
JP2020077797A5 true JP2020077797A5 (enExample) 2021-12-16
JP7202148B2 JP7202148B2 (ja) 2023-01-11

Family

ID=70724422

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2018210925A Active JP7202148B2 (ja) 2018-11-08 2018-11-08 インプリント装置および物品製造方法

Country Status (1)

Country Link
JP (1) JP7202148B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7590895B2 (ja) * 2021-03-08 2024-11-27 キヤノン株式会社 インプリント装置、インプリント方法、および物品製造方法
JP7675130B2 (ja) * 2023-05-23 2025-05-12 キヤノン株式会社 インプリント装置、および物品製造方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013069918A (ja) * 2011-09-22 2013-04-18 Toshiba Corp インプリント方法およびインプリント装置
JP5686779B2 (ja) * 2011-10-14 2015-03-18 キヤノン株式会社 インプリント装置、それを用いた物品の製造方法
JP6632270B2 (ja) * 2014-09-08 2020-01-22 キヤノン株式会社 インプリント装置、インプリント方法および物品の製造方法

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