JP2021052167A - 誘電体組成物及びこれを含む積層型電子部品 - Google Patents
誘電体組成物及びこれを含む積層型電子部品 Download PDFInfo
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- 239000000203 mixture Substances 0.000 title claims abstract description 64
- 229910052761 rare earth metal Inorganic materials 0.000 claims abstract description 44
- 229910052726 zirconium Inorganic materials 0.000 claims abstract description 19
- 229910052718 tin Inorganic materials 0.000 claims abstract description 8
- 239000013078 crystal Substances 0.000 claims description 35
- 229910052788 barium Inorganic materials 0.000 claims description 27
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 claims description 15
- 229910052746 lanthanum Inorganic materials 0.000 claims description 15
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 claims description 11
- 229910052692 Dysprosium Inorganic materials 0.000 claims description 7
- 229910052759 nickel Inorganic materials 0.000 claims description 6
- 229910052802 copper Inorganic materials 0.000 claims description 5
- 239000011521 glass Substances 0.000 claims description 5
- 229910052688 Gadolinium Inorganic materials 0.000 claims description 3
- 229910052689 Holmium Inorganic materials 0.000 claims description 3
- 229910052779 Neodymium Inorganic materials 0.000 claims description 3
- 229910052773 Promethium Inorganic materials 0.000 claims description 3
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 claims description 3
- 229910052772 Samarium Inorganic materials 0.000 claims description 3
- 229910052771 Terbium Inorganic materials 0.000 claims description 3
- 229910052767 actinium Inorganic materials 0.000 claims description 3
- QQINRWTZWGJFDB-UHFFFAOYSA-N actinium atom Chemical compound [Ac] QQINRWTZWGJFDB-UHFFFAOYSA-N 0.000 claims description 3
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- 150000001875 compounds Chemical class 0.000 claims description 3
- 239000011258 core-shell material Substances 0.000 claims description 3
- KBQHZAAAGSGFKK-UHFFFAOYSA-N dysprosium atom Chemical compound [Dy] KBQHZAAAGSGFKK-UHFFFAOYSA-N 0.000 claims description 3
- UIWYJDYFSGRHKR-UHFFFAOYSA-N gadolinium atom Chemical compound [Gd] UIWYJDYFSGRHKR-UHFFFAOYSA-N 0.000 claims description 3
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- 229910052742 iron Inorganic materials 0.000 claims description 3
- 229910052748 manganese Inorganic materials 0.000 claims description 3
- QEFYFXOXNSNQGX-UHFFFAOYSA-N neodymium atom Chemical compound [Nd] QEFYFXOXNSNQGX-UHFFFAOYSA-N 0.000 claims description 3
- VQMWBBYLQSCNPO-UHFFFAOYSA-N promethium atom Chemical compound [Pm] VQMWBBYLQSCNPO-UHFFFAOYSA-N 0.000 claims description 3
- 229910052707 ruthenium Inorganic materials 0.000 claims description 3
- KZUNJOHGWZRPMI-UHFFFAOYSA-N samarium atom Chemical compound [Sm] KZUNJOHGWZRPMI-UHFFFAOYSA-N 0.000 claims description 3
- GZCRRIHWUXGPOV-UHFFFAOYSA-N terbium atom Chemical compound [Tb] GZCRRIHWUXGPOV-UHFFFAOYSA-N 0.000 claims description 3
- 229910052720 vanadium Inorganic materials 0.000 claims description 3
- 229910052725 zinc Inorganic materials 0.000 claims description 3
- 229910052693 Europium Inorganic materials 0.000 claims 2
- OGPBJKLSAFTDLK-UHFFFAOYSA-N europium atom Chemical compound [Eu] OGPBJKLSAFTDLK-UHFFFAOYSA-N 0.000 claims 2
- 229910002113 barium titanate Inorganic materials 0.000 abstract description 3
- -1 (Ba Inorganic materials 0.000 abstract 1
- 230000007423 decrease Effects 0.000 description 21
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- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 16
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- 238000000034 method Methods 0.000 description 15
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- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 13
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- 229910010293 ceramic material Inorganic materials 0.000 description 4
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- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 3
- 239000011230 binding agent Substances 0.000 description 3
- 230000002542 deteriorative effect Effects 0.000 description 3
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- 238000012360 testing method Methods 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
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- 229910052739 hydrogen Inorganic materials 0.000 description 2
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910052684 Cerium Inorganic materials 0.000 description 1
- 229910052691 Erbium Inorganic materials 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 229910052775 Thulium Inorganic materials 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
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- GWXLDORMOJMVQZ-UHFFFAOYSA-N cerium Chemical compound [Ce] GWXLDORMOJMVQZ-UHFFFAOYSA-N 0.000 description 1
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- 239000003989 dielectric material Substances 0.000 description 1
- 238000007606 doctor blade method Methods 0.000 description 1
- UYAHIZSMUZPPFV-UHFFFAOYSA-N erbium Chemical compound [Er] UYAHIZSMUZPPFV-UHFFFAOYSA-N 0.000 description 1
- 230000003631 expected effect Effects 0.000 description 1
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- 239000012299 nitrogen atmosphere Substances 0.000 description 1
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- 229910052763 palladium Inorganic materials 0.000 description 1
- 229910052573 porcelain Inorganic materials 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
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- 239000002904 solvent Substances 0.000 description 1
- FRNOGLGSGLTDKL-UHFFFAOYSA-N thulium atom Chemical compound [Tm] FRNOGLGSGLTDKL-UHFFFAOYSA-N 0.000 description 1
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Abstract
Description
本発明の一実施形態による誘電体組成物は、BaTiO3、(Ba,Ca)(Ti,Ca)O3、(Ba,Ca)(Ti,Zr)O3、Ba(Ti,Zr)O3、及び(Ba,Ca)(Ti,Sn)O3のうち一つを主成分として含み、希土類元素を含む第1副成分と、原子価可変アクセプタ元素及び原子価固定アクセプタ元素のうち一つ以上を含む第2副成分と、を含み、上記希土類元素の含有量合計をDT、上記原子価可変アクセプタ元素及び原子価固定アクセプタ元素の含有量合計をATと定義するとき、(DT/AT)/(Ba+Ca)が0.5超過6.0未満を満たす。
本発明の一実施形態による誘電体組成物は、BaTiO3、(Ba,Ca)(Ti,Ca)O3、(Ba,Ca)(Ti,Zr)O3、Ba(Ti,Zr)O3、及び(Ba,Ca)(Ti,Sn)O3のうち一つを主成分として含む。
本発明の一実施形態によると、上記誘電体組成物は、希土類元素を含む第1副成分を含む。
本発明の一実施形態によると、上記誘電体組成物は、原子価可変アクセプタ元素及び原子価固定アクセプタ元素のうち一つ以上を含む第2副成分を含む。
本発明の一実施形態によると、上記誘電体組成物は、Baを含む酸化物又は炭酸塩である第3副成分を含み、上記第3副成分は、上記主成分100モルに対して0.37モル以上4.0モル以下で含まれることができる。
本発明の一実施形態によると、上記誘電体組成物は、第4副成分として、Si及びAlのうち少なくとも一つを含む酸化物、及びSiを含むガラス(Glass)化合物のうち少なくとも一つを含む。上記第4副成分は、上記主成分100モルに対して0.5モル以上7.0モル以下で含まれることができる。
図1は本発明の一実施形態による積層型電子部品を概略的に示す斜視図であり、図2は図1のI−I'線に沿った断面を概略的に示す断面図であり、図3は図1のII−II'線に沿った断面を概略的に示す断面図であり、図4は本発明の一実施形態による誘電体層及び内部電極が積層された本体を分解して概略的に示す分解斜視図である。
本発明の実施例は、主成分として100nm級レベルのチタン酸バリウム(BaTiO3)粉末に、主な添加剤を下記表1を満たすように添加し、バインダーとエタノールなどの有機溶媒を添加し、湿式混合して誘電体スラリーを用意した後、上記誘電体スラリーをキャリアフィルム上に塗布及び乾燥してセラミックグリーンシートを用意する。これにより、誘電体層を形成することができる。
110 本体
121、122 内部電極
111 誘電体層
112、113 カバー部
114、115 マージン部
131、132 外部電極
Claims (17)
- BaTiO3、(Ba,Ca)(Ti,Ca)O3、(Ba,Ca)(Ti,Zr)O3、Ba(Ti,Zr)O3、及び(Ba,Ca)(Ti,Sn)O3のうち一つを主成分として含み、
希土類元素を含む第1副成分と、
原子価可変アクセプタ元素及び原子価固定アクセプタ元素のうち一つ以上を含む第2副成分と、を含み、
前記希土類元素の含有量合計をDT、前記原子価可変アクセプタ元素及び原子価固定アクセプタ元素の含有量合計をATと定義するとき、(DT/AT)/(Ba+Ca)が0.5超過6.0未満を満たす、誘電体組成物。 - 前記希土類元素は、ランタン(La)を含み、
イットリウム(Y)、アクチニウム(Ac)、セリウム(Ce)、プラセオジム(Pr)、ネオジウム(Nd)、プロメチウム(Pm)、サマリウム(Sm)、ユウロピウム(Eu)、ガドリニウム(Gd)、テルビウム(Tb)、ジスプロシウム(Dy)、ホルミウム(Ho)、エルビウム(Er)、ツリウム(Tm)、イッテルビウム(Yb)、及びルテニウム(Lu)のうち一つ以上をさらに含み、
前記希土類元素の含有量合計(DT)に対する前記ランタン(La)の含有量の割合(La/DT)が0.1以上1.0未満を満たす、請求項1に記載の誘電体組成物。 - 前記第1副成分は、前記主成分100モルに対して、前記希土類元素を含む酸化物又は炭酸塩が0.2モル以上4.0モル以下で含まれる、請求項1または2に記載の誘電体組成物。
- 前記原子価可変アクセプタ元素はMn、V、Cr、Fe、Ni、Co、Cu及びZnのうち一つ以上を含み、
前記原子価固定アクセプタ元素はMg及びZrのうち一つ以上を含む、請求項1から3のいずれか一項に記載の誘電体組成物。 - 前記第2副成分は、前記主成分100モルに対して、原子価可変アクセプタ元素及び原子価固定アクセプタ元素のうち一つ以上を含む酸化物又は炭酸塩が0.01モル以上4.0モル以下で含まれる、請求項1から4のいずれか一項に記載の誘電体組成物。
- 前記誘電体組成物は、Baを含む酸化物又は炭酸塩である第3副成分を含み、
前記第3副成分は、前記主成分100モルに対して0.37モル以上4.0モル以下で含まれる、請求項1から5のいずれか一項に記載の誘電体組成物。 - Si及びAlのうち少なくとも一つを含む酸化物、及びSiを含むガラス(Glass)化合物のうち少なくとも一つである第4副成分を含み、
前記第4副成分は、前記主成分100モルに対して0.5モル以上7.0モル以下で含まれる、請求項1から6のいずれか一項に記載の誘電体組成物。 - 誘電体層及び内部電極を含む本体と、
前記本体上に配置され、前記内部電極と接続される外部電極と、を含み、
前記誘電体層は、誘電体組成物を含み、
前記誘電体組成物は、BaTiO3、(Ba,Ca)(Ti,Ca)O3、(Ba,Ca)(Ti,Zr)O3、Ba(Ti,Zr)O3、及び(Ba,Ca)(Ti,Sn)O3のうち一つを主成分として含み、
希土類元素を含む第1副成分と、
原子価可変アクセプタ元素及び原子価固定アクセプタ元素のうち一つ以上を含む第2副成分と、を含み、
前記希土類元素の含有量合計をDT、前記原子価可変アクセプタ元素及び原子価固定アクセプタ元素の含有量合計をATと定義するとき、(DT/AT)/(Ba+Ca)が0.5超過6.0未満を満たす、積層型電子部品。 - 前記希土類元素は、ランタン(La)を含み、
イットリウム(Y)、アクチニウム(Ac)、セリウム(Ce)、プラセオジム(Pr)、ネオジウム(Nd)、プロメチウム(Pm)、サマリウム(Sm)、ユウロピウム(Eu)、ガドリニウム(Gd)、テルビウム(Tb)、ジスプロシウム(Dy)、ホルミウム(Ho)、エルビウム(Er)、ツリウム(Tm)、イッテルビウム(Yb)、及びルテニウム(Lu)のうち一つ以上をさらに含み、
前記希土類元素の含有量合計(DT)に対する前記ランタン(La)の含有量の割合(La/DT)が0.1以上1.0未満を満たす、請求項8に記載の積層型電子部品。 - 前記第1副成分は、前記主成分100モルに対して、前記希土類元素を含む酸化物又は炭酸塩が0.2モル以上4.0モル以下で含まれる、請求項8または9に記載の積層型電子部品。
- 前記原子価可変アクセプタ元素はMn、V、Cr、Fe、Ni、Co、Cu及びZnのうち一つ以上を含み、
前記原子価固定アクセプタ元素はMg及びZrのうち一つ以上を含む、請求項8から10のいずれか一項に記載の積層型電子部品。 - 前記第2副成分は、前記主成分100モルに対して、原子価可変アクセプタ元素及び原子価固定アクセプタ元素のうち一つ以上を含む酸化物又は炭酸塩が0.01モル以上4.0モル以下で含まれる、請求項8から11のいずれか一項に記載の積層型電子部品。
- 前記誘電体組成物は、Baを含む酸化物又は炭酸塩である第3副成分を含み、
前記第3副成分は、前記主成分100モルに対して0.37モル以上4.0モル以下で含まれる、請求項8から12のいずれか一項に記載の積層型電子部品。 - Si及びAlのうち少なくとも一つを含む酸化物、及びSiを含むガラス(Glass)化合物のうち少なくとも一つである第4副成分を含み、
前記第4副成分は、前記主成分100モルに対して0.5モル以上7.0モル以下で含まれる、請求項8から13のいずれか一項に記載の積層型電子部品。 - 前記誘電体層は、複数の結晶粒を含み、
前記複数の結晶粒は、平均結晶粒サイズ(Grain size)が50nm以上500nm以下である、請求項8から14のいずれか一項に記載の積層型電子部品。 - 前記誘電体層は、複数の結晶粒を含み、
前記複数の結晶粒のうち一つ以上の結晶粒は、コア−シェル構造を有する、請求項8から15のいずれか一項に記載の積層型電子部品。 - 前記誘電体層は、平均厚さが0.41μm以下である、請求項8から16のいずれか一項に記載の積層型電子部品。
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