JP2021044482A - 基板処理装置 - Google Patents
基板処理装置 Download PDFInfo
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- 238000004140 cleaning Methods 0.000 claims abstract description 204
- 238000004381 surface treatment Methods 0.000 claims description 20
- 230000032258 transport Effects 0.000 description 36
- 238000000034 method Methods 0.000 description 15
- 238000010586 diagram Methods 0.000 description 10
- 238000005192 partition Methods 0.000 description 7
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- 239000000969 carrier Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009429 electrical wiring Methods 0.000 description 1
- 238000005401 electroluminescence Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
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- 239000011521 glass Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
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- 235000012431 wafers Nutrition 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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Abstract
Description
すなわち、従来の装置は、上段か下段の一方のメインロボットが故障した場合や、上段または下段の処理ユニットが全て故障した場合には、表面洗浄か裏面洗浄のいずれか一方の処理しか行うことができず、表裏にわたる洗浄処理を行うことができないという問題がある。
すなわち、請求項1に記載の発明は、基板を洗浄処理する基板処理装置において、複数枚の基板を収容するキャリアが載置されるキャリア載置部を備え、前記キャリア載置部の前記キャリアとの間で基板を搬送するインデクサロボットを備えたインデクサブロックと、処理ユニットとして、基板の表面洗浄処理を行う表面洗浄ユニット及び基板の裏面洗浄処理を行う裏面洗浄ユニットを備えている処理ブロックと、前記インデクサブロックと前記処理ブロックとの間に配置され、基板を載置する複数段の棚を備えているとともに、基板の表裏を反転させる反転機能を備えている反転パスブロックと、を備え、前記処理ブロックは、前記処理ユニットを上段と下段のそれぞれに複数個備え、前記上段に前記表面洗浄ユニット及び前記裏面洗浄ユニットを少なくとも1つずつ備え、前記下段に前記表面洗浄ユニット及び前記裏面洗浄ユニットを少なくとも1つずつ備えたタワーユニットを少なくとも1つ備え、前記タワーユニットにおける前記各処理ユニットと前記反転パスブロックとの間で基板を搬送するセンターロボットを前記上段及び前記下段のそれぞれに備えた搬送ブロックを備えていることを特徴とするものである。
3 … インデクサブロック
5 … 反転パスブロック
7 … 処理ブロック
9 … 搬送ブロック
11 … ユーティリティブロック
W … 基板
SS … 表面洗浄ユニット
SSR … 裏面洗浄ユニット
13 … キャリア載置部
TID … インデクサロボット
C … キャリア
15 … ガイドレール
17 … 基台部
17a … 基台部本体
17b … 固定アーム
SP … 空間
19 … 多関節アーム
19a … 第1アーム
19b … 第2アーム
19c … 第3アーム
P1〜P3 … 回転軸
21 … ハンド
21a〜21d … ハンド本体
VL … 仮想線
25 … 載置フレーム
27 … 載置懸架フレーム
29 … 懸架フレーム
31 … 反転パスユニット
33 … 上段反転パスユニット
35 … 下段反転パスユニット
37,39 … 固定具
41 … ガイド部
43 … 回転保持部
45,47 … 棚
49 … 回転部材
P4 … 回転軸
UF … 上段
DF … 下段
PU … 処理ユニット
PU11〜14,PU21〜24,PU31〜34,PU41〜44 … 処理ユニット
TW1〜TW4 … タワーユニット
CR1,CR2 … センターロボット
CTS … 搬送スペース
Claims (8)
- 基板を洗浄処理する基板処理装置において、
複数枚の基板を収容するキャリアが載置されるキャリア載置部を備え、前記キャリア載置部の前記キャリアとの間で基板を搬送するインデクサロボットを備えたインデクサブロックと、
処理ユニットとして、基板の表面洗浄処理を行う表面洗浄ユニット及び基板の裏面洗浄処理を行う裏面洗浄ユニットを備えている処理ブロックと、
前記インデクサブロックと前記処理ブロックとの間に配置され、基板を載置する複数段の棚を備えているとともに、基板の表裏を反転させる反転機能を備えている反転パスブロックと、
を備え、
前記処理ブロックは、前記処理ユニットを上段と下段のそれぞれに複数個備え、前記上段に前記表面洗浄ユニット及び前記裏面洗浄ユニットを少なくとも1つずつ備え、前記下段に前記表面洗浄ユニット及び前記裏面洗浄ユニットを少なくとも1つずつ備えたタワーユニットを少なくとも1つ備え、
前記タワーユニットにおける前記各処理ユニットと前記反転パスブロックとの間で基板を搬送するセンターロボットを前記上段及び前記下段のそれぞれに備えた搬送ブロックを備えていることを特徴とする基板処理装置。 - 請求項1に記載の基板処理装置において、
前記反転パスブロックは、前記上段及び前記下段のそれぞれに、少なくとも2つの個別反転パスユニットを備えており、
前記反転パスユニットのそれぞれは、基板を載置する複数段の棚を備えているとともに、基板の表裏を反転させる反転機能を備えていることを特徴とする基板処理装置。 - 請求項1または2に記載の基板処理装置において、
前記処理ブロックは、前記タワーユニットを複数個備え、
前記反転パスブロックに近いタワーユニットは、前記反転パスブロックから遠いタワーユニットよりも多くの前記表面洗浄ユニットを備えていることを特徴とする基板処理装置。 - 請求項3に記載の基板処理装置において、
前記各タワーユニットは、前記センターロボットを挟んで対向する同じ高さ位置に、前記表面洗浄ユニットと、前記裏面洗浄ユニットとを備えていることを特徴とする基板処理装置。 - 請求項3に記載の基板処理装置において、
前記各タワーユニットのうち、前記反転パスブロックに近いタワーユニットは、前記表面処理ユニットと前記裏面処理ユニットとが上下方向について隣接する組を少なくとも1つ有することを特徴とする基板処理装置。 - 請求項3または5に記載の基板処理装置において、
前記反転パスブロックに近いタワーユニットは、前記上段と前記下段とがその境界にそれぞれ前記表面洗浄ユニットを備えていることを特徴とする基板処理装置。 - 請求項3または5に記載の基板処理装置において、
前記反転パスブロックに近いタワーユニットは、前記上段と前記下段とがその境界にそれぞれ前記裏面洗浄ユニットを備えていることを特徴とする基板処理装置。 - 請求項1から7のいずれかに記載の基板処理装置において、
前記タワーユニットは、前記上段に備えた複数個の処理ユニットと同じ配置で前記下段に複数個の処理ユニットを備えていることを特徴とする基板処理装置。
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