JP2021044355A - 半導体装置および半導体装置の製造方法 - Google Patents
半導体装置および半導体装置の製造方法 Download PDFInfo
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Abstract
Description
本発明にかかる半導体装置は、ワイドバンドギャップ半導体を用いて構成される。実施の形態においては、ワイドバンドギャップ半導体として例えば炭化珪素(SiC)を用いて作製された炭化珪素半導体装置について、MOSFETを例に説明する。図1は、実施の形態にかかる炭化珪素半導体装置の構造を示す断面図である。
次に、実施の形態にかかる炭化珪素半導体装置の製造方法について説明する。図3〜図9は、実施の形態にかかる炭化珪素半導体装置の製造途中の状態を模式的に示す断面図である。
図10は、実施例にかかる炭化珪素半導体装置のテラス部の原子間力顕微鏡写真である。実施例では、トレンチ18形成後、圧力300Torrとして1400℃で18分間の水素アニールを行った後、15分間の窒素添加アニールを行った。窒素添加アニールでは、水素ガスとの流量比(窒素ガス/水素ガス)を10%として窒素ガスを添加した。図10は、このアニール後、ゲート絶縁膜9形成前のテラス部Bの原子間力顕微鏡(Atomic Force Microscope:AFM)の写真である。図10によると、実施例ではトレンチ18のテラス部Bの表面粗さRaが、0.0578nmとなった。なお、ここでの測定はゲート絶縁膜9形成前の値であるが、半導体装置完成後も同様の値であると推定される。
2 n型炭化珪素エピタキシャル層
2a 第1n型炭化珪素エピタキシャル層
2b 第2n型炭化珪素エピタキシャル層
3 p型炭化珪素エピタキシャル層
4 第1p+型ベース領域
4a 下部第1p+型ベース領域
4b 上部第1p+型ベース領域
5 第2p+型ベース領域
6 n型高濃度領域
6a 下部n型高濃度領域
6b 上部n型高濃度領域
7 n+型ソース領域
8 p++型コンタクト領域
9 ゲート絶縁膜
10 ゲート電極
11 層間絶縁膜
13 ソース電極
14 裏面電極
18 トレンチ
Claims (5)
- 第1導電型の半導体基板と、
前記半導体基板のおもて面に設けられた、前記半導体基板より不純物濃度の低い第1導電型の第1半導体層と、
前記第1半導体層の、前記半導体基板側に対して反対側の表面に選択的に設けられた第2導電型の第2半導体層と、
前記第2半導体層の内部に選択的に設けられた、前記半導体基板よりも不純物濃度の高い第1導電型の第1半導体領域と、
前記第1半導体領域および前記第2半導体層を貫通して、前記第1半導体層に達するトレンチと、
前記トレンチの内部にゲート絶縁膜を介して設けられたゲート電極と、
を備え、
前記トレンチの側壁のテラス部の表面粗さRaが0.1nm以下であることを特徴とする半導体装置。 - 第1導電型の半導体基板のおもて面に、前記半導体基板よりも不純物濃度の低い第1導電型の第1半導体層を形成する第1工程と、
前記第1半導体層の、前記半導体基板側に対して反対側に第2導電型の第2半導体層を形成する第2工程と、
前記第2半導体層の内部に選択的に、前記半導体基板よりも不純物濃度の高い第1導電型の第1半導体領域を形成する第3工程と、
前記第1半導体領域および前記第2半導体層を貫通して、前記第1半導体層に達するトレンチを形成する第4工程と、
前記トレンチを水素雰囲気中でアニールし、該アニール後、前記トレンチを水素と窒素を含む混合ガス雰囲気中でアニールする第5工程と、
前記トレンチの内部にゲート絶縁膜を介してゲート電極を形成する第6工程と、
を含むことを特徴とする半導体装置の製造方法。 - 前記混合ガス雰囲気は、ガス流量比で水素ガスに対して、1%〜80%の割合で窒素ガスが添加されていることを特徴とする請求項2に記載の半導体装置の製造方法。
- 前記混合ガス雰囲気は、ガス流量比で水素ガスに対して、4%〜50%の割合で窒素ガスが添加されていることを特徴とする請求項2に記載の半導体装置の製造方法。
- 前記混合ガス雰囲気は、ガス流量比で水素ガスに対して、5%〜50%の割合で窒素ガスが添加されていることを特徴とする請求項2に記載の半導体装置の製造方法。
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