JP2021013007A5 - - Google Patents
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- Publication number
- JP2021013007A5 JP2021013007A5 JP2020014220A JP2020014220A JP2021013007A5 JP 2021013007 A5 JP2021013007 A5 JP 2021013007A5 JP 2020014220 A JP2020014220 A JP 2020014220A JP 2020014220 A JP2020014220 A JP 2020014220A JP 2021013007 A5 JP2021013007 A5 JP 2021013007A5
- Authority
- JP
- Japan
- Prior art keywords
- gallium
- semiconductor device
- diamond substrate
- based semiconductor
- manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 239000004065 semiconductor Substances 0.000 claims 26
- 229910003460 diamond Inorganic materials 0.000 claims 17
- 239000010432 diamond Substances 0.000 claims 17
- 239000000758 substrate Substances 0.000 claims 17
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims 13
- 229910052733 gallium Inorganic materials 0.000 claims 13
- 238000000034 method Methods 0.000 claims 9
- 238000004519 manufacturing process Methods 0.000 claims 8
- 229910002601 GaN Inorganic materials 0.000 claims 5
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 claims 3
- 239000013078 crystal Substances 0.000 claims 3
- RNQKDQAVIXDKAG-UHFFFAOYSA-N aluminum gallium Chemical compound [Al].[Ga] RNQKDQAVIXDKAG-UHFFFAOYSA-N 0.000 claims 2
- AJNVQOSZGJRYEI-UHFFFAOYSA-N digallium;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Ga+3].[Ga+3] AJNVQOSZGJRYEI-UHFFFAOYSA-N 0.000 claims 2
- 229910001195 gallium oxide Inorganic materials 0.000 claims 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 1
- 229910052782 aluminium Inorganic materials 0.000 claims 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 1
- 229910052802 copper Inorganic materials 0.000 claims 1
- 239000010949 copper Substances 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 229910052594 sapphire Inorganic materials 0.000 claims 1
- 239000010980 sapphire Substances 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims 1
- 229910010271 silicon carbide Inorganic materials 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019125039 | 2019-07-04 | ||
| JP2019125039 | 2019-07-04 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2021013007A JP2021013007A (ja) | 2021-02-04 |
| JP2021013007A5 true JP2021013007A5 (https=) | 2022-05-20 |
| JP7389472B2 JP7389472B2 (ja) | 2023-11-30 |
Family
ID=74226528
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2020014220A Active JP7389472B2 (ja) | 2019-07-04 | 2020-01-30 | 半導体デバイスの製造方法及び半導体デバイス |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP7389472B2 (https=) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2022184075A (ja) * | 2021-05-31 | 2022-12-13 | 国立研究開発法人産業技術総合研究所 | モザイクダイヤモンドウェハと異種半導体との接合体及びその製造方法、並びに、異種半導体との接合体用モザイクダイヤモンドウェハ |
| JP7741539B2 (ja) * | 2021-08-10 | 2025-09-18 | 国立研究開発法人産業技術総合研究所 | 半導体素子および半導体素子の製造方法 |
| US12424594B2 (en) | 2022-03-31 | 2025-09-23 | Raytheon Company | Integrated diamond substrate for thermal management |
| WO2024247933A1 (ja) * | 2023-06-01 | 2024-12-05 | 日本碍子株式会社 | 積層基板 |
| WO2025017863A1 (ja) * | 2023-07-19 | 2025-01-23 | 三菱電機株式会社 | 半導体装置および半導体装置の製造方法 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001102675A (ja) | 1999-09-29 | 2001-04-13 | Toshiba Corp | 半導体発光素子 |
| EP1851369A1 (en) | 2005-01-26 | 2007-11-07 | Apollo Diamond, Inc. | Gallium nitride light emitting devices on diamond |
| JP4654389B2 (ja) | 2006-01-16 | 2011-03-16 | 株式会社ムサシノエンジニアリング | ダイヤモンドヒートスプレッダの常温接合方法，及び半導体デバイスの放熱部 |
| WO2018143344A1 (ja) | 2017-02-02 | 2018-08-09 | 三菱電機株式会社 | 半導体製造方法および半導体製造装置 |
-
2020
- 2020-01-30 JP JP2020014220A patent/JP7389472B2/ja active Active
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