JP2021007144A - 流体透過性材料のコーティング - Google Patents
流体透過性材料のコーティング Download PDFInfo
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- JP2021007144A JP2021007144A JP2020098635A JP2020098635A JP2021007144A JP 2021007144 A JP2021007144 A JP 2021007144A JP 2020098635 A JP2020098635 A JP 2020098635A JP 2020098635 A JP2020098635 A JP 2020098635A JP 2021007144 A JP2021007144 A JP 2021007144A
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/04—Coating on selected surface areas, e.g. using masks
- C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45561—Gas plumbing upstream of the reaction chamber
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C13/00—Means for manipulating or holding work, e.g. for separate articles
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C7/00—Apparatus specially designed for applying liquid or other fluent material to the inside of hollow work
- B05C7/04—Apparatus specially designed for applying liquid or other fluent material to the inside of hollow work the liquid or other fluent material flowing or being moved through the work; the work being filled with liquid or other fluent material and emptied
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C9/00—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important
- B05C9/04—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material to opposite sides of the work
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F10/00—Homopolymers and copolymers of unsaturated aliphatic hydrocarbons having only one carbon-to-carbon double bond
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- C—CHEMISTRY; METALLURGY
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
- C23C16/18—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material from metallo-organic compounds
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- C23C16/34—Nitrides
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- C—CHEMISTRY; METALLURGY
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- C23C16/40—Oxides
- C23C16/401—Oxides containing silicon
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
- C23C16/403—Oxides of aluminium, magnesium or beryllium
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
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- C23C16/40—Oxides
- C23C16/405—Oxides of refractory metals or yttrium
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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- C23C16/4417—Methods specially adapted for coating powder
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
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- C—CHEMISTRY; METALLURGY
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- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45597—Reactive back side gas
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/46—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
- C23C16/463—Cooling of the substrate
- C23C16/466—Cooling of the substrate using thermal contact gas
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/48—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45519—Inert gas curtains
- C23C16/45521—Inert gas curtains the gas, other than thermal contact gas, being introduced the rear of the substrate to flow around its periphery
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Abstract
Description
100 反応器アセンブリ
101 反応チャンバー
102 蓋
103 中央排気ライン/ポンプフォアライン
104 ポンプ
105 弁(排気)
10、10A 多孔性基板およびそれに応じたコーティングされるその標的表面
11 不活性流体
11A 1種以上の前駆体化学物質のための不活性担体流体
12 反応性流体
12−X、12−1、12−2 前駆体
13 排気流
21 反応性流体吸入ライン
22 反応チャンバーの中に反応性流体を受け入れるための入口
23 反応性流体流調整装置
24 前駆体供給源
25 前駆体流調整装置
31 不活性流体供給装置内の封鎖部分
31A 一実施形態に係る封鎖部分31内の開口部
31−1、31−2 一実施形態に係る補助的封鎖部分
311 不活性流体吸入ライン
312 不活性流体排出ライン(任意)
313、313A 加熱要素
314 供給物貫通保持装置
32 電磁放射線源
33 不活性流体流調整装置
34 運搬装置
35 載置装置
36 取り出し装置
110 外部チャンバー
121 コーティング
Claims (28)
- −コーティングされる標的表面(10A)を有する流体透過性基板(10)を少なくとも部分的に受け入れるように構成された反応チャンバー(101)と、
−反応性流体(12)の前記反応チャンバーの中への流れを媒介するように構成された少なくとも1つの反応性流体吸入ライン(21)と、
−前記表面において不活性流体(11)の流れが前記反応性流体(12)の流れに出会い、それにより前記基板の前記標的表面(10A)にコーティング(121)が形成されるように、その標的表面に向かう前記流体透過性基板(10)を通る前記不活性流体(11)の流れを媒介するように構成された少なくとも1つの封鎖部分(31)を有する不活性流体供給装置と
を備える、化学蒸着により流体透過性基板の表面にコーティングを形成するために構成された反応器アセンブリ(100)。 - 前記基板の前記標的表面(10A)のみが前記反応性流体(12)の流れに曝露されるように、前記流体透過性基板(10)が前記反応チャンバー(101)の中に受け入れられる、請求項1に記載の反応器アセンブリ(100)。
- 前記封鎖部分(31)は前記反応チャンバー(101)から分離して配置されており、かつ前記封鎖部分と前記反応チャンバーとの間の流体の流れは前記流体透過性基板(10)を介してのみ生じる、請求項1または2のいずれか1項に記載の反応器アセンブリ(100)。
- 前記封鎖部分(31)と前記反応チャンバー(101)との間の流体の流れが前記流体透過性基板(10)を介してのみ生じるように、前記封鎖部分(31)は前記反応チャンバー(101)に隣接するように構成されている、前記請求項のいずれかに記載の反応器アセンブリ。
- 前記流体透過性基板(10)は前記封鎖部分(31)の内部に少なくとも部分的に受け入れられる、前記請求項のいずれかに記載の反応器アセンブリ(100)。
- 前記不活性流体供給装置は少なくとも1つの不活性流体吸入ライン(311)をさらに備える、前記請求項のいずれかに記載の反応器アセンブリ(100)。
- 前記封鎖部分(31)は本質的に前記反応チャンバー(101)の外部に設けられている、前記請求項のいずれかに記載の反応器アセンブリ(100)。
- 前記封鎖部分(31)は蓋(102)の中に設けられている、前記請求項のいずれかに記載の反応器アセンブリ(100)。
- 前記封鎖部分(31)は前記反応チャンバー(101)の本質的に内部に設けられている、前記請求項1〜6のいずれかに記載の反応器アセンブリ(100)。
- 前記封鎖部分(31)は前記流体透過性基板(10)のための基板ホルダーとして構成されている、請求項9に記載の反応器アセンブリ(100)。
- 前記封鎖部分(31)および/または1つ以上の前記不活性流体吸入ライン(311)に隣接しているかそれらの中に一体化されている少なくとも1つの加熱要素(313、313A)をさらに備える、前記請求項のいずれかに記載の反応器アセンブリ(100)。
- 所定の時点で前記不活性流体(11)の流れを変え、かつ前記標的表面(10A)における前記反応性流体(12)の前記流体透過性基板(10)の中への透過深さを調整するように構成された少なくとも1つの不活性流体流調整装置(33)をさらに備える、前記請求項のいずれかに記載の反応器アセンブリ(100)。
- 前記少なくとも1つの反応性流体吸入ライン(21)の中の前記反応性流体(12)の流れを制御するように構成された少なくとも1つの反応性流体流調整装置(23)をさらに備える、前記請求項のいずれかに記載の反応器アセンブリ(100)。
- 原子層堆積(ALD)装置、任意に光支援ALD装置として構成されている、前記請求項のいずれかに記載の反応器アセンブリ(100)。
- −コーティングされる標的表面(10A)を有する流体透過性基板(10)を少なくとも部分的に受け入れるように構成された反応チャンバー(101)を有する化学蒸着反応器(100)を得る工程と、
−反応性流体(12)を前記反応チャンバーの中に導く工程と、
−前記表面において不活性流体(11)の流れが前記反応性流体(12)の流れに出会い、それにより前記流体透過性基板の前記標的表面(10A)においてコーティング(121)が形成されるように、前記不活性流体(11)を流体透過性基板(10)を通して前記標的表面(10A)に向かって導く工程と
を含む、化学蒸着により流体透過性基板の表面をコーティングするための方法。 - 前記封鎖部分(31)と前記反応チャンバー(101)との間の流体の流れが前記流体透過性基板(10)を介してのみ生じるように、前記不活性流体(11)は、前記反応チャンバー(101)とは分離して配置された少なくとも1つの封鎖部分(31)を有する不活性流体供給装置により前記流体透過性基板を通して導かれる、請求項15に記載の方法。
- 前記反応性流体(12)の前記基板(10)の内部への透過が防止されるように、前記不活性流体(11)は前記流体透過性基板を通して前記標的表面(10A)に向かって導かれる、請求項15または16のいずれか1項に記載の方法。
- 前記反応性流体(12)が前記流体透過性基板(10)の中に透過する深さは、所定の時点で前記不活性流体(11)の流れを変えることによって調整される、前記請求項15〜17のいずれかに記載の方法。
- 前記反応性流体(12)が前記流体透過性基板(10)の中に透過する深さは、前記反応性流体(12)が前記基板(10)の前記標的表面(10A)に到達する時点で前記不活性流体(11)の流れを中断することによって調整される、前記請求項15〜18のいずれかに記載の方法。
- 前記反応性流体(12)が前記流体透過性基板(10)の前記標的表面(10A)に到達する時点で前記不活性流体(11)の流れを中断して反転させ、それにより前記反応性流体(12)は前記基板(10)の中に透過するのが許される、前記請求項15〜19のいずれかに記載の方法。
- 前記反応チャンバーの中に供給される前記反応性流体(12)は所定の前駆体化合物(12−1、12−2)を含む、前記請求項15〜20のいずれかに記載の方法。
- いくつかの所定の前駆体(12−1、12−2)は前記反応チャンバーの中に順番に供給され、かつ各前駆体の供給後に前記反応チャンバー(101)の洗い流しが行われ、前記洗い流しは不活性流体を前記少なくとも1つの反応性流体吸入ライン(21)および/または前記少なくとも1つの封鎖部分(31)を介して前記反応チャンバー内に導くことによって行われる、前記請求項15〜21のいずれかに記載の方法。
- 請求項15〜22のいずれか1項に記載の方法によって形成されたコーティング層(121)を含む表面(10A)を有する、流体透過性材料(10)のコーティングされた物品。
- 前記流体透過性材料(10)は、粒子状材料または多孔性金属、多孔性セラミックスおよび多孔性ポリマーからなる群から選択される多孔性材料である、請求項23に記載のコーティングされた物品。
- 前記コーティング層(121)は触媒化合物を含む、請求項23または24のいずれか1項に記載のコーティングされた物品。
- 多孔性材料で作られ、かつその中に少なくとも1つの開口部または経路を含む本体として構成されている、請求項23〜25のいずれか1項に記載のコーティングされた物品。
- センサ装置、特にガスセンサ装置をコーティングするための、請求項1〜14のいずれか1項に記載の反応器アセンブリの使用。
- 固体状態の多孔性触媒を製造するための、請求項1〜14のいずれか1項に記載の反応器アセンブリの使用。
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KR102228546B1 (ko) | 2021-03-16 |
EP3748034A1 (en) | 2020-12-09 |
US20200385858A1 (en) | 2020-12-10 |
CN112048712A (zh) | 2020-12-08 |
KR20200140742A (ko) | 2020-12-16 |
TWI725867B (zh) | 2021-04-21 |
JP7029192B2 (ja) | 2022-03-03 |
TW202100796A (zh) | 2021-01-01 |
SG10202005317WA (en) | 2021-01-28 |
CN112048712B (zh) | 2023-08-01 |
FI20195479A1 (en) | 2020-12-07 |
FI129040B (fi) | 2021-05-31 |
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