JP2020534904A5 - - Google Patents
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- JP2020534904A5 JP2020534904A5 JP2020516732A JP2020516732A JP2020534904A5 JP 2020534904 A5 JP2020534904 A5 JP 2020534904A5 JP 2020516732 A JP2020516732 A JP 2020516732A JP 2020516732 A JP2020516732 A JP 2020516732A JP 2020534904 A5 JP2020534904 A5 JP 2020534904A5
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- JP
- Japan
- Prior art keywords
- ray
- imaging device
- scan data
- ray detector
- respect
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- 238000003384 imaging method Methods 0.000 claims 33
- 230000033001 locomotion Effects 0.000 claims 10
- 238000007689 inspection Methods 0.000 claims 9
- 238000000034 method Methods 0.000 claims 5
- 230000005855 radiation Effects 0.000 claims 5
- 238000004590 computer program Methods 0.000 claims 3
- LFEUVBZXUFMACD-UHFFFAOYSA-H lead(2+);trioxido(oxo)-$l^{5}-arsane Chemical compound [Pb+2].[Pb+2].[Pb+2].[O-][As]([O-])([O-])=O.[O-][As]([O-])([O-])=O LFEUVBZXUFMACD-UHFFFAOYSA-H 0.000 claims 2
- 238000010521 absorption reaction Methods 0.000 claims 1
- 230000005540 biological transmission Effects 0.000 claims 1
- 230000001427 coherent effect Effects 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP17192846.8 | 2017-09-25 | ||
| EP17192846.8A EP3459461A1 (en) | 2017-09-25 | 2017-09-25 | X-ray imaging reference scan |
| PCT/EP2018/075643 WO2019057915A1 (en) | 2017-09-25 | 2018-09-21 | X-RAY IMAGING REFERENCE SCAN |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2020534904A JP2020534904A (ja) | 2020-12-03 |
| JP2020534904A5 true JP2020534904A5 (https=) | 2021-04-22 |
| JP6961077B2 JP6961077B2 (ja) | 2021-11-05 |
Family
ID=60009429
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2020516732A Active JP6961077B2 (ja) | 2017-09-25 | 2018-09-21 | Ｘ線撮像参照スキャン |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US11231378B2 (https=) |
| EP (2) | EP3459461A1 (https=) |
| JP (1) | JP6961077B2 (https=) |
| CN (1) | CN111107787B (https=) |
| WO (1) | WO2019057915A1 (https=) |
Families Citing this family (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10295485B2 (en) | 2013-12-05 | 2019-05-21 | Sigray, Inc. | X-ray transmission spectrometer system |
| US10845491B2 (en) | 2018-06-04 | 2020-11-24 | Sigray, Inc. | Energy-resolving x-ray detection system |
| GB2591630B (en) | 2018-07-26 | 2023-05-24 | Sigray Inc | High brightness x-ray reflection source |
| WO2020051221A2 (en) | 2018-09-07 | 2020-03-12 | Sigray, Inc. | System and method for depth-selectable x-ray analysis |
| DE112020004169T5 (de) | 2019-09-03 | 2022-05-25 | Sigray, Inc. | System und verfahren zur computergestützten laminografieröntgenfluoreszenz-bildgebung |
| US11175243B1 (en) | 2020-02-06 | 2021-11-16 | Sigray, Inc. | X-ray dark-field in-line inspection for semiconductor samples |
| JP7395775B2 (ja) | 2020-05-18 | 2023-12-11 | シグレイ、インコーポレイテッド | 結晶解析装置及び複数の検出器素子を使用するｘ線吸収分光法のためのシステム及び方法 |
| WO2022061347A1 (en) | 2020-09-17 | 2022-03-24 | Sigray, Inc. | System and method using x-rays for depth-resolving metrology and analysis |
| US12480892B2 (en) | 2020-12-07 | 2025-11-25 | Sigray, Inc. | High throughput 3D x-ray imaging system using a transmission x-ray source |
| KR20260030946A (ko) | 2020-12-07 | 2026-03-06 | 시그레이, 아이엔씨. | 투과 x-선 소스를 이용한 고처리량 3D x-선 이미징 시스템 |
| WO2023168204A1 (en) | 2022-03-02 | 2023-09-07 | Sigray, Inc. | X-ray fluorescence system and x-ray source with electrically insulative target material |
| WO2023177981A1 (en) | 2022-03-15 | 2023-09-21 | Sigray, Inc. | System and method for compact laminography utilizing microfocus transmission x-ray source and variable magnification x-ray detector |
| CN119173759A (zh) | 2022-05-02 | 2024-12-20 | 斯格瑞公司 | X射线顺序阵列波长色散光谱仪 |
| CN115861250B (zh) * | 2022-12-14 | 2023-09-22 | 深圳技术大学 | 自适应数据集的半监督医学图像器官分割方法及系统 |
| CN121013975A (zh) | 2023-02-16 | 2025-11-25 | 斯格瑞公司 | 具有至少两个堆叠的平面布拉格衍射器的x射线探测器系统 |
| US12181423B1 (en) | 2023-09-07 | 2024-12-31 | Sigray, Inc. | Secondary image removal using high resolution x-ray transmission sources |
| US12429437B2 (en) | 2023-11-07 | 2025-09-30 | Sigray, Inc. | System and method for x-ray absorption spectroscopy using spectral information from two orthogonal planes |
| CN120195197A (zh) * | 2023-12-21 | 2025-06-24 | 清华大学 | 辐射成像设备和方法 |
| US12429436B2 (en) | 2024-01-08 | 2025-09-30 | Sigray, Inc. | X-ray analysis system with focused x-ray beam and non-x-ray microscope |
| WO2025155719A1 (en) | 2024-01-18 | 2025-07-24 | Sigray, Inc. | Sequential array of x-ray imaging detectors |
| WO2025174966A1 (en) | 2024-02-15 | 2025-08-21 | Sigray, Inc. | System and method for generating a focused x‑ray beam |
| US20250305971A1 (en) * | 2024-03-28 | 2025-10-02 | Tokyo Electron Limited | X-ray methods and systems for semiconductor substrate alignment |
Family Cites Families (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1731099A1 (en) | 2005-06-06 | 2006-12-13 | Paul Scherrer Institut | Interferometer for quantitative phase contrast imaging and tomography with an incoherent polychromatic x-ray source |
| WO2011070519A1 (en) * | 2009-12-10 | 2011-06-16 | Koninklijke Philips Electronics N.V. | Scanning system for differential phase contrast imaging |
| WO2011070489A1 (en) * | 2009-12-10 | 2011-06-16 | Koninklijke Philips Electronics N.V. | Non- parallel grating arrangement with on-the-fly phase stepping, x-ray system and use |
| CN102651994A (zh) * | 2009-12-10 | 2012-08-29 | 皇家飞利浦电子股份有限公司 | 微分相位对比成像系统的校准 |
| JP5438649B2 (ja) * | 2010-03-26 | 2014-03-12 | 富士フイルム株式会社 | 放射線撮影システム及び位置ずれ判定方法 |
| JP2011224329A (ja) * | 2010-03-30 | 2011-11-10 | Fujifilm Corp | 放射線撮影システム及び方法 |
| JP2012040237A (ja) * | 2010-08-20 | 2012-03-01 | Fujifilm Corp | 放射線撮影システム及びその画像生成方法 |
| US9486175B2 (en) * | 2011-07-04 | 2016-11-08 | Koninklijke Philips N.V. | Phase contrast imaging apparatus |
| JP5475737B2 (ja) * | 2011-10-04 | 2014-04-16 | 富士フイルム株式会社 | 放射線撮影装置及び画像処理方法 |
| WO2014027333A1 (en) | 2012-08-17 | 2014-02-20 | Koninklijke Philips N.V. | Correction in x-ray imaging systems for differential phase contrast imaging |
| US9717470B2 (en) * | 2012-08-20 | 2017-08-01 | Koninklijke Philips N.V. | Aligning source-grating-to-phase-grating distance for multiple order phase tuning in differential phase contrast imaging |
| US9357975B2 (en) * | 2013-12-30 | 2016-06-07 | Carestream Health, Inc. | Large FOV phase contrast imaging based on detuned configuration including acquisition and reconstruction techniques |
| JP2015008884A (ja) * | 2013-06-28 | 2015-01-19 | 株式会社日立メディコ | Ｘ線画像診断装置 |
| WO2014207193A1 (en) * | 2013-06-28 | 2014-12-31 | Koninklijke Philips N.V. | Correction in slit-scanning phase contrast imaging |
| US9939392B2 (en) * | 2013-09-12 | 2018-04-10 | The United States Of America, As Represented By The Secretary, Department Of Health And Human Services | Demodulation of intensity modulation in X-ray imaging |
| EP3062093B1 (en) * | 2013-10-23 | 2023-07-26 | Nanovision Technology (Beijing) Co., Ltd. | Photon count-based radiation imaging system, method, and apparatus |
| EP3082600B1 (en) | 2013-12-17 | 2018-03-28 | Koninklijke Philips N.V. | Phase retrieval for scanning differential phase contrast systems |
| JP5725681B1 (ja) * | 2014-01-22 | 2015-05-27 | レーザーテック株式会社 | 干渉計及び位相シフト量測定装置 |
| JP2016032573A (ja) * | 2014-07-31 | 2016-03-10 | キヤノン株式会社 | トールボット干渉計、トールボット干渉システム、及び縞走査法 |
| JP6369206B2 (ja) * | 2014-08-06 | 2018-08-08 | コニカミノルタ株式会社 | Ｘ線撮影システム及び画像処理装置 |
| JP6543838B2 (ja) * | 2014-08-28 | 2019-07-17 | 株式会社緑野リサーチ | 位相撮影装置およびその復元方法 |
| AU2015326843B2 (en) | 2014-10-02 | 2017-07-06 | Koninklijke Philips N.V. | Cushion element for a patient interface |
| WO2017001294A1 (en) | 2015-06-30 | 2017-01-05 | Koninklijke Philips N.V. | Scanning x-ray apparatus with full-field detector |
| JP6430636B2 (ja) * | 2015-08-26 | 2018-11-28 | コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． | デュアルエネルギー微分位相コントラスト撮像 |
-
2017
- 2017-09-25 EP EP17192846.8A patent/EP3459461A1/en not_active Withdrawn
-
2018
- 2018-09-21 US US16/650,220 patent/US11231378B2/en active Active
- 2018-09-21 JP JP2020516732A patent/JP6961077B2/ja active Active
- 2018-09-21 EP EP18770036.4A patent/EP3687403B1/en active Active
- 2018-09-21 CN CN201880061786.4A patent/CN111107787B/zh active Active
- 2018-09-21 WO PCT/EP2018/075643 patent/WO2019057915A1/en not_active Ceased
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