JP2020533806A5 - - Google Patents

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Publication number
JP2020533806A5
JP2020533806A5 JP2020515155A JP2020515155A JP2020533806A5 JP 2020533806 A5 JP2020533806 A5 JP 2020533806A5 JP 2020515155 A JP2020515155 A JP 2020515155A JP 2020515155 A JP2020515155 A JP 2020515155A JP 2020533806 A5 JP2020533806 A5 JP 2020533806A5
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JP
Japan
Prior art keywords
protrusions
substrate
substrate support
support
support according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2020515155A
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English (en)
Japanese (ja)
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JP7438104B2 (ja
JP2020533806A (ja
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Publication date
Priority claimed from US15/703,961 external-priority patent/US11955362B2/en
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Publication of JP2020533806A publication Critical patent/JP2020533806A/ja
Publication of JP2020533806A5 publication Critical patent/JP2020533806A5/ja
Application granted granted Critical
Publication of JP7438104B2 publication Critical patent/JP7438104B2/ja
Active legal-status Critical Current
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JP2020515155A 2017-09-13 2018-09-11 基板裏側の損傷の低減のための基板支持体 Active JP7438104B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US15/703,961 2017-09-13
US15/703,961 US11955362B2 (en) 2017-09-13 2017-09-13 Substrate support for reduced damage substrate backside
PCT/US2018/050446 WO2019055406A1 (en) 2017-09-13 2018-09-11 SUBSTRATE CARRIER FOR REAR-DETAILED SUBSTRATE SUBFACE

Publications (3)

Publication Number Publication Date
JP2020533806A JP2020533806A (ja) 2020-11-19
JP2020533806A5 true JP2020533806A5 (https=) 2021-10-21
JP7438104B2 JP7438104B2 (ja) 2024-02-26

Family

ID=65631487

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2020515155A Active JP7438104B2 (ja) 2017-09-13 2018-09-11 基板裏側の損傷の低減のための基板支持体

Country Status (6)

Country Link
US (1) US11955362B2 (https=)
JP (1) JP7438104B2 (https=)
KR (1) KR102653894B1 (https=)
CN (1) CN111183512B (https=)
TW (1) TWI823865B (https=)
WO (1) WO2019055406A1 (https=)

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US12412774B2 (en) * 2022-06-13 2025-09-09 Applied Materials, Inc. Tab arrangement for retaining support elements of substrate support
US20240213078A1 (en) * 2022-12-22 2024-06-27 Applied Materials, Inc. Substrate supports and transfer apparatus for substrate deformation

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