JP2020531861A - 熱型検出器及び熱型検出器アレイ - Google Patents
熱型検出器及び熱型検出器アレイ Download PDFInfo
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Abstract
Description
互いに接合された第1のウェハ及び第2のウェハであって、第1のウェハが、誘電体又は半導体の基板と、基板上に堆積されたウェハ大か又はパターン形成された局所的な誘電体犠牲層と、誘電体又は半導体の犠牲層又は基板上に堆積された支持層と、支持層内の開口に設けられた懸架アクティブ素子とを含む、第1のウェハ及び第2のウェハと、
懸架アクティブ素子の両側の第1の真空封止空洞及び第2の真空封止空洞であって、第1の真空封止空洞が、懸架アクティブ素子の位置において犠牲層へと延在しており、第2の真空封止空洞が、接合された第2のウェハによって閉じられた、支持層の開口を含む、第1の真空封止空洞及び第2の真空封止空洞と、
外部から第1の真空封止空洞及び第2の真空封止空洞のうちの一方に放射を入射するための前方光学装置と、
第1の真空封止空洞及び第2の真空封止空洞のうちの他方に放射を反射するように構成された後方反射器と、
懸架アクティブ素子を読出し回路に接続するための電気接続部と
を備える、ウェハ・レベル集積熱型検出器である。
Claims (21)
- 互いに接合された第1のウェハ及び第2のウェハであって、前記第1のウェハは、誘電体又は半導体の基板、前記基板の上に堆積されたウェハ幅の又はパターン形成された局所的な誘電体の犠牲層、前記誘電体若しくは半導体の犠牲層又は前記基板の上に堆積された支持層、及び前記支持層の開口内に設けられた懸架アクティブ素子を含む、第1のウェハ及び第2のウェハと、
前記懸架アクティブ素子の両側の第1の真空封止空洞及び第2の真空封止空洞であって、前記第1の真空封止空洞は、前記懸架アクティブ素子の位置において前記犠牲層に延在し、前記第2の真空封止空洞は、前記接合された第2のウェハによって閉じられている、前記支持層の前記開口を含む、第1の真空封止空洞及び第2の真空封止空洞と、
外部から前記第1の真空封止空洞及び前記第2の真空封止空洞のうちの一方に放射を入射するための前方光学装置と、
前記第1の真空封止空洞及び前記第2の真空封止空洞のうちの他方に放射を反射するように構成された後方反射器と、
前記懸架アクティブ素子を読出し回路に接続するための電気接続部と
を備える、ウェハ・レベル集積熱型検出器。 - 前記第1のウェハ及び前記第2のウェハは、フュージョン活性化接合、プラズマ活性化接合、熱圧着接合、又は別のタイプの金属ベースのウェハ接合を使用してウェハ接合されている、請求項1に記載の集積熱型検出器。
- 前記電気接続部は、好ましくは熱圧着接合、別のタイプの金属ベースの接合、又はチップ接合によって、第3のウェハの上の集積読出し回路に接続されるように構成されている、請求項1又は2に記載の集積熱型検出器。
- 前記前方光学装置は、透過性基板、基板内の窓、反射防止コーティング、レンズ、フィルタ、前方ミラー、制御可能な移動式前方ミラー、ファブリ・ペロー干渉計、同調可能ファブリ・ペロー干渉計のうちの1つ以上を備える、請求項1〜3の何れか一項に記載の集積熱型検出器。
- 前記後方反射器は、後方ミラー、金属の後方ミラー、分布ブラッグ反射器、制御可能な移動式後方ミラー、ファブリ・ペロー干渉計、同調可能ファブリ・ペロー干渉計のうちの1つ以上を備える、請求項1〜4の何れか一項に記載の集積熱型検出器。
- 前記後方反射器は、前記第1のウェハ及び前記第2のウェハのうちの他方のウェハの内側面、透過性基板若しくは窓の後ろの、前記第1のウェハ及び前記第2のウェハのうちの他方のウェハの外側面、又は前記第1のウェハ及び前記第2のウェハのうちの他方のウェハに設けられた開口に設けられる、請求項1〜5の何れか一項に記載の集積熱型検出器。
- 前記支持層は、前記懸架アクティブ素子の機械的連結及び電気的接続のために、前記開口の周辺部に、より薄い肩部分をさらに備え、前記より薄い肩部分は、好ましくは前記第1のウェハの接合表面からオフセットされている、請求項1〜6の何れか一項に記載の集積熱型検出器。
- 前記後方反射器は、前記第1のウェハ及び前記第2のウェハのうちの他方のウェハの内側面、透過性基板若しくは窓の後ろの、前記第1のウェハ及び前記第2のウェハのうちの他方のウェハの外側面、又は前記第1のウェハ及び前記第2のウェハのうちの他方のウェハに設けられた開口に設けられる、請求項1〜7の何れか一項に記載の集積熱型検出器。
- 前記第1の真空封止空洞及び前記第2の真空封止空洞のうちの一方にファブリ・ペロー干渉計の可動反射器を備え、前記可動反射器の両側に真空の空間が存在する、請求項1〜8の何れか一項に記載の集積熱型検出器。
- 前記ファブリ・ペロー干渉計の固定反射器と前記可動反射器との両方が、前記第1の真空封止空洞及び前記第2の真空封止空洞のうちの同じ前記一方に、前記懸架アクティブ素子の前側に配置されている、請求項9に記載の集積熱型検出器チップ。
- 前記可動反射器は、前記第1の真空封止空洞及び前記第2の真空封止空洞のうちの前記一方に、前記懸架アクティブ素子の裏側に配置されている、請求項9に記載の集積熱型検出器。
- 前記可動反射器は、前記後方反射器として機能するように構成されている、請求項11に記載の集積熱型検出器。
- 前記ファブリ・ペロー干渉計の固定反射器は、前記懸架アクティブ素子の前側に配置されている、請求項11又は12に記載の集積熱型検出器。
- 前記第1の真空封止空洞及び前記第2の真空封止空洞のうちの前記一方の内部に前記可動反射器を機械的に支持するように構成された支持構造体を備える、請求項9〜13の何れか一項に記載の集積熱型検出器。
- 前記ファブリ・ペロー干渉計を同調させるために前記可動反射器を作動制御装置に接続するように構成された電気接続部を備える、請求項9〜14の何れか一項に記載の集積熱型検出器。
- 前記可動反射器の前記電気接続部は1対の静電駆動電極を備える、請求項15に記載の集積熱型検出器。
- 前記熱型検出器は、紫外(UV)光、可視光、赤外(IR)光、テラヘルツ(THz)放射、及びX線の波長範囲のうちの1つの電磁放射を吸収するように構成されている、請求項1〜16の何れか一項に記載の集積熱型検出器。
- 請求項1〜17の何れか一項に記載の複数の熱型検出器を備える、集積熱型検出器アレイ。
- 請求項1〜17の何れか一項に記載の集積熱型検出器、又は請求項18に記載の集積熱型検出器アレイを製造するための事前製造された中間製品であって、前記基板と、前記懸架アクティブ装置と、前記支持層と、前記懸架アクティブ装置を支持する前記誘電体の犠牲層とを含むように事前製造された前記第1のウェハを備える、事前製造された中間製品。
- 前記第1のウェハは、前記第1のウェハの内側面にファブリ・ペロー干渉計、ファブリ・ペロー干渉計の固定反射器、又はファブリ・ペロー干渉計の可動反射器を含むようにさらに事前製造されている、請求項19に記載の事前製造された中間製品。
- 請求項1〜17の何れか一項に記載の集積熱型検出器、又は請求項18に記載の集積熱型検出器アレイを製造するための事前製造された中間製品であって、誘電体又は半導体の基板と、前記第2のウェハの内側面にファブリ・ペロー干渉計の可動反射器とを含むように事前製造された前記第2のウェハを備える、事前製造された中間製品。
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Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10511772A (ja) * | 1994-12-30 | 1998-11-10 | ハネウエル・インコーポレーテッド | フアブリ・ペローマイクロフィルタ検出器 |
JP2000236482A (ja) * | 1998-12-14 | 2000-08-29 | Sharp Corp | 二次元画像検出器およびその製造方法 |
JP2010190618A (ja) * | 2009-02-16 | 2010-09-02 | Denso Corp | 波長選択型赤外線検出器 |
JP2012163913A (ja) * | 2011-02-09 | 2012-08-30 | Seiko Epson Corp | 波長可変干渉フィルター、光モジュール、光分析装置、及び波長可変干渉フィルターの製造方法 |
JP2013132115A (ja) * | 2011-12-21 | 2013-07-04 | Aisin Seiki Co Ltd | 回転電機 |
JP2013186038A (ja) * | 2012-03-09 | 2013-09-19 | Panasonic Corp | 赤外線検出装置 |
JP2014038092A (ja) * | 2012-08-20 | 2014-02-27 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | テラヘルツ領域での電磁放射のボロメータ検出器およびそのような検出器を含むアレイ検出装置 |
JP2015198155A (ja) * | 2014-04-01 | 2015-11-09 | セイコーエプソン株式会社 | 熱電変換素子、光検出装置、電子機器 |
US20160163942A1 (en) * | 2014-12-04 | 2016-06-09 | Maxim Integrated Products, Inc. | Mems-based wafer level packaging for thermo-electric ir detectors |
DE102016122850A1 (de) * | 2015-11-27 | 2017-06-01 | Heimann Sensor Gmbh | Thermischer Infrarot-Sensorarray im Wafer-Level-Package |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000298063A (ja) * | 1999-04-14 | 2000-10-24 | Tdk Corp | 赤外線検出器 |
US7015457B2 (en) * | 2002-03-18 | 2006-03-21 | Honeywell International Inc. | Spectrally tunable detector |
JP2006145501A (ja) * | 2004-11-24 | 2006-06-08 | Hamamatsu Photonics Kk | 赤外線検出装置 |
US7417746B2 (en) * | 2005-12-29 | 2008-08-26 | Xerox Corporation | Fabry-perot tunable filter systems and methods |
US7800066B2 (en) | 2006-12-08 | 2010-09-21 | Regents of the University of Minnesota Office for Technology Commercialization | Detection beyond the standard radiation noise limit using reduced emissivity and optical cavity coupling |
DE102008054481B4 (de) | 2008-12-10 | 2021-11-25 | Robert Bosch Gmbh | Sensor und Verfahren zu dessen Herstellung |
FR2946777B1 (fr) | 2009-06-12 | 2011-07-22 | Commissariat Energie Atomique | Dispositif de detection et/ou d'emission de rayonnement electromagnetique et procede de fabrication d'un tel dispositif |
US8610070B2 (en) | 2010-04-28 | 2013-12-17 | L-3 Communications Corporation | Pixel-level optical elements for uncooled infrared detector devices |
CN102214662B (zh) * | 2011-04-26 | 2012-12-19 | 北京大学 | 非制冷红外焦平面阵列探测器单片集成结构及制作方法 |
KR101307436B1 (ko) | 2011-11-10 | 2013-09-12 | (주)유우일렉트로닉스 | Mems 센서 패키징 및 그 방법 |
CN102583220B (zh) * | 2012-03-29 | 2014-11-05 | 江苏物联网研究发展中心 | 一种晶圆级真空封装的红外探测器及其制作方法 |
DE102012216618A1 (de) | 2012-09-18 | 2014-03-20 | Robert Bosch Gmbh | Anordnung von mindestens zwei Wafern zum Detektieren von elektromagnetischer Strahlung und Verfahren zum Herstellen der Anordnung |
US9423303B2 (en) | 2012-11-30 | 2016-08-23 | Robert Bosch Gmbh | MEMS infrared sensor including a plasmonic lens |
CN105683726B (zh) | 2013-10-31 | 2019-05-07 | 浜松光子学株式会社 | 光检测装置 |
JP6390117B2 (ja) | 2014-02-26 | 2018-09-19 | セイコーエプソン株式会社 | 光学モジュール、及び電子機器 |
JP2016017794A (ja) | 2014-07-07 | 2016-02-01 | 株式会社リコー | 光学センサとその製造方法 |
US9372114B2 (en) | 2014-08-20 | 2016-06-21 | William N. Carr | Spectrophotometer comprising an integrated Fabry-Perot interferometer |
-
2018
- 2018-08-31 US US16/642,939 patent/US11199455B2/en active Active
- 2018-08-31 JP JP2020512595A patent/JP7438936B2/ja active Active
- 2018-08-31 EP EP18769414.6A patent/EP3676584A1/en active Pending
- 2018-08-31 WO PCT/FI2018/050619 patent/WO2019043299A1/en unknown
- 2018-08-31 CN CN201880070853.9A patent/CN111356907B/zh active Active
-
2023
- 2023-09-26 JP JP2023162940A patent/JP2023184524A/ja active Pending
Patent Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10511772A (ja) * | 1994-12-30 | 1998-11-10 | ハネウエル・インコーポレーテッド | フアブリ・ペローマイクロフィルタ検出器 |
JP2000236482A (ja) * | 1998-12-14 | 2000-08-29 | Sharp Corp | 二次元画像検出器およびその製造方法 |
JP2010190618A (ja) * | 2009-02-16 | 2010-09-02 | Denso Corp | 波長選択型赤外線検出器 |
JP2012163913A (ja) * | 2011-02-09 | 2012-08-30 | Seiko Epson Corp | 波長可変干渉フィルター、光モジュール、光分析装置、及び波長可変干渉フィルターの製造方法 |
JP2013132115A (ja) * | 2011-12-21 | 2013-07-04 | Aisin Seiki Co Ltd | 回転電機 |
JP2013186038A (ja) * | 2012-03-09 | 2013-09-19 | Panasonic Corp | 赤外線検出装置 |
JP2014038092A (ja) * | 2012-08-20 | 2014-02-27 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | テラヘルツ領域での電磁放射のボロメータ検出器およびそのような検出器を含むアレイ検出装置 |
JP2015198155A (ja) * | 2014-04-01 | 2015-11-09 | セイコーエプソン株式会社 | 熱電変換素子、光検出装置、電子機器 |
US20160163942A1 (en) * | 2014-12-04 | 2016-06-09 | Maxim Integrated Products, Inc. | Mems-based wafer level packaging for thermo-electric ir detectors |
DE102016122850A1 (de) * | 2015-11-27 | 2017-06-01 | Heimann Sensor Gmbh | Thermischer Infrarot-Sensorarray im Wafer-Level-Package |
WO2017089604A1 (de) * | 2015-11-27 | 2017-06-01 | Heimann Sensor Gmbh | Thermischer infrarot-sensorarray im wafer-level-package |
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