JP2020528498A - 基板処理装置のガス噴射装置、基板処理装置、および基板処理方法 - Google Patents
基板処理装置のガス噴射装置、基板処理装置、および基板処理方法 Download PDFInfo
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Abstract
Description
Claims (16)
- 第1ガス噴射空間に第1ガスを噴射する第1ガス噴射モジュール、
前記第1ガス噴射空間と異なる第2ガス噴射空間に処理ガスを噴射する第2ガス噴射モジュール、および
前記第1ガス噴射空間および前記第2ガス噴射空間それぞれと異なる第3ガス噴射空間に第2ガスを噴射する第3ガス噴射モジュールを含み、
前記第2ガス噴射モジュールは、前記第1ガス噴射モジュールが前記第1ガスを噴射するときに、前記第2ガス噴射空間に前記第1ガスを噴射し、前記第3ガス噴射モジュールが前記第2ガスを噴射するときに、前記第2ガス噴射空間に前記第2ガスを噴射することを特徴とする基板処理装置のガス噴射装置。 - 前記第1ガス噴射空間、前記第2ガス噴射空間、および前記第3ガス噴射空間と異なるパージガス噴射空間にパージガスを噴射するパージガス噴射モジュールを含み、
前記第2ガス噴射モジュールは、前記パージガス噴射モジュールがパージガスを噴射するときに、前記第2ガス噴射空間にパージガスを噴射することを特徴とする請求項1に記載の基板処理装置のガス噴射装置。 - 前記第1ガス噴射モジュールおよび前記第2ガス噴射モジュールが、それぞれプラズマを用いて前記第1ガスを活性化させて噴射し、
前記第3ガス噴射モジュールおよび前記第2ガス噴射モジュールは、それぞれプラズマを用いて前記第2ガスを活性化させて噴射することを特徴とする請求項1に記載の基板処理装置のガス噴射装置。 - 処理チャンバー、
複数の基板を支持するように前記処理チャンバー内に設置され、回転軸を中心に回転する基板支持部、
前記処理チャンバーの上部を覆うチャンバーリード、および
前記チャンバーリードに設置されて前記基板支持部の方に処理ガスを噴射するガス噴射部を含み、
前記ガス噴射部が、前記チャンバーリードに設置されてソースガスを噴射する第1ガス噴射モジュール、前記第1ガス噴射モジュールから離隔した位置で前記チャンバーリードに設置された第2ガス噴射モジュール、および前記第1ガス噴射モジュールと前記第2ガス噴射モジュールそれぞれから離隔した位置で前記チャンバーリードに設置されて反応ガスを噴射する第3ガス噴射モジュールを含み、
前記第2ガス噴射モジュールは、前記第1ガス噴射モジュールがソースガスを噴射するときにソースガスを噴射し、前記第3ガス噴射モジュールが反応ガスを噴射するときに反応ガスを噴射することを特徴とする基板処理装置。 - 前記ガス噴射部が、前記第1ガス噴射モジュール、前記第2ガス噴射モジュール、および前記第3ガス噴射モジュールそれぞれから離隔した位置で前記チャンバーリードに設置されたパージガス噴射モジュールを含み、
前記第2ガス噴射モジュールは、前記パージガス噴射モジュールがパージガスを噴射するときにパージガスを噴射することを特徴とする請求項4に記載の基板処理装置。 - 前記第2ガス噴射モジュールが、前記基板支持部の回転軸から上側に離隔した位置に配置されるように前記チャンバーリードに設置されたことを特徴とする請求項4に記載の基板処理装置。
- 前記基板支持部が、前記基板が回転経路に沿って移動するように、前記回転軸を中心に回転し、
前記第1ガス噴射モジュールおよび前記第3ガス噴射モジュールは、前記基板の回転経路に対して重畳するように、前記チャンバーリードに設置され、
前記第2ガス噴射モジュールは、前記基板の回転経路に対して重畳しないように、前記チャンバーリードに設置されたことを特徴とする請求項4に記載の基板処理装置。 - 処理チャンバー内に処理ガスを噴射して基板を処理する方法であって、
前記処理チャンバーの第1ガス噴射空間と前記第1ガス噴射空間に隣接した第2ガス噴射空間にソースガスを噴射する工程、
前記ソースガスをパージする工程、
前記第1ガス噴射空間と異なる第3ガス噴射空間と前記第2ガス噴射空間に反応ガスを噴射する工程、および
前記反応ガスをパージする工程を含む、基板処理方法。 - 処理チャンバー内に処理ガスを噴射して基板を処理する方法であって、
前記処理チャンバーの第1ガス噴射空間と前記第1ガス噴射空間に隣接した第2ガス噴射空間にソースガスを噴射する工程、
前記第1ガス噴射空間と前記第2ガス噴射空間にパージガスを噴射する工程、および
前記第1ガス噴射空間と前記第2ガス噴射空間に反応ガスを噴射する工程を含む、基板処理方法。 - 前記第1ガス噴射空間と前記第2ガス噴射空間に反応ガスを噴射した後に、前記第1ガス噴射空間と前記第2ガス噴射空間にパージガスを噴射する工程を含むことを特徴とする請求項9に記載の基板処理方法。
- 処理チャンバー内に処理ガスを噴射して基板を処理する方法であって、
処理チャンバー内に時間によって、処理ガスを変更して噴射する時分割モードで基板を処理する時分割処理工程、および
前記処理チャンバー内に空間別に異なる処理ガスを噴射する空間分割モードで基板を処理する空間分割処理工程を含む基板処理方法。 - 前記時分割処理工程および前記空間分割処理工程を交互に繰り返して行う反復処理工程を含む請求項11に記載の基板処理方法。
- 前記時分割処理工程が、
前記処理チャンバーの第1ガス噴射空間と前記第1ガス噴射空間に隣接した第2ガス噴射空間にソースガスを噴射する工程、
前記第1ガス噴射空間と前記第2ガス噴射空間にパージガスを噴射する工程、
前記第1ガス噴射空間と前記第2ガス噴射空間に反応ガスを噴射する工程、および
前記第1ガス噴射空間と前記第2ガス噴射空間にパージガスを噴射する工程を含むことを特徴とする請求項11に記載の基板処理方法。 - 前記時分割処理工程が、
前記処理チャンバーの第1ガス噴射空間と前記第1ガス噴射空間に隣接した第2ガス噴射空間にソースガスを噴射する工程、
前記ソースガスをパージする工程、
前記第1ガス噴射空間と異なる第3ガス噴射空間と前記第2ガス噴射空間に反応ガスを噴射する工程、および
前記反応ガスをパージする工程を含むことを特徴とする請求項11に記載の基板処理方法。 - 前記空間分割処理工程が、前記処理チャンバーの第1ガス噴射空間にソースガスを噴射する工程、前記第1ガス噴射空間に隣接した第2ガス噴射空間にパージガスを噴射する工程、および前記第1ガス噴射空間と前記第2ガス噴射空間それぞれと異なる第3ガス噴射空間に反応ガスを噴射する工程を含み、
前記第1ガス噴射空間にソースガスを噴射する工程、前記第2ガス噴射空間にパージガスを噴射する工程、および前記第3ガス噴射空間に反応ガスを噴射する工程が、同時に行なわれることを特徴とする請求項11に記載の基板処理方法。 - 前記空間分割処理工程が、前記第1ガス噴射空間、前記第3ガス噴射空間、および前記第2ガス噴射空間と異なるパージガス噴射空間にパージガスを噴射する工程を含み、
前記第1ガス噴射空間にソースガスを噴射する工程、前記第2ガス噴射空間にパージガスを噴射する工程、前記第3ガス噴射空間に反応ガスを噴射する工程、および前記パージガス噴射空間にパージガスを噴射する工程が、同時に行なわれることを特徴とする請求項15に記載の基板処理方法。
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KR20190013497A (ko) | 2019-02-11 |
KR102155281B1 (ko) | 2020-09-11 |
US11651941B2 (en) | 2023-05-16 |
US20200219700A1 (en) | 2020-07-09 |
TW201911381A (zh) | 2019-03-16 |
CN110914970A (zh) | 2020-03-24 |
TWI769284B (zh) | 2022-07-01 |
CN110914970B (zh) | 2023-10-10 |
JP7145928B2 (ja) | 2022-10-03 |
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