JP2020527759A - 微小球レンズ組立体 - Google Patents
微小球レンズ組立体 Download PDFInfo
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- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
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- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
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- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
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Abstract
Description
Claims (37)
- 基部レンズと、
微小球レンズと、
前記基部レンズの前面から前記微小球レンズまで延在する光学的に透明な材料からなるカラムと、
を備える、
微小球レンズ組立体。 - 前記微小球レンズは、微小球を備える、
請求項1に記載の微小球レンズ組立体。 - 前記微小球レンズは、複数の微小球の配列構造を備える、
請求項1に記載の微小球レンズ組立体。 - 前記微小球レンズは、一部切除された微小球を備える、
請求項1に記載の微小球レンズ組立体。 - 前記微小球レンズは、複数の一部切除された微小球の配列構造を備える、
請求項1に記載の微小球レンズ組立体。 - 前記光学的に透明な材料は、ガラスまたはプラスチックを含む、
請求項1〜5のいずれか1項に記載の微小球レンズ組立体。 - 前記光学的に透明な材料は、接着剤または樹脂を含み、UV硬化可能なものである、
請求項1〜6のいずれか1項に記載の微小球レンズ組立体。 - 前記カラムは、前記基部レンズの縁部から前記微小球レンズの縁部まで延在する、
請求項1〜7のいずれか1項に記載の微小球レンズ組立体。 - 微小球レンズ組立体を構築する方法であって、
顕微鏡に基部レンズを取り付けるステップと、
試料上に微小球レンズを提供するステップと、
前記基部レンズと前記微小球レンズとの間に光学的に透明且つUV硬化可能な材料を塗布するステップと、
前記微小球レンズが前記基部レンズの視野の中心にあり且つ前記試料が焦点合わせされるまで、前記微小球レンズと前記基部レンズとの間隔を調整するステップと、
前記基部レンズの後面にUV光を照射するステップと、
前記試料から前記基部レンズを離すステップと、
を含む、
方法。 - 前記試料は、既知の試料または専用のキャリブレーション試料である、
請求項9に記載の方法。 - 前記基部レンズの後面にUV光を照射した後に、余分な前記光学的に透明な材料を洗い流すステップを含む、
請求項10に記載の方法。 - 洗浄後に、前記光学的に透明な材料をさらなるUV光に曝露して完全に硬化させるステップを含む、
請求項11に記載の方法。 - 前記微小球レンズは、単一の微小球を備える、
請求項9〜12のいずれか1項に記載の方法。 - 前記微小球レンズは、複数の微小球の配列構造を備える、
請求項9〜12のいずれか1項に記載の方法。 - 前記微小球の配列構造は、水中に前記複数の微小球を懸濁して前記水を蒸発させることで形成される、
請求項14に記載の方法。 - 前記微小球レンズを一部切除する追加のステップを含む、
請求項13〜15のいずれか1項に記載の方法。 - 前記一部切除は、集束イオンビーム(FIB)システムを使用して、前記微小球レンズを構成する1つの前記微小球または複数の前記微小球を、所望の距離で切断することで実現される、
請求項16に記載の方法。 - 前記一部切除は、前記微小球レンズを構成する1つの前記微小球または複数の前記微小球を、所望の一部切除形状が得られるまでミリングすることで実現される、
請求項16に記載の方法。 - 請求項1〜8のいずれか1項に記載の微小球レンズ組立体を備える、
対物レンズまたは対物レンズ構成。 - 顕微鏡と、
請求項20に記載の対物レンズまたは対物レンズ構成と、
を備える、
超解像顕微鏡装置。 - 反射モードまたは透過モードで前記試料を照射するように動作可能な照射手段を備える、
請求項20に記載の超解像顕微鏡装置。 - 前記照射手段と前記微小球レンズ組立体との間には、制限された開口が設けられる、
請求項20または21に記載の超解像顕微鏡装置。 - 前記対物レンズを通して見た前記試料の画像を捕捉するように動作可能な撮像装置が設けられる、
請求項20〜22のいずれか1項に記載の超解像顕微鏡装置。 - 前記撮像装置は、捕捉した前記画像を処理するように動作可能な画像処理手段と接続される、
請求項23に記載の超解像顕微鏡装置。 - 前記微小球レンズ組立体を通して前記試料を見ることができるように前記試料が配置される試料台を備える、
請求項20〜24のいずれか1項に記載の超解像顕微鏡装置。 - 前記試料台は、前記微小球レンズ組立体と前記試料との間の間隔を制御可能に変化させるように動作可能であり、前記試料台は、前記微小球レンズ組立体の光軸に垂直な平面において、前記微小球レンズ組立体に対して前記試料の位置を制御可能に変化させるように動作可能である、
請求項25に記載の超解像顕微鏡装置。 - 複数の前記対物レンズを備える、
請求項20〜26のいずれか1項に記載の超解像顕微鏡装置。 - 前記対物レンズの各々は、微小球レンズ組立体を備える、
請求項27に記載の超解像顕微鏡装置。 - 加工用レーザ光源が設けられる、
請求項20〜28のいずれか1項に記載の超解像顕微鏡装置。 - 前記加工用レーザ光は、前記微小球レンズ組立体を通過するように位置合わせされる、
請求項29に記載の超解像顕微鏡装置。 - 請求項20〜30のいずれか1項に記載の顕微鏡を用いた超解像顕微鏡法の方法であって、
試料を提供するステップと、
前記試料に対して前記微小球レンズ組立体を配置するステップと、
前記試料の画像を1つまたは複数捕捉するステップと、
を含む、
方法。 - 前記微小球レンズ組立体と前記試料との間の間隔を変化させるステップを含む、
請求項31に記載の方法。 - 前記微小球レンズ組立体の光軸に垂直な平面において、前記微小球レンズ組立体に対して前記試料の位置を変化させるステップを含む、
請求項31または32に記載の方法。 - 前記微小球レンズ組立体と前記試料との間に流動体を導入するステップを含む、
請求項31〜33のいずれか1項に記載の方法。 - 捕捉した前記画像を処理するステップを含む、
請求項31〜34のいずれか1項に記載の方法。 - 前記加工用レーザ光が前記微小球レンズ組立体を通過するように位置合わせされた加工用レーザ光源を提供して前記試料を加工するステップと、
前記試料のターゲット表面を前記加工用レーザ光に曝露して前記表面を加工するステップと、
をさらに含む、
請求項31〜35のいずれか1項に記載の方法。 - 請求項20〜30のいずれか1項に記載の顕微鏡を用いた加工方法であって、
試料を提供するステップと、
前記試料に対して前記微小球レンズ組立体を配置するステップと、
加工用レーザ光が前記微小球レンズ組立体を通過するように位置合わせされた加工用レーザ光源を提供するステップと、
前記試料のターゲット表面を前記加工用レーザ光に曝露して前記表面を加工するステップと、
を含む、
方法。
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CN110672883B (zh) * | 2019-10-17 | 2020-10-30 | 中国科学院长春应用化学研究所 | 一种基于周期纳米孔阵列和透镜介质微球阵列的近场超分辨光学成像方法 |
CN111358440B (zh) * | 2020-03-31 | 2021-05-07 | 中国科学技术大学 | 利用锁相原理同时进行标定和测量的装置及方法 |
KR20230017253A (ko) * | 2020-05-28 | 2023-02-03 | 스코프젠스 프라이빗 리미티드 | 스마트폰 및 다른 디바이스들을 위한 광 안내 요소들을 갖는 내장형 현미경 검사 |
CN111766692B (zh) * | 2020-06-18 | 2022-07-19 | 苏州大学 | 自动补液微球超分辨显微成像系统 |
US11474283B2 (en) * | 2020-06-30 | 2022-10-18 | Uchicago Argonne, Llc | Super resolution for magneto-optical microscopy |
KR20220021327A (ko) | 2020-08-13 | 2022-02-22 | 삼성전자주식회사 | 분광 계측 장치와 방법, 및 그 계측 방법을 이용한 반도체 소자 제조방법 |
HRP20202053B1 (hr) * | 2020-12-22 | 2024-07-05 | Institut Ruđer Bošković | Nove optičke naprave te način proizvodnje mehanički učvršćene mikrosfere za upotrebu u mapiranju i optičkim mjerenjima u mikroskopiji i spektroskopiji za pojačanje signala i rezolucije |
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EP3646109B1 (en) | 2023-06-21 |
GB2565898B (en) | 2020-01-01 |
US20200166769A1 (en) | 2020-05-28 |
US11966063B2 (en) | 2024-04-23 |
GB201804378D0 (en) | 2018-05-02 |
EP3646109A1 (en) | 2020-05-06 |
JP7249339B2 (ja) | 2023-03-30 |
CN110799893A (zh) | 2020-02-14 |
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CN110799893B (zh) | 2022-01-11 |
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GB201810650D0 (en) | 2018-08-15 |
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EP3646109B8 (en) | 2023-07-26 |
WO2019002874A3 (en) | 2019-03-21 |
GB2565898A (en) | 2019-02-27 |
KR20200019748A (ko) | 2020-02-24 |
WO2019002876A2 (en) | 2019-01-03 |
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