JP2020527728A - 表面欠陥を検出するためのデバイスおよび方法 - Google Patents

表面欠陥を検出するためのデバイスおよび方法 Download PDF

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JP2020527728A
JP2020527728A JP2020523065A JP2020523065A JP2020527728A JP 2020527728 A JP2020527728 A JP 2020527728A JP 2020523065 A JP2020523065 A JP 2020523065A JP 2020523065 A JP2020523065 A JP 2020523065A JP 2020527728 A JP2020527728 A JP 2020527728A
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electromagnetic radiation
intensity
band
inspected
spectral
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Japanese (ja)
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JP2020527728A5 (enExample
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デ ニスコ ブルーノ
デ ニスコ ブルーノ
ディ ジローラモ アレッサンドロ
ディ ジローラモ アレッサンドロ
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テクノ アイデア ソシエタ ア レスポンサビリタ リミタータ
テクノ アイデア ソシエタ ア レスポンサビリタ リミタータ
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Publication of JP2020527728A publication Critical patent/JP2020527728A/ja
Publication of JP2020527728A5 publication Critical patent/JP2020527728A5/ja
Priority to JP2023084317A priority Critical patent/JP2023106529A/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8829—Shadow projection or structured background, e.g. for deflectometry

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Engineering & Computer Science (AREA)
  • General Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • Analytical Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP2020523065A 2017-07-10 2018-07-09 表面欠陥を検出するためのデバイスおよび方法 Pending JP2020527728A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2023084317A JP2023106529A (ja) 2017-07-10 2023-05-23 表面欠陥を検出するためのデバイスおよび方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
IT102017000077459 2017-07-10
IT102017000077459A IT201700077459A1 (it) 2017-07-10 2017-07-10 Dispositivo e procedimento per la rilevazione di difetti superficiali
PCT/IB2018/055041 WO2019012404A1 (en) 2017-07-10 2018-07-09 Device and process for detecting surface defects

Related Child Applications (1)

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JP2023084317A Division JP2023106529A (ja) 2017-07-10 2023-05-23 表面欠陥を検出するためのデバイスおよび方法

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JP2020527728A true JP2020527728A (ja) 2020-09-10
JP2020527728A5 JP2020527728A5 (enExample) 2021-07-26

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JP2020523065A Pending JP2020527728A (ja) 2017-07-10 2018-07-09 表面欠陥を検出するためのデバイスおよび方法
JP2023084317A Pending JP2023106529A (ja) 2017-07-10 2023-05-23 表面欠陥を検出するためのデバイスおよび方法

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US (2) US11105614B2 (enExample)
EP (1) EP3652524B1 (enExample)
JP (2) JP2020527728A (enExample)
ES (1) ES2977710T3 (enExample)
IT (1) IT201700077459A1 (enExample)
MA (1) MA49568A (enExample)
WO (1) WO2019012404A1 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT201700077459A1 (it) * 2017-07-10 2019-01-10 Tekno Idea Srl Dispositivo e procedimento per la rilevazione di difetti superficiali
CN111189854B (zh) * 2020-04-13 2020-08-07 征图新视(江苏)科技股份有限公司 玻璃盖板自动检测系统缺陷分层检测方法
US12175654B2 (en) 2020-11-06 2024-12-24 Carl Zeiss Metrology Llc Surface inspection system and method for differentiating particulate contamination from defects on a surface of a specimen

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008123604A1 (ja) * 2007-03-29 2008-10-16 Toyota Jidosha Kabushiki Kaisha 表面検査装置
US20110181873A1 (en) * 2008-09-12 2011-07-28 Ceramicam Ltd. Surface scanning device
JP2011232265A (ja) * 2010-04-30 2011-11-17 Honda Motor Co Ltd 表面検査装置及び表面検査方法
US20140043602A1 (en) * 2012-08-07 2014-02-13 Carl Zeiss Industrielle Messtechnik Gmbh Apparatus and method for inspecting an object

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US4629319A (en) 1984-02-14 1986-12-16 Diffracto Ltd. Panel surface flaw inspection
US5237404A (en) * 1990-06-28 1993-08-17 Mazda Motor Corporation Inspection apparatus with improved detection of surface defects over large and curved surfaces
JPH05322543A (ja) 1992-05-22 1993-12-07 Mazda Motor Corp 表面欠陥検査装置
EP1108197A1 (de) * 1998-09-04 2001-06-20 Siemens Aktiengesellschaft Anordnung und verfahren zur ermittlung einer tiefen- und farbinformation eines aufzunehmenden objekts
JP2001242092A (ja) * 2000-03-02 2001-09-07 Mitsubishi Electric Corp 評価装置
DE10110994B4 (de) 2000-03-09 2012-11-29 Isra Vision Systems Ag Vorrichtung zur Bildabtastung eines Objektes
WO2003016819A1 (de) * 2001-08-14 2003-02-27 Metronom Gmbh Industrial Measurement Verfahren zur vermessung von oberflächenstrukturen
GB0500570D0 (en) * 2005-01-12 2005-02-16 Enfis Ltd Sensing in meat products and the like
JP5110977B2 (ja) * 2007-06-22 2012-12-26 株式会社日立ハイテクノロジーズ 欠陥観察装置及びその方法
JP2009133725A (ja) * 2007-11-30 2009-06-18 Sumitomo Chemical Co Ltd 樹脂塗布フィルムの塗膜欠陥の検査方法
JP4719284B2 (ja) * 2008-10-10 2011-07-06 トヨタ自動車株式会社 表面検査装置
US20130057678A1 (en) 2010-05-17 2013-03-07 Ford Espana S.L. Inspection system and method of defect detection on specular surfaces
JP5994419B2 (ja) * 2012-06-21 2016-09-21 富士通株式会社 検査方法及び検査装置
EP2799810A1 (de) * 2013-04-30 2014-11-05 Aimess Services GmbH Vorrichtung und Verfahren zum simultanen dreidimensionalen Vermessen von Oberflächen mit mehreren Wellenlängen
WO2017001897A1 (pt) * 2015-06-30 2017-01-05 Bosch Car Multimedia Portugal, S.A. Dispositivo e método para deteção de defeitos em superfícies especulares com luz difusa estruturada
JP2017116487A (ja) * 2015-12-25 2017-06-29 凸版印刷株式会社 ウェブ欠陥検査装置
IT201700077459A1 (it) * 2017-07-10 2019-01-10 Tekno Idea Srl Dispositivo e procedimento per la rilevazione di difetti superficiali
US11328380B2 (en) * 2018-10-27 2022-05-10 Gilbert Pinter Machine vision systems, illumination sources for use in machine vision systems, and components for use in the illumination sources

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008123604A1 (ja) * 2007-03-29 2008-10-16 Toyota Jidosha Kabushiki Kaisha 表面検査装置
US20110181873A1 (en) * 2008-09-12 2011-07-28 Ceramicam Ltd. Surface scanning device
JP2011232265A (ja) * 2010-04-30 2011-11-17 Honda Motor Co Ltd 表面検査装置及び表面検査方法
US20140043602A1 (en) * 2012-08-07 2014-02-13 Carl Zeiss Industrielle Messtechnik Gmbh Apparatus and method for inspecting an object

Also Published As

Publication number Publication date
US20210348917A1 (en) 2021-11-11
MA49568A (fr) 2020-05-20
WO2019012404A1 (en) 2019-01-17
ES2977710T3 (es) 2024-08-29
EP3652524A1 (en) 2020-05-20
JP2023106529A (ja) 2023-08-01
US20200173771A1 (en) 2020-06-04
US11105614B2 (en) 2021-08-31
EP3652524C0 (en) 2024-02-14
US11629953B2 (en) 2023-04-18
EP3652524B1 (en) 2024-02-14
IT201700077459A1 (it) 2019-01-10
BR112020000286A2 (pt) 2020-07-14

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