ES2977710T3 - Dispositivo y proceso para detectar defectos superficiales - Google Patents

Dispositivo y proceso para detectar defectos superficiales Download PDF

Info

Publication number
ES2977710T3
ES2977710T3 ES18749871T ES18749871T ES2977710T3 ES 2977710 T3 ES2977710 T3 ES 2977710T3 ES 18749871 T ES18749871 T ES 18749871T ES 18749871 T ES18749871 T ES 18749871T ES 2977710 T3 ES2977710 T3 ES 2977710T3
Authority
ES
Spain
Prior art keywords
electromagnetic radiation
spectral band
inspected
source
intensity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
ES18749871T
Other languages
English (en)
Spanish (es)
Inventor
Nisco Bruno De
Girolamo Alessandro Di
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tekno Idea Srl
Original Assignee
Tekno Idea Srl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tekno Idea Srl filed Critical Tekno Idea Srl
Application granted granted Critical
Publication of ES2977710T3 publication Critical patent/ES2977710T3/es
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/8806Specially adapted optical and illumination features
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/24Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/8806Specially adapted optical and illumination features
    • G01N2021/8829Shadow projection or structured background, e.g. for deflectometry

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Engineering & Computer Science (AREA)
  • General Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • Analytical Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
ES18749871T 2017-07-10 2018-07-09 Dispositivo y proceso para detectar defectos superficiales Active ES2977710T3 (es)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
IT102017000077459A IT201700077459A1 (it) 2017-07-10 2017-07-10 Dispositivo e procedimento per la rilevazione di difetti superficiali
PCT/IB2018/055041 WO2019012404A1 (en) 2017-07-10 2018-07-09 Device and process for detecting surface defects

Publications (1)

Publication Number Publication Date
ES2977710T3 true ES2977710T3 (es) 2024-08-29

Family

ID=61005905

Family Applications (1)

Application Number Title Priority Date Filing Date
ES18749871T Active ES2977710T3 (es) 2017-07-10 2018-07-09 Dispositivo y proceso para detectar defectos superficiales

Country Status (7)

Country Link
US (2) US11105614B2 (enExample)
EP (1) EP3652524B1 (enExample)
JP (2) JP2020527728A (enExample)
ES (1) ES2977710T3 (enExample)
IT (1) IT201700077459A1 (enExample)
MA (1) MA49568A (enExample)
WO (1) WO2019012404A1 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT201700077459A1 (it) * 2017-07-10 2019-01-10 Tekno Idea Srl Dispositivo e procedimento per la rilevazione di difetti superficiali
CN111189854B (zh) * 2020-04-13 2020-08-07 征图新视(江苏)科技股份有限公司 玻璃盖板自动检测系统缺陷分层检测方法
US12175654B2 (en) 2020-11-06 2024-12-24 Carl Zeiss Metrology Llc Surface inspection system and method for differentiating particulate contamination from defects on a surface of a specimen

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4629319A (en) 1984-02-14 1986-12-16 Diffracto Ltd. Panel surface flaw inspection
US5237404A (en) * 1990-06-28 1993-08-17 Mazda Motor Corporation Inspection apparatus with improved detection of surface defects over large and curved surfaces
JPH05322543A (ja) 1992-05-22 1993-12-07 Mazda Motor Corp 表面欠陥検査装置
EP1108197A1 (de) * 1998-09-04 2001-06-20 Siemens Aktiengesellschaft Anordnung und verfahren zur ermittlung einer tiefen- und farbinformation eines aufzunehmenden objekts
JP2001242092A (ja) * 2000-03-02 2001-09-07 Mitsubishi Electric Corp 評価装置
DE10110994B4 (de) 2000-03-09 2012-11-29 Isra Vision Systems Ag Vorrichtung zur Bildabtastung eines Objektes
WO2003016819A1 (de) * 2001-08-14 2003-02-27 Metronom Gmbh Industrial Measurement Verfahren zur vermessung von oberflächenstrukturen
GB0500570D0 (en) * 2005-01-12 2005-02-16 Enfis Ltd Sensing in meat products and the like
JP2008249397A (ja) * 2007-03-29 2008-10-16 Toyota Motor Corp 表面検査装置
JP5110977B2 (ja) * 2007-06-22 2012-12-26 株式会社日立ハイテクノロジーズ 欠陥観察装置及びその方法
JP2009133725A (ja) * 2007-11-30 2009-06-18 Sumitomo Chemical Co Ltd 樹脂塗布フィルムの塗膜欠陥の検査方法
EP2335047A4 (en) * 2008-09-12 2012-02-22 Ceramicam Ltd SURFACE SCANNING DEVICE
JP4719284B2 (ja) * 2008-10-10 2011-07-06 トヨタ自動車株式会社 表面検査装置
JP2011232265A (ja) * 2010-04-30 2011-11-17 Honda Motor Co Ltd 表面検査装置及び表面検査方法
US20130057678A1 (en) 2010-05-17 2013-03-07 Ford Espana S.L. Inspection system and method of defect detection on specular surfaces
JP5994419B2 (ja) * 2012-06-21 2016-09-21 富士通株式会社 検査方法及び検査装置
US8823930B2 (en) * 2012-08-07 2014-09-02 Carl Zeiss Industrielle Messtechnik Gmbh Apparatus and method for inspecting an object
EP2799810A1 (de) * 2013-04-30 2014-11-05 Aimess Services GmbH Vorrichtung und Verfahren zum simultanen dreidimensionalen Vermessen von Oberflächen mit mehreren Wellenlängen
WO2017001897A1 (pt) * 2015-06-30 2017-01-05 Bosch Car Multimedia Portugal, S.A. Dispositivo e método para deteção de defeitos em superfícies especulares com luz difusa estruturada
JP2017116487A (ja) * 2015-12-25 2017-06-29 凸版印刷株式会社 ウェブ欠陥検査装置
IT201700077459A1 (it) * 2017-07-10 2019-01-10 Tekno Idea Srl Dispositivo e procedimento per la rilevazione di difetti superficiali
US11328380B2 (en) * 2018-10-27 2022-05-10 Gilbert Pinter Machine vision systems, illumination sources for use in machine vision systems, and components for use in the illumination sources

Also Published As

Publication number Publication date
US20210348917A1 (en) 2021-11-11
MA49568A (fr) 2020-05-20
WO2019012404A1 (en) 2019-01-17
EP3652524A1 (en) 2020-05-20
JP2020527728A (ja) 2020-09-10
JP2023106529A (ja) 2023-08-01
US20200173771A1 (en) 2020-06-04
US11105614B2 (en) 2021-08-31
EP3652524C0 (en) 2024-02-14
US11629953B2 (en) 2023-04-18
EP3652524B1 (en) 2024-02-14
IT201700077459A1 (it) 2019-01-10
BR112020000286A2 (pt) 2020-07-14

Similar Documents

Publication Publication Date Title
JP2023106529A (ja) 表面欠陥を検出するためのデバイスおよび方法
ES2942266T3 (es) Método de detección de defectos de superficie y dispositivo de detección de defectos de superficie
CN106796179B (zh) 检查装置以及检查方法
CN106415248B (zh) 缺陷检查系统和方法
ES2770791T3 (es) Procedimiento para el análisis de defectos de conexiones de cable
GB2514180A (en) An optical inspection system
JP5182833B1 (ja) 表面検査装置および表面検査方法
US8988523B1 (en) Single-camera multi-mirror imaging method and apparatus for whole-surface inspection of rotating objects
KR20130004915A (ko) 보어 검사 시스템 및 보어 검사 시스템에 의한 검사 방법
KR20140012342A (ko) Led모듈 검사장치
JP2004037248A (ja) 検査装置および貫通孔の検査方法
KR101114251B1 (ko) 3차원 표면 촬영 장치
JP2017122621A (ja) 布表面検査装置及び布表面検査装置用の照明装置
KR20060053847A (ko) 유리판의 결점 검사 방법 및 그 장치
JP4630945B1 (ja) 欠陥検査装置
JP6908373B2 (ja) 検査対象物の表面の凹凸を検査する方法及びその表面検査装置
KR100887184B1 (ko) 부분 경면 물체의 형상측정 장치 및 그 방법
US20020167660A1 (en) Illumination for integrated circuit board inspection
Munaro et al. Efficient completeness inspection using real-time 3D color reconstruction with a dual-laser triangulation system
ES2929129T3 (es) Procedimiento y dispositivo para inspeccionar la superficie de una banda en movimiento
JP2021110551A (ja) 基板エッジ検査装置
BR112020000286B1 (pt) Dispositivo e processo para detectar defeitos de superfície
KR20160149883A (ko) 렌즈 결함 검사 장치
JP2015200544A (ja) 表面凹凸検査装置及び表面凹凸検査方法
KR101358429B1 (ko) 4면 광학계