JP2020526670A5 - - Google Patents
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- JP2020526670A5 JP2020526670A5 JP2020501465A JP2020501465A JP2020526670A5 JP 2020526670 A5 JP2020526670 A5 JP 2020526670A5 JP 2020501465 A JP2020501465 A JP 2020501465A JP 2020501465 A JP2020501465 A JP 2020501465A JP 2020526670 A5 JP2020526670 A5 JP 2020526670A5
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- JP
- Japan
- Prior art keywords
- region
- mask
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- auxiliary pixel
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- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 230000007423 decrease Effects 0.000 claims 3
- 238000005530 etching Methods 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 claims 2
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810277643.9 | 2018-03-30 | ||
| CN201810277643.9A CN108456846A (zh) | 2018-03-30 | 2018-03-30 | 掩膜板及其制备方法 |
| PCT/CN2018/101549 WO2019184205A1 (zh) | 2018-03-30 | 2018-08-21 | 掩膜板及其制备方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2020526670A JP2020526670A (ja) | 2020-08-31 |
| JP2020526670A5 true JP2020526670A5 (enExample) | 2020-10-08 |
| JP6977140B2 JP6977140B2 (ja) | 2021-12-08 |
Family
ID=63237826
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2020501465A Active JP6977140B2 (ja) | 2018-03-30 | 2018-08-21 | マスク及びその製作方法 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US20190345599A1 (enExample) |
| EP (1) | EP3640365A4 (enExample) |
| JP (1) | JP6977140B2 (enExample) |
| KR (1) | KR20200028483A (enExample) |
| CN (2) | CN116024523A (enExample) |
| TW (1) | TWI726240B (enExample) |
| WO (1) | WO2019184205A1 (enExample) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109487206B (zh) * | 2018-12-11 | 2020-08-11 | 武汉华星光电半导体显示技术有限公司 | 掩膜版及采用该掩膜版的掩膜装置 |
| CN110760791A (zh) * | 2019-02-28 | 2020-02-07 | 云谷（固安）科技有限公司 | 掩膜板及掩膜组件 |
| CN110760790A (zh) * | 2019-02-28 | 2020-02-07 | 云谷（固安）科技有限公司 | 掩膜板及掩膜组件 |
| CN109913805B (zh) * | 2019-03-27 | 2021-01-26 | 京东方科技集团股份有限公司 | 一种掩膜版 |
| JP7749925B2 (ja) * | 2020-03-13 | 2025-10-07 | 大日本印刷株式会社 | 有機デバイスの製造装置の蒸着室の評価方法 |
| KR102836687B1 (ko) * | 2020-05-11 | 2025-07-22 | 삼성디스플레이 주식회사 | 마스크 검사 장치 및 이를 이용한 마스크 검사 방법 |
| CN116657099A (zh) * | 2023-05-31 | 2023-08-29 | 京东方科技集团股份有限公司 | 遮挡用金属掩膜板、张网组件、掩膜板以及显示面板 |
Family Cites Families (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4608874B2 (ja) * | 2003-12-02 | 2011-01-12 | ソニー株式会社 | 蒸着マスクおよびその製造方法 |
| JP4915312B2 (ja) * | 2007-08-08 | 2012-04-11 | ソニー株式会社 | 蒸着用マスクの製造方法 |
| CN202530150U (zh) * | 2012-01-16 | 2012-11-14 | 昆山允升吉光电科技有限公司 | 蒸镀掩模板 |
| CN103014618A (zh) * | 2012-12-25 | 2013-04-03 | 唐军 | 蒸镀用掩模板及其制造方法 |
| KR20160015214A (ko) * | 2013-04-22 | 2016-02-12 | 어플라이드 머티어리얼스, 인코포레이티드 | 능동적으로-정렬되는 미세 금속 마스크 |
| KR102106331B1 (ko) * | 2013-07-08 | 2020-05-06 | 삼성디스플레이 주식회사 | 마스크 조립체 및 이의 제조 방법 |
| KR102106336B1 (ko) * | 2013-07-08 | 2020-06-03 | 삼성디스플레이 주식회사 | 증착용 마스크 |
| CN104593721B (zh) * | 2013-10-30 | 2017-08-08 | 昆山国显光电有限公司 | 一种蒸镀用精密金属掩膜板的张网方法及其获得的掩膜板 |
| KR102237428B1 (ko) * | 2014-02-14 | 2021-04-08 | 삼성디스플레이 주식회사 | 마스크 프레임 조립체 및 그 제조방법 |
| US10022748B2 (en) * | 2014-09-12 | 2018-07-17 | Toshiba Memory Corporation | Stencil mask, stencil mask manufacturing method, and imprinting method |
| CN104630705A (zh) * | 2015-03-13 | 2015-05-20 | 合肥鑫晟光电科技有限公司 | 一种掩膜板及其制备方法 |
| KR102541449B1 (ko) * | 2015-12-22 | 2023-06-09 | 삼성디스플레이 주식회사 | 박막 증착용 마스크 어셈블리 |
| JP6465075B2 (ja) * | 2016-05-26 | 2019-02-06 | 大日本印刷株式会社 | 蒸着マスク、フレーム付き蒸着マスク、有機半導体素子の製造方法、及びに有機ｅｌディスプレイの製造方法 |
| KR102366019B1 (ko) * | 2016-06-28 | 2022-02-23 | 다이니폰 인사츠 가부시키가이샤 | 증착 마스크, 유기 반도체 소자의 제조 방법 및 유기 el 디스플레이의 제조 방법 |
| CN205844737U (zh) * | 2016-07-29 | 2016-12-28 | 昆山国显光电有限公司 | 掩膜板 |
| US20180040855A1 (en) * | 2016-08-04 | 2018-02-08 | Hon Hai Precision Industry Co., Ltd. | Deposition mask for making oled display panel |
| CN206512267U (zh) * | 2016-10-28 | 2017-09-22 | 京东方科技集团股份有限公司 | 一种掩模片及掩模板 |
| CN106502044B (zh) * | 2017-01-10 | 2020-01-24 | 昆山国显光电有限公司 | 掩膜板及其制造方法 |
| JP6304412B2 (ja) * | 2017-02-06 | 2018-04-04 | 大日本印刷株式会社 | 金属フレーム付き蒸着マスクの製造方法、有機半導体素子の製造方法、パターンの形成方法 |
| CN107435131B (zh) * | 2017-09-29 | 2019-08-02 | 上海天马微电子有限公司 | 掩膜装置、蒸镀设备以及掩膜装置制备方法 |
-
2018
- 2018-03-30 CN CN202211563012.6A patent/CN116024523A/zh active Pending
- 2018-03-30 CN CN201810277643.9A patent/CN108456846A/zh active Pending
- 2018-08-21 EP EP18912788.9A patent/EP3640365A4/en active Pending
- 2018-08-21 WO PCT/CN2018/101549 patent/WO2019184205A1/zh not_active Ceased
- 2018-08-21 JP JP2020501465A patent/JP6977140B2/ja active Active
- 2018-08-21 KR KR1020207005442A patent/KR20200028483A/ko not_active Ceased
- 2018-09-12 TW TW107131963A patent/TWI726240B/zh active
-
2019
- 2019-07-29 US US16/524,190 patent/US20190345599A1/en not_active Abandoned
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