JP2020510354A - 寄生波を減衰するための層を含むsaw共振器 - Google Patents
寄生波を減衰するための層を含むsaw共振器 Download PDFInfo
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- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02818—Means for compensation or elimination of undesirable effects
- H03H9/02866—Means for compensation or elimination of undesirable effects of bulk wave excitation and reflections
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
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- H03H9/02—Details
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- H03H9/02543—Characteristics of substrate, e.g. cutting angles
- H03H9/02551—Characteristics of substrate, e.g. cutting angles of quartz substrates
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- H—ELECTRICITY
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- H03H9/02559—Characteristics of substrate, e.g. cutting angles of lithium niobate or lithium-tantalate substrates
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- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
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- Engineering & Computer Science (AREA)
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- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Abstract
Description
−1つの基板と;
−前記基板上に配された圧電材料の1つの層と;
−前記基板と圧電材料の前記層との間に配された1つの第1の減衰層、及び/又は、前記基板が少なくとも2つの別々の層を含むとき、前記基板の前記2つの層の間に配された1つの第2の減衰層と;を少なくとも含み、
前記減衰層又は複数の減衰層が不均質である、SAW共振器を提案する。
−第1の減衰層が、基板とは及び圧電材料の層とは別々である、又は、基板の及び/又は圧電材料の層の一部に対応し、及び/又は
−第2の減衰層が、基板の2つの層とは別々である、又は、基板の2つの層の内の少なくとも1つの一部に対応する。
−基板上の第1の減衰層の、及び/又は、基板が少なくとも2つの別々の層を含むとき、基板の2つの層の間の第2の減衰層の、製造と;
−基板上の、又は、第1の減衰層が基板上に存在するとき、第1の減衰層上の、圧電材料の層の製造と;の実施を含み、
減衰層又は複数の減衰層が不均質である、SAW共振器を製造するための方法に関する。
Claims (10)
- −1つの基板(102)と;
−前記基板(102)上に配された圧電材料の1つの層(108)と;
−前記基板(102)と圧電材料の前記層(108)との間に配された1つの第1の減衰層(112)、及び/又は、前記基板(102)が少なくとも2つの別々の層(104、106)を含むとき、前記基板(102)の前記2つの層(104、106)の間に配された1つの第2の減衰層(114)と;
を少なくとも含み、
前記減衰層又は複数の減衰層(112、114)が、寄生音響波の少なくとも一部を拡散する又は吸収することができ、且つ、前記減衰層又は複数の減衰層(112、114)を不均質にするドープされた領域を含む、表面音響波共振器、SAW、(100)。 - 前記圧電材料が、LTO及び/又はLNO及び/又は石英及び/又はランガテイト及び/又はランガサイト及び/又はランガナイトを含む、請求項1に記載のSAW共振器(100)。
- 前記領域が、前記第1の減衰層(112)の及び/又は前記第2の減衰層(114)の残りとは異なってドープされた、請求項1又は2に記載のSAW共振器(100)。
- 前記第1の減衰層(112)及び/又は前記第2の減衰層(114)が、多孔(116)及び/又は空洞(118)及び/又は少なくとも部分的に粗い少なくとも1つの面を含む、請求項1から3の何れか一項に記載のSAW共振器(100)。
- 前記第1の減衰層(112)及び/又は前記第2の減衰層(114)が多孔(116)及び/又は空洞(118)を含むとき、前記第1の減衰層(112)の及び/又は前記第2の減衰層(114)の前記多孔(116)及び/又は前記空洞(118)が各々、実質的に球又は円筒形状を有する、請求項4に記載のSAW共振器(100)。
- −前記第1の減衰層(112)が、前記基板(102)とは及び圧電材料の前記層(108)とは別々である、又は、前記基板(102)の及び/又は圧電材料の前記層(108)の一部に対応し、及び/又は
−前記第2の減衰層(114)が、前記基板(102)の前記2つの層(104、106)とは別々である、又は、前記基板(102)の前記2つの層(104、106)の内の少なくとも1つの一部に対応する、請求項1から5の何れか一項に記載のSAW共振器(100)。 - 前記第1の減衰層(112)及び/又は前記第2の減衰層(114)が、SiOC及び/又はSiOCH及び/又は多孔質シリコン及び/又は多孔質有機材料及び/又はポリシリコンを含む、請求項1から6の何れか一項に記載のSAW共振器(100)。
- 圧電材料の前記層(108)上に配された電極(110)をさらに含む、請求項1から7の何れか一項に記載のSAW共振器(100)。
- 少なくとも以下のステップ:
−基板(102)上の第1の減衰層(112)の、及び/又は、前記基板(102)が少なくとも2つの別々の層(104、106)を含むとき、前記基板(102)の前記2つの層(104、106)の間の第2の減衰層(114)の、製造と;
−前記基板(102)上の、又は、前記第1の減衰層(112)が前記基板(102)上に存在するとき、前記第1の減衰層(112)上の、圧電材料の層(108)の製造と;
の実施を含み、
前記第1の減衰層(112)の及び/又は前記第2の減衰層(114)の前記製造が、前記減衰層又は複数の減衰層(112、114)を不均質にする前記第1の減衰層(112)の及び/又は前記第2の減衰層(114)の領域のドーピングを含み、前記減衰層又は複数の減衰層(112、114)が、寄生音響波の少なくとも一部を拡散する又は吸収することが可能である、表面音響波共振器、SAW、(100)を製造するための方法。 - 前記第1の減衰層(112)の及び/又は前記第2の減衰層(114)の前記製造が、前記第1の減衰層(112)及び/又は前記第2の減衰層(114)を形成する、少なくとも1つの多孔質材料の堆積の実施及び/又はフォトリソグラフィー及びエッチングのステップの実施による空洞(118)の製造及び/又は粗い表面上に材料の堆積の実施、及び/又は、前記第1の減衰層(112)の及び/又は前記第2の減衰層(114)の少なくとも1つの面上の粗さを形成する処理の実施、を含む、請求項9に記載の方法。
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Application Number | Priority Date | Filing Date | Title |
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FR1752043A FR3063854B1 (fr) | 2017-03-13 | 2017-03-13 | Resonateur saw a couches d'attenuation d'ondes parasites |
FR1752043 | 2017-03-13 | ||
PCT/FR2018/050559 WO2018167407A1 (fr) | 2017-03-13 | 2018-03-09 | Resonateur saw a couches d'attenuation d'ondes parasites |
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US (1) | US11595021B2 (ja) |
EP (1) | EP3596825B1 (ja) |
JP (1) | JP7097904B2 (ja) |
KR (1) | KR102623048B1 (ja) |
CN (1) | CN110870202B (ja) |
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US11962282B2 (en) | 2020-06-17 | 2024-04-16 | Taiyo Yuden Co., Ltd. | Acoustic wave device, filter, and multiplexer |
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DE102018125498B4 (de) * | 2018-10-15 | 2020-04-23 | RF360 Europe GmbH | Elektroakustisches HF-Filter mit verbesserter Leistung und Multiplexer-Komponente, die ein HF-Filter umfasst |
JP7397573B2 (ja) * | 2019-02-14 | 2023-12-13 | 太陽誘電株式会社 | 弾性波デバイス、フィルタおよびマルチプレクサ |
EP3896850A1 (en) * | 2020-04-14 | 2021-10-20 | IQE plc | Layered structure with regions of localized strain in crystalline rare earth oxides |
CN111865258B (zh) * | 2020-08-10 | 2022-04-05 | 杭州星阖科技有限公司 | 一种声波谐振器的制作工艺及声波谐振器 |
CN112653407B (zh) * | 2020-12-18 | 2024-04-19 | 广东广纳芯科技有限公司 | 一种tc-saw谐振器及制造方法 |
CN113810007B (zh) * | 2021-09-08 | 2023-08-29 | 常州承芯半导体有限公司 | 声表面波谐振装置、滤波装置及射频前端装置 |
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JP2001053579A (ja) * | 1999-06-02 | 2001-02-23 | Matsushita Electric Ind Co Ltd | 弾性表面波素子と移動体通信機器 |
WO2009093377A1 (ja) * | 2008-01-25 | 2009-07-30 | Murata Manufacturing Co., Ltd. | 弾性波素子及びその製造方法 |
WO2014027538A1 (ja) * | 2012-08-17 | 2014-02-20 | 日本碍子株式会社 | 複合基板,弾性表面波デバイス及び複合基板の製造方法 |
WO2016016532A1 (fr) * | 2014-08-01 | 2016-02-04 | Soitec | Structure pour applications radio-frequences |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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US11962282B2 (en) | 2020-06-17 | 2024-04-16 | Taiyo Yuden Co., Ltd. | Acoustic wave device, filter, and multiplexer |
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KR20190128202A (ko) | 2019-11-15 |
EP3596825A1 (fr) | 2020-01-22 |
US11595021B2 (en) | 2023-02-28 |
FR3063854B1 (fr) | 2021-08-27 |
KR102623048B1 (ko) | 2024-01-09 |
CN110870202B (zh) | 2023-03-24 |
EP3596825B1 (fr) | 2022-03-30 |
FR3063854A1 (fr) | 2018-09-14 |
CN110870202A (zh) | 2020-03-06 |
SG11201908449QA (en) | 2019-10-30 |
WO2018167407A1 (fr) | 2018-09-20 |
JP7097904B2 (ja) | 2022-07-08 |
US20200389148A1 (en) | 2020-12-10 |
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