JP2020501345A - 紫外線照射下で発光デバイスを成長させる方法 - Google Patents
紫外線照射下で発光デバイスを成長させる方法 Download PDFInfo
- Publication number
- JP2020501345A JP2020501345A JP2019523849A JP2019523849A JP2020501345A JP 2020501345 A JP2020501345 A JP 2020501345A JP 2019523849 A JP2019523849 A JP 2019523849A JP 2019523849 A JP2019523849 A JP 2019523849A JP 2020501345 A JP2020501345 A JP 2020501345A
- Authority
- JP
- Japan
- Prior art keywords
- type layer
- nitride
- iii
- layer
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims abstract description 97
- 239000001257 hydrogen Substances 0.000 claims abstract description 36
- 229910052739 hydrogen Inorganic materials 0.000 claims abstract description 36
- 239000000758 substrate Substances 0.000 claims abstract description 34
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims abstract description 33
- 229910019080 Mg-H Inorganic materials 0.000 claims abstract description 23
- 150000004767 nitrides Chemical class 0.000 claims abstract description 23
- 230000008021 deposition Effects 0.000 claims abstract description 20
- 230000015572 biosynthetic process Effects 0.000 claims abstract description 14
- 239000011777 magnesium Substances 0.000 claims description 28
- 239000002019 doping agent Substances 0.000 claims description 25
- 238000000151 deposition Methods 0.000 claims description 19
- 238000000137 annealing Methods 0.000 claims description 15
- 238000011065 in-situ storage Methods 0.000 claims description 9
- 230000001678 irradiating effect Effects 0.000 claims description 9
- 229910052749 magnesium Inorganic materials 0.000 claims description 8
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 claims description 6
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 claims 1
- 238000009281 ultraviolet germicidal irradiation Methods 0.000 abstract description 19
- 229910002601 GaN Inorganic materials 0.000 description 194
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 187
- 239000000463 material Substances 0.000 description 25
- 230000008569 process Effects 0.000 description 18
- 238000006243 chemical reaction Methods 0.000 description 15
- 238000004519 manufacturing process Methods 0.000 description 14
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 13
- 229910052751 metal Inorganic materials 0.000 description 13
- 239000002184 metal Substances 0.000 description 13
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 10
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 9
- 239000004065 semiconductor Substances 0.000 description 9
- 230000004913 activation Effects 0.000 description 7
- 239000000203 mixture Substances 0.000 description 7
- 230000007480 spreading Effects 0.000 description 6
- 238000003892 spreading Methods 0.000 description 6
- 229910021529 ammonia Inorganic materials 0.000 description 5
- 229910052757 nitrogen Inorganic materials 0.000 description 5
- 230000010287 polarization Effects 0.000 description 5
- 229910052594 sapphire Inorganic materials 0.000 description 5
- 239000010980 sapphire Substances 0.000 description 5
- 238000005229 chemical vapour deposition Methods 0.000 description 4
- 238000005286 illumination Methods 0.000 description 4
- 239000012535 impurity Substances 0.000 description 4
- 230000005855 radiation Effects 0.000 description 4
- 238000013459 approach Methods 0.000 description 3
- 239000000969 carrier Substances 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 3
- 239000004020 conductor Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000010348 incorporation Methods 0.000 description 3
- 238000001451 molecular beam epitaxy Methods 0.000 description 3
- 229920001296 polysiloxane Polymers 0.000 description 3
- 230000006641 stabilisation Effects 0.000 description 3
- 238000011105 stabilization Methods 0.000 description 3
- 239000012780 transparent material Substances 0.000 description 3
- 230000005641 tunneling Effects 0.000 description 3
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000011066 ex-situ storage Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 150000002431 hydrogen Chemical class 0.000 description 2
- 229910052738 indium Inorganic materials 0.000 description 2
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 2
- 239000002096 quantum dot Substances 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 1
- MHYQBXJRURFKIN-UHFFFAOYSA-N C1(C=CC=C1)[Mg] Chemical compound C1(C=CC=C1)[Mg] MHYQBXJRURFKIN-UHFFFAOYSA-N 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 230000009918 complex formation Effects 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000007872 degassing Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 239000000975 dye Substances 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000001962 electrophoresis Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 239000002159 nanocrystal Substances 0.000 description 1
- 230000006911 nucleation Effects 0.000 description 1
- 238000010899 nucleation Methods 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 229910002059 quaternary alloy Inorganic materials 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 238000001429 visible spectrum Methods 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/26—Materials of the light emitting region
- H01L33/30—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table
- H01L33/32—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table containing nitrogen
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
- H01L33/0062—Processes for devices with an active region comprising only III-V compounds
- H01L33/0066—Processes for devices with an active region comprising only III-V compounds with a substrate not being a III-V compound
- H01L33/007—Processes for devices with an active region comprising only III-V compounds with a substrate not being a III-V compound comprising nitride compounds
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/301—AIII BV compounds, where A is Al, Ga, In or Tl and B is N, P, As, Sb or Bi
- C23C16/303—Nitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/48—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation
- C23C16/482—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation using incoherent light, UV to IR, e.g. lamps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02436—Intermediate layers between substrates and deposited layers
- H01L21/02439—Materials
- H01L21/02455—Group 13/15 materials
- H01L21/02458—Nitrides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02538—Group 13/15 materials
- H01L21/0254—Nitrides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/0257—Doping during depositing
- H01L21/02573—Conductivity type
- H01L21/02579—P-type
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/0262—Reduction or decomposition of gaseous compounds, e.g. CVD
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/268—Bombardment with radiation with high-energy radiation using electromagnetic radiation, e.g. laser radiation
- H01L21/2686—Bombardment with radiation with high-energy radiation using electromagnetic radiation, e.g. laser radiation using incoherent radiation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/0004—Devices characterised by their operation
- H01L33/0008—Devices characterised by their operation having p-n or hi-lo junctions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
- H01L33/0062—Processes for devices with an active region comprising only III-V compounds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
- H01L33/0062—Processes for devices with an active region comprising only III-V compounds
- H01L33/0075—Processes for devices with an active region comprising only III-V compounds comprising nitride compounds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
- H01L33/0095—Post-treatment of devices, e.g. annealing, recrystallisation or short-circuit elimination
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/04—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction
- H01L33/06—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction within the light emitting region, e.g. quantum confinement structure or tunnel barrier
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/025—Physical imperfections, e.g. particular concentration or distribution of impurities
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Toxicology (AREA)
- Health & Medical Sciences (AREA)
- High Energy & Nuclear Physics (AREA)
- Inorganic Chemistry (AREA)
- Optics & Photonics (AREA)
- Electromagnetism (AREA)
- Led Devices (AREA)
Abstract
Description
Claims (20)
- 堆積チャンバ内で発光ダイオード(LED)を形成する方法であって、
III族窒化物p型層をエピタキシャル成長させることと、
照射下で前記III族窒化物p型層の上に非p型層をエピタキシャル成長させることと、
前記堆積チャンバ内に存在する水素に起因する前記III族窒化物p型層内でのMg−H錯体の形成を抑制するために、前記非p型層の表面を、初期成長期間中に、前記III族窒化物p型層のバンドギャップエネルギーよりも高い光子エネルギーを持つ光で照射することと、
を有する方法。 - 前記光は、前記堆積チャンバの窓を通して提供される、請求項1に記載の方法。
- 前記堆積チャンバはMOCVDチャンバである、請求項2に記載の方法。
- 前記光は、紫外光又はそれよりも高エネルギーの光である、請求項1に記載の方法。
- 前記非p型層は活性層である、請求項1に記載の方法。
- 前記非p型層はIII族窒化物n型層である、請求項1に記載の方法。
- 前記非p型層の前記表面を前記光で照射することは、前記非p型層の成長期間全体にわたってオンのままである、請求項1に記載の方法。
- 前記III族窒化物p型層はトンネル接合III族窒化物p型層であり、前記非p型層はIII族窒化物トンネル接合n型層であり、
当該方法は更に、前記トンネル接合III族窒化物p型層及び前記III族窒化物トンネル接合n型層を照射下でエピタキシャルに形成することを有する、
請求項1に記載の方法。 - 前記III族窒化物p型層はトンネル接合III族窒化物p型層であり、前記非p型層はIII族窒化物トンネル接合n型層であり、
当該方法は更に、前記III族窒化物トンネル接合n型層の一部を照射下でエピタキシャルに形成することを有する、
請求項1に記載の方法。 - 前記III族窒化物トンネル接合n型層の残りの部分を光照射なしでエピタキシャルに形成すること、
を更に有する請求項9に記載の方法。 - 前記III族窒化物トンネル接合n型層の前記一部を照射下でエピタキシャルに形成することに先立って、前記トンネル接合III族窒化物p型層をアニールすること、
を更に有する請求項9に記載の方法。 - 堆積チャンバ内で発光ダイオード(LED)を形成する方法であって、
成長基板の上にIII族窒化物n型層をエピタキシャル成長させることと、
前記III族窒化物n型層の上に活性層をエピタキシャル成長させることと、
水素及びマグネシウムの存在下で前記活性層の上にIII族窒化物p型層をエピタキシャル成長させることと、
前記p型層内のマグネシウムドーパントを活性化させるために、少なくとも前記III族窒化物p型層をインサイチュでアニールすることと、
前記アニールを停止することと、
トンネル接合発光ダイオードを形成するよう、前記III族窒化物p型層の上にIII族窒化物トンネル接合n型層の最初の部分をエピタキシャルに形成することと、
前記III族窒化物トンネル接合n型層の前記最初の部分の表面を、成長中に、前記III族窒化物p型層のバンドギャップエネルギーよりも高い光子エネルギーを持つ光で照射することと、
前記III族窒化物トンネル接合n型層の残りの部分を、成長中の光照射なしでエピタキシャルに形成することと、
を有する方法。 - 前記III族窒化物トンネル接合n型層の前記表面を前記光で照射することは、前記III族窒化物p型層内でのMg−H錯体の形成を抑制する、請求項12に記載の方法。
- 前記光はUV光である、請求項12に記載の方法。
- 堆積チャンバの窓を通して前記光を当てることを更に有する請求項12に記載の方法。
- 前記アニール中に前記光で照射することを更に有する請求項12に記載の方法。
- 堆積チャンバ内で発光ダイオード(LED)を形成する方法であって、
成長基板の上に、成長中の光照射なしで、少なくとも1つのIII族窒化物p型層をエピタキシャル成長させることと、
前記少なくとも1つのIII族窒化物p型層の上に非p型層をエピタキシャル成長させることと、
前記堆積チャンバ内に存在する水素に起因する前記III族窒化物p型層内でのMg−H錯体の形成を抑制するために、非p型層成長中に、前記非p型層の表面を、前記III族窒化物p型層のバンドギャップエネルギーよりも高い光子エネルギーを持つ光で照射することと、
を有する方法。 - 前記非p型層は、III族窒化物n型層及び活性層のうちの少なくとも一方である、請求項17に記載の方法。
- 前記非p型層の前記表面を光で照射することは、前記非p型層の初期成長の後に停止される、請求項17に記載の方法。
- 前記非p型層の残りの成長が光照射なしで行われる、請求項19に記載の方法。
Applications Claiming Priority (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201662414612P | 2016-10-28 | 2016-10-28 | |
US62/414,612 | 2016-10-28 | ||
EP16204234.5 | 2016-12-15 | ||
EP16204234 | 2016-12-15 | ||
US15/793,723 US10541352B2 (en) | 2016-10-28 | 2017-10-25 | Methods for growing light emitting devices under ultra-violet illumination |
US15/793,723 | 2017-10-25 | ||
PCT/US2017/058867 WO2018081635A1 (en) | 2016-10-28 | 2017-10-27 | Methods for growing light emitting devices under ultra-violet illumination |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2020501345A true JP2020501345A (ja) | 2020-01-16 |
JP7050060B2 JP7050060B2 (ja) | 2022-04-07 |
Family
ID=67255788
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2019523849A Active JP7050060B2 (ja) | 2016-10-28 | 2017-10-27 | 紫外線照射下で発光デバイスを成長させる方法 |
Country Status (5)
Country | Link |
---|---|
EP (1) | EP3533088B1 (ja) |
JP (1) | JP7050060B2 (ja) |
KR (1) | KR102281223B1 (ja) |
CN (1) | CN110168752B (ja) |
TW (1) | TWI745465B (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2023175830A1 (ja) * | 2022-03-17 | 2023-09-21 | 三菱電機株式会社 | 半導体素子及び半導体素子の製造方法 |
Citations (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01215014A (ja) * | 1988-02-24 | 1989-08-29 | Toshiba Corp | 半導体結晶の成長方法 |
JPH0766136A (ja) * | 1993-08-30 | 1995-03-10 | Matsushita Electric Ind Co Ltd | Iii −v族化合物半導体のエピタキシャル成長方法 |
JPH10144959A (ja) * | 1996-11-08 | 1998-05-29 | Toshiba Corp | 半導体発光素子の製造方法 |
JPH11126758A (ja) * | 1997-10-24 | 1999-05-11 | Pioneer Electron Corp | 半導体素子製造方法 |
JPH11238692A (ja) * | 1998-02-23 | 1999-08-31 | Nichia Chem Ind Ltd | 窒化物半導体の低抵抗化方法 |
JP2006045642A (ja) * | 2004-08-06 | 2006-02-16 | Sumitomo Electric Ind Ltd | 水素脱離方法および水素脱離装置 |
JP2006313844A (ja) * | 2005-05-09 | 2006-11-16 | Rohm Co Ltd | 窒化物半導体素子の製法 |
JP2008141047A (ja) * | 2006-12-04 | 2008-06-19 | Sharp Corp | 窒化物半導体発光素子 |
KR20110088545A (ko) * | 2008-11-07 | 2011-08-03 | 오스람 옵토 세미컨덕터스 게엠베하 | 광전 반도체 칩의 제조 방법 및 광전 반도체 칩 |
US20150115220A1 (en) * | 2013-10-29 | 2015-04-30 | The Regents Of The University Of California | (Al, In, Ga, B)N DEVICE STRUCTURES ON A PATTERNED SUBSTRATE |
CN104638070A (zh) * | 2015-03-06 | 2015-05-20 | 天津三安光电有限公司 | 一种光电器件的制备方法 |
WO2015129610A1 (ja) * | 2014-02-26 | 2015-09-03 | 学校法人名城大学 | npn型窒化物半導体発光素子の製造方法、およびnpn型窒化物半導体発光素子 |
JP2018523921A (ja) * | 2015-07-30 | 2018-08-23 | ビーコ・インストゥルメンツ・インコーポレイテッド | 化学蒸着システムにおける制御されたドーパントの取込み及び活性化のための方法及び装置 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3324312C2 (de) * | 1983-04-20 | 1985-11-28 | Komet Stahlhalter- Und Werkzeugfabrik Robert Breuning Gmbh, 7122 Besigheim | Werkzeugmaschine mit Werkzeugwechselvorrichtung |
JPS61247686A (ja) * | 1985-04-26 | 1986-11-04 | Toshiba Corp | 半導体単結晶の製造方法 |
US6537838B2 (en) * | 2001-06-11 | 2003-03-25 | Limileds Lighting, U.S., Llc | Forming semiconductor structures including activated acceptors in buried p-type III-V layers |
KR20050123422A (ko) * | 2004-06-25 | 2005-12-29 | 삼성전기주식회사 | p형 질화물 반도체 형성방법 및 질화물 반도체 발광소자제조방법 |
JP4948134B2 (ja) * | 2006-11-22 | 2012-06-06 | シャープ株式会社 | 窒化物半導体発光素子 |
JP2008226906A (ja) * | 2007-03-08 | 2008-09-25 | Sharp Corp | 窒化物半導体発光素子 |
US8592309B2 (en) * | 2009-11-06 | 2013-11-26 | Ultratech, Inc. | Laser spike annealing for GaN LEDs |
KR20130007032A (ko) * | 2011-06-28 | 2013-01-18 | (주)세미머티리얼즈 | 질화물계 반도체 제조용 열처리 장치 및 이를 이용한 질화물계 반도체의 열처리 방법 |
CN103855263A (zh) * | 2014-02-25 | 2014-06-11 | 广东省工业技术研究院(广州有色金属研究院) | 一种具有极化隧道结的GaN基LED外延片及其制备方法 |
-
2017
- 2017-10-27 TW TW106137084A patent/TWI745465B/zh active
- 2017-10-27 JP JP2019523849A patent/JP7050060B2/ja active Active
- 2017-10-27 KR KR1020197015126A patent/KR102281223B1/ko active IP Right Grant
- 2017-10-27 CN CN201780081546.6A patent/CN110168752B/zh active Active
- 2017-10-27 EP EP17794888.2A patent/EP3533088B1/en active Active
Patent Citations (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01215014A (ja) * | 1988-02-24 | 1989-08-29 | Toshiba Corp | 半導体結晶の成長方法 |
JPH0766136A (ja) * | 1993-08-30 | 1995-03-10 | Matsushita Electric Ind Co Ltd | Iii −v族化合物半導体のエピタキシャル成長方法 |
JPH10144959A (ja) * | 1996-11-08 | 1998-05-29 | Toshiba Corp | 半導体発光素子の製造方法 |
JPH11126758A (ja) * | 1997-10-24 | 1999-05-11 | Pioneer Electron Corp | 半導体素子製造方法 |
JPH11238692A (ja) * | 1998-02-23 | 1999-08-31 | Nichia Chem Ind Ltd | 窒化物半導体の低抵抗化方法 |
JP2006045642A (ja) * | 2004-08-06 | 2006-02-16 | Sumitomo Electric Ind Ltd | 水素脱離方法および水素脱離装置 |
JP2006313844A (ja) * | 2005-05-09 | 2006-11-16 | Rohm Co Ltd | 窒化物半導体素子の製法 |
JP2008141047A (ja) * | 2006-12-04 | 2008-06-19 | Sharp Corp | 窒化物半導体発光素子 |
KR20110088545A (ko) * | 2008-11-07 | 2011-08-03 | 오스람 옵토 세미컨덕터스 게엠베하 | 광전 반도체 칩의 제조 방법 및 광전 반도체 칩 |
CN102210031A (zh) * | 2008-11-07 | 2011-10-05 | 欧司朗光电半导体有限公司 | 用于制造光电子半导体芯片的方法和光电子半导体芯片 |
US20110278641A1 (en) * | 2008-11-07 | 2011-11-17 | Osram Opto Semiconductors Gmbh | Method for producing an optoelectronic semiconductor chip and optoelectronic semiconductor chip |
JP2012508458A (ja) * | 2008-11-07 | 2012-04-05 | オスラム オプト セミコンダクターズ ゲゼルシャフト ミット ベシュレンクテル ハフツング | オプトエレクトロニクス半導体チップの製造方法およびオプトエレクトロニクス半導体チップ |
US20150115220A1 (en) * | 2013-10-29 | 2015-04-30 | The Regents Of The University Of California | (Al, In, Ga, B)N DEVICE STRUCTURES ON A PATTERNED SUBSTRATE |
WO2015129610A1 (ja) * | 2014-02-26 | 2015-09-03 | 学校法人名城大学 | npn型窒化物半導体発光素子の製造方法、およびnpn型窒化物半導体発光素子 |
US20160365479A1 (en) * | 2014-02-26 | 2016-12-15 | Meijo University | Method of manufacturing n-p-n nitride-semiconductor light-emitting device, and n-p-n nitride-semiconductor light-emitting device |
CN104638070A (zh) * | 2015-03-06 | 2015-05-20 | 天津三安光电有限公司 | 一种光电器件的制备方法 |
JP2018523921A (ja) * | 2015-07-30 | 2018-08-23 | ビーコ・インストゥルメンツ・インコーポレイテッド | 化学蒸着システムにおける制御されたドーパントの取込み及び活性化のための方法及び装置 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2023175830A1 (ja) * | 2022-03-17 | 2023-09-21 | 三菱電機株式会社 | 半導体素子及び半導体素子の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
KR102281223B1 (ko) | 2021-07-22 |
TWI745465B (zh) | 2021-11-11 |
EP3533088A1 (en) | 2019-09-04 |
EP3533088B1 (en) | 2021-08-25 |
KR20190076011A (ko) | 2019-07-01 |
JP7050060B2 (ja) | 2022-04-07 |
TW201828493A (zh) | 2018-08-01 |
CN110168752A (zh) | 2019-08-23 |
CN110168752B (zh) | 2022-02-22 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN109716541B (zh) | 用于使用远程等离子体化学气相沉积(rp-cvd)和溅射沉积来生长发光器件中的层的方法 | |
EP3459117B1 (en) | Method of forming a p-type layer for a light emitting device | |
US11069836B2 (en) | Methods for growing light emitting devices under ultra-violet illumination | |
CN109690783B (zh) | 形成发光器件的p型层的方法 | |
CN110168752B (zh) | 用于在紫外照射下生长发光器件的方法 | |
KR102192601B1 (ko) | 발광 디바이스들 내의 층들을 성장시키기 위해 원격 플라즈마 화학 기상 퇴적(rp-cvd) 및 스퍼터링 퇴적을 사용하기 위한 방법들 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20201019 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20211020 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20211102 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20211214 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20220111 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20220222 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20220315 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20220328 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 7050060 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |