JP2020128539A5 - - Google Patents
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- Publication number
- JP2020128539A5 JP2020128539A5 JP2020071965A JP2020071965A JP2020128539A5 JP 2020128539 A5 JP2020128539 A5 JP 2020128539A5 JP 2020071965 A JP2020071965 A JP 2020071965A JP 2020071965 A JP2020071965 A JP 2020071965A JP 2020128539 A5 JP2020128539 A5 JP 2020128539A5
- Authority
- JP
- Japan
- Prior art keywords
- glass substrate
- particle size
- polishing
- polishing liquid
- manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002245 particle Substances 0.000 claims description 25
- 238000005498 polishing Methods 0.000 claims description 23
- 239000000758 substrate Substances 0.000 claims description 18
- 239000011521 glass Substances 0.000 claims description 14
- 239000007788 liquid Substances 0.000 claims description 12
- 238000000034 method Methods 0.000 claims description 12
- 229910000420 cerium oxide Inorganic materials 0.000 claims description 8
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 claims description 8
- 238000004519 manufacturing process Methods 0.000 claims description 7
- 239000006061 abrasive grain Substances 0.000 claims description 3
- 238000007561 laser diffraction method Methods 0.000 claims description 3
- 238000000790 scattering method Methods 0.000 claims description 3
- 238000007517 polishing process Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022205494A JP7547449B2 (ja) | 2017-10-31 | 2022-12-22 | 研磨液、ガラス基板の製造方法、及び、磁気ディスクの製造方法 |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017210817 | 2017-10-31 | ||
| JP2017210817 | 2017-10-31 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019550479A Division JP6692006B2 (ja) | 2017-10-31 | 2018-10-31 | 研磨液、ガラス基板の製造方法、及び、磁気ディスクの製造方法 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022205494A Division JP7547449B2 (ja) | 2017-10-31 | 2022-12-22 | 研磨液、ガラス基板の製造方法、及び、磁気ディスクの製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2020128539A JP2020128539A (ja) | 2020-08-27 |
| JP2020128539A5 true JP2020128539A5 (https=) | 2022-03-28 |
| JP7201639B2 JP7201639B2 (ja) | 2023-01-10 |
Family
ID=66331926
Family Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019550479A Active JP6692006B2 (ja) | 2017-10-31 | 2018-10-31 | 研磨液、ガラス基板の製造方法、及び、磁気ディスクの製造方法 |
| JP2020071965A Active JP7201639B2 (ja) | 2017-10-31 | 2020-04-13 | 研磨液、ガラス基板の製造方法、及び、磁気ディスクの製造方法 |
| JP2022205494A Active JP7547449B2 (ja) | 2017-10-31 | 2022-12-22 | 研磨液、ガラス基板の製造方法、及び、磁気ディスクの製造方法 |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019550479A Active JP6692006B2 (ja) | 2017-10-31 | 2018-10-31 | 研磨液、ガラス基板の製造方法、及び、磁気ディスクの製造方法 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022205494A Active JP7547449B2 (ja) | 2017-10-31 | 2022-12-22 | 研磨液、ガラス基板の製造方法、及び、磁気ディスクの製造方法 |
Country Status (5)
| Country | Link |
|---|---|
| US (3) | US11214713B2 (https=) |
| JP (3) | JP6692006B2 (https=) |
| CN (2) | CN111094502B (https=) |
| SG (1) | SG11202001636RA (https=) |
| WO (1) | WO2019088209A1 (https=) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SG11202001636RA (en) | 2017-10-31 | 2020-03-30 | Hoya Corp | Polishing liquid, method for manufacturing glass substrate, and method for manufacturing magnetic disk |
| CN112266729A (zh) * | 2020-11-17 | 2021-01-26 | 云南光电辅料有限公司 | 一种超低色散玻璃镜片用抛光液及其制备方法 |
| CN114800055A (zh) * | 2022-04-28 | 2022-07-29 | 浙江美迪凯光学半导体有限公司 | 一种方形片的抛光工艺 |
Family Cites Families (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100480760B1 (ko) | 2000-10-02 | 2005-04-07 | 미쓰이 긴조꾸 고교 가부시키가이샤 | 세륨계 연마재 및 세륨계 연마재의 제조방법 |
| JP4807905B2 (ja) * | 2001-04-05 | 2011-11-02 | 昭和電工株式会社 | 研磨材スラリー及び研磨微粉 |
| JP4885352B2 (ja) | 2000-12-12 | 2012-02-29 | 昭和電工株式会社 | 研磨材スラリー及び研磨微粉 |
| JP2002371267A (ja) | 2001-06-15 | 2002-12-26 | Mitsui Mining & Smelting Co Ltd | セリウム系研摩材粒子の製造方法及びセリウム系研摩材粒子 |
| JP4033440B2 (ja) * | 2001-09-17 | 2008-01-16 | 三井金属鉱業株式会社 | セリウム系研摩材スラリー及びセリウム系研摩材スラリーの製造方法 |
| JP5256832B2 (ja) | 2007-04-17 | 2013-08-07 | 日立化成株式会社 | 研磨剤及びその製造方法 |
| MY154861A (en) * | 2008-12-22 | 2015-08-14 | Kao Corp | Polishing liquid composition for magnetic-disk substrate |
| CN101486879A (zh) * | 2009-02-20 | 2009-07-22 | 包头迅博新材料有限公司 | 一种稀土精细抛光材料及其制造工艺 |
| JP2011110637A (ja) * | 2009-11-25 | 2011-06-09 | Asahi Glass Co Ltd | 磁気ディスク用ガラス基板の製造方法 |
| CN102079950A (zh) * | 2009-11-27 | 2011-06-01 | 东莞市卓越研磨材料有限公司 | 单分散稀土抛光粉制备方法 |
| BR112012019714A2 (pt) * | 2010-02-10 | 2020-08-18 | Saint-Gobain Ceramics & Plastics, Inc. | população de particulas de cerâmica e proceso para fabricar a mesma |
| JP5736681B2 (ja) * | 2010-07-15 | 2015-06-17 | 旭硝子株式会社 | 研磨液及び磁気ディスク用ガラス基板の製造方法 |
| WO2012043214A1 (ja) * | 2010-09-30 | 2012-04-05 | コニカミノルタオプト株式会社 | 情報記録媒体用ガラス基板の製造方法および情報記録媒体 |
| US8421536B2 (en) * | 2011-09-21 | 2013-04-16 | Analog Devices, Inc. | Apparatus and methods for electronic amplification |
| JPWO2013069720A1 (ja) * | 2011-11-09 | 2015-04-02 | Ｄｏｗａエコシステム株式会社 | 研磨剤リサイクル方法 |
| WO2013146090A1 (ja) * | 2012-03-30 | 2013-10-03 | Hoya株式会社 | 磁気ディスク用ガラス基板の製造方法 |
| WO2014034251A1 (ja) | 2012-08-29 | 2014-03-06 | Hoya株式会社 | 磁気ディスク用ガラス基板、磁気ディスク |
| WO2014168113A1 (ja) * | 2013-04-09 | 2014-10-16 | Ｄｏｗａエコシステム株式会社 | 再生酸化セリウム系研磨剤粒子の製造方法および再生粒子 |
| US20160239913A1 (en) | 2013-08-13 | 2016-08-18 | Cfph, Llc | Foreign exchange trading |
| WO2016002825A1 (ja) * | 2014-06-30 | 2016-01-07 | Hoya株式会社 | 磁気ディスク用ガラス基板の製造方法 |
| WO2016115096A1 (en) | 2015-01-12 | 2016-07-21 | Air Products And Chemicals, Inc. | Composite abrasive particles for chemical mechanical planarization composition and method of use thereof |
| CN106479371A (zh) * | 2016-08-15 | 2017-03-08 | 惠州市米特仑科技有限公司 | 一种高精度复合抛光液及其制备方法 |
| SG11202001636RA (en) * | 2017-10-31 | 2020-03-30 | Hoya Corp | Polishing liquid, method for manufacturing glass substrate, and method for manufacturing magnetic disk |
-
2018
- 2018-10-31 SG SG11202001636RA patent/SG11202001636RA/en unknown
- 2018-10-31 CN CN201880060448.9A patent/CN111094502B/zh active Active
- 2018-10-31 WO PCT/JP2018/040610 patent/WO2019088209A1/ja not_active Ceased
- 2018-10-31 CN CN202111254736.8A patent/CN113913156B/zh active Active
- 2018-10-31 US US16/641,185 patent/US11214713B2/en active Active
- 2018-10-31 JP JP2019550479A patent/JP6692006B2/ja active Active
-
2020
- 2020-04-13 JP JP2020071965A patent/JP7201639B2/ja active Active
-
2021
- 2021-12-30 US US17/566,200 patent/US11680187B2/en active Active
-
2022
- 2022-12-22 JP JP2022205494A patent/JP7547449B2/ja active Active
-
2023
- 2023-05-22 US US18/321,385 patent/US12252633B2/en active Active
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