JP2020096040A5 - - Google Patents
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- Publication number
- JP2020096040A5 JP2020096040A5 JP2018231681A JP2018231681A JP2020096040A5 JP 2020096040 A5 JP2020096040 A5 JP 2020096040A5 JP 2018231681 A JP2018231681 A JP 2018231681A JP 2018231681 A JP2018231681 A JP 2018231681A JP 2020096040 A5 JP2020096040 A5 JP 2020096040A5
- Authority
- JP
- Japan
- Prior art keywords
- nitride
- material according
- piezoelectric
- intermediate layer
- piezoelectric body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 claims 11
- 150000004767 nitrides Chemical class 0.000 claims 7
- 239000000126 substance Substances 0.000 claims 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 1
- 229910002601 GaN Inorganic materials 0.000 claims 1
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 claims 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims 1
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 claims 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 1
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims 1
- 229910052782 aluminium Inorganic materials 0.000 claims 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 1
- SJKRCWUQJZIWQB-UHFFFAOYSA-N azane;chromium Chemical compound N.[Cr] SJKRCWUQJZIWQB-UHFFFAOYSA-N 0.000 claims 1
- NWAIGJYBQQYSPW-UHFFFAOYSA-N azanylidyneindigane Chemical compound [In]#N NWAIGJYBQQYSPW-UHFFFAOYSA-N 0.000 claims 1
- CUOITRGULIVMPC-UHFFFAOYSA-N azanylidynescandium Chemical compound [Sc]#N CUOITRGULIVMPC-UHFFFAOYSA-N 0.000 claims 1
- 229910052804 chromium Inorganic materials 0.000 claims 1
- 239000011651 chromium Substances 0.000 claims 1
- 229910052802 copper Inorganic materials 0.000 claims 1
- 239000010949 copper Substances 0.000 claims 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims 1
- 238000009792 diffusion process Methods 0.000 claims 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims 1
- 229910052737 gold Inorganic materials 0.000 claims 1
- 239000010931 gold Substances 0.000 claims 1
- 229910052735 hafnium Inorganic materials 0.000 claims 1
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 claims 1
- 229910052741 iridium Inorganic materials 0.000 claims 1
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 claims 1
- 229910052750 molybdenum Inorganic materials 0.000 claims 1
- 239000011733 molybdenum Substances 0.000 claims 1
- 229910052759 nickel Inorganic materials 0.000 claims 1
- 229910052763 palladium Inorganic materials 0.000 claims 1
- 229910052697 platinum Inorganic materials 0.000 claims 1
- 229910052707 ruthenium Inorganic materials 0.000 claims 1
- 229910001925 ruthenium oxide Inorganic materials 0.000 claims 1
- WOCIAKWEIIZHES-UHFFFAOYSA-N ruthenium(iv) oxide Chemical compound O=[Ru]=O WOCIAKWEIIZHES-UHFFFAOYSA-N 0.000 claims 1
- 229910052709 silver Inorganic materials 0.000 claims 1
- 239000004332 silver Substances 0.000 claims 1
- 229910052715 tantalum Inorganic materials 0.000 claims 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims 1
- 229910052719 titanium Inorganic materials 0.000 claims 1
- 239000010936 titanium Substances 0.000 claims 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims 1
- 229910052721 tungsten Inorganic materials 0.000 claims 1
- 239000010937 tungsten Substances 0.000 claims 1
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018231681A JP7085208B2 (ja) | 2018-12-11 | 2018-12-11 | 圧電体およびそれを用いたｍｅｍｓデバイス |
| CN201980076704.8A CN113165865B (zh) | 2018-12-11 | 2019-11-26 | 压电体以及使用其的mems器件 |
| KR1020217008026A KR102604213B1 (ko) | 2018-12-11 | 2019-11-26 | 압전체 및 이를 이용한 mems 디바이스 |
| PCT/JP2019/046052 WO2020121796A1 (ja) | 2018-12-11 | 2019-11-26 | 圧電体およびそれを用いたｍｅｍｓデバイス |
| EP19897007.1A EP3896029B1 (en) | 2018-12-11 | 2019-11-26 | Piezoelectric body and mems device using same |
| US17/276,464 US11968902B2 (en) | 2018-12-11 | 2019-11-26 | Piezoelectric body and MEMS device using same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018231681A JP7085208B2 (ja) | 2018-12-11 | 2018-12-11 | 圧電体およびそれを用いたｍｅｍｓデバイス |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2020096040A JP2020096040A (ja) | 2020-06-18 |
| JP2020096040A5 true JP2020096040A5 (enExample) | 2021-03-11 |
| JP7085208B2 JP7085208B2 (ja) | 2022-06-16 |
Family
ID=71075954
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018231681A Active JP7085208B2 (ja) | 2018-12-11 | 2018-12-11 | 圧電体およびそれを用いたｍｅｍｓデバイス |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US11968902B2 (enExample) |
| EP (1) | EP3896029B1 (enExample) |
| JP (1) | JP7085208B2 (enExample) |
| KR (1) | KR102604213B1 (enExample) |
| CN (1) | CN113165865B (enExample) |
| WO (1) | WO2020121796A1 (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7406262B2 (ja) * | 2019-02-22 | 2023-12-27 | 国立研究開発法人産業技術総合研究所 | 窒化物圧電体およびそれを用いたｍｅｍｓデバイス |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4478910B2 (ja) * | 2001-05-11 | 2010-06-09 | 宇部興産株式会社 | 圧電薄膜共振子 |
| US6936837B2 (en) | 2001-05-11 | 2005-08-30 | Ube Industries, Ltd. | Film bulk acoustic resonator |
| CN1983462B (zh) * | 2002-10-24 | 2010-11-03 | 精工爱普生株式会社 | 强电介质膜的制造方法、和强电介质电容器的制造方法 |
| JP2005244184A (ja) * | 2004-01-28 | 2005-09-08 | Toshiba Corp | 薄膜圧電素子及び薄膜圧電素子の製造方法 |
| JP4911907B2 (ja) * | 2005-03-25 | 2012-04-04 | 京セラ株式会社 | 圧電アクチュエータ及び液体吐出装置 |
| JP4977380B2 (ja) * | 2005-05-31 | 2012-07-18 | 京セラ株式会社 | 圧電アクチュエータおよびその駆動方法、並びに印刷ヘッド |
| JP5190841B2 (ja) | 2007-05-31 | 2013-04-24 | 独立行政法人産業技術総合研究所 | 圧電体薄膜、圧電体およびそれらの製造方法、ならびに当該圧電体薄膜を用いた圧電体共振子、アクチュエータ素子および物理センサー |
| TWI621183B (zh) * | 2011-12-01 | 2018-04-11 | 半導體能源研究所股份有限公司 | 半導體裝置及半導體裝置的製造方法 |
| US9520855B2 (en) * | 2014-02-26 | 2016-12-13 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Bulk acoustic wave resonators having doped piezoelectric material and frame elements |
| US20170263847A1 (en) * | 2016-03-09 | 2017-09-14 | Teledyne Dalsa Semiconductor, Inc. | Piezoelectric Alloy Films |
| JP2017201050A (ja) * | 2016-05-06 | 2017-11-09 | 学校法人早稲田大学 | 圧電体薄膜及びそれを用いた圧電素子 |
| JP7345855B2 (ja) * | 2020-02-27 | 2023-09-19 | 国立研究開発法人産業技術総合研究所 | 窒化物材料およびそれからなる圧電体並びにその圧電体を用いたｍｅｍｓデバイス |
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2018
- 2018-12-11 JP JP2018231681A patent/JP7085208B2/ja active Active
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2019
- 2019-11-26 CN CN201980076704.8A patent/CN113165865B/zh active Active
- 2019-11-26 KR KR1020217008026A patent/KR102604213B1/ko active Active
- 2019-11-26 EP EP19897007.1A patent/EP3896029B1/en active Active
- 2019-11-26 WO PCT/JP2019/046052 patent/WO2020121796A1/ja not_active Ceased
- 2019-11-26 US US17/276,464 patent/US11968902B2/en active Active