JP2020077750A - クリーニング方法及び成膜方法 - Google Patents
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4581—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber characterised by material of construction or surface finish of the means for supporting the substrate
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4582—Rigid and flat substrates, e.g. plates or discs
- C23C16/4583—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally
- C23C16/4584—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally the substrate being rotated
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- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
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- H01J37/32431—Constructional details of the reactor
- H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
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- H01J37/32862—In situ cleaning of vessels and/or internal parts
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- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
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- H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
- H01L21/02271—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
- H01L21/02274—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition in the presence of a plasma [PECVD]
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- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
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- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
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Abstract
Description
前記サセプタに設けられた基板載置領域に保護部材を載置する工程と、
前記保護部材を前記基板載置領域に載置した状態で前記サセプタにクリーニングガスを供給し、前記サセプタの表面上に堆積した膜をエッチングにより除去する工程と、を有する。
まず、本開示の実施形態に係るクリーニング方法及び成膜方法を適用するのに好適な成膜装置の一例について、図1〜図6を参照して説明する。この成膜装置は、図1〜図4に示すように、平面形状が概ね円形である真空容器1と、この真空容器1内に設けられ、当該真空容器1の中心に回転中心を有すると共に例えば石英により構成されたサセプタ2と、を備えており、ウエハWに対して成膜処理を行う成膜装置として構成されている。そして、この成膜装置は、後で詳述するように、例えば山状に(上に凸に)反っているウエハWに対して成膜処理を行う場合であっても、スループットの低下を抑えつつ、且つ面内における成膜処理の均一性を確保しながら、ウエハWへのパーティクルの付着を抑制できるように構成されている。続いて、この成膜装置の各部について以下に説明する。
次に、本開示の実施形態に係る成膜方法について説明する。本実施形態に係る成膜方法は、成膜工程とクリーニング工程とを含む。即ち、成膜工程でウエハWに成膜処理を施す際、サセプタ2の表面上にも成膜処理がなされ、サセプタ2上に薄膜が堆積してゆく。かかるサセプタ2上の薄膜を除去する際、本開示の実施形態に係るクリーニング方法が実施される。本実施形態に係るクリーニング方法では、薄膜をエッチングにより除去可能なエッチングガスをクリーニングガスとして用い、真空容器1内のサセプタ2にクリーニングガスを供給し、サセプタ2の表面上に堆積した薄膜をエッチングにより除去するドライクリーニングを行う。なお、このドライクリーニングでは、サセプタ2の表面のみならず、真空容器1の内壁や真空容器1内の部品もクリーニングされる。
1 真空容器
2 サセプタ
24 凹部
25 載置台
26 溝
31、32 処理ガスノズル
35 クリーニングガスノズル
61、62 排気口
130 保護部材
Claims (14)
- 成膜装置の処理室内に設けられたサセプタをドライクリーニングするクリーニング方法であって、
前記サセプタに設けられた基板載置領域に保護部材を載置する工程と、
前記保護部材を前記基板載置領域に載置した状態で前記サセプタにクリーニングガスを供給し、前記サセプタの表面上に堆積した膜をエッチングにより除去する工程と、を有するクリーニング方法。 - 前記保護部材は、成膜処理される基板と略同一の平面形状を有する請求項1に記載のクリーニング方法。
- 前記保護部材は、前記成膜処理される基板と略同一の位置に配置される請求項2に記載のクリーニング方法。
- 前記保護部材は、前記クリーニングガスによりエッチングされても汚染を発生させない材料からなる請求項2又は3に記載のクリーニング方法。
- 前記保護部材は、前記成膜処理される基板と同一の材料からなる請求項4に記載のクリーニング方法。
- 前記保護部材及び前記成膜処理される基板は、シリコンからなる請求項5に記載のクリーニング方法。
- 前記保護部材は、前記クリーニングガスに対するエッチング耐性が前記サセプタ以上の材料からなる請求項2又は3に記載のクリーニング方法。
- 前記保護部材は、石英又は炭化珪素からなる請求項7に記載のクリーニング方法。
- 前記サセプタは、石英からなる請求項1乃至8のいずれか一項に記載のクリーニング方法。
- 前記基板載置領域は、基板の外形に沿った平面形状を有する窪みとして構成され、
該窪みは、底面の中央部に前記基板及び前記保護部材を接触支持可能な載置台と、該載置台の周囲の外周領域に前記基板が熱変形しても接触しない深さの溝を有し、
前記載置台上に前記保護部材を載置した状態で前記サセプタの表面上に堆積した膜をエッチングにより除去する工程を行う請求項1乃至9のいずれか一項に記載のクリーニング方法。 - 前記サセプタの表面上に堆積した膜をエッチングにより除去する工程は、前記サセプタを回転させながら行う請求項1乃至10のいずれか一項に記載のクリーニング方法。
- 前記クリーニングガスは、フッ素含有ガスである請求項1乃至11のいずれか一項に記載のクリーニング方法。
- 前記基板載置領域は、前記サセプタの周方向に沿って複数設けられている請求項1乃至12のいずれか一項に記載のクリーニング方法。
- 第1の基板を処理室内に搬入し、該処理室内に設けられたサセプタの基板載置領域上に載置する工程と、
前記第1の基板上に成膜を行う工程と、
成膜された前記第1の基板を前記処理室から搬出する工程と、
請求項1乃至13のいずれか一項に記載されたクリーニング方法を用いて前記サセプタをクリーニングする工程と、
前記保護部材を前記基板載置領域から除去して前記処理室外に搬出する工程と、
第2の基板を処理室内に搬入し、該処理室内に設けられたサセプタの基板載置領域上に載置する工程と、
前記第2の基板上に成膜を行う工程と、を有する成膜方法。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
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JP2018210060A JP2020077750A (ja) | 2018-11-07 | 2018-11-07 | クリーニング方法及び成膜方法 |
US16/666,621 US11359279B2 (en) | 2018-11-07 | 2019-10-29 | Cleaning method and film deposition method |
KR1020190135096A KR20200052833A (ko) | 2018-11-07 | 2019-10-29 | 클리닝 방법 및 성막 방법 |
CN201911082055.0A CN111172515A (zh) | 2018-11-07 | 2019-11-07 | 清洁方法和成膜方法 |
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JP2018210060A JP2020077750A (ja) | 2018-11-07 | 2018-11-07 | クリーニング方法及び成膜方法 |
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JP7038618B2 (ja) * | 2018-07-12 | 2022-03-18 | 東京エレクトロン株式会社 | クリーニング方法及び基板処理装置 |
KR20210133788A (ko) | 2020-04-29 | 2021-11-08 | 주식회사 엘지에너지솔루션 | 냉각 유로 구조의 효율화 및 안정성을 향상시킨 배터리 팩 및 이를 포함하는 자동차 |
US11749554B2 (en) * | 2020-11-05 | 2023-09-05 | Sandisk Technologies Llc | Multi-wafer deposition tool for reducing residual deposition on transfer blades and methods of operating the same |
JP7223047B2 (ja) * | 2021-03-03 | 2023-02-15 | 株式会社Kokusai Electric | 基板処理装置、半導体装置の製造方法およびプログラム |
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JP2011058031A (ja) * | 2009-09-08 | 2011-03-24 | Hitachi Kokusai Electric Inc | 半導体装置の製造方法及び基板処理装置 |
WO2013146278A1 (ja) * | 2012-03-30 | 2013-10-03 | 株式会社日立国際電気 | 半導体装置の製造方法、基板処理方法及び基板処理装置 |
JP2013222948A (ja) * | 2012-04-19 | 2013-10-28 | Tokyo Electron Ltd | 基板処理装置 |
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US6322716B1 (en) * | 1999-08-30 | 2001-11-27 | Cypress Semiconductor Corp. | Method for conditioning a plasma etch chamber |
JP2004119505A (ja) * | 2002-09-24 | 2004-04-15 | Seiko Epson Corp | 半導体基板製造装置の洗浄方法及びその装置 |
US7122125B2 (en) * | 2002-11-04 | 2006-10-17 | Applied Materials, Inc. | Controlled polymerization on plasma reactor wall |
US7959970B2 (en) * | 2004-03-31 | 2011-06-14 | Tokyo Electron Limited | System and method of removing chamber residues from a plasma processing system in a dry cleaning process |
JP5025458B2 (ja) * | 2005-02-02 | 2012-09-12 | 東京エレクトロン株式会社 | クリーニング方法、制御プログラム、コンピュータ読み取り可能な記憶媒体およびプラズマ処理装置 |
JP5241499B2 (ja) * | 2006-09-19 | 2013-07-17 | 東京エレクトロン株式会社 | プラズマクリーニング方法、プラズマcvd方法、およびプラズマ処理装置 |
US7732009B2 (en) * | 2006-09-26 | 2010-06-08 | United Microelectronics Corp. | Method of cleaning reaction chamber, method of forming protection film and protection wafer |
JP5365165B2 (ja) * | 2007-12-04 | 2013-12-11 | 信越化学工業株式会社 | ウエハ |
JP5031013B2 (ja) | 2008-11-19 | 2012-09-19 | 東京エレクトロン株式会社 | 成膜装置、成膜装置のクリーニング方法、プログラム、プログラムを記憶するコンピュータ可読記憶媒体 |
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JP2017045849A (ja) * | 2015-08-26 | 2017-03-02 | 東京エレクトロン株式会社 | シーズニング方法およびエッチング方法 |
KR101856608B1 (ko) * | 2016-07-29 | 2018-05-15 | 세메스 주식회사 | 기판 처리 설비 |
JP7042689B2 (ja) * | 2018-05-23 | 2022-03-28 | 東京エレクトロン株式会社 | サセプタのドライクリーニング方法及び基板処理装置 |
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JP2011058031A (ja) * | 2009-09-08 | 2011-03-24 | Hitachi Kokusai Electric Inc | 半導体装置の製造方法及び基板処理装置 |
WO2013146278A1 (ja) * | 2012-03-30 | 2013-10-03 | 株式会社日立国際電気 | 半導体装置の製造方法、基板処理方法及び基板処理装置 |
JP2013222948A (ja) * | 2012-04-19 | 2013-10-28 | Tokyo Electron Ltd | 基板処理装置 |
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US11359279B2 (en) | 2022-06-14 |
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US20200141001A1 (en) | 2020-05-07 |
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