JP7042689B2 - サセプタのドライクリーニング方法及び基板処理装置 - Google Patents
サセプタのドライクリーニング方法及び基板処理装置 Download PDFInfo
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- JP7042689B2 JP7042689B2 JP2018098465A JP2018098465A JP7042689B2 JP 7042689 B2 JP7042689 B2 JP 7042689B2 JP 2018098465 A JP2018098465 A JP 2018098465A JP 2018098465 A JP2018098465 A JP 2018098465A JP 7042689 B2 JP7042689 B2 JP 7042689B2
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Description
前記サセプタ上の基板載置領域が設けられた部分を含む第1の領域にクリーニングガスを供給してドライクリーニングする第1のクリーニング工程と、
該第1のクリーニング工程において前記クリーニングガスが到達し難い第2の領域に局所的に前記クリーニングガスを供給する第2のクリーニング工程と、を有し、
前記第2のクリーニング工程は、前記第1の領域に不活性ガスを供給してガスの圧力壁を形成し、前記クリーニングガスを前記第2の領域に流入するように導く工程であり、
前記クリーニングガスは、クリーニングガス供給部から供給され、
前記不活性ガスは、基板処理用の反応ガス供給部から供給される。
まず、本発明の実施形態に係る基板処理装置について説明する。本発明は、CVD成膜装置、エッチング装置等を含む種々の基板処理装置に適用可能であるが、本実施形態においては、基板処理装置をALD(Atomic Layer Deposition)成膜装置として構成した例を挙げて説明する。
次に、本発明の実施形態に係るサセプタのドライクリーニング方法について説明する。ドライクリーニングは、基板処理装置を用いて基板処理を行い、サセプタ上に堆積した反応生成物を除去する必要が生じたときに行う。言い換えると、サセプタ上に堆積した反応生成物が所定量に達し、そのまま基板処理を続けると基板処理に支障が生じるおそれがあるときに行う。よって、サセプタ2のドライクリーニングは、基板処理が終了してウエハWが真空容器1から搬出され、かつウエハWが真空容器1に搬入される前に行われる。即ち、ウエハWが真空容器1内に存在しない時に行われ、基板処理が行われないタイミングで実施されるが、基板処理で反応生成物が発生することにより生じるクリーニングであるので、基板処理方法について説明してから、本実施形態に係るサセプタのドライクリーニング方法について説明する。また、基板処理及びドライクリーニングについては、シリコン酸化膜を成膜する基板処理を行い、サセプタ2上に堆積したシリコン酸化膜を除去するドライクリーニングを行う例を挙げて説明する。
図12は、サセプタ2の表面上に堆積したシリコン酸化膜の半径方向における膜厚分布の一例を示した図である。図12において、横軸がサセプタ2の半径方向における中心軸からの距離(mm)、縦軸が膜厚(nm)を示している。なお、中心付近のハブは、サセプタ2を支持しているコア部21であり、サセプタ2ではない部分である。また、凹部とあるのは、凹部が形成されており、ウエハWが載置される領域が含まれる範囲である。成膜処理をしている間は、凹部24上にはウエハWが載置されているので、この領域における膜厚は小さくなる。しかしながら、サセプタ2の隣接する凹部24同士の間は、成膜中もサセプタ2が露出している部分であるので、この部分もクリーニングは当然に必要である。全体的に見れば、凹部24が存在しない中心側(0mmに近い領域)と外周側(550mmに近い領域)の膜厚が大きくなっている。
2 サセプタ
4 凸状部
5 突出部
7 ヒータユニット
11 天板
12 容器本体
15 搬送口
24 凹部
31、33 反応ガスノズル
32 シャワーヘッド
32a 底面
32b クリーニングガス供給部
32c 第2の反応ガス供給部
35~37 ガス吐出孔
41、42 分離ガスノズル
80 プラズマ発生器
130~133 ガス供給源
P1~P3 処理領域
W ウエハ
Claims (8)
- 基板処理装置の処理室から基板を搬出した後に行うサセプタのドライクリーニング方法であって、
前記サセプタ上の基板載置領域が設けられた部分を含む第1の領域にクリーニングガスを供給してドライクリーニングする第1のクリーニング工程と、
該第1のクリーニング工程において前記クリーニングガスが到達し難い第2の領域に局所的に前記クリーニングガスを供給する第2のクリーニング工程と、を有し、
前記第2のクリーニング工程は、前記第1の領域に不活性ガスを供給してガスの圧力壁を形成し、前記クリーニングガスを前記第2の領域に流入するように導く工程であり、
前記クリーニングガスは、クリーニングガス供給部から供給され、
前記不活性ガスは、基板処理用の反応ガス供給部から供給されるサセプタのドライクリーニング方法。 - 前記サセプタは回転可能であり、
前記クリーニングガス供給部は、前記反応ガス供給部よりも前記サセプタの回転方向の上流側に配置されている請求項1に記載のサセプタのドライクリーニング方法。 - 前記サセプタは、前記基板載置領域を周方向に沿って複数有し、
前記クリーニングガス供給部及び前記反応ガス供給部は、前記サセプタの半径方向に沿って延在して設けられる請求項2に記載のサセプタのドライクリーニング方法。 - 前記クリーニングガス供給部及び前記反応ガス供給部は、シャワーヘッドの底面に吐出孔を有して構成される請求項3に記載のサセプタのドライクリーニング方法。
- 前記第2の領域は、前記サセプタの中心側と外周側の領域である請求項3又は4に記載のサセプタのドライクリーニング方法。
- 前記基板処理装置はALD成膜装置であり、
前記クリーニングガスは、前記サセプタ上に堆積した膜をエッチング可能なガスである請求項1乃至5のいずれか一項に記載のサセプタのドライクリーニング方法。 - 前記クリーニングガスは、フッ素原子含有ガスである請求項6に記載のドライクリーニング方法。
- 処理室と、
該処理室内に設けられ、表面に基板載置領域を有するサセプタと、
該サセプタにクリーニングガスを供給可能なクリーニングガス供給部と、
該クリーニングガス供給部に隣接して配置され、前記サセプタに基板を処理する反応ガスを供給可能な反応ガス供給部と、
前記処理室から前記基板が搬出された後に、前記サセプタ上の前記基板載置領域が設けられた部分を含む第1の領域にクリーニングガスを供給してドライクリーニングする第1のクリーニング工程と、
該第1のクリーニング工程において前記クリーニングガスが到達し難い第2の領域に局所的に前記クリーニングガスを供給する第2のクリーニング工程と、を実行する制御手段と、を有する基板処理装置。
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