JP2020054973A - 基板処理装置および基板処理方法 - Google Patents
基板処理装置および基板処理方法 Download PDFInfo
- Publication number
- JP2020054973A JP2020054973A JP2018188788A JP2018188788A JP2020054973A JP 2020054973 A JP2020054973 A JP 2020054973A JP 2018188788 A JP2018188788 A JP 2018188788A JP 2018188788 A JP2018188788 A JP 2018188788A JP 2020054973 A JP2020054973 A JP 2020054973A
- Authority
- JP
- Japan
- Prior art keywords
- unit
- substrate
- height
- coating
- processing apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C9/00—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important
- B05C9/06—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying two different liquids or other fluent materials, or the same liquid or other fluent material twice, to the same side of the work
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
- B05C11/1002—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
- B05C11/1015—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves responsive to a conditions of ambient medium or target, e.g. humidity, temperature ; responsive to position or movement of the coating head relative to the target
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C13/00—Means for manipulating or holding work, e.g. for separate articles
- B05C13/02—Means for manipulating or holding work, e.g. for separate articles for particular articles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C9/00—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important
- B05C9/08—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68742—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a lifting arrangement, e.g. lift pins
Abstract
Description
実施形態に係る基板処理装置1について図1〜図3を参照し説明する。図1は、実施形態に係る基板処理装置1の一部を示す概略平面図である。図2は、実施形態に係る基板処理装置1の搬送部5を示す概略側面図である。図3は、図1のIII-III断面における概略図である。
次に、基板処理装置1における高さ調整処理について図5を参照し説明する。図5は、実施形態に係る高さ調整処理を説明するフローチャートである。
次に、基板処理装置1の第2塗布部2Bにおいて基板Sにレジスト液を塗布する基板処理について図6を参照し説明する。図6は、実施形態に係る第2塗布部2Bにおける基板処理を説明するフローチャートである。
基板処理装置1は、基板Sの下面を吸着する複数の吸着パッド41を有し、基板Sを保持する保持部4と、保持部4を搬送方向に沿って搬送する搬送部5と、保持部4の傾きを調整する調整部6と、基板Sにレジスト液(処理液の一例)を塗布する第2塗布部2B(塗布部の一例)と、第2塗布部2Bの直下における保持部4の傾きを調整部6によって制御する制御部92とを備える。
次に、本実施形態の変形例について説明する。
2 塗布部
2A 第1塗布部(所定塗布部)
2B 第2塗布部(他の塗布部)
4 保持部
5 搬送部
6 調整部
7 パッド高さ調整部
8 検出センサ
9 制御装置
41 吸着パッド
61 昇降アクチュエータ
92 制御部
93 記憶部
Claims (6)
- 基板の下面を吸着する複数の吸着パッドを有し、前記基板を保持する保持部と、
前記保持部を搬送方向に沿って搬送する搬送部と、
前記保持部の傾きを調整する調整部と、
前記基板に処理液を塗布する塗布部と、
前記塗布部の直下における前記保持部の傾きを前記調整部によって制御する制御部と
を備える基板処理装置。 - 所定塗布部の直下における前記基板の高さが所定範囲内となるように前記複数の吸着パッドの高さをそれぞれ調整可能な複数のパッド高さ調整部
を備え、
前記制御部は、
前記複数のパッド高さ調整部によって前記複数の吸着パッドの高さが調整された状態で、前記所定塗布部とは異なる他の塗布部の直下における前記保持部の傾きを前記調整部によって制御する
請求項1に記載の基板処理装置。 - 前記制御部は、
前記所定塗布部の直下における前記保持部の傾きを前記調整部によって制御する
請求項2に記載の基板処理装置。 - 前記塗布部の直下における前記基板の高さを検出する検出センサ
を備え、
前記制御部は、
前記検出センサによって検出され、記憶部に記憶された前記基板の高さに基づいて、前記保持部の傾きを前記調整部によって制御する
請求項1〜3のいずれか一つに記載の基板処理装置。 - 前記塗布部の直下における前記基板の高さを検出する検出センサ
を備え、
前記制御部は、
前記検出センサによって前記基板の高さを検出しつつ、検出された前記基板の高さに基づいて、前記保持部の傾きを前記調整部によって制御する
請求項1〜3のいずれか一つに記載の基板処理装置。 - 基板の下面を吸着する複数の吸着パッドを有する保持部によって前記基板を保持する工程と、
前記保持部を搬送方向に沿って搬送する工程と、
塗布部によって前記基板に処理液を塗布する工程と、
前記塗布部の直下における前記保持部の傾きを調整する工程と
を有する基板処理方法。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018188788A JP7101583B2 (ja) | 2018-10-04 | 2018-10-04 | 基板処理装置および基板処理方法 |
CN201910909737.8A CN111001539A (zh) | 2018-10-04 | 2019-09-25 | 基片处理装置和基片处理方法 |
KR1020190121566A KR20200038862A (ko) | 2018-10-04 | 2019-10-01 | 기판 처리 장치 및 기판 처리 방법 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018188788A JP7101583B2 (ja) | 2018-10-04 | 2018-10-04 | 基板処理装置および基板処理方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2020054973A true JP2020054973A (ja) | 2020-04-09 |
JP7101583B2 JP7101583B2 (ja) | 2022-07-15 |
Family
ID=70105867
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018188788A Active JP7101583B2 (ja) | 2018-10-04 | 2018-10-04 | 基板処理装置および基板処理方法 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP7101583B2 (ja) |
KR (1) | KR20200038862A (ja) |
CN (1) | CN111001539A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2022202396A1 (ja) * | 2021-03-25 | 2022-09-29 | 東京エレクトロン株式会社 | 基板搬送装置、塗布処理装置、基板搬送方法および基板搬送プログラム |
CN115365060A (zh) * | 2022-09-02 | 2022-11-22 | 安徽艺云玻璃有限公司 | 一种钢化玻璃生产加工用加工胶喷涂装置 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005228881A (ja) * | 2004-02-12 | 2005-08-25 | Tokyo Electron Ltd | 浮上式基板搬送処理方法及びその装置 |
JP2008132422A (ja) * | 2006-11-28 | 2008-06-12 | Tokyo Electron Ltd | 塗布方法及び塗布装置 |
JP2009117571A (ja) * | 2007-11-06 | 2009-05-28 | Tokyo Electron Ltd | 基板処理装置及び塗布装置及び塗布方法 |
JP2010005492A (ja) * | 2008-06-24 | 2010-01-14 | Tokyo Ohka Kogyo Co Ltd | 塗布装置 |
JP2012204500A (ja) * | 2011-03-24 | 2012-10-22 | Tokyo Electron Ltd | 浮上式塗布装置 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3638456B2 (ja) * | 1998-12-22 | 2005-04-13 | 大日本スクリーン製造株式会社 | 基板姿勢変更装置 |
JP4884871B2 (ja) * | 2006-07-27 | 2012-02-29 | 東京エレクトロン株式会社 | 塗布方法及び塗布装置 |
JP5600624B2 (ja) * | 2011-03-22 | 2014-10-01 | 東京エレクトロン株式会社 | 塗布膜形成装置及び塗布膜形成方法 |
US9728443B2 (en) * | 2014-02-27 | 2017-08-08 | SCREEN Holdings Co., Ltd. | Substrate processing apparatus and substrate processing method |
KR102114264B1 (ko) * | 2015-08-24 | 2020-05-22 | 주식회사 원익아이피에스 | 기판 처리 장치 및 기판 처리 방법 |
JP6737575B2 (ja) * | 2015-09-30 | 2020-08-12 | Aiメカテック株式会社 | 基板組立システム、そのシステムに用いる基板組立装置、及び、そのシステムを用いた基板組立方法 |
-
2018
- 2018-10-04 JP JP2018188788A patent/JP7101583B2/ja active Active
-
2019
- 2019-09-25 CN CN201910909737.8A patent/CN111001539A/zh active Pending
- 2019-10-01 KR KR1020190121566A patent/KR20200038862A/ko not_active Application Discontinuation
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005228881A (ja) * | 2004-02-12 | 2005-08-25 | Tokyo Electron Ltd | 浮上式基板搬送処理方法及びその装置 |
JP2008132422A (ja) * | 2006-11-28 | 2008-06-12 | Tokyo Electron Ltd | 塗布方法及び塗布装置 |
JP2009117571A (ja) * | 2007-11-06 | 2009-05-28 | Tokyo Electron Ltd | 基板処理装置及び塗布装置及び塗布方法 |
JP2010005492A (ja) * | 2008-06-24 | 2010-01-14 | Tokyo Ohka Kogyo Co Ltd | 塗布装置 |
JP2012204500A (ja) * | 2011-03-24 | 2012-10-22 | Tokyo Electron Ltd | 浮上式塗布装置 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2022202396A1 (ja) * | 2021-03-25 | 2022-09-29 | 東京エレクトロン株式会社 | 基板搬送装置、塗布処理装置、基板搬送方法および基板搬送プログラム |
CN115365060A (zh) * | 2022-09-02 | 2022-11-22 | 安徽艺云玻璃有限公司 | 一种钢化玻璃生产加工用加工胶喷涂装置 |
CN115365060B (zh) * | 2022-09-02 | 2023-11-14 | 安徽艺云玻璃有限公司 | 一种钢化玻璃生产加工用加工胶喷涂装置 |
Also Published As
Publication number | Publication date |
---|---|
JP7101583B2 (ja) | 2022-07-15 |
KR20200038862A (ko) | 2020-04-14 |
CN111001539A (zh) | 2020-04-14 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4652351B2 (ja) | 基板支持装置、基板支持方法 | |
TWI559365B (zh) | Coating device | |
JP2007150280A (ja) | 基板支持装置、基板支持方法、基板加工装置、基板加工方法、表示装置構成部材の製造方法 | |
US11488929B2 (en) | Bonding apparatus, bonding system, bonding method, and recording medium | |
JP2008310249A (ja) | 近接スキャン露光装置及びその制御方法 | |
JP2020054973A (ja) | 基板処理装置および基板処理方法 | |
US11658146B2 (en) | Bonding apparatus, bonding system, bonding method, and recording medium | |
JP2008147291A (ja) | 基板支持装置、基板支持方法、基板加工装置、基板加工方法、表示装置構成部材の製造方法 | |
JP2021015931A (ja) | 基板浮上型レーザ処理装置及び浮上量の測定方法 | |
JP5188759B2 (ja) | 塗布装置及び塗布方法 | |
CN108701635B (zh) | 基板浮起输送装置 | |
JP4982292B2 (ja) | 塗布装置及び塗布方法 | |
KR101394312B1 (ko) | 웨이퍼 정렬장치 | |
JP2004272242A (ja) | 液晶パネル自動把持装置及びその方法 | |
KR20090052806A (ko) | 도포장치 및 그 기판 지지방법 | |
JP4372606B2 (ja) | 塗布膜形成装置 | |
KR20220001471A (ko) | 기판 처리 장치 및 기판 처리 방법 | |
JP6825464B2 (ja) | ティーチングユニット及び天井搬送車システム | |
KR20090048330A (ko) | 도포장치 및 도포방법 | |
KR20150051584A (ko) | 수평 유지 장치 | |
JP2013026370A (ja) | 電子部品の実装装置及び実装方法 | |
CN210128944U (zh) | 基板表面检测装置 | |
JP5788778B2 (ja) | ラビング装置およびラビング方法 | |
WO2022202396A1 (ja) | 基板搬送装置、塗布処理装置、基板搬送方法および基板搬送プログラム | |
JP2021079584A (ja) | スクライブヘッド及びスクライブ装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20210719 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20220412 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20220607 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20220705 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 7101583 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |