JP2020053627A - 気相成長装置、エピタキシャルウェーハの製造方法 - Google Patents
気相成長装置、エピタキシャルウェーハの製造方法 Download PDFInfo
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68785—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the mechanical construction of the susceptor, stage or support
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02293—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process formation of epitaxial layers by a deposition process
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68742—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a lifting arrangement, e.g. lift pins
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/6875—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a plurality of individual support members, e.g. support posts or protrusions
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
気相成長の際に半導体基板を支持するサセプタと、
前記サセプタを貫通して上下方向に延びるように設けられて、搬送ロボットにより前記サセプタの上方領域に搬送された半導体基板を前記サセプタへ移動させる際に該半導体基板の裏面を一時的に支持する3つ以上のリフトピンと、
前記リフトピンを昇降させるため下から前記リフトピンを支持する支持部とを備え、
前記リフトピンは、半導体基板を傾斜させた状態で支持することを特徴とする。
サセプタの上方領域に搬送された半導体基板を傾斜させた状態から前記サセプタ上に載置させる載置工程と、
前記載置工程により前記サセプタ上に載置された前記半導体基板の表面に薄膜を気相成長させる成長工程と、
を備えることを特徴とする。
実施例として、図1の気相成長装置1を用意した。ただし、サセプタ3としてガス逃げ用の貫通孔を有していないものを用意した。リフトピン5の個数は3つであり、そのうち1つのリフトピン5aの長さを、残り2つのリフトピン5bよりも1mm長くした。直径300mmのシリコン基板Wを反応容器11内にロボット搬送し、リフトピン5a、5bでシリコン基板Wを保持させた。このときのシリコン基板Wの水平面に対する傾斜角度は0.1°以上、1°未満の角度である。その後、リフトピン5a、5bを降下し、サセプタ3上にシリコン基板Wを載置し、サセプタ3を加熱装置14a、14bで1150℃に加熱し、原料ガスをトリクロロシランとしてシリコン単結晶膜の気相成長反応を実施した。このとき、サセプタ3の中心Oに対するシリコン基板Wの中心の相対位置を算出した。この一連の工程を複数のシリコン基板Wに対して行った。
比較例として、Φ1.0mmの貫通孔17aを孔ピッチ9mmの間隔で基板載置面の全面に設けたサセプタ17を備え、長さの等しいリフトピン13を3本備えた図4の気相成長装置を用意した。実施例と同様の方法で直径300mmのシリコン基板Wを搬送し、気相成長を実施し、サセプタ17の中心に対するシリコン基板Wの中心の相対位置を算出した。
実施例におけるサセプタ3の中心からのシリコン基板Wの相対位置のばらつきを図5に示す。比較例におけるサセプタ17の中心からのシリコン基板Wの相対位置のばらつきを図6に示す。図5、図6において、X軸とY軸の交点がサセプタの中心を示している。また、図5、図6において、白抜きの点は、各シリコン基板Wの中心位置を示している。黒塗りの点は、白抜き点の位置を平均した位置を示している。図5、図6の比較により、実施例の気相成長装置1も比較例と同等のばらつきであることが確認できた。なお、比較例では、シリコン基板Wとサセプタ17の間のガスがサセプタ17の貫通孔17aからサセプタ17の下方に抜けることで、実施例と同等の結果となったと考えられる。
3、17 サセプタ
4 サセプタ支持パーツ
5、12、13 リフトピン
5a 長いリフトピン
5b 短いリフトピン
6a サセプタ支持パーツと接続されたアクチュエータ
6b リフトピン支持パーツと接続されたアクチュエータ
7、8 リフトピン支持パーツ(支持部)
11 反応容器
14a 上部加熱装置
14b 下部加熱装置
15 気相成長用ガス導入管
16 排気管
W 半導体基板
Claims (7)
- 気相成長の際に半導体基板を支持するサセプタと、
前記サセプタを貫通して上下方向に延びるように設けられて、搬送ロボットにより前記サセプタの上方領域に搬送された半導体基板を前記サセプタへ移動させる際に該半導体基板の裏面を一時的に支持する3つ以上のリフトピンと、
前記リフトピンを昇降させるため下から前記リフトピンを支持する支持部とを備え、
前記リフトピンは、半導体基板を傾斜させた状態で支持することを特徴とする気相成長装置。 - 一部の前記リフトピンの長さが、他の前記リフトピンの長さと異なることを特徴とする請求項1に記載の気相成長装置。
- 前記支持部は、一部の前記リフトピンの下端を、他の前記リフトピンの下端と異なる高さ位置で支持することを特徴とする請求項1に記載の気相成長装置。
- 前記傾斜させた状態での半導体基板の水平面に対する傾斜角度が0.1°以上、10°未満であることを特徴とする請求項1〜3のいずれか1項に記載の気相成長装置。
- 前記傾斜させた状態での半導体基板の水平面に対する傾斜角度が0.1°以上、1°未満であることを特徴とする請求項1〜4のいずれか1項に記載の気相成長装置。
- 全ての前記リフトピンが前記サセプタの中心から互いに等距離に設けられたことを特徴とする請求項1〜5のいずれか1項に記載の気相成長装置。
- サセプタの上方領域に搬送された半導体基板を傾斜させた状態から前記サセプタ上に載置させる載置工程と、
前記載置工程により前記サセプタ上に載置された前記半導体基板の表面に薄膜を気相成長させる成長工程と、
を備えることを特徴とするエピタキシャルウェーハの製造方法。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018183689A JP6965861B2 (ja) | 2018-09-28 | 2018-09-28 | 気相成長装置 |
KR1020190095490A KR20200036723A (ko) | 2018-09-28 | 2019-08-06 | 기상 성장 장치, 에피택셜 웨이퍼의 제조 방법 |
CN201910837131.8A CN110970343A (zh) | 2018-09-28 | 2019-09-05 | 气相生长装置及外延晶片的制造方法 |
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JP2018183689A JP6965861B2 (ja) | 2018-09-28 | 2018-09-28 | 気相成長装置 |
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JP2020053627A true JP2020053627A (ja) | 2020-04-02 |
JP6965861B2 JP6965861B2 (ja) | 2021-11-10 |
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CN (1) | CN110970343A (ja) |
Cited By (1)
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KR20230057955A (ko) | 2021-10-22 | 2023-05-02 | 도쿄엘렉트론가부시키가이샤 | 피처리체의 반송 방법 및 처리 장치 |
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CN113629001B (zh) * | 2020-05-09 | 2024-05-14 | 长鑫存储技术有限公司 | 一种载台装置 |
TWI800072B (zh) * | 2020-12-31 | 2023-04-21 | 大陸商拓荊科技股份有限公司 | 晶圓支撐銷升降裝置 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002064132A (ja) * | 2000-08-22 | 2002-02-28 | Tokyo Electron Ltd | 被処理体の受け渡し方法、被処理体の載置機構及びプローブ装置 |
JP2004063865A (ja) * | 2002-07-30 | 2004-02-26 | Shin Etsu Handotai Co Ltd | サセプタ、気相成長装置およびエピタキシャルウェーハの製造方法 |
JP2011204784A (ja) * | 2010-03-24 | 2011-10-13 | Yaskawa Electric Corp | 被処理体の支持機構、支持方法およびそれを備えた搬送システム |
JP2012238758A (ja) * | 2011-05-12 | 2012-12-06 | Sharp Corp | 基板載置装置および基板載置方法 |
US20130245978A1 (en) * | 2012-03-14 | 2013-09-19 | Taiwan Semiconductor Manufacturing Co., Ltd. | Systems and methods of controlling semiconductor wafer fabrication processes |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
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US20060005770A1 (en) | 2004-07-09 | 2006-01-12 | Robin Tiner | Independently moving substrate supports |
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2018
- 2018-09-28 JP JP2018183689A patent/JP6965861B2/ja active Active
-
2019
- 2019-08-06 KR KR1020190095490A patent/KR20200036723A/ko not_active Application Discontinuation
- 2019-09-05 CN CN201910837131.8A patent/CN110970343A/zh active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002064132A (ja) * | 2000-08-22 | 2002-02-28 | Tokyo Electron Ltd | 被処理体の受け渡し方法、被処理体の載置機構及びプローブ装置 |
JP2004063865A (ja) * | 2002-07-30 | 2004-02-26 | Shin Etsu Handotai Co Ltd | サセプタ、気相成長装置およびエピタキシャルウェーハの製造方法 |
JP2011204784A (ja) * | 2010-03-24 | 2011-10-13 | Yaskawa Electric Corp | 被処理体の支持機構、支持方法およびそれを備えた搬送システム |
JP2012238758A (ja) * | 2011-05-12 | 2012-12-06 | Sharp Corp | 基板載置装置および基板載置方法 |
US20130245978A1 (en) * | 2012-03-14 | 2013-09-19 | Taiwan Semiconductor Manufacturing Co., Ltd. | Systems and methods of controlling semiconductor wafer fabrication processes |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20230057955A (ko) | 2021-10-22 | 2023-05-02 | 도쿄엘렉트론가부시키가이샤 | 피처리체의 반송 방법 및 처리 장치 |
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KR20200036723A (ko) | 2020-04-07 |
JP6965861B2 (ja) | 2021-11-10 |
CN110970343A (zh) | 2020-04-07 |
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