JP2020049574A - Grindstone - Google Patents

Abstract

To provide a grindstone that can more evenly process a work-piece.SOLUTION: A grindstone 10 comprises an end face processing part 30 which has a plurality of tube parts 32 arranged along a processing end face 31 for polishing or grinding a work-piece and extending along a Z-direction orthogonal to the processing end face 31. The plurality of tube parts 32 of the end face processing part 30 comprise a first tube part 32a having a plurality of confronting wall parts 33a arranged to separate from each other by a first distance Da in a circumferential direction C of the grindstone 10, and a second tube part 32b positioned closer to an inside R1 in a radial direction of the grindstone 10 than the first tube part 32a, having a plurality of confronting wall parts 33a arranged to separate from each other by a second distance Db smaller than the first distance Da in the circumferential direction C.SELECTED DRAWING: Figure 3

Description

  The present invention relates to a grindstone.

  Conventionally, a grindstone for polishing or grinding a workpiece has been known. For example, the grinding wheel described in Patent Literature 1 has a honeycomb structure in which hexagonal cylindrical tubular portions are arranged. And this grindstone is located at the intersection of the honeycomb structure and the like, and has a grindstone column made of abrasive grains and a binder. Further, as shown in FIG. 1 and the like of Patent Document 1, a plurality of cylindrical portions are set to the same size.

JP 2017-13221 A

  In the configuration described in Patent Literature 1, the radially outer portion of the grindstone has a higher speed with respect to the workpiece than the radially inner portion of the grindstone. Therefore, the processing amount of the part of the workpiece that contacts the radial outside of the grindstone is larger than the processing amount of the part of the workpiece that contacts the radial inside of the grindstone. For this reason, it has been difficult to uniformly process the workpiece.

  The present invention has been made in view of the above situation, and has as its object to provide a grindstone capable of processing a workpiece more uniformly.

  In order to achieve the above object, a grindstone according to the present invention is arranged along a processing end surface for polishing or grinding a workpiece, and an end surface processing portion having a plurality of cylindrical portions extending along a direction orthogonal to the processing end surface. Wherein the plurality of cylindrical portions of the end surface processing portion include a first cylindrical portion having a plurality of facing wall portions arranged at a first distance in a circumferential direction of the grinding stone, and the first cylindrical portion. A second cylindrical portion which is located radially inward of the grinding wheel and has a plurality of facing wall portions arranged in the circumferential direction at a second distance smaller than the first distance.

  Further, the grinding wheel has a honeycomb structure in which the plurality of hexagonal cylindrical portions are arranged along the processing end surface, and the first cylindrical portion extends along a first row along the circumferential direction. The second cylindrical portion may be arranged along a second row along the circumferential direction on the radially inner side of the grindstone than the first row.

  In the above-mentioned grindstone, the first row is located radially outward of the grindstone with respect to the second row, adjacent to the second row, and the second cylindrical portion arranged in the second row May be displaced in the circumferential direction by a half of the first distance with respect to the first cylinders arranged in the first row.

  Further, in the grinding wheel, the plurality of cylindrical portions of the end face processing portion are each set to a size proportional to a radial distance between a rotation axis of the grinding stone and a position of the cylindrical portion, so that Is also good.

  Further, the grinding wheel is a side surface processing portion having a plurality of cylindrical portions arranged along a processing side surface for polishing or grinding a workpiece positioned on a side peripheral surface of the grinding stone and extending in a direction orthogonal to the processing side surface. May be provided.

  In the grinding wheel, each of the plurality of cylindrical portions of the side surface processing portion may be formed in a hexagonal cylindrical shape.

  Further, the grindstone includes a plurality of abrasive grains and a bonding material that binds the plurality of abrasive grains, and a radially outer end of the grindstone has a radially inner end than the grindstone of the grindstone. The ratio of the abrasive grains occupying the unit volume of the binder may be set to be higher than that of the portion.

  ADVANTAGE OF THE INVENTION According to this invention, in a grindstone, a workpiece can be processed more uniformly.

FIG. 1A is a bottom view of a grindstone, and FIG. 2B is a side view of the grindstone according to one embodiment of the present invention. FIG. 2 is a sectional view taken along line 2-2 of FIG. It is the bottom view which expanded a part of whetstone concerning one embodiment of the present invention. FIG. 2 is a perspective view showing a portion in a range A in FIG. 1A and a portion in a range B in FIG. 1B in the grindstone according to one embodiment of the present invention. (A) is a sectional view taken along line 5a-5a in FIG. 2, and (b) is a sectional view taken along line 5b-5b in FIG. It is the bottom view which expanded a part of whetstone concerning the modification of the present invention.

An embodiment of the grinding wheel according to the present invention will be described with reference to the drawings.
As shown in FIGS. 1A, 1B and 2, the grindstone unit 1 includes a grindstone 10 for processing a workpiece W and a grindstone holder 20 for holding the grindstone 10.

  As shown in FIG. 2, the grindstone holder 20 has a substantially disk shape. A cylindrical shaft 25 is inserted through the center of the grindstone holder 20. The grindstone holder 20 is rotated together with the grindstone 10 by a motor 27 about a rotation axis O along a shaft 25. Thereby, the grindstone 10 processes, that is, grinds or grinds the workpiece W fixed to the chuck (not shown). The workpiece W is a ceramic, a silicon wafer, a semiconductor substrate, an LED (Light Emitting Diode) substrate, a heat dissipation substrate, silicon carbide, alumina, sapphire, metal, or the like.

  As shown in FIG. 2, the grindstone 10 has a bottomed cylindrical shape in which a grindstone holder 20 is located. Specifically, the grindstone 10 includes an end face processing unit 30 for polishing or grinding the upper surface of the workpiece W, and a side processing unit 40 for polishing or grinding the side surface of the workpiece W.

  The end surface processing portion 30 is formed in a ring shape along the XY plane. The end face processing part 30 has a processing end face 31 in the shape of an annular plane along the XY plane with which the workpiece W is in contact during processing.

Specifically, the end surface processing section 30 has a honeycomb structure. That is, as shown in FIG. 1A, the end surface processing portion 30 includes a plurality of hexagonal cylindrical portions 32 extending along the Z direction orthogonal to the processing end surface 31. The plurality of cylindrical portions 32 are arranged without gaps along the processing end surface 31 of the grindstone 10.
Each cylindrical part 32 is constituted by six wall parts 33. The wall 33 intersects the wall 33 adjacent thereto at an angle of about 60 °. The cylindrical part 32 shares the wall part 33 with the cylindrical part 32 adjacent to itself. The space in the cylindrical portion 32 has a function of holding chips of the workpiece W. As shown in FIG. 3, two facing wall portions 33a of the six wall portions 33 extend along the radial direction R and face in the circumferential direction C. The distance between the two facing wall portions 33a decreases as approaching the radially inner side R1.

  As shown in FIG. 3, cylindrical portions 32 of the same size are arranged in a row direction along the circumferential direction C of the grindstone 10. The size of the cylindrical portion 32 is formed to be different for each row. As shown in FIG. 1A, the size of each cylindrical portion 32 is set to be proportional to the distance E in the radial direction R between the rotation axis O of the grindstone 10 and the position of the cylindrical portion 32. Therefore, the size of the tubular portions 32 in the radially outer row R2 is larger than the size of the tubular portions 32 in the radially inner row R1.

More specifically, as shown in FIG. 3, the plurality of cylindrical portions 32 include a plurality of first cylindrical portions 32a arranged along the first row L1 and a plurality of second cylindrical portions arranged along the second row L2. A plurality of third tubular portions 32c arranged along the third row L3; and a plurality of fourth tubular portions 32d arranged along the fourth row L4.
The third row L3 is located on the radially innermost side R1 of the first row L1 to the fourth row L4. The second row L2 is adjacent to the third row L3 and is located radially outward R2 from the third row L3. The first row L1 is located adjacent to the second row L2 and on the radially outer side R2 than the second row L2. The fourth row L4 is located radially outward R2 from the first row L1 adjacent to the first row L1.
The third cylindrical portion 32c has a shape in which the two wall portions 33 on the radially inner side R1 are omitted and the third cylindrical portion 32c is opened on the radially inner side R1. The fourth cylindrical portion 32d has a shape in which the two walls 33 on the radially outer side R2 are omitted and the fourth cylindrical portion 32d is opened on the radially outer side R2.

The two facing wall portions 33a of the fourth tubular portion 32d are arranged in the circumferential direction C at a distance of a fourth distance Dd. Therefore, the plurality of facing wall portions 33a are arranged at intervals of the fourth distance Dd over the entire circumference of the fourth row L4 in the circumferential direction C.
The two facing wall portions 33a of the first cylindrical portion 32a are arranged in the circumferential direction C with a first distance Da smaller than the fourth distance Dd. Therefore, the plurality of facing wall portions 33a are arranged at intervals of the first distance Da over the entire circumference of the first row L1 in the circumferential direction C.
The two facing wall portions 33a of the second cylindrical portion 32b are arranged in the circumferential direction C with a second distance Db smaller than the first distance Da. Therefore, the plurality of facing wall portions 33a are arranged at intervals of the second distance Db over the entire circumference of the second row L2 in the circumferential direction C.
The two facing wall portions 33a of the third cylindrical portion 32c are arranged in the circumferential direction C with a third distance Dc smaller than the second distance Db. Therefore, the plurality of facing wall portions 33a are arranged at intervals of the third distance Dc over the entire circumference in the circumferential direction C of the third row L3.
Therefore, the magnitude relationship between the first to fourth distances Da to Dd is “Dc <Db <Da <Dd”. The first to fourth distances Da to Dd are, for example, an average value, a minimum value, or a maximum value of the distance between the pair of facing wall portions 33a.

  The first tubular portions 32a arranged in the first row L1 are shifted from the fourth tubular portions 32d arranged in the fourth row L4 in the circumferential direction C by a distance that is a half of the fourth distance Dd. Further, the second cylindrical portions 32b arranged in the second row L2 are shifted from the first cylindrical portions 32a arranged in the first row L1 in the circumferential direction C by a distance that is a half of the first distance Da. . Further, the third tubular portions 32c arranged in the third row L3 are shifted from the second tubular portions 32b arranged in the second row L2 by half the second distance Db in the circumferential direction C. .

  As shown in FIGS. 1B, 2, and 4, the side surface processing portion 40 has an annular shape extending in the Z direction, and has a processing side surface 41 with which the workpiece W contacts during processing. The processing side surface 41 extends from the peripheral edge of the processing end surface 31 so as to be orthogonal to the processing end surface 31. The grindstone holder 20 is located in the side surface processing part 40.

More specifically, as shown in FIG. 1B, the side surface processed portion 40 has a honeycomb structure. That is, the side surface processing portion 40 includes a plurality of regular hexagonal cylindrical portions 42 extending along the radial direction R orthogonal to the processing side surface 41. The plurality of cylindrical portions 42 are arranged without gaps along the processing side surface 41 of the grindstone 10. Each of the plurality of cylinders 42 has the same size.
Each cylindrical part 42 is constituted by six wall parts 43. The wall 43 intersects the wall 33 adjacent thereto at an angle of about 60 °. The tube portion 42 shares the wall portion 43 with the tube portion 42 adjacent to itself. The space in the cylindrical portion 42 has a function of holding chips of the workpiece W.

As shown in FIGS. 5A and 5B, the grindstone 10 includes a plurality of abrasive grains 15 and a bonding material 16 that binds the plurality of abrasive grains 15.
The plurality of abrasive grains 15 are distributed in the bonding material 16. The abrasive grains 15 are, for example, diamond. The abrasive grains 15 are not limited to diamond, but may be cubic boron nitride (CBN) abrasive grains, or may be a mixture of CBN abrasive grains and diamond. Furthermore, the plurality of abrasive grains 15 may be silicon carbide (SiC), fused alumina (Al ₂ O ₃ ), or a mixture thereof.

  The bonding material 16 holds a plurality of abrasive grains 15 inside. The bonding material 16 is formed of a metal such as nickel and aluminum, a resin, or a ceramic.

  As shown in FIG. 2, the end portion P1 of the radially outer side R2 of the grindstone 10 has an abrasive grain 15 occupying a unit volume of the binder 16 as compared with a portion P2 of the radially inner side R1 of the grindstone 10 than the end portion P1. Is set to be high. The average grain size of the abrasive grains 15 at the end P1 shown in FIG. 5A is larger than the average grain size of the abrasive grains 15 at the portion P2 shown in FIG. 5B. Further, the number of abrasive grains 15 per unit volume at the end P1 shown in FIG. 5A is larger than the number of abrasive grains 15 per unit volume at the site P2 shown in FIG. 5B.

Next, the operation of the grindstone 10 will be described.
First, as shown in FIG. 2, the processing end surface 31 of the end surface processing portion 30 of the grinding wheel 10 is brought into contact with the upper surface of the workpiece W while rotating the grinding wheel 10 about the rotation axis O. Thereby, the upper surface of the workpiece W is polished or ground. When the grindstone 10 rotates around the rotation axis O, the portion of the grindstone 10 on the radially outer side R2 rotates faster than the portion of the grindstone 10 on the radially inner side R1. For this reason, in the case of a conventional grindstone in which hexagonal cylinders of the same size are arranged, the processing amount of the portion of the workpiece that comes into contact with the grindstone in the radial direction is the inner diameter of the grindstone in the workpiece. Larger than the processing amount of the part that comes into contact with. Therefore, in the conventional configuration, it was difficult to uniformly process the workpiece. In this regard, in the present embodiment, the interval (first to fourth distances Da to Dd) between the facing wall portions 33a is set to be larger as going toward the radially outer side R2. Thus, regardless of the peripheral speed difference in the radial direction R of the grindstone 10, as shown in FIG. 2, the processing amount of the workpiece W at the position Q2 that contacts the radially outer R2 of the grindstone 10 is equal to the workpiece amount. The amount of processing is equal to the processing amount at a position Q1 of W that contacts the radially inner side R1 of the grindstone 10. Therefore, the workpiece W can be processed with a more uniform processing amount.

When the processing of the upper surface of the workpiece W by the end surface processing unit 30 is completed, the processing side surface 41 of the side surface processing unit 40 is brought into contact with the side surface of the workpiece W while rotating the grindstone 10 in the axial direction. Thus, the side surface of the workpiece W is polished or ground.
As described above, the upper surface and the side surface of the workpiece W can be processed by the grindstone 10.

(effect)
According to the embodiment described above, the following effects can be obtained.

(1) The grindstone 10 includes an end surface processing portion 30 that is arranged along a processing end surface 31 for polishing or grinding the workpiece W and has a plurality of cylindrical portions 32 extending along a Z direction orthogonal to the processing end surface 31. . The plurality of cylindrical portions 32 of the end surface processing portion 30 include a first cylindrical portion 32a having a plurality of facing wall portions 33a arranged at a first distance Da in the circumferential direction C of the grindstone 10, and a grinding stone larger than the first cylindrical portion 32a. And a second cylindrical portion 32b having a plurality of facing wall portions 33a arranged in the circumferential direction C at a second radial distance Rb smaller than the first distance Da.
According to this configuration, the interval (first distance Da) between the facing wall portions 33a in the first tubular portion 32a is equal to the facing wall portion 33a in the second tubular portion 32b located radially inward R1 of the first tubular portion 32a. (The second distance Db). Thus, regardless of the peripheral speed difference in the radial direction R of the grindstone 10, the processing amount of the workpiece Q at the position Q2 that contacts the radially outer side R2 of the grindstone 10 is the diameter of the grindstone 10 of the workpiece W. This is equivalent to the processing amount at the position Q1 that contacts the inner side R1 in the direction. Therefore, the workpiece W can be processed with a more uniform processing amount.

(2) The grindstone 10 has a honeycomb structure in which a plurality of hexagonal cylindrical portions 32 are arranged along the processing end surface 31. The first cylindrical portions 32a are arranged along a first row L1 along the circumferential direction C. The second cylindrical portions 32b are arranged along the second row L2 along the circumferential direction C on the radially inner side R1 of the grindstone 10 than the first row L1.
According to this configuration, since the grindstone 10 has a honeycomb structure, the strength of the grindstone 10 can be increased.

(3) The first row L1 is located radially outside R2 of the grindstone 10 with respect to the second row L2, adjacent to the second row L2. The second tubular portions 32b arranged in the second row L2 are shifted from the first tubular portions 32a arranged in the first row L1 in the circumferential direction C by a distance half the first distance Da.
According to this configuration, the plurality of cylindrical portions 32 are spatially arranged efficiently. Therefore, the sharpness of the grindstone 10 can be enhanced while increasing the strength of the grindstone 10.

(4) The size of each cylindrical part 32 of the end face processing part 30 is set to be proportional to the distance E in the radial direction R between the rotation axis O of the grindstone 10 and the position of the cylindrical part 32.
According to this configuration, as the distance E between the rotation axis O of the grindstone 10 and the position of the cylindrical portion 32 increases, the size of the cylindrical portion 32 increases. Therefore, as described above, the workpiece W can be processed with a more uniform processing amount.

(5) The grindstone 10 includes a side surface processed portion 40 that is arranged on the processing side surface 41 located on the side peripheral surface of the grinding stone 10 and has a plurality of cylindrical portions 42 extending in the radial direction R perpendicular to the processing side surface 41.
According to this configuration, the workpiece W can be processed not only by the end face processing section 30 but also by the side processing section 40. Therefore, the degree of freedom of processing by the grindstone 10 is increased.

(6) Each of the plurality of cylindrical portions 32 of the side surface processed portion 40 has a hexagonal cylindrical shape.
According to this configuration, the strength of the grindstone 10 can be increased, and the sharpness of the grindstone 10 can be enhanced.

(7) The grindstone 10 includes a plurality of abrasive grains 15 and a bonding material 16 that binds the plurality of abrasive grains 15. The end P1 of the radial outside R2 of the grindstone 10 has a smaller percentage of the abrasive grains 15 in the unit volume of the binder 16 than the portion P2 of the grindstone 10 located radially inside R1 than the end P1. Set high.
According to this configuration, a force is easily applied to the end P1 of the radially outer side R2 of the grindstone 10 at the time of processing. Therefore, the life of the grindstone 10 can be extended by increasing the proportion of the abrasive grains 15 in the unit volume of the binder 16 at the end P1.

(Modification)
Note that the above embodiment can be implemented in the following form in which this is appropriately changed.

  In the above-described embodiment, the end surface processed portion 30 has a honeycomb structure in which a plurality of hexagonal cylindrical portions 32 are arranged without gaps, but the structure of the end surface processed portion 30 is not limited to this. For example, as shown in FIG. 6, the end face processed portion 130 may have a structure in which a plurality of quadrangular cylindrical portions 132 are arranged without gaps. The tubular portion 132 has a rectangular tubular shape that is curved along the circumferential direction C and is long in the circumferential direction C. The tubular portion 132 is arranged in the same manner as the tubular portion 32 of the above embodiment, and has a plurality of facing wall portions 33a. With this structure, the same operation and effect as those of the above embodiment can be obtained.

  In the above-described embodiment, the processing side surface 41 of the side surface processing portion 40 of the grindstone 10 may have a curved concave portion that is concave toward the rotation axis O. Thereby, the side surface of the workpiece W can be formed into a curved convex shape.

  In the above embodiment, the grindstone 10 includes the end face processing part 30 and the side processing part 40, but the side processing part 40 may be omitted.

In the above embodiment, the end portion P1 of the radially outer side R2 of the grindstone 10 has the abrasive grains 15 occupying a unit volume of the binder 16 as compared with the portion P2 of the radially inner side R1 of the grindstone 10 than the end portion P1. The existence ratio was set high. However, the present invention is not limited to this, and the ratio of the abrasive grains 15 occupying the unit volume of the binder 16 at the end P1 and the site P2 may be set to be the same.
For example, the average grain size of the abrasive grains 15 at the end P1 may be substantially the same as the average grain size of the abrasive grains 15 at the site P2. Further, the number of the abrasive grains 15 at the end P1 may be substantially the same as the number of the abrasive grains 15 at the portion P2.

DESCRIPTION OF SYMBOLS 1 Whetstone unit 10 Whetstone 15 Abrasive grain 16 Bonding material 20 Whetstone holder 25 Shaft 27 Motor 30, 130 End face processing part 31 Processing end faces 32, 42, 132 Tube part 32a First cylinder part 32b Second cylinder part 32c Third cylinder part 32d Fourth cylindrical part 33, 43 Wall part 33a Facing wall part 40 Side processing part 41 Processing side C Circumferential direction L1 First row L2 Second row L3 Third row L4 Fourth row O Rotation axis R Radial direction R1 Radial inner side R2 Radially outer side W Workpiece Da First distance Db Second distance Dc Third distance Dd Fourth distance

Claims (7)

A grindstone provided with an end surface processing portion having a plurality of cylindrical portions arranged along a processing end surface for polishing or grinding a workpiece and extending along a direction orthogonal to the processing end surface,
The plurality of cylindrical portions of the end face processing portion,
A first cylindrical portion having a plurality of facing wall portions lined up at a first distance in a circumferential direction of the whetstone;
A second cylinder portion, which is located radially inward of the grindstone from the first cylinder portion and has a plurality of facing wall portions arranged in the circumferential direction at a second distance smaller than the first distance. ,
Whetstone. The whetstone has a honeycomb structure in which the plurality of cylindrical portions having a hexagonal cylindrical shape are arranged along the processing end surface,
The first cylindrical portion is arranged along a first row along the circumferential direction,
The second cylindrical portion is arranged along a second row along the circumferential direction on a radially inner side of the grindstone than the first row,
The whetstone according to claim 1. The first row is positioned radially outward of the grindstone with respect to the second row, adjacent to the second row,
The second cylinders arranged in the second row are offset from the first cylinders arranged in the first row by half the first distance in the circumferential direction.
The whetstone according to claim 2. The plurality of cylindrical portions of the end face processing portion, respectively, is set to a size proportional to a radial distance between the rotation axis of the grinding wheel and the position of the cylindrical portion,
The grindstone according to any one of claims 1 to 3. The whetstone includes a side surface processing portion having a plurality of cylindrical portions arranged along a processing side surface for polishing or grinding a workpiece located on a side peripheral surface of the grinding stone and extending in a direction perpendicular to the processing side surface.
The grindstone according to claim 1. Each of the plurality of cylindrical portions of the side surface processed portion has a hexagonal cylindrical shape,
A whetstone according to claim 5. The whetstone is
Multiple abrasive grains,
And a bonding material for bonding the plurality of abrasive grains,
The radially outer end of the grindstone is compared to a portion of the grindstone radially inner than the end, and the ratio of the abrasive grains occupying a unit volume of the binder is set higher.
The grindstone according to any one of claims 1 to 6.