JP2017213664A - Grind stone and grinding wheel - Google Patents

Grind stone and grinding wheel Download PDF

Info

Publication number
JP2017213664A
JP2017213664A JP2016110782A JP2016110782A JP2017213664A JP 2017213664 A JP2017213664 A JP 2017213664A JP 2016110782 A JP2016110782 A JP 2016110782A JP 2016110782 A JP2016110782 A JP 2016110782A JP 2017213664 A JP2017213664 A JP 2017213664A
Authority
JP
Japan
Prior art keywords
grinding
grindstone
workpiece
holes
shape
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2016110782A
Other languages
Japanese (ja)
Inventor
良吾 馬路
Ryogo Umaji
良吾 馬路
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Disco Corp
Original Assignee
Disco Abrasive Systems Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Disco Abrasive Systems Ltd filed Critical Disco Abrasive Systems Ltd
Priority to JP2016110782A priority Critical patent/JP2017213664A/en
Publication of JP2017213664A publication Critical patent/JP2017213664A/en
Pending legal-status Critical Current

Links

Images

Landscapes

  • Polishing Bodies And Polishing Tools (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a grind stone and grinding wheel capable of sufficiently discharging grinding swarf during grinding of a workpiece.SOLUTION: A grind stone 22 is configured by including two or more through-holes 25 penetrating from a grinding surface 220 to an opposite surface 220' on an opposite side. The grind stone has a mesh shape in which through-holes 25 each having a nearly columnar shape or a prismatic shape are aggregated, and a honeycomb structure formed of the through-holes each having a hexagonal column shape. Accordingly, the grind stone makes it possible to sufficiently feed a grinding fluid through the through-holes 25 to a working point at which the grind stone 22 comes into contract with a plate-like workpiece W, and possible to promote the discharge of the grinding swarf to effectively discharge the grinding swarf.SELECTED DRAWING: Figure 2

Description

本発明は、被加工物を研削する砥石及び砥石が装着された研削ホイールに関する。   The present invention relates to a grindstone for grinding a workpiece and a grinding wheel equipped with the grindstone.

板状ワークなどの被加工物は、例えば研削装置によって研削されることにより薄化される(例えば、下記の特許文献1を参照)。研削装置は、板状ワークを保持するチャックテーブルと、板状ワークを研削する砥石を備える研削ホイールとを備えている。研削ホイールの内部には、研削水が流れる連通路が形成され、連通路は研削ホイールの下面に形成された供給口に連通している。この研削装置では、連通路を介して供給口からチャックテーブルに保持される板状ワークに向けて研削水を供給することにより、研削時に発生する研削屑を排出しながら、砥石によって板状ワークを所望の厚みに研削することができる。   A workpiece such as a plate-shaped workpiece is thinned by being ground by, for example, a grinding device (for example, see Patent Document 1 below). The grinding apparatus includes a chuck table that holds a plate-like workpiece and a grinding wheel that includes a grindstone for grinding the plate-like workpiece. A communication path through which grinding water flows is formed inside the grinding wheel, and the communication path communicates with a supply port formed on the lower surface of the grinding wheel. In this grinding apparatus, by supplying grinding water from the supply port to the plate-like workpiece held by the chuck table via the communication path, the grinding workpiece generated by the grinding stone is discharged while grinding waste generated during grinding is discharged. It can be ground to a desired thickness.

特開2013−086218号公報JP 2013-086218 A

しかし、特許文献1に示す従来の研削ホイールにおいては、砥石で板状ワークを研削する際に、研削ホイールの下部に環状に並べられて固着された砥石の内側に形成された供給口からチャックテーブルに保持された板状ワークに向けて研削水を供給することが可能となっているが、砥石と板状ワークとが接触する加工点に研削水がいきわたらず、研削屑を充分に排出することができないという問題がある。   However, in the conventional grinding wheel shown in Patent Document 1, when a plate-shaped workpiece is ground with a grindstone, a chuck table is formed from a supply port formed inside the grindstone that is annularly arranged and fixed to the lower portion of the grinding wheel. Grinding water can be supplied toward the plate-shaped workpiece held on the surface, but the grinding water does not flow to the processing point where the grindstone and the plate-shaped workpiece are in contact, and the grinding waste is sufficiently discharged. There is a problem that can not be.

本発明は、上記の事情に鑑みてなされたものであり、被加工物の研削時において研削屑を充分に排出できるようにすることを目的としている。   The present invention has been made in view of the above circumstances, and an object of the present invention is to make it possible to sufficiently discharge grinding waste during grinding of a workpiece.

本発明は、被加工物を研削する砥石であって、該砥石の研削面から反対の面に貫通する2以上の貫通孔を含み、該貫通孔を通じて研削水が供給される構成となっている。   The present invention is a grindstone for grinding a workpiece, and includes two or more through holes penetrating from the grinding surface of the grindstone to the opposite surface, and is supplied with grinding water through the through holes. .

上記貫通孔は略円柱形状または角柱形状であり、該貫通孔が集合したメッシュ形状で構成してもよい。   The through hole may have a substantially cylindrical shape or a prismatic shape, and may have a mesh shape in which the through holes are gathered.

上記貫通孔は六角柱形状であり、ハニカム構造で構成してもよい。   The through hole has a hexagonal column shape, and may be formed of a honeycomb structure.

上記砥石の上記研削面を多角形状で構成してもよい。   You may comprise the said grinding surface of the said grindstone in polygonal shape.

また、本発明は、被加工物を研削する研削ホイールであって、ホイールマウントに装着されるホイールマウント装着面を有する環状基台と、該環状基台の自由端部にリング状に配設された上記砥石と、を含み、該環状基台から上記貫通孔を通じて被加工物の被研削面に研削水を供給することができる。   Further, the present invention is a grinding wheel for grinding a workpiece, and is disposed in a ring shape on an annular base having a wheel mount mounting surface to be mounted on the wheel mount, and on a free end of the annular base. In addition, the grinding water can be supplied from the annular base to the surface to be ground of the workpiece through the through hole.

本発明にかかる砥石は、砥石の研削面から反対の面に貫通する2以上の貫通孔を含んで構成したため、貫通孔を通じて研削水を砥石と被加工物とが接触する加工点にいきわたらせることができ、研削屑の排出を促進させ研削屑を充分に排出することができる。   Since the grindstone according to the present invention includes two or more through-holes penetrating from the grinding surface of the grindstone to the opposite surface, the grinding water is distributed through the through-holes to the machining point where the grindstone and the workpiece are in contact with each other. It is possible to accelerate the discharge of the grinding waste and to sufficiently discharge the grinding waste.

上記貫通孔が略円柱形状または角柱形状であり、砥石の研削面において複数の貫通孔が集合したメッシュ形状により構成した場合は、砥石で被加工物を研削するときに、複数の貫通孔を通じて研削水を上記の加工点に向けて供給することができるため、効果的に研削屑の排出を促進することができる。   When the through hole has a substantially cylindrical shape or a prismatic shape and is configured with a mesh shape in which a plurality of through holes are gathered on the grinding surface of the grindstone, when the workpiece is ground with the grindstone, grinding is performed through the plurality of through holes. Since water can be supplied toward the processing point, it is possible to effectively promote the discharge of grinding scraps.

上記貫通孔が六角柱形状であり、砥石が複数の貫通孔が集合したハニカム構造で構成した場合は、砥石で被加工物を研削するときに、複数の貫通孔を通じて研削水を上記の加工点に向けて効率よく供給することができるため、研削屑の排出をより促進することができる。   When the through-hole has a hexagonal column shape and the grindstone is configured with a honeycomb structure in which a plurality of through-holes are aggregated, when grinding the workpiece with the grindstone, the grinding water is passed through the plurality of through-holes to the above processing point. Therefore, it is possible to more efficiently promote the discharge of grinding waste.

上記砥石の上記研削面を多角形状により構成した場合は、複数の上記貫通孔を通じて研削水を上記の加工点に向けて供給しつつ、砥石により被加工物を精度よく研削することができる。   When the grinding surface of the grindstone is configured in a polygonal shape, the workpiece can be accurately ground with the grindstone while supplying grinding water to the machining point through the plurality of through holes.

また、本発明にかかる研削ホイールは、ホイールマウントに装着されるホイールマウント装着面を有する環状基台と、環状基台の自由端部にリング状に配設された上記砥石と、を含み、環状基台から上記貫通孔を通じて被加工物の被研削面に研削水を供給できるように構成したため、被加工物の研削中は、貫通孔を通じて常に加工点に向けて研削水が効率よく流れていくため、研削屑が充分に排出され、砥石の研削面に研削屑が付着するのを防止することができる。   The grinding wheel according to the present invention includes an annular base having a wheel mount mounting surface to be mounted on the wheel mount, and the above-described grindstone disposed in a ring shape at the free end of the annular base, Since the grinding water can be supplied from the base to the grinding surface of the workpiece through the through hole, the grinding water always flows efficiently toward the machining point through the through hole during grinding of the workpiece. Therefore, it is possible to prevent the grinding waste from being sufficiently discharged and the grinding waste from adhering to the grinding surface of the grindstone.

研削装置の構成を示す斜視図である。It is a perspective view which shows the structure of a grinding apparatus. 研削ホイールの第1例によってチャックテーブルに保持された板状ワークを研削する状態を示す一部拡大断面図である。It is a partially expanded sectional view which shows the state which grinds the plate-shaped workpiece | work hold | maintained at the chuck table by the 1st example of a grinding wheel. (a)は研削ホイールの第1例の構成を示す斜視図である。(b)は角柱形状の貫通孔が形成された直方体形状の砥石の構成を示す斜視図である。(c)は角柱形状の貫通孔が形成された直方体形状の砥石の構成を示す底面図である。(A) is a perspective view which shows the structure of the 1st example of a grinding wheel. (B) is a perspective view showing a configuration of a rectangular parallelepiped shaped grindstone in which a prismatic through hole is formed. (C) is a bottom view showing a configuration of a rectangular parallelepiped shaped grindstone in which a prismatic through hole is formed. 略円柱形状の貫通孔が形成された直方体形状の砥石の構成を示す斜視図である。It is a perspective view which shows the structure of the rectangular parallelepiped-shaped grindstone in which the substantially cylindrical through-hole was formed. (a)は研削ホイールの第2例の構成を示す斜視図である。(b)は六角柱形状の貫通孔が形成された円柱形状の砥石の構成を示す斜視図である。(c)は六角柱形状の貫通孔が形成された円柱形状の砥石の構成を示す底面図である。(A) is a perspective view which shows the structure of the 2nd example of a grinding wheel. (B) is a perspective view which shows the structure of the column-shaped grindstone in which the hexagonal column-shaped through-hole was formed. (C) is a bottom view showing a configuration of a cylindrical grindstone in which a hexagonal column-shaped through hole is formed. (a)は研削ホイールの第3例の構成を示す斜視図である。(b)は六角柱形状の貫通孔が形成された直方体形状の砥石の構成を示す斜視図である。(c)は六角柱形状の貫通孔が形成された直方体形状の砥石の構成を示す底面図である。(A) is a perspective view which shows the structure of the 3rd example of a grinding wheel. (B) is a perspective view which shows the structure of the rectangular parallelepiped-shaped grindstone in which the hexagonal column-shaped through-hole was formed. (C) is a bottom view showing a configuration of a rectangular parallelepiped-shaped grindstone in which a hexagonal column-shaped through hole is formed. 三角形状の研削面を有する砥石の構成を示す底面図である。It is a bottom view which shows the structure of the grindstone which has a triangular-shaped grinding surface. 研削ホイールの第4例であって、自由端部における三角形状の研削面を有する砥石の配置例を示す部分拡大底面図である。It is a 4th example of a grinding wheel, Comprising: It is a partial expanded bottom view which shows the example of arrangement | positioning of the grindstone which has a triangular-shaped grinding surface in a free end part. 卵形状の研削面を有する砥石の構成を示す底面図である。It is a bottom view which shows the structure of the grindstone which has an egg-shaped grinding surface. 研削ホイールの第5例であって、自由端部における卵形状の研削面を有する砥石の配置例を示す部分拡大底面図である。It is a 5th example of a grinding wheel, Comprising: It is a partial expanded bottom view which shows the example of arrangement | positioning of the grindstone which has the egg-shaped grinding surface in a free end part. 五角形状の研削面を有する砥石の構成を示す底面図である。It is a bottom view which shows the structure of the grindstone which has a pentagonal grinding surface. 階段形状の研削面を有する砥石の構成を示す底面図である。It is a bottom view which shows the structure of the grindstone which has a step-shaped grinding surface. 大きさの異なる貫通孔が複数形成された砥石の構成を示す底面図である。It is a bottom view which shows the structure of the grindstone in which the several through-hole from which a magnitude | size differs was formed.

図1に示す研削装置1は、Y軸方向に延在する装置ベース2と、装置ベース2のY軸方向後部に立設されたコラム3とを有している。装置ベース2の上面には、被加工物を吸引保持する保持面4aを有するチャックテーブル4が配設されている。チャックテーブル4の周囲はカバー5によって覆われている。チャックテーブル4は、図示しないY軸方向移動手段によりY軸方向に往復移動することができる。   A grinding apparatus 1 shown in FIG. 1 has an apparatus base 2 extending in the Y-axis direction and a column 3 erected on the rear part of the apparatus base 2 in the Y-axis direction. On the upper surface of the apparatus base 2, a chuck table 4 having a holding surface 4a for sucking and holding a workpiece is disposed. The periphery of the chuck table 4 is covered with a cover 5. The chuck table 4 can reciprocate in the Y axis direction by a Y axis direction moving means (not shown).

コラム3のY軸方向前方には、被加工物に研削を施す研削手段10と、チャックテーブル4に対して接近及び離反する研削送り方向(Z軸方向)に研削手段10を昇降させる研削送り手段30とが配設されている。研削送り手段30は、Z軸方向に延在するボールネジ31と、ボールネジ31の一端に接続されたモータ32と、ボールネジ31と平行に延在する一対のガイドレール33と、一方の面が研削手段10に固定された昇降板34とを備える。一対のガイドレール33には昇降板34の他方の面が摺接し、昇降板34の内部に形成されたナットにはボールネジ31が螺合している。モータ32によってボールネジ31を回動させることにより、昇降板34とともに研削手段10をZ軸方向に昇降させることができる。   In front of the column 3 in the Y-axis direction, a grinding means 10 that grinds the workpiece, and a grinding feed means that moves the grinding means 10 up and down in a grinding feed direction (Z-axis direction) that approaches and separates from the chuck table 4. 30. The grinding feed means 30 includes a ball screw 31 extending in the Z-axis direction, a motor 32 connected to one end of the ball screw 31, a pair of guide rails 33 extending in parallel with the ball screw 31, and one surface being a grinding means. And an elevating plate 34 fixed to 10. The other surface of the elevating plate 34 is in sliding contact with the pair of guide rails 33, and a ball screw 31 is screwed into a nut formed inside the elevating plate 34. By rotating the ball screw 31 by the motor 32, the grinding means 10 can be lifted and lowered in the Z-axis direction together with the lifting plate 34.

研削手段10は、Z軸方向の軸心を有するスピンドル11と、スピンドル11の外周を囲繞するスピンドルハウジング12を保持するホルダ13と、スピンドル11の一端に取り付けられたモータ14と、スピンドル11の下端にホイールマウント15を介して装着され被加工物を研削する研削ホイール20とを備える。モータ14がスピンドル11を所定の回転速度で回転させることにより、研削ホイール20を所定の回転速度で回転させることができる。   The grinding means 10 includes a spindle 11 having an axis in the Z-axis direction, a holder 13 that holds a spindle housing 12 that surrounds the outer periphery of the spindle 11, a motor 14 attached to one end of the spindle 11, and a lower end of the spindle 11. And a grinding wheel 20 mounted on the wheel mount 15 for grinding the workpiece. When the motor 14 rotates the spindle 11 at a predetermined rotation speed, the grinding wheel 20 can be rotated at a predetermined rotation speed.

図2に示すように、研削ホイール20は、研削ホイールの第1例であって、ホイールマウント15に装着されるホイールマウント装着面210を有する環状基台21と、環状基台21の自由端部211においてリング状に配設された砥石22とを含んで構成されている。研削ホイール20をホイールマウント15に装着する際には、環状基台21のホイールマウント装着面210にホイールマウント15の下面を密着させた状態で、ホイールマウント15に形成されたネジ穴にボルト16を挿入するとともに、環状基台21に形成されたネジ穴でボルト16を締結することにより、研削ホイール20がホイールマウント15に装着される。   As shown in FIG. 2, the grinding wheel 20 is a first example of a grinding wheel, and includes an annular base 21 having a wheel mount attachment surface 210 attached to the wheel mount 15, and a free end portion of the annular base 21. 211 and a grindstone 22 arranged in a ring shape. When the grinding wheel 20 is mounted on the wheel mount 15, the bolt 16 is inserted into the screw hole formed in the wheel mount 15 with the lower surface of the wheel mount 15 in close contact with the wheel mount mounting surface 210 of the annular base 21. The grinding wheel 20 is mounted on the wheel mount 15 by inserting and fastening the bolt 16 with a screw hole formed in the annular base 21.

砥石22は、図2の部分拡大図に示すように、被加工物を研削する研削面220から反対側の反対面220’に貫通する2以上、好ましくは3以上の貫通孔25を含む構成となっている。環状基台21の自由端部211には、砥石22を嵌め込むためのリング状の凹部214が形成されている。そして、砥石22は、凹部214に嵌め込まれており、例えば接着材により接着固定されている。   As shown in the partially enlarged view of FIG. 2, the grindstone 22 includes two or more, preferably three or more through holes 25 penetrating from the grinding surface 220 for grinding the workpiece to the opposite surface 220 ′ on the opposite side. It has become. A ring-shaped recess 214 for fitting the grindstone 22 is formed at the free end 211 of the annular base 21. The grindstone 22 is fitted in the recess 214, and is bonded and fixed by an adhesive, for example.

スピンドル11の内部には、その中央を貫通して鉛直方向に延在する流水路110が形成され、流水路110の一端には研削水供給源6が接続されている。ホイールマウント15の内部には、流水路110の他端に接続される連通路150が形成されている。さらに、環状基台21の内部には、連通路150に連通する研削水供給孔212と、研削水供給孔212に連通し環状基台21の内側部材215により分岐された供給流路213a,213bとが形成されている。供給流路213aは、砥石22の反対面220’側に連通しており、供給流路213bは、砥石22の側面側に連通している。   Inside the spindle 11, there is formed a flowing water passage 110 that penetrates the center of the spindle 11 and extends in the vertical direction, and a grinding water supply source 6 is connected to one end of the flowing water passage 110. A communication passage 150 connected to the other end of the flowing water passage 110 is formed inside the wheel mount 15. Further, inside the annular base 21, there are a grinding water supply hole 212 communicating with the communication passage 150, and supply channels 213 a and 213 b branched to the grinding water supply hole 212 by the inner member 215 of the annular base 21. And are formed. The supply channel 213 a communicates with the opposite surface 220 ′ of the grindstone 22, and the supply channel 213 b communicates with the side surface of the grindstone 22.

ここで、研削水供給孔212は、内側部材215の端部215aが研削水供給孔212の中心の下方に位置するように形成するとよい。これにより、研削水供給孔212から下方に流出する研削水が供給流路213a,213bに流れ込むため、供給流路213aから貫通孔25を通じて砥石22と被加工物とが接触する加工点に向けて研削水を供給することができるとともに、供給流路213bを通じて加工点に近い位置(砥石22の側面側)に向けて研削水を供給することができる。   Here, the grinding water supply hole 212 may be formed so that the end 215 a of the inner member 215 is positioned below the center of the grinding water supply hole 212. Accordingly, since the grinding water flowing downward from the grinding water supply hole 212 flows into the supply flow paths 213a and 213b, the grinding stone 22 and the workpiece are contacted from the supply flow path 213a through the through hole 25. The grinding water can be supplied, and the grinding water can be supplied toward the position close to the processing point (side surface side of the grindstone 22) through the supply channel 213b.

研削ホイール20では、図3(a)に示すように、環状基台21の自由端部211において等間隔をあけて複数の砥石22がリング状に配設されている。隣り合う砥石22の間の間隔をあけすぎると、被加工物の研削結果(例えば被加工物の面粗さ)に悪影響をもたらすことが想定されるため、被加工物の材質・大きさや砥石22の材質等に応じて、隣り合う砥石22の間の間隔を適宜設定するとよい。また、複数の砥石22は、自由端部211において隣接するように配置してもよい。なお、砥石22の個数は特に限定されるものではない。   In the grinding wheel 20, as shown in FIG. 3A, a plurality of grindstones 22 are arranged in a ring shape at equal intervals at the free end 211 of the annular base 21. If the interval between the adjacent grindstones 22 is too large, it is assumed that the grinding result of the workpiece (for example, the surface roughness of the workpiece) is adversely affected. Therefore, the material / size of the workpiece and the grindstone 22 are assumed. The interval between the adjacent grindstones 22 may be appropriately set according to the material or the like. Moreover, you may arrange | position the some grindstone 22 so that it may adjoin in the free end part 211. FIG. The number of grindstones 22 is not particularly limited.

図3(b)に示すように、砥石22は、直方体形状に形成されており、被加工物を研削する研削面220が四角形状となっている。砥石22を構成する貫通孔25は、角柱形状(図示の例では四角柱)に形成されており、複数の貫通孔25が集合したメッシュ形状となっている。図3(c)に示すように、砥石22の強度が低下しないように、隣り合う貫通孔25の壁23の厚みH1は、少なくとも0.5mmにするとよい。砥石22のサイズは、例えば2〜3インチで構成されることが好ましい。貫通孔25の数は、本実施形態に示した数に限られず、砥石22のサイズに合わせて少なくとも2以上となるように増減すればよい。本実施形態に示す砥石22は、例えば、ポーラス部材により形成されている。これにより、複数の貫通孔25だけでなく、全てのポーラスを通じて砥石22全体に研削水をいきわたらせることができ、上記した加工点に向けて研削水を供給することが可能となっている。   As shown in FIG. 3B, the grindstone 22 is formed in a rectangular parallelepiped shape, and the grinding surface 220 for grinding the workpiece has a quadrangular shape. The through holes 25 constituting the grindstone 22 are formed in a prismatic shape (a quadrangular prism in the illustrated example), and have a mesh shape in which a plurality of through holes 25 are gathered. As shown in FIG. 3C, the thickness H1 of the wall 23 of the adjacent through hole 25 is preferably at least 0.5 mm so that the strength of the grindstone 22 does not decrease. The size of the grindstone 22 is preferably composed of, for example, 2 to 3 inches. The number of through holes 25 is not limited to the number shown in the present embodiment, and may be increased or decreased according to the size of the grindstone 22 to be at least 2 or more. The grindstone 22 shown in this embodiment is formed of, for example, a porous member. Thereby, not only the plurality of through-holes 25 but also the entire grinding stone 22 can be distributed through all the porosities, and the grinding water can be supplied toward the above-described processing points.

図3に示した砥石22に代えて、図4に示す砥石22aを用いることもできる。図4に示す砥石22aは、砥石22と同様に、直方体形状に形成され、被加工物を研削する研削面220aが四角形状となっている。この砥石22aを構成する貫通孔26は、略円柱形状に形成されており、複数の貫通孔26が集合したメッシュ形状となっている。貫通孔26の数についても本実施形態に示した数に限られず、砥石22aのサイズに合わせて少なくとも2以上となるように増減すればよい。このように、砥石22,22aは、研削面220,220aにおいて複数の貫通孔25,26が集合したメッシュ形状となっているため、砥石22,22aで被加工物を研削する際に、複数の貫通孔25,26を通じて研削水を上記した加工点に効率よく供給することが可能となり、研削屑の排出を促進することができる。   4 can be used instead of the grindstone 22 shown in FIG. The grindstone 22a shown in FIG. 4 is formed in a rectangular parallelepiped shape like the grindstone 22, and the grinding surface 220a for grinding the workpiece has a quadrangular shape. The through hole 26 constituting the grindstone 22a is formed in a substantially cylindrical shape, and has a mesh shape in which a plurality of through holes 26 are gathered. The number of the through holes 26 is not limited to the number shown in the present embodiment, and may be increased or decreased so as to be at least 2 according to the size of the grindstone 22a. Thus, since the grindstones 22 and 22a have a mesh shape in which a plurality of through holes 25 and 26 are gathered on the grinding surfaces 220 and 220a, when grinding the workpiece with the grindstones 22 and 22a, a plurality of grindstones 22 and 22a are provided. Grinding water can be efficiently supplied to the above-described processing points through the through holes 25 and 26, and discharge of grinding waste can be promoted.

次に、図1に示した研削装置1において、砥石22が配設された研削ホイール20を用いて図2に示す板状ワークWを研削する動作例について説明する。板状ワークWは、円形板状の被加工物の一例であって、その表面Waには、デバイスを保護するテープTが貼着されている。一方、表面Waと反対側の裏面Wbは、砥石22によって研削される被研削面となっている。   Next, an operation example of grinding the plate-like workpiece W shown in FIG. 2 using the grinding wheel 20 provided with the grindstone 22 in the grinding apparatus 1 shown in FIG. 1 will be described. The plate-like workpiece W is an example of a circular plate-like workpiece, and a tape T for protecting the device is attached to the surface Wa of the workpiece. On the other hand, the back surface Wb opposite to the front surface Wa is a surface to be ground that is ground by the grindstone 22.

チャックテーブル4の保持面4aに板状ワークWの表面Wa側を載置して裏面Wbを上向きに露出させる。続いて図示しない吸引源の吸引力を保持面4aに作用させて板状ワークWを吸引保持し、板状ワークWを保持したチャックテーブル4を研削手段10の下方に移動させる。続いて、チャックテーブル4を例えば矢印a方向に回転させるとともに、研削ホイール20を例えば矢印a方向に回転させながら、図1に示した研削送り手段30によって研削ホイール20をチャックテーブル4の保持面4aに接近する方向に下降させる。そして、回転しながら下降する砥石22を板状ワークWの裏面Wbに接触させ研削を行う。   The front surface Wa side of the plate-like workpiece W is placed on the holding surface 4a of the chuck table 4, and the back surface Wb is exposed upward. Subsequently, a suction force of a suction source (not shown) is applied to the holding surface 4 a to suck and hold the plate-like workpiece W, and the chuck table 4 holding the plate-like workpiece W is moved below the grinding means 10. Subsequently, while the chuck table 4 is rotated in the direction of the arrow a, for example, and the grinding wheel 20 is rotated in the direction of the arrow a, for example, the grinding wheel 20 is held by the holding surface 4a of the chuck table 4 by the grinding feed means 30 shown in FIG. Lower in the direction approaching. Then, the grindstone 22 descending while rotating is brought into contact with the back surface Wb of the plate-like workpiece W for grinding.

板状ワークWの研削中は、研削水供給源6から砥石22に向けて研削水を供給し続ける。具体的には、研削水供給源6がスピンドル11の内部の流水路110に研削水を流入させると、研削水が連通路150を通じて研削水供給孔212から供給流路213a,213bに流れ込む。供給流路213aに流れ込んだ研削水は、砥石22の反対面220’側から複数の貫通孔25を通過して、砥石22と板状ワークWの裏面Wbとが接触する加工点に供給される。一方、供給流路213bに流れ込んだ研削水は、供給流路213bを通じて砥石22の側面側に供給される。板状ワークWの研削中は、常に加工点に向けて研削水が効率よく流れていくことから、研削屑が充分に排出され、砥石22の研削面220に研削屑が付着するのを防止することができる。こうして研削加工を進めていき板状ワークWが所望の厚さに達したら、研削手段10をチャックテーブル4の保持面4aから離反する方向に上昇させて研削加工を終了する。なお、研削水としては、例えば純水を用いる。   During the grinding of the plate-like workpiece W, the grinding water is continuously supplied from the grinding water supply source 6 toward the grindstone 22. Specifically, when the grinding water supply source 6 causes the grinding water to flow into the flow channel 110 inside the spindle 11, the grinding water flows from the grinding water supply hole 212 into the supply channels 213 a and 213 b through the communication path 150. The grinding water that has flowed into the supply flow path 213a passes through the plurality of through holes 25 from the opposite surface 220 ′ side of the grindstone 22, and is supplied to the processing point where the grindstone 22 and the back surface Wb of the plate-like workpiece W come into contact. . On the other hand, the grinding water that has flowed into the supply channel 213b is supplied to the side surface of the grindstone 22 through the supply channel 213b. During grinding of the plate-like workpiece W, the grinding water always flows efficiently toward the machining point, so that the grinding waste is sufficiently discharged and prevents the grinding waste from adhering to the grinding surface 220 of the grindstone 22. be able to. When the plate-like workpiece W reaches the desired thickness by proceeding with the grinding process in this way, the grinding means 10 is raised in a direction away from the holding surface 4a of the chuck table 4 to finish the grinding process. For example, pure water is used as the grinding water.

図5(a)に示す研削ホイール20Aは、研削ホイールの第2例であって、環状基台21aの自由端部211aにおいて等間隔をあけて複数の砥石22bがリング状に配設されている。自由端部211aは、リング状の平面となっており、例えば接着材により複数の砥石22bが自由端部211aに接着固定されている。図5(b)に示すように、砥石22bは、円柱形状に形成されており、被加工物を研削する研削面221が楕円形状となっている。砥石22bは、研削面221から反対側の反対面221’に貫通する3以上の貫通孔27を含んでいる。貫通孔27は、六角柱形状に形成されており、砥石22bは複数の貫通孔27が集合したハニカム構造となっている。図5(c)に示すように、砥石22bの強度が低下しないように、隣り合う貫通孔27の壁24の厚みH2は、少なくとも0.5mmにするとよい。砥石22bのサイズは、例えば長径が2〜3インチで構成されることが好ましい。貫通孔27の数は、本実施形態に示した数に限られず、砥石22bのサイズに合わせて少なくとも2以上となるように増減すればよい。砥石22bは、例えば、ポーラス部材により形成されているため、複数の貫通孔27だけでなく、全てのポーラスを通じて砥石22b全体に研削水をいきわたらせることができ、上記した加工点に向けて研削水を供給することが可能となっている。   A grinding wheel 20A shown in FIG. 5A is a second example of a grinding wheel, and a plurality of grindstones 22b are arranged in a ring shape at equal intervals at a free end 211a of the annular base 21a. . The free end portion 211a is a ring-shaped plane, and a plurality of grindstones 22b are bonded and fixed to the free end portion 211a with, for example, an adhesive. As shown in FIG.5 (b), the grindstone 22b is formed in the column shape, and the grinding surface 221 which grinds a workpiece has an elliptical shape. The grindstone 22b includes three or more through holes 27 penetrating from the grinding surface 221 to the opposite surface 221 'on the opposite side. The through hole 27 is formed in a hexagonal column shape, and the grindstone 22b has a honeycomb structure in which a plurality of through holes 27 are gathered. As shown in FIG. 5C, the thickness H2 of the wall 24 of the adjacent through hole 27 is preferably at least 0.5 mm so that the strength of the grindstone 22b does not decrease. As for the size of the grindstone 22b, for example, the major axis is preferably 2 to 3 inches. The number of the through holes 27 is not limited to the number shown in the present embodiment, and may be increased or decreased so as to be at least 2 or more according to the size of the grindstone 22b. Since the grindstone 22b is formed of, for example, a porous member, the grinding water can be distributed to the entire grindstone 22b not only through the plurality of through holes 27 but also through all the porosities, and grinding toward the above-described processing points is performed. It is possible to supply water.

図6(a)に示す研削ホイール20Bは、研削ホイールの第3例であって、環状基台21bの自由端部211に複数の砥石22cがリング状に配設されている。図6(b)に示すように、砥石22cは、直方体形状に形成されており、被加工物を研削する研削面220cが四角形状となっている。砥石22cは、上記した六角柱形状の貫通孔27を含み、砥石22cは複数の貫通孔27が集合したハニカム構造となっている。図6(c)に示すように、砥石22cの強度が低下しないように、隣り合う貫通孔27の壁24aの厚みH3は、少なくとも0.5mmに形成するとよい。このように、砥石22b、22cは、六角柱形状の貫通孔27が形成され砥石全体がハニカム構造となっているため、砥石22b,22cで被加工物を研削する際に、複数の貫通孔27を通じて研削水を上記した加工点に効率よく供給することが可能となるため、研削屑の排出をより促進することができる。   A grinding wheel 20B shown in FIG. 6A is a third example of a grinding wheel, and a plurality of grindstones 22c are arranged in a ring shape at a free end portion 211 of an annular base 21b. As shown in FIG. 6B, the grindstone 22c is formed in a rectangular parallelepiped shape, and the grinding surface 220c for grinding the workpiece has a quadrangular shape. The grindstone 22c includes the hexagonal column-shaped through hole 27 described above, and the grindstone 22c has a honeycomb structure in which a plurality of through holes 27 are gathered. As shown in FIG.6 (c), it is good to form thickness H3 of the wall 24a of the adjacent through-hole 27 to at least 0.5 mm so that the intensity | strength of the grindstone 22c may not fall. Thus, since the grindstones 22b and 22c are formed with hexagonal column-shaped through holes 27 and the entire grindstone has a honeycomb structure, when the workpiece is ground with the grindstones 22b and 22c, a plurality of through holes 27 are formed. Since it becomes possible to supply grinding water efficiently to the above-mentioned processing point through, discharge of grinding waste can be further promoted.

被加工物を研削する砥石の研削面の形状は、上記した砥石22〜22cのように、四角形状や円形状に限定されない。すなわち、砥石の研削面は、四角形以外の多角形状に形成してもよいし、非円形状に形成してもよい。以下では、砥石の研削面のバリエーションについて図7〜図12を参照しながら説明する。   The shape of the grinding surface of the grindstone that grinds the workpiece is not limited to a square shape or a circular shape as in the grindstones 22 to 22c described above. That is, the grinding surface of the grindstone may be formed in a polygonal shape other than a quadrangle, or may be formed in a non-circular shape. Below, the variation of the grinding surface of a grindstone is demonstrated, referring FIGS. 7-12.

図7に示す砥石22dは、被加工物を研削する研削面222が三角形状に形成されている。砥石22dは、被加工物を研削する研削面222から反対側の面に貫通する3以上の六角柱形状の貫通孔27を含み、ハニカム構造となっている。図示の例では、砥石22dの研削面222は、正三角形状となっているが、この形状に限定されず、直角三角形状でもよいし、二等辺三角形状に形成してもよい。砥石22dの研削面222は、3つの頂点A,B,Cを有し、隣同士の頂点A,B,Cを結んで形成される3つの辺AB,BC,ACによって囲まれている。かかる砥石22dは、例えば、図8に示す研削ホイール20Cのように、環状基台21cの自由端部211cにおいて、砥石22dの3つの頂点A,B,Cのいずれか1点(図示の例では頂点A)を研削ホイール20Cの内周側の内縁部17に向けるとともに、辺AB,BC,ACのいずれか1辺(図示の例では辺BC)を研削ホイール20Cの外周側の外縁部18に向け、頂点B及び頂点Cが研削ホイール20Cの周方向に向くように配置するとよい。これにより、研削ホイール20Cを回転させて砥石22dによって被加工物を研削する際に、砥石22dと被加工物との接触回数が多い部分(被加工物の中央部分)に接触する砥石22dの面積が小さくなり、被加工物の中央部分が、被加工物の外縁部分に比べて過度に凹むのを防止するとともに、複数の貫通孔27を通じて研削水を上記した加工点に供給できるため、研削屑の排出をより促進することができる。なお、砥石22dの3つの頂点A,B及びCは、R形状に成形されていることが好ましい。   In the grindstone 22d shown in FIG. 7, a grinding surface 222 for grinding a workpiece is formed in a triangular shape. The grindstone 22d includes three or more hexagonal column-shaped through holes 27 penetrating from the grinding surface 222 to grind the workpiece to the opposite surface, and has a honeycomb structure. In the illustrated example, the grinding surface 222 of the grindstone 22d has an equilateral triangle shape, but is not limited to this shape, and may be a right triangle shape or an isosceles triangle shape. The grinding surface 222 of the grindstone 22d has three vertices A, B, and C, and is surrounded by three sides AB, BC, and AC formed by connecting adjacent vertices A, B, and C. For example, like the grinding wheel 20C shown in FIG. 8, the grindstone 22d has one of the three vertices A, B, and C of the grindstone 22d at the free end portion 211c of the annular base 21c (in the illustrated example). The vertex A) is directed to the inner peripheral edge 17 on the inner peripheral side of the grinding wheel 20C, and any one of the sides AB, BC, AC (the side BC in the illustrated example) is directed to the outer peripheral edge 18 on the outer peripheral side of the grinding wheel 20C. The apex B and the apex C may be arranged so as to face the circumferential direction of the grinding wheel 20C. Thereby, when the grinding wheel 20C is rotated and the workpiece is ground by the grindstone 22d, the area of the grindstone 22d that comes into contact with the portion where the grindstone 22d and the workpiece are frequently contacted (the central portion of the workpiece) is increased. The center portion of the workpiece is prevented from being excessively recessed as compared with the outer edge portion of the workpiece, and the grinding water can be supplied to the above-described processing points through the plurality of through holes 27. Can be further promoted. The three vertices A, B, and C of the grindstone 22d are preferably formed in an R shape.

図9に示す砥石22eは、被加工物を研削する研削面223が卵形状に形成されている。すなわち、研削面223の外形は、その端面Dから側面F1,F2が膨らむようにして形成されている。砥石22eは、被加工物を研削する研削面223から反対側の面に貫通する3以上の六角柱形状の貫通孔27を含み、ハニカム構造となっている。かかる砥石22eは、例えば、図10に示す研削ホイール20Dのように、環状基台21dの自由端部211dにおいて、砥石22eの端面Dを研削ホイール20Dの内周側の内縁部17に向け、砥石22eの側面F1及びF2が研削ホイール20Dの周方向に向くように配置するとよい。これにより、砥石22eと被加工物との接触回数が多い部分(被加工物の中央部分)に接触する砥石22eの面積が徐々に小さくなるため、被加工物の被研削面にムラが発生するのを防止するとともに、複数の貫通孔27を通じて研削水を上記した加工点に供給できるため、研削屑の排出を促進することができる。   In the grindstone 22e shown in FIG. 9, a grinding surface 223 for grinding a workpiece is formed in an egg shape. That is, the outer shape of the grinding surface 223 is formed such that the side surfaces F1 and F2 swell from the end surface D thereof. The grindstone 22e includes three or more hexagonal column-shaped through holes 27 penetrating from the grinding surface 223 for grinding the workpiece to the opposite surface, and has a honeycomb structure. For example, like the grinding wheel 20D shown in FIG. 10, the grindstone 22e has a free end 211d of the annular base 21d with the end surface D of the grindstone 22e facing the inner edge 17 on the inner peripheral side of the grinding wheel 20D. It is good to arrange | position so that the side surfaces F1 and F2 of 22e may face the circumferential direction of the grinding wheel 20D. Thereby, since the area of the grindstone 22e which contacts the part (center part of a workpiece) with many times of contact with the grindstone 22e and a workpiece becomes small gradually, a nonuniformity generate | occur | produces in the to-be-ground surface of a workpiece. In addition, the grinding water can be supplied to the above-described processing points through the plurality of through holes 27, so that the discharge of the grinding waste can be promoted.

図11に示す砥石22fは、被加工物を研削する研削面224が五角形状に形成されている。砥石22fは、被加工物を研削する研削面224から反対側の面に貫通する3以上の略円柱形状の貫通孔26を含み、メッシュ形状となっている。図12に示す砥石22gでは、被加工物を研削する研削面225の外形が階段形状に形成されている。砥石22gは、被加工物を研削する研削面225から反対側の面に貫通する3以上の角柱形状の貫通孔25を含み、メッシュ形状に形成されている。このように、砥石22f,22gについても、研削面224,225において複数の貫通孔26,25が集合したメッシュ形状となっているため、複数の貫通孔26,25を通じて研削水を加工点に供給することができ、研削屑の排出を促進することができる。   In the grindstone 22f shown in FIG. 11, a grinding surface 224 for grinding a workpiece is formed in a pentagonal shape. The grindstone 22f includes three or more substantially cylindrical through holes 26 penetrating from the grinding surface 224 for grinding the workpiece to the opposite surface, and has a mesh shape. In the grindstone 22g shown in FIG. 12, the outer shape of the grinding surface 225 for grinding the workpiece is formed in a staircase shape. The grindstone 22g includes three or more prismatic through holes 25 penetrating from the grinding surface 225 for grinding the workpiece to the opposite surface, and is formed in a mesh shape. As described above, the grindstones 22f and 22g also have a mesh shape in which the plurality of through holes 26 and 25 are gathered on the grinding surfaces 224 and 225, so that the grinding water is supplied to the processing point through the plurality of through holes 26 and 25. It is possible to promote the discharge of grinding waste.

上記した貫通孔25,26,27の大きさは、本実施形態に示した構成に限定されない。例えば、図13に示す砥石22hは、四角形状の研削面220から反対側の面に貫通する3以上の六角柱形状の大貫通孔28と、研削面220から反対側の面に貫通する3以上の六角柱形状の小貫通孔29とを含んで構成されている。このように大きさの異なる貫通孔を複合的に含んだ砥石22hでは、大貫通孔28から多量の研削水を上記した加工点に供給できるため被加工物の加工品質が向上するとともに、小貫通孔29の存在によって研削面220と被加工物との接触面積が大きくなるため研削効率も向上する。貫通孔25,26,27,大貫通孔28及び小貫通孔29のサイズは、φ3〜10mmの範囲内に設定するとよい。なお、大貫通孔28及び小貫通孔29の数は、本実施形態に示した数に限られず、砥石22hのサイズに合わせて少なくとも2以上となるようにそれぞれ増減すればよい。   The size of the above-described through holes 25, 26, and 27 is not limited to the configuration shown in the present embodiment. For example, the grindstone 22h shown in FIG. 13 includes three or more hexagonal column-shaped large through holes 28 penetrating from the rectangular grinding surface 220 to the opposite surface, and three or more penetrating from the grinding surface 220 to the opposite surface. And a small through hole 29 having a hexagonal column shape. In the grindstone 22h including the through holes having different sizes in this way, a large amount of grinding water can be supplied from the large through hole 28 to the above-described processing point, so that the processing quality of the workpiece is improved and the small through hole is provided. The presence of the holes 29 increases the contact area between the grinding surface 220 and the workpiece, so that the grinding efficiency is also improved. The sizes of the through holes 25, 26, 27, the large through hole 28, and the small through hole 29 are preferably set within a range of 3 to 10 mm. Note that the numbers of the large through holes 28 and the small through holes 29 are not limited to the numbers shown in the present embodiment, and may be increased or decreased so as to be at least 2 according to the size of the grindstone 22h.

本実施形態に示した砥石22〜22hは、例えば押出成形によって製造される。具体的には、例えば、ビトリファイドボンド、アルミナ、レジンボンドのいずれか一つに砥粒を混錬し、所定の型枠において混錬した砥粒にプレス加工を施し、その後、所定の温度で所定時間焼結することにより砥石22〜22hを製造することができる。特に、ビトリファイドボンドやアルミナをベースとしたボンド材を使用した場合には、精度のよい砥石22〜22hを取得することができる。レジンボンドとしては、例えば、フェノール樹脂、エポキシ樹脂、ポリイミド樹脂を使用する。また、砥粒にホウ素をドープして砥石22〜22hを製造することにより、潤滑性及び放熱性を向上させてもよい。なお、砥粒の種類は特に限定されるものではない。   The grindstones 22 to 22h shown in the present embodiment are manufactured by, for example, extrusion molding. Specifically, for example, abrasive grains are kneaded into any one of vitrified bond, alumina, and resin bond, and the kneaded abrasive grains are pressed in a predetermined formwork, and then pressed at a predetermined temperature. The grindstone 22-22h can be manufactured by time sintering. In particular, when a vitrified bond or an alumina-based bond material is used, it is possible to obtain a highly accurate grindstone 22 to 22h. For example, a phenol resin, an epoxy resin, or a polyimide resin is used as the resin bond. Further, lubricity and heat dissipation may be improved by doping the abrasive grains with boron to produce the grindstones 22 to 22h. In addition, the kind of abrasive grain is not specifically limited.

1:研削装置 2:装置ベース 3:コラム 4:チャックテーブル 4a:保持面
5:カバー 6:研削水供給源 10:研削手段 11:スピンドル 110:流水路 12:スピンドルハウジング 13:ホルダ 14:モータ 15:ホイールマウント
150:連通路 16:ボルト 17:内縁部 18:外縁部
20,20A,20B,20C,20D:研削ホイール 21:環状基台
210:ホイールマウント装着面 211:自由端部 212:研削水供給孔
213a,213b:供給流路 214:凹部 215:内側部材 215a:端部
22,22a,22b,22c,22d,22e,22f,22g,22h:砥石
220,221,222,223,224,225:研削面
23,24:壁 25,26,27:貫通孔 28:大貫通孔 29:小貫通孔
30:研削送り手段 31:ボールネジ 32:モータ 33:ガイドレール
34:昇降板
1: Grinding device 2: Device base 3: Column 4: Chuck table 4a: Holding surface 5: Cover 6: Grinding water supply source 10: Grinding means 11: Spindle 110: Flow channel 12: Spindle housing 13: Holder 14: Motor 15 : Wheel mount 150: Communication path 16: Bolt 17: Inner edge 18: Outer edge 20, 20A, 20B, 20C, 20D: Grinding wheel 21: Ring base 210: Wheel mount mounting surface 211: Free end 212: Grinding water Supply holes 213a, 213b: Supply flow path 214: Recess 215: Inner member 215a: Ends 22, 22a, 22b, 22c, 22d, 22e, 22f, 22g, 22h: Grinding stones 220, 221, 222, 223, 224, 225 : Ground surfaces 23, 24: Walls 25, 26, 27: Through holes 28: Large through holes 29: Small through holes Hole 30: grinding feed means 31: ball screw 32: motor 33: Guide rail 34: elevating plate

Claims (5)

被加工物を研削する砥石であって、
該砥石の研削面から反対の面に貫通する2以上の貫通孔を含み、該貫通孔を通じて研削水が供給される砥石。
A grindstone for grinding a workpiece,
A grindstone including two or more through holes penetrating from the grinding surface of the grindstone to the opposite surface, and supplied with grinding water through the through holes.
前記貫通孔は略円柱形状または角柱形状であり、該貫通孔が集合したメッシュ形状の請求項1に記載の砥石。   The grindstone according to claim 1, wherein the through hole has a substantially cylindrical shape or a prismatic shape, and has a mesh shape in which the through holes are gathered. 前記貫通孔は六角柱形状であり、ハニカム構造の請求項1に記載の砥石。   The grindstone according to claim 1, wherein the through hole has a hexagonal column shape and has a honeycomb structure. 前記砥石の前記研削面が多角形状である請求項1から3のいずれか1項に記載の砥石。   The grindstone according to any one of claims 1 to 3, wherein the grinding surface of the grindstone has a polygonal shape. 被加工物を研削する研削ホイールであって、
ホイールマウントに装着されるホイールマウント装着面を有する環状基台と、
該環状基台の自由端部にリング状に配設された請求項1から4のいずれか1項に記載の砥石と、を含み、
該環状基台から前記貫通孔を通じて被加工物の被研削面に研削水を供給する研削ホイール。
A grinding wheel for grinding a workpiece,
An annular base having a wheel mount mounting surface to be mounted on the wheel mount;
The grindstone according to any one of claims 1 to 4, which is disposed in a ring shape at a free end of the annular base,
A grinding wheel for supplying grinding water from the annular base to the ground surface of the workpiece through the through hole.
JP2016110782A 2016-06-02 2016-06-02 Grind stone and grinding wheel Pending JP2017213664A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2016110782A JP2017213664A (en) 2016-06-02 2016-06-02 Grind stone and grinding wheel

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016110782A JP2017213664A (en) 2016-06-02 2016-06-02 Grind stone and grinding wheel

Publications (1)

Publication Number Publication Date
JP2017213664A true JP2017213664A (en) 2017-12-07

Family

ID=60576211

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016110782A Pending JP2017213664A (en) 2016-06-02 2016-06-02 Grind stone and grinding wheel

Country Status (1)

Country Link
JP (1) JP2017213664A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020049574A (en) * 2018-09-26 2020-04-02 株式会社ナノテム Grindstone

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5541272U (en) * 1978-09-11 1980-03-17
JPH0446773A (en) * 1990-06-12 1992-02-17 Yuzo Arai Grinding wheel
JPH04129675A (en) * 1990-09-14 1992-04-30 Mitsubishi Materials Corp Perforated grinding wheel
WO2009138435A1 (en) * 2008-05-13 2009-11-19 Micheal O'ceallaigh An abrasive material, wheel and tool for grinding semiconductor substrates, and method of manufacture of same

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5541272U (en) * 1978-09-11 1980-03-17
JPH0446773A (en) * 1990-06-12 1992-02-17 Yuzo Arai Grinding wheel
JPH04129675A (en) * 1990-09-14 1992-04-30 Mitsubishi Materials Corp Perforated grinding wheel
WO2009138435A1 (en) * 2008-05-13 2009-11-19 Micheal O'ceallaigh An abrasive material, wheel and tool for grinding semiconductor substrates, and method of manufacture of same

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020049574A (en) * 2018-09-26 2020-04-02 株式会社ナノテム Grindstone
JP7145494B2 (en) 2018-09-26 2022-10-03 株式会社ナノテム whetstone

Similar Documents

Publication Publication Date Title
KR102443360B1 (en) Grinding wheel and method for grinding workpiece
US10279452B2 (en) Processing apparatus
US20150283670A1 (en) Grinding wheel and cleaning method for grinding chamber
US11612979B2 (en) Polishing pad
KR101730658B1 (en) Grinding processing tool
JP2018118358A (en) Method for use of laminated dressing board
TWI693994B (en) Method for shaping front end shape of cutting blade
KR20170000770A (en) Cutting blade and mounting structure for cutting blade
JP2017213664A (en) Grind stone and grinding wheel
KR20160058700A (en) Method of grinding workpiece
JP2010162665A (en) Machining device
JP2015178149A (en) Grinding device
JP6359384B2 (en) Cutting blade
JP2023064421A (en) dressing board
JP2014091193A (en) Grinding wheel
JP6713195B2 (en) Chuck table
JP7321649B2 (en) Grinding method
KR20230085863A (en) Dressing tool and dressing method
JP2018107309A (en) Adhesive tape, processing method of workpiece, and adhesive tape affixing device
TWI699258B (en) Forming grindstone tools
JP6920079B2 (en) Chuck table
JP2020001123A (en) Grinding wheel
JP2016137531A (en) Chuck table
KR20220086485A (en) Dressing tool
JP2021079514A (en) Cutting blade

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20190424

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20200309

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20200317

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20201006