JP2021079514A - Cutting blade - Google Patents

Abstract

To make both easy insertion of a boss part and omission of truing compatible.SOLUTION: An annular cutting blade comprises a through-hole. The cutting blade comprises a marking part that indicates a direction of the cutting blade when inserting a cylindrical boss part provided in a mount into the through-hole of the cutting blade. An inner periphery of the cutting blade corresponding to an edge of the through-hole includes an alignment area where a length from a center of an outer peripheral circle of the cutting blade to an inner periphery of the cutting blade is identical to a radius of the boss part and a marginal area, positioned in an area different from the alignment area, where the length from the center of the outer peripheral circle of the cutting blade to the inner periphery of the cutting blade is longer than the radius of the boss part. When the mark part is aligned along a predetermined direction, the boss part is inserted into the through-hole and the cutting blade is installed in the boss part, a distance between a rotation center of the boss part and the center of the outer peripheral circle of the cutting blade is below a predetermined length.SELECTED DRAWING: Figure 4

Description

The present invention relates to an annular cutting blade used when cutting a workpiece.

A grind fixed with a bond when dividing various plate-shaped workpieces such as semiconductor wafers, resin package substrates, ceramic substrates, and glass substrates into multiple chips, or when forming grooves in the workpieces. A cutting blade having a cutting edge containing grains is used.

As the cutting blade, for example, an annular hubless blade (that is, a washer blade) in which the entire blade is formed by a cutting blade without having a base is used. The hubless blade is an annular blade having a circular outer circumference and having a through hole (specifically, a round hole) formed in the central portion of the disk so as to be concentric with respect to the outer peripheral circle. The hubless blade is mounted on the mount using this through hole.

The mount includes a cylindrical boss portion and a flange portion formed on the outer peripheral side of the boss portion. When mounting the hubless blade on the mount, the boss portion is inserted into the through hole of the hubless blade, and one surface of the hubless blade is brought into contact with the flange portion. Then, the annular holding nut is brought into contact with the other surface of the hubless blade, and the hubless blade is sandwiched between the flange portion and the holding nut.

After that, an annular fixing nut is arranged on the side opposite to the hubless blade with respect to the holding nut, and the fixing nut is fixed to the tip of the boss portion. As a result, the hubless blade is fixed to the mount while being sandwiched between the flange portion and the holding nut.

The tip of the columnar spindle is fixed to a part of the mount with bolts or the like. A rotary drive source such as a motor is connected to the other end of the spindle, and the spindle serves as a rotation shaft of the mount.

When cutting a workpiece with a hubless blade, the hubless blade is rotated at high speed by rotating the spindle with a rotational drive source. Then, the lower end of the hubless blade that rotates at high speed is cut into the workpiece to cut the workpiece.

By the way, if cutting is performed in a state where the deviation amount between the center of rotation of the spindle and the center of the outer peripheral circle of the hubless blade is relatively large, cutting is performed only on a part of the outer peripheral portion of the hubless blade, so that the workpiece is to be machined. Is prone to chipping and cracking.

In order to make it easier to insert the boss portion into the through hole of the hubless blade, the diameter of the through hole is set to be larger than the outer diameter of the boss portion (a margin width is provided), but the above-mentioned deviation amount is used. To make it smaller, this margin is usually set to a small size (eg, 10 μm to 20 μm). As a result, when the hubless blade is mounted on the mount, the amount of deviation between the center of rotation of the spindle and the center of the outer peripheral circle of the hubless blade is reduced.

However, as a result of reducing the margin width, the amount of play in the through hole becomes small, and it becomes relatively difficult to insert the boss portion into the through hole. For example, if the operator's skill is low or the mount is scratched, the cutting blade may be damaged when the boss portion is inserted into the through hole.

On the other hand, if the diameter of the through hole is made sufficiently larger than the outer diameter of the boss portion, the boss portion can be easily inserted into the through hole. The amount of deviation from the center of the circle is relatively large. Therefore, if cutting is performed in this state, chips and cracks are likely to occur in the workpiece.

In order to avoid this, each time the hubless blade is mounted on the mount, the outer peripheral portion is shaped (that is, truing) according to the amount of displacement, and the outer peripheral portion becomes a perfect circle with respect to the rotation center of the spindle. It is necessary to process the hubless blade in the same manner (so-called rounding) (see, for example, Patent Document 1).

Japanese Unexamined Patent Publication No. 2013-233613

The present invention has been made in view of the above problems, and the size of the through hole is set to a size that allows the boss portion to be easily inserted, and for rounding out each time the blade is mounted on the mount. The purpose is to achieve both the omission of tsuruing.

According to one aspect of the present invention, it is an annular cutting blade having a through hole used when cutting an workpiece, and is a cylindrical boss provided on a mount fixed to one end of a spindle. When the portion is inserted into the through hole of the cutting blade, the cutting blade is provided with a mark portion indicating the orientation of the cutting blade, and the inner circumference of the cutting blade corresponding to the edge of the through hole is the cutting blade. The center of the outer circumference circle of the cutting blade is located in the alignment region where the length from the center of the outer circumference circle of the cutting blade to the inner circumference of the cutting blade is the same as the radius of the boss portion and the region different from the alignment region. The length from to the inner circumference of the cutting blade includes a margin area longer than the radius of the boss portion, the mark portion is aligned in a predetermined direction, and the boss portion is inserted into the through hole to insert the cutting blade. Provided is a cutting blade in which the distance between the center of rotation of the boss portion and the center of the outer peripheral circle of the cutting blade is a predetermined length or less when the boss portion is installed.

Preferably, the mark portion is provided so as to cut out the cutting blade from the inner circumference of the cutting blade toward the outer circumference of the cutting blade.

Further, preferably, the cutting blade is a weight adjusting unit for adjusting a weight balance deviation caused by a positional deviation between the center of the outer peripheral circle of the cutting blade and the center of the inner peripheral circle of the cutting blade. Is further included.

Further, preferably, the weight adjusting portion is a notch portion provided so as to cut out the cutting blade from the inner circumference of the cutting blade toward the outer circumference of the cutting blade.

The cutting blade according to one aspect of the present invention includes a mark portion indicating the direction of the cutting blade when the cylindrical boss portion provided on the mount is inserted into the through hole of the cutting blade. The inner circumference of the cutting blade corresponding to the edge of the through hole includes an alignment region and a margin region.

In the alignment region, the length from the center of the outer circumference circle of the cutting blade to the inner circumference of the cutting blade is the same as the radius of the boss portion. On the other hand, the margin region is located in a region different from the alignment region, and in the margin region, the length from the center of the outer peripheral circle of the cutting blade to the inner circumference of the cutting blade is smaller than the radius of the boss portion. Is also long. Therefore, when the boss portion is inserted into the through hole with the mark portion aligned in a predetermined direction, the boss portion can be easily inserted into the through hole.

Further, when the boss portion is inserted into the through hole with the mark portion aligned in a predetermined direction and the cutting blade is installed on the boss portion, the distance between the rotation center of the boss portion and the center of the outer peripheral circle of the cutting blade is predetermined. Is less than or equal to the length of. For example, when the boss portion is inserted into the through hole with the mark portion aligned in a predetermined direction and the cutting blade is installed on the boss portion, the rotation center of the boss portion and the center of the outer peripheral circle of the cutting blade match.

In this way, when the boss portion is inserted into the through hole with the mark aligned in a predetermined direction and the cutting blade is installed in the boss portion, the outer circumference circle of the cutting blade can be regarded as a perfect circle with respect to the rotation center of the spindle. It is possible to omit shaping (that is, trueing) of the cutting blade for rounding.

It is a partial cross-sectional side view of a cutting apparatus. It is an exploded perspective view of a cutting unit. It is a partial cross-sectional side view of a cutting unit. FIG. 4A is a front view of a mount or the like fixed to the tip of the spindle, FIG. 4B is a view showing one side of the cutting blade, and FIG. 4C is a first through hole. It is a figure which shows the state which inserted the boss part of. FIG. 5A is a front view of the cutting blade according to the second embodiment, and FIG. 5B is a front view of the cutting blade according to the third embodiment. It is a front view of the cutting blade which concerns on 4th Embodiment.

A first embodiment according to one aspect of the present invention will be described with reference to the accompanying drawings. FIG. 1 is a partial cross-sectional side view of the cutting device 2. First, the workpiece 11 and the like to be cut by using the cutting device 2 will be described.

The workpiece 11 of the present embodiment is a disk-shaped wafer made of a semiconductor material such as silicon (Si), silicon carbide (SiC), and gallium nitride (GaN). The workpiece 11 is not limited to a disk-shaped wafer, and may be a rectangular substrate such as a resin package substrate, a ceramics substrate, or a glass substrate.

A plurality of scheduled division lines (not shown) are set in a grid pattern on the surface 11a side of the workpiece 11 of the present embodiment, and a device (not shown) is set in each region divided by the plurality of scheduled division lines. ) Is formed.

A circular dicing tape 13 formed of resin and having a diameter larger than the diameter of the workpiece 11 is attached to the back surface 11b side of the workpiece 11. The dicing tape 13 has, for example, a laminated structure of a base material layer and an adhesive layer (glue layer).

The base material layer is formed of a resin such as polyolefin (PO), and the entire or part of one surface of the base material layer is an adhesive layer formed of an adhesive resin such as an ultraviolet (UV) curable resin. Is formed.

The back surface 11b side of the workpiece 11 is attached to the substantially central portion of the dicing tape 13, and one surface of the annular frame 15 made of metal is attached to the outer peripheral portion of the dicing tape 13.

The dicing tape 13 is not limited to the laminated structure of the base material layer and the adhesive layer. For example, the dicing tape 13 may have only a base material layer. In this case, the dicing tape 13 is attached to the work piece 11 or the like by thermocompression bonding the base material layer to the work piece 11 or the like.

The cutting device 2 has a disk-shaped chuck table 4 that sucks and holds the workpiece 11 and the like. The chuck table 4 has a frame made of metal or the like. A flow path (not shown) having a predetermined shape is provided inside the frame, and one end of this flow path is connected to a suction source (not shown) such as an ejector.

A recess formed by a disk-shaped space is formed on the upper surface side of the frame. A disk-shaped porous plate (not shown) is fixed to this recess. The upper surface of the porous plate is exposed above the chuck table 4, and the lower surface of the porous plate is connected to the other end of the flow path of the frame body.

Since a negative pressure is generated on the upper surface of the porous plate when the suction source is operated, the upper surface of the chuck table 4 functions as a holding surface 4a for sucking and holding an object placed on the upper surface. A plurality of clamp units 6 for fixing the frame 15 are provided on the outer peripheral portion of the chuck table 4.

Below the chuck table 4, a θ table (not shown) for rotating the chuck table 4 around a predetermined rotation axis is provided. Further, below the θ table, an X-axis moving mechanism (not shown) for moving the chuck table 4 and the like along the machining feed direction (X-axis direction) is provided.

The cutting unit 10 has a columnar spindle 14. The spindle 14 is arranged so that the height direction is along the Y-axis direction. An annular cutting blade (hubless blade) 18 is attached to the tip of the spindle 14 via a mount 16 or the like, and a rotary drive source such as a motor is connected to the other end of the spindle 14.

When cutting the workpiece 11 with the cutting unit 10, first, the back surface 11b side (that is, the dicing tape 13) of the workpiece 11 is held by the holding surface 4a so that the front surface 11a is exposed, and a plurality of working objects 11 are held. The frame 15 is fixed by the clamp unit 6.

Next, the surface 11a side of the workpiece 11 is imaged with a camera unit (not shown) having an image sensor or the like. Based on the image acquired by this imaging, the region to be cut (that is, the planned division line) is detected. Then, the cutting blade 18 is positioned on an extension line of one scheduled division line.

After that, the cutting blade 18 is rotated around the rotation axis of the spindle 14, and the lower end of the cutting blade 18 is positioned between the back surface 11b of the workpiece 11 and the holding surface 4a. Then, the chuck table 4 is moved in the X-axis direction with respect to the workpiece 11 by the X-axis moving mechanism. As a result, the workpiece 11 is cut along the X-axis direction.

After cutting the workpiece 11 along one scheduled division line, the cutting unit 10 is moved along the Y-axis direction (indexing feed direction), and the cutting blade 18 is moved along the Y-axis with respect to one scheduled division line. Positioned on the extension of other planned division lines adjacent in the direction.

Then, the workpiece 11 is cut along the other scheduled division lines. In the same way, the workpiece 11 is cut along the remaining planned division lines. The X-axis direction and the Y-axis direction are orthogonal to each other in a plane perpendicular to the vertical direction (Z-axis direction).

Next, the configuration of the cutting unit 10 will be described in detail with reference to FIGS. 2, 3, 4, 4 (A), 4 (B), and 4 (C). FIG. 2 is an exploded perspective view of the cutting unit 10, and FIG. 3 is a partial cross-sectional side view of the cutting unit 10.

The cutting unit 10 has a tubular spindle housing 12. A part of the above-mentioned spindle 14 is housed in the spindle housing 12 in a rotatable manner. A screw hole 14a having a predetermined depth is formed at the tip of the spindle 14 along the height direction of the spindle 14. The screw hole 14a has a substantially cylindrical shape, and the central axis of the screw hole 14a coincides with the rotation axis of the spindle 14.

A mount 16 is arranged at the tip of the spindle 14. The mount 16 has a cylindrical first boss portion (boss portion) 16a into which a through hole 18a of the cutting blade 18 is inserted. Flange portions 16b are provided concentrically on the outside of the first boss portion 16a so as to surround the outside of the first boss portion 16a.

The flange portion 16b has an annular surface 16c that comes into contact with one surface of the cutting blade 18 when the cutting blade 18 is installed on the outer peripheral portion of the first boss portion 16a. The annular surface 16c is located between one end and the other end of the first boss portion 16a of the cylinder in the length direction.

On one end side of the first boss portion 16a, a cylindrical second boss portion 16d having a diameter smaller than that of the first boss portion 16a is formed concentrically with the first boss portion 16a. Inside the cylindrical second boss portion 16d, a mounting hole 16e corresponding to the shape of the tip end side of the spindle 14 is formed.

On the other end side of the first boss portion 16a, a cylindrical third boss portion 16f is formed concentrically with the first boss portion 16a. The outer diameter of the third boss portion 16f is smaller than the outer diameter of the first boss portion 16a and is substantially the same as the outer diameter of the second boss portion 16d.

A male screw 16g is formed in a part of the outer surface of the third boss portion 16f, which is located on the side opposite to the first boss portion 16a. Further, a mounting hole 16h is formed inside the third boss portion 16f and the first boss portion 16a.

The mounting holes 16h are formed concentrically with respect to the third boss portion 16f and the first boss portion 16a. The mounting hole 16h is connected to the mounting hole 16e, and a through hole is formed by the mounting hole 16h and the mounting hole 16e. The mounting hole 16h has a columnar first space mainly formed inside the third boss portion 16f.

The mounting hole 16h further has a columnar second space formed primarily inside the first boss portion 16a and having a diameter smaller than the diameter of the first space. The central axes of the first and second spaces coincide with the central axes of the mounting holes 16e.

Due to the difference in diameter between the first and second spaces, a step portion 16i is formed in the mounting hole 16h. A washer 20 having an outer diameter larger than the inner diameter of the step portion 16i is arranged in the step portion 16i. A shaft portion of a bolt 22 having a head having a diameter larger than the inner diameter of the washer 20 is inserted into the washer 20.

When the shaft portion of the bolt 22 is fastened to the screw hole 14a of the spindle 14 with the spindle 14 mounted in the mounting hole 16e, the mount 16 is attached to the tip end portion (one end) of the spindle 14 by the head of the bolt 22 and the washer 20. It is fixed to the part). At this time, the central axis of the cylindrical first boss portion 16a coincides with the rotation center 14b of the spindle 14.

FIG. 4A is a front view of the mount 16 and the like fixed to the tip of the spindle 14. The outer peripheral circle of the first boss portion 16a on a plane orthogonal to the central axis of the first boss portion 16a has a predetermined outer diameter (2r ₁ ).

With reference to FIGS. 2 and 3 again, an annular holding flange portion 24 is inserted into the third boss portion 16f. The holding flange portion 24 has an annular surface 24a. The annular surface 24a has the same outer diameter and inner diameter as the annular surface 16c of the flange portion 16b, respectively, and faces the annular surface 16c when the pressing flange portion 24 is inserted into the third boss portion 16f.

When the holding flange portion 24 is inserted into the third boss portion 16f with the cutting blade 18 installed on the outer peripheral portion of the first boss portion 16a, the male screw 16g located at the tip of the third boss portion 16f is removed. , Exposed from the holding flange portion 24.

An annular fixing nut 26 having a female screw 26a formed on the inner surface thereof is fastened to the exposed male screw 16g. As a result, the cutting blade 18 is fixed to the tip of the spindle 14 in a state of being sandwiched between the annular surface 16c of the mount 16 and the annular surface 24a of the holding flange portion 24.

Next, the structure of the cutting blade 18 will be described in more detail. The cutting blade 18 is an annular hubless blade (that is, a washer blade) in which diamond abrasive grains are dispersed in a resin bond or a metal bond. However, the cutting blade 18 may be a hubless blade formed by an electroforming method and having abrasive grains dispersed in a bond of a metal such as nickel.

FIG. 4B is a diagram showing one side of the cutting blade 18. The outer peripheral circle of the cutting blade 18 has a radius r ₂ (for example, 28.0 mm) _{larger than the radius r 1 of the first boss portion 16a.} In contrast, the inner circumference of the cutting blade 18 (ie, the edge of the through hole 18a) has a radius r ₃ (eg, 20.1 mm) that is greater than _{radius r 1 and smaller than radius r 2.}

However, the center 18c of the inner peripheral circle is arranged so as to deviate from the center 18b of the outer peripheral circle in a predetermined direction. As shown in FIG. 4B, in the present embodiment, the amount of deviation between the center 18b of the outer peripheral circle (that is, the center of the outer diameter) and the center 18c of the inner peripheral circle (that is, the center of the inner diameter) is the amount of deviation. Let A be the direction of deviation from the center 18b to the center 18c. The deviation amount A is, for example, 100 μm or more and 1 mm or less.

In a normal hubless blade, the through hole is formed concentrically with the outer peripheral circle of the hubless blade. That is, in a normal hubless blade, unlike the cutting blade 18, the center 18b of the outer peripheral circle and the center 18c of the inner peripheral circle are not formed so as to be displaced by 100 μm or more.

A predetermined mark portion is formed at a predetermined position on the inner circumference circle of the cutting blade 18. The mark portion is formed so as to cut out a part of the cutting blade 18 from the inside to the outside of the through hole 18a. The notch 18d of the present embodiment has an arch-shaped notch (marking portion) 18d, but the notch 18d is not limited to the arch shape and may have another shape.

The notch 18d is formed in, for example, a region including an intersection of a straight line passing through the center 18b and the center 18c and the inner peripheral circle of the cutting blade 18. The notch 18d functions as a mark portion indicating the direction of the cutting blade 18 when the first boss portion 16a is inserted into the through hole 18a of the cutting blade 18 and the cutting blade 18 is attached to the mount 16.

For example, when the first boss portion 16a is inserted into the through hole 18a, the orientation of the notch 18d is adjusted so that the notch 18d is located at the top (upper part in the vertical direction) of the first boss portion 16a. .. FIG. 4C is a diagram showing a state in which the first boss portion 16a is inserted into the through hole 18a.

When the first boss portion 16a is inserted into the through hole 18a with the notch 18d aligned in a predetermined direction and the cutting blade 18 is installed in the first boss portion 16a, an arch shape defining the notch 18d is formed. Two ends of the curve located on the inner circumference of the cutting blade 18 come into contact with a part of the first boss portion 16a.

That is, the two ends function as an _{alignment region 18a 1} in contact with the first boss portion 16a. Incidentally, from the two ends, the length to the center 18b of the outer circle is set so as to become the same as the radius r ₁ of the outer circumference of the first boss portion 16a.

Therefore, when the first boss portion 16a is inserted into the through hole 18a and the cutting blade 18 is installed in the first boss portion 16a with the notch 18d aligned in a predetermined direction, the cutting blade 18 rotates with the center 18b of the outer peripheral circle. The distance from the center 14b is equal to or less than a predetermined length. For example, the center 18b of the outer circle and the center of rotation 14b match.

In the present embodiment, to make the distance between the center 18b of the outer peripheral circle and the rotation center 14b less than a predetermined length means that the distance between the center 18b and the rotation center 14b is within 10 μm, preferably within 5 μm. Means.

On the other hand, in the region of the through hole 18a _{different from the alignment region 18a 1} , the length from the center 18b of the outer peripheral circle to the inner peripheral circle of the through hole 18a is the radius r _{1 of the first boss portion 16a.} It is a longer margin area 18a ₂ .

The margin area 18a ₂ is the first when the first boss portion 16a is inserted into the through hole 18a with the notch 18d aligned in a predetermined direction and the cutting blade 18 is installed in the first boss portion 16a. This is a region that does not come into contact with the boss portion 16a of the above. _{As shown in FIG. 4C, in the present embodiment, the length of the margin region 18a 2} on the straight line passing through the centers 18b and 18c is defined as the margin width B.

By providing the margin area 18a ₂ , the first boss portion 16a can be easily inserted into the through hole 18a as compared with the case where the play amount of the through hole 18a with respect to the outer diameter of the first boss portion 16a is made as small as possible.

By the way, when the notch 18d is not provided, the center 18b of the outer circumference circle of the cutting blade 18 and the inner circumference circle of the cutting blade 18 are caused by the deviation between the center 18b of the outer circumference circle and the center 18c of the inner circumference circle. The weight balance may be deviated due to the misalignment with the center 18c of the (inner circumference circle).

However, by providing the notch 18d, the weight balance deviation that occurs around the center 18b can be adjusted. That is, the notch 18d functions as a weight adjusting portion in addition to the marking portion.

When the cutting blade 18 is inserted into the first boss portion 16a and sandwiched and fixed between the flange portion 16b and the holding flange portion 24, the notch 18d is larger than the outer peripheral edges of the annular surface 16c and the annular surface 24a. It is located inside (that is, on the central axis side of the first boss portion 16a). Therefore, when the workpiece 11 is cut by the cutting blade 18, the notch 18d does not come into contact with the workpiece 11, so that the notch 18d does not directly affect the cutting.

Next, a method of manufacturing the cutting blade 18 of the present embodiment will be described. For example, when the cutting blade 18 is a resin-bonded hubless blade, first, abrasive grains, resin, etc. are placed in a mold having an annular space in which the center of the inner peripheral circle and the center of the outer peripheral circle are deviated by a predetermined length. The mixture of the above is put and molded to form an annular molded body.

Next, the molded product is fired to obtain a fired product. Then, a laser beam having a wavelength absorbed by the fired body is irradiated to a part of the vicinity of the inner circumference of the fired body to remove a part of the inner peripheral region of the fired body. As a result, the cutting blade 18 in which the notch 18d is formed is manufactured.

Next, a method of using the cutting blade 18 of the present embodiment will be described. First, the first boss portion 16a is inserted into the through hole 18a of the cutting blade 18 so that the notch 18d of the cutting blade 18 coincides with the top of the first boss portion 16a, and the cutting blade 18 is first inserted. It is installed on the boss portion 16a (insertion step (S10)).

After the insertion step (S10), the holding flange portion 24 is inserted into the first boss portion 16a, and the fixing nut 26 is fastened to the male screw 16g. As a result, the cutting blade 18 is mounted on the spindle 14 (mounting step (S20)).

At this time, the center 18b of the outer peripheral circle of the cutting blade 18 substantially coincides with the rotation center 14b of the spindle 14. Therefore, after the mounting step (S20), it is not necessary to shape (that is, truing) the cutting blade 18 so that the outer peripheral circle of the cutting blade 18 becomes a perfect circle with respect to the rotation center 14b. As described above, when the cutting blade 18 is used, it is not necessary to make a perfect circle, so that the consumption of the cutting blade 18 can be suppressed.

However, when the cutting blade 18 is not sharpened, the outer peripheral portion of the cutting blade 18 may be dressed for the purpose of sharpening. After that, as described with reference to FIG. 1, the workpiece 11 is cut by the cutting unit 10 (first cutting step (S30)).

After the first cutting step (S30), for example, a hubless blade of a different type may cut an already partially machined workpiece 11 or another workpiece 11. In this case, the fixing nut 26 and the holding flange portion 24 are sequentially removed, and the cutting blade 18 is removed from the mount 16.

Then, a predetermined hubless blade is attached to the mount 16 (replacement step (S40)). After the replacement step (S40), the already partially machined workpiece 11 and the other workpiece 11 are cut by the replaced predetermined hubless blade (second cutting step (S50)).

By the way, after the second cutting step (S50), the cutting blade 18 may be used again. In this case, the through hole 18a of the cutting blade 18 is reinserted into the first boss portion 16a so that the notch 18d coincides with the top of the first boss portion 16a, and the cutting blade 18 is inserted into the first boss portion 16a. It is installed at 16a (reinsertion step (S60)).

After the reinsertion step (S60), the cutting blade 18 is fixed to the spindle 14 by the holding flange portion 24 and the fixing nut 26 (remounting step (S70)). Even after the remounting step (S70), it is not necessary to make a perfect circle.

In this way, if the cutting blade 18 is used, it is possible to avoid wear due to rounding at each mounting process, so that the life of the cutting blade 18 can be extended as compared with a normal hubless blade.

Next, the second embodiment will be described. FIG. 5A is a front view of the cutting blade 28 according to the second embodiment. The same components as those in the first embodiment are designated by the same reference numerals. The cutting blade 28 does not have a notch 18d and has a V-shaped mark (mark portion) 28a indicating the orientation of the cutting blade 28 with respect to the mount 16.

The inner peripheral region corresponding to the mark 28a functions as the _{alignment region 18a 1 described above.} The mark 28a is formed by using, for example, an ink such as a pigment ink or a dye ink, and is formed by partially removing the other surface side of the cutting blade 28 to form irregularities on the other surface side. You may.

Further, the cutting blade 28 further has a thin portion (weight adjusting portion) 28b. The thin portion 28b is arranged on the side opposite to the above-mentioned deviation direction, and is a region on the outer peripheral side of the cutting blade 28 with respect to the mark 28a, which is not used as a cutting blade and does not come into contact with the workpiece 11. Is formed in.

By providing the thin portion 28b, it is possible to adjust the deviation of the weight balance that occurs around the center 18b of the outer peripheral circle of the cutting blade 28 due to the deviation between the center 18b of the outer peripheral circle and the center 18c of the inner peripheral circle. In this way, the mark 28a and the thin portion 28b play the same role as the notch 18d. The thin portion 28b may be formed on the other surface side of the cutting blade 28 on which the mark 28a is formed, or may be formed on the one surface side located on the opposite side of the other surface of the cutting blade 28.

When the cutting blade 28 is inserted into the first boss portion 16a and sandwiched and fixed between the flange portion 16b and the holding flange portion 24, the mark 28a and the thin portion 28b are formed from the outer peripheral edges of the annular surface 16c and the annular surface 24a. Is also located inside. Therefore, since the mark 28a and the thin portion 28b do not come into contact with the workpiece 11, the mark 28a and the thin portion 28b do not directly affect the cutting.

Also in the second embodiment, the center 18b of the outer peripheral circle of the cutting blade 28 can be aligned with the rotation center 14b of the spindle 14 by using the mark 28a. Therefore, even with the cutting blade 28, it is not necessary to make a perfect circle, so that the consumption of the cutting blade 28 can be suppressed.

Further, also in the second embodiment, _{by providing the margin area 18a 2} , the through hole 18a of the cutting blade 28 is formed as compared with the case where the play amount of the through hole 18a with respect to the outer diameter of the first boss portion 16a is made as small as possible. The first boss portion 16a can be easily inserted.

Next, a third embodiment will be described. FIG. 5B is a front view of the cutting blade 38 according to the third embodiment. The same components as those in the first and second embodiments are designated by the same reference numerals.

The cutting blade 38 has the mark 28a described above. In addition, the cutting blade 38 has a small notch 38a smaller than the above-mentioned notch 18d at a position line-symmetrical with respect to a straight line passing through the centers 18b and 18c in the edge of the through hole 18a.

The two small notches 38a are arranged on the side opposite to the above-mentioned deviation direction with respect to the center 18b of the outer peripheral circle. The two small notches 38a function as weight adjusting portions for adjusting the weight balance deviation that occurs around the center 18b of the outer peripheral circle of the cutting blade 28.

When the cutting blade 38 is inserted into the first boss portion 16a and sandwiched and fixed between the flange portion 16b and the holding flange portion 24, the mark 28a and the small notch 38a are formed on the outer peripheral edges of the annular surface 16c and the annular surface 24a. Located inside. Therefore, since the mark 28a and the small notch 38a do not come into contact with the workpiece 11, the mark 28a and the small notch 38a do not directly affect the cutting.

Also in the third embodiment, the center 18b of the outer peripheral circle of the cutting blade 38 can be aligned with the rotation center 14b of the spindle 14 by using the mark 28a. Therefore, even with the cutting blade 38, it is not necessary to make a perfect circle, so that the consumption of the cutting blade 38 can be suppressed.

Further, also in the third embodiment, _{by providing the margin area 18a 2} , the through hole 18a of the cutting blade 38 is provided as compared with the case where the play amount of the through hole 18a with respect to the outer diameter of the first boss portion 16a is made as small as possible. The first boss portion 16a can be easily inserted.

Next, a fourth embodiment will be described. FIG. 6 is a front view of the cutting blade 48 according to the fourth embodiment. The same components as those in the first, second and third embodiments are designated by the same reference numerals.

The cutting blade 48 has the two small notches 38a described above. In addition, the cutting blade 48 has a small notch 48a smaller than the notch 18d at substantially the same position as the notch 18d described above. Two ends of the arched curve defining the small notch 48a located on the inner circumference of the cutting blade 48 function as the _{alignment region 18a 1 described above.}

Further, the small notch 48a functions as a mark portion indicating the direction of the cutting blade 18 with respect to the mount 16 when the cutting blade 48 is attached to the mount 16, but also as a weight adjusting portion like the small notch 38a. Function.

When the cutting blade 48 is inserted into the first boss portion 16a and sandwiched and fixed between the flange portion 16b and the holding flange portion 24, the small notches 38a and 48a are formed from the outer peripheral edges of the annular surface 16c and the annular surface 24a. Is also located inside. Therefore, the small cutouts 38a and 48a do not come into contact with the workpiece 11, and the small cutouts 38a and 48a do not directly affect the cutting.

Also in the fourth embodiment, the center 18b of the outer peripheral circle of the cutting blade 48 can be aligned with the rotation center 14b of the spindle 14 by using the small notch 48a. Therefore, even with the cutting blade 48, it is not necessary to make a perfect circle, so that the consumption of the cutting blade 48 can be suppressed.

Further, also in the fourth embodiment, _{by providing the margin area 18a 2} , the through hole 18a of the cutting blade 48 is formed as compared with the case where the play amount of the through hole 18a with respect to the outer diameter of the first boss portion 16a is made as small as possible. The first boss portion 16a can be easily inserted.

In addition, the structure, method, etc. according to the above-described embodiment can be appropriately modified and implemented as long as they do not deviate from the scope of the object of the present invention. The position of the mark 28a is not limited to the positions shown in FIGS. 5 (A) and 5 (B).

That is, the position, size, number, shape, etc. of _{the mark 28a are not limited as long as the alignment region 18a 1} in consideration of the deviation between the center 18b of the outer peripheral circle and the center 18c of the inner peripheral circle can be specified. The mark 28a is not limited to the case where the operator visually confirms the mark 28a, and may be read by a reading device (not shown) provided with a camera or the like. Further, the position, size, number, shape, etc. of the small notches 38a are not limited to the examples shown in FIGS. 5 (B) and 6.

2 Cutting device 4 Chuck table 4a Holding surface 6 Clamp unit 10 Cutting unit 12 Spindle housing 14 Spindle 14a Screw hole 14b Rotation center 16 Mount 16a First boss part (boss part)
16b Flange part 16c Coronal plane 16d Second boss part 16e Mounting hole 16f Third boss part 16g Male screw 16h Mounting hole 16i Stepped part 18 Cutting blade 18a Through hole 18a ₁ Alignment area 18a ₂ Margin area 18b, 18c Center 18d Notch (mark part)
20 Washers 22 Bolts 24 Holding flanges 24a Coronal planes 26 Fixing nuts 26a Female threads 28 Cutting blades 28a Marks 28b Thin parts (weight adjustment part)
38 Cutting blade 38a Small notch 48 Cutting blade 48a Small notch 11 Work piece 11a Front surface 11b Back surface 13 Dicing tape 15 Frame r ₁ , r ₂ , r ₃ Radius A Misalignment amount B Margin width

Claims (4)

An annular cutting blade with through holes used when cutting workpieces.
When a cylindrical boss portion provided on a mount fixed to one end of a spindle is inserted into the through hole of the cutting blade, the cutting blade is provided with a mark portion indicating the orientation of the cutting blade.
The inner circumference of the cutting blade corresponding to the edge of the through hole is
An alignment region in which the length from the center of the outer peripheral circle of the cutting blade to the inner circumference of the cutting blade is the same as the radius of the boss portion.
It is located in a region different from the alignment region, and includes a margin region in which the length from the center of the outer peripheral circle of the cutting blade to the inner circumference of the cutting blade is longer than the radius of the boss portion.
When the boss portion is inserted into the through hole with the mark portion aligned in a predetermined direction and the cutting blade is installed on the boss portion, the rotation center of the boss portion and the center of the outer peripheral circle of the cutting blade A cutting blade characterized in that the distance between the two is less than or equal to a predetermined length. The cutting blade according to claim 1, wherein the mark portion is provided so as to cut out the cutting blade from the inner circumference of the cutting blade toward the outer circumference of the cutting blade. The claim is characterized by further including a weight adjusting portion for adjusting a weight balance deviation caused by a positional deviation between the center of the outer peripheral circle of the cutting blade and the center of the inner peripheral circle of the cutting blade. The cutting blade according to 1 or 2. The cutting blade according to claim 3, wherein the weight adjusting portion is a notch portion provided so as to cut out the cutting blade from the inner circumference of the cutting blade toward the outer circumference of the cutting blade.

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