WO2020189368A1 - Grindstone - Google Patents

Grindstone Download PDF

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Publication number
WO2020189368A1
WO2020189368A1 PCT/JP2020/009963 JP2020009963W WO2020189368A1 WO 2020189368 A1 WO2020189368 A1 WO 2020189368A1 JP 2020009963 W JP2020009963 W JP 2020009963W WO 2020189368 A1 WO2020189368 A1 WO 2020189368A1
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WO
WIPO (PCT)
Prior art keywords
plate
shaped portion
shaped
grindstone
abrasive grains
Prior art date
Application number
PCT/JP2020/009963
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French (fr)
Japanese (ja)
Inventor
篤 ▲高▼田
大橋　恭介
大地 ▲高▼田
タイン グェン、トウン
Original Assignee
株式会社ナノテム
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社ナノテム filed Critical 株式会社ナノテム
Priority to JP2021507217A priority Critical patent/JP7186468B2/en
Publication of WO2020189368A1 publication Critical patent/WO2020189368A1/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D7/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor

Definitions

  • the present invention relates to a grindstone.
  • the grindstone described in Patent Document 1 includes a porous support made of ceramics having a large number of parallel through holes, and an abrasive grain layer in which superabrasive grains are fixed to the end face of the porous support with a metal plating layer. Equipped. An opening corresponding to the through hole is formed in this abrasive grain layer.
  • the abrasive grain layer has a lattice shape. Therefore, the contact area between the abrasive grain layer and the workpiece becomes large. Therefore, the processing pressure applied by the grindstone to the work piece is reduced, which may reduce the processing performance.
  • the present invention has been made in view of the above circumstances, and an object of the present invention is to provide a grindstone capable of improving processing performance.
  • the grindstone according to the present invention is provided with a plurality of columnar portions that are arranged along a processed surface on which the workpiece is processed and extend in a direction intersecting the processed surface, and each of the columnar portions is a first.
  • a plate-shaped portion and a second plate-shaped portion extending in a direction different from that of the first plate-shaped portion and connected to the first plate-shaped portion are provided.
  • each of the columnar portions extends in a direction different from that of the first plate-shaped portion and the second plate-shaped portion, and forms a third plate-shaped portion connected to the first plate-shaped portion and the second plate-shaped portion. You may be prepared.
  • first plate-shaped portion, the second plate-shaped portion, and the third plate-shaped portion may be arranged at equal angular intervals.
  • the plurality of columnar portions are arranged at each corner portion of a virtual hexagon arranged without a gap along the machined surface, and the first plate-shaped portion, the second plate-shaped portion, and the third plate-shaped portion are arranged.
  • the plate-shaped portion may extend in a direction along the side of the hexagon.
  • the number of the columnar portions per unit area of the processed surface may be increased toward the inside in the radial direction of the grindstone.
  • the plurality of columnar portions may have the same shape and size, respectively.
  • the grindstone includes a plurality of plate materials formed by connecting the first plate-shaped portion and the second plate-shaped portion, and an adhesive layer provided between the plurality of plate materials, and the plate materials are each provided.
  • a plurality of first abrasive grains that come into contact with the workpiece when the workpiece is processed, and a binder that binds the plurality of first abrasive grains, and the adhesive layer is the workpiece.
  • a plurality of second abrasive grains that come into contact with the workpiece when the object is processed, and an adhesive that combines the plurality of second abrasive grains and adheres between the plurality of plate materials are provided. You may.
  • the three plate materials each have a V-shaped plate shape and are arranged so as to open in different directions, and the adhesive layer is provided in a Y-shaped gap between the three plate materials.
  • the three plate materials may be adhered to each other.
  • the processing performance of the grindstone can be improved.
  • FIG. 1A is a partially enlarged enlarged view of FIG. 1A according to an embodiment of the present invention.
  • FIG. 1B is a partially enlarged enlarged view of FIG. 1B according to an embodiment of the present invention. It is sectional drawing of line 2-2 of FIG. 1A. It is a bottom view of the X-shaped columnar part which concerns on the modification of this invention. It is a bottom view of the V-shaped columnar part which concerns on the modification of this invention. It is sectional drawing of the Y-shaped columnar part which concerns on the modification of this invention.
  • the grindstone unit 1 includes a grindstone 10 for processing the workpiece W and a grindstone holder 20 for holding the grindstone 10.
  • the grindstone holder 20 has a substantially disk shape.
  • a cylindrical shaft 25 is inserted through the center of the grindstone holder 20.
  • the grindstone holder 20 is rotated together with the grindstone 10 by a motor 27 about a rotation shaft O along a shaft 25.
  • the grindstone 10 rotates in a state where the workpiece W fixed to the chuck (not shown) is in contact with the machined surface 10a which is the lower surface of the grindstone 10.
  • the grindstone 10 processes, that is, polishes or grinds the workpiece W.
  • the workpiece W is, for example, ceramics, a silicon wafer, a semiconductor substrate, an LED (Light Emitting Diode) substrate, a heat radiating substrate, silicon carbide, alumina, sapphire, metal, or the like.
  • the grindstone 10 forms an annular shape.
  • the grindstone 10 includes a plurality of Y-shaped columnar portions 11 each having the same shape and size.
  • Each Y-shaped columnar portion 11 is fixed to the lower surface of the grindstone holder 20 and extends in the Z direction along the rotation axis O.
  • a gap through which air and chips can pass is formed between the plurality of Y-shaped columnar portions 11. The gaps between the plurality of Y-shaped columnar portions 11 communicate with the outer and inner outer spaces of the grindstone 10 in the radial direction R.
  • the plurality of Y-shaped columnar portions 11 are arranged at each corner portion of the virtual hexagonal Hx arranged without gaps.
  • the plurality of Y-shaped columnar portions 11 are formed in a shape in which the central portion of the side of the virtual hexagon Hx is omitted.
  • the virtual hexagons Hx are arranged along the circumferential direction C and the radial direction R of the grindstone 10.
  • the area of the virtual hexagon Hx becomes smaller as it becomes the inner row in the radial direction R.
  • the virtual hexagon Hx1 is arranged in the first row L1 along the circumferential direction C
  • the virtual hexagon Hx2 is arranged in the second row L2 along the circumferential direction C.
  • the second row L2 is located adjacent to the inside of the radial direction R with respect to the first row L1.
  • the virtual hexagon Hx2 arranged in the second row L2 has a smaller area than the virtual hexagon Hx1 arranged in the first row L1. Further, the virtual hexagons Hx2 arranged in the second row L2 are displaced in the circumferential direction C with respect to the virtual hexagons Hx1 arranged in the first row L1 by a distance of half the honeycomb diameter of the virtual hexagons Hx1 or the virtual hexagons Hx2. Have been placed.
  • the number of Y-shaped columnar portions 11 per unit area of the machined surface 10a of the grindstone 10 increases toward the inside of the radial direction R.
  • the distance between the plurality of Y-shaped columnar portions 11 in the circumferential direction C becomes narrower toward the inside of the radial direction R.
  • the Y-shaped columnar portion 11 includes a first plate-shaped portion 11a, a second plate-shaped portion 11b, and a third plate-shaped portion 11c.
  • the first plate-shaped portion 11a, the second plate-shaped portion 11b, and the third plate-shaped portion 11c each have a rectangular plate shape.
  • the base end portions of the first plate-shaped portion 11a, the second plate-shaped portion 11b, and the third plate-shaped portion 11c are connected at one point, and extend from the base end portion toward the tip end portion in different directions.
  • the first plate-shaped portion 11a, the second plate-shaped portion 11b, and the third plate-shaped portion 11c are arranged at equal angular intervals, that is, at 120 ° intervals.
  • the angle formed by the third plate-shaped portion 11c and the angle formed by the third plate-shaped portion 11c with respect to the first plate-shaped portion 11a and the second plate-shaped portion 11b are both set to 120 °.
  • the first plate-shaped portion 11a, the second plate-shaped portion 11b, and the third plate-shaped portion 11c extend along each side of the virtual hexagon Hx.
  • Six Y-shaped columnar portions 11 having different orientations are arranged at the six corner portions of the virtual hexagon Hx.
  • the intersection of the first plate-shaped portion 11a, the second plate-shaped portion 11b, and the third plate-shaped portion 11c coincides with the corner portion of the virtual hexagon Hx.
  • the plate thickness of the first plate-shaped portion 11a, the second plate-shaped portion 11b, and the third plate-shaped portion 11c is preferably set to 100 ⁇ m, more preferably 10 ⁇ m to 500 ⁇ m.
  • the first plate-shaped portion 11a, the second plate-shaped portion 11b, and the third plate-shaped portion 11c form, for example, a square plate shape having a side of 3 mm.
  • the grindstone 10 is formed of a plurality of abrasive grains and a binder.
  • a plurality of abrasive grains are distributed in the binder.
  • the abrasive grains are, for example, diamond.
  • the abrasive grains are not limited to diamond, and may be cubic boron nitride (CBN) abrasive grains, or CBN abrasive grains and diamond may be mixed.
  • the plurality of abrasive grains may be silicon carbide (SiC), molten alumina (Al 2 O 3 ), or a mixture thereof.
  • the binder holds a plurality of abrasive grains inside.
  • the binder is formed of a metal such as nickel or aluminum, a resin or a ceramic.
  • the grindstone 10 includes a Y-shaped columnar portion 11 which is an example of a plurality of columnar portions which are arranged with a gap along a processed surface 10a on which the workpiece W is processed and extend in a direction intersecting the processed surface 10a. ..
  • Each Y-shaped columnar portion 11 includes a first plate-shaped portion 11a and a second plate-shaped portion 11b extending in a direction different from that of the first plate-shaped portion 11a and connected to the first plate-shaped portion 11a. According to this configuration, since the plurality of Y-shaped columnar portions 11 are arranged with a gap, the contact area between the grindstone 10 and the workpiece W can be reduced.
  • the processing pressure applied by the grindstone 10 to the workpiece W is increased, and the processing performance is improved.
  • the first plate-shaped portion 11a and the second plate-shaped portion 11b of the Y-shaped columnar portion 11 are connected while extending in different directions. Therefore, even when the contact area between the grindstone 10 and the workpiece W becomes small, it is difficult for the Y-shaped columnar portion 11 to bend due to the force received from the workpiece W. Therefore, the processing performance is improved. Further, since a gap is formed between the plurality of Y-shaped columnar portions 11, a closed space is not formed.
  • an air hammer phenomenon may occur due to air in the closed space.
  • the air in the closed space expands and becomes a pressurized state, which prevents the grindstone from coming into contact with the work piece or roughens the machined surface due to the vibration of the grindstone. , Machining accuracy may decrease.
  • the present embodiment since a gap through which air enters and exits is formed between the plurality of Y-shaped columnar portions 11, the occurrence of the air hammer phenomenon is suppressed. As a result, it is possible to prevent the processing accuracy from being lowered. Chips of the workpiece W are held in the gaps between the plurality of Y-shaped columnar portions 11. Therefore, it is possible to prevent chips from entering between the grindstone 10 and the workpiece W, thereby suppressing the influence of chips on the processing.
  • Each Y-shaped columnar portion 11 extends in a direction different from that of the first plate-shaped portion 11a and the second plate-shaped portion 11b, and is connected to the first plate-shaped portion 11a and the second plate-shaped portion 11b.
  • the shape portion 11c is provided. According to this configuration, the Y-shaped columnar portion 11 is difficult to bend due to the force received from the workpiece W. Therefore, the processing performance is improved.
  • the first plate-shaped portion 11a, the second plate-shaped portion 11b, and the third plate-shaped portion 11c are arranged at equal angular intervals. According to this configuration, the Y-shaped columnar portion 11 can be made difficult to bend regardless of the direction of the force received from the workpiece W.
  • the plurality of Y-shaped columnar portions 11 are arranged at each corner portion of the virtual hexagonal Hx arranged without gaps along the machined surface 10a.
  • the first plate-shaped portion 11a, the second plate-shaped portion 11b, and the third plate-shaped portion 11c extend in a direction along the side of the virtual hexagon Hx.
  • the six Y-shaped columnar portions 11 located at each corner of the virtual hexagon Hx are installed so as to have different orientations. Therefore, the Y-shaped columnar portion 11 can be made difficult to bend regardless of the direction of the force received from the workpiece W.
  • the number of Y-shaped columnar portions 11 per unit area of the machined surface 10a increases toward the inside of the grindstone 10 in the radial direction R.
  • the portion outside the radial direction R of the grindstone 10 rotates at a higher speed than the portion inside the radial direction R of the grindstone 10.
  • the amount of machining of the portion of the work piece that comes into contact with the radial outside of the grindstone is the work piece. It is larger than the amount of processing of the part that contacts the inside of the grindstone in the radial direction.
  • the number of Y-shaped columnar portions 11 per unit area increases toward the inside of the grindstone 10 in the radial direction.
  • the workpiece W can be machined with a uniform machining amount regardless of the difference in peripheral speed in the radial direction R of the grindstone 10.
  • the plurality of Y-shaped columnar portions 11 each have the same shape and size.
  • the first plate-shaped portion 11a, the second plate-shaped portion 11b, and the third plate-shaped portion 11c are arranged at equal angular intervals, but they do not have to be at equal angular intervals.
  • the angle of the second plate-shaped portion 11b with respect to the first plate-shaped portion 11a is an acute angle
  • the angles of the first plate-shaped portion 11a and the second plate-shaped portion 11b with respect to the third plate-shaped portion 11c are obtuse angles. May be good.
  • the plurality of Y-shaped columnar portions 11 are arranged at each corner of the virtual hexagon Hx arranged without gaps, but the arrangement mode is not limited to this, and the virtual quadrangles arranged without gaps. It may be arranged at each corner of.
  • the number of Y-shaped columnar portions 11 per unit area is set to increase toward the inside of the radial direction R of the grindstone 10.
  • the number of Y-shaped columnar portions 11 per unit area may be set to decrease toward the inside of the radial direction R, or may be set to the same number along the radial direction R.
  • the plurality of Y-shaped columnar portions 11 are each formed in the same shape and size, but they may be formed in different shapes or sizes.
  • the columnar portion is a Y-shaped columnar portion 11, but the columnar portion is not limited to this, and may be an X-shaped columnar portion 12 as shown in FIG. 3A.
  • the X-shaped columnar portion 12 includes a first plate-shaped portion 12a and a second plate-shaped portion 12b intersecting the first plate-shaped portion 12a.
  • the center position of the first plate-shaped portion 12a and the center position of the second plate-shaped portion 12b intersect.
  • the angle formed by the first plate-shaped portion 12a and the second plate-shaped portion 12b may be approximately 90 °.
  • the columnar portion may be a V-shaped columnar portion 13 as shown in FIG. 3B.
  • the V-shaped columnar portion 13 includes a first plate-shaped portion 13a and a second plate-shaped portion 13b at an angle with respect to the first plate-shaped portion 13a.
  • the end of the first plate-shaped portion 13a and the end of the second plate-shaped portion 13b are connected.
  • the angle formed by the first plate-shaped portion 13a and the second plate-shaped portion 13b is an acute angle.
  • the columnar portion may be an N-shaped columnar portion, an L-shaped columnar portion, a T-shaped columnar portion, a Z-shaped columnar portion, a cross columnar portion, or a triangular tubular columnar portion.
  • the Y-shaped columnar portion 11 may include three V-shaped plate members 11v1, 11v2, 11v3 and an adhesive layer 11s.
  • the V-shaped plate member 11v1 is composed of a first plate-shaped portion 11a1 and a second plate-shaped portion 11b1 connected to each other at different angles.
  • the V-shaped plate member 11v2 is composed of a first plate-shaped portion 11a2 and a second plate-shaped portion 11b2 that are connected to each other at different angles.
  • the V-shaped plate member 11v3 is composed of a first plate-shaped portion 11a3 and a second plate-shaped portion 11b3 that are connected to each other at different angles.
  • the first plate-shaped portions 11a1 and 11a3 face each other and are adhered to each other via the adhesive layer 11s.
  • the second plate-shaped portions 11b2 and 11b3 face each other and are adhered to each other via the adhesive layer 11s.
  • the first plate-shaped portion 11a2 and the second plate-shaped portion 11b1 face each other and are adhered to each other via the adhesive layer 11s.
  • the V-shaped plate members 11v1, 11v2, 11v3 each include a plurality of abrasive grains 11e that come into contact with the workpiece W when the workpiece W is processed, and a binder 11f that binds the plurality of abrasive grains 11e. ..
  • the plurality of abrasive grains 11e are arranged in a row along the V-shaped plate members 11v1, 11v2, 11v3.
  • the binder 11f is set to have a thickness equal to or larger than the average particle size of the abrasive grains 11e, for example, 1.0 to 1.5 times the average particle size of the abrasive grains 11e.
  • the abrasive grains 11e are, for example, diamond abrasive grains, CBN abrasive grains, SiC, Al 2 O 3, and the like.
  • the binder 11f is formed of a metal such as nickel or aluminum, a resin or a ceramic.
  • the V-shaped plate members 11v1, 11v2, 11v3 are installed so that their corners are close to the center point Cp of the Y-shaped columnar portion 11 and are opened in different directions.
  • the V-shaped plate material 11v1 has a V-shape that opens in the first direction F1.
  • the V-shaped plate material 11v2 has a V-shape that opens in the second direction F2.
  • the V-shaped plate material 11v3 has a V-shape that opens in the third direction F3.
  • the first direction F1, the second direction F2, and the third direction F3 are set in different directions at intervals of 120 ° about the center point Cp.
  • the adhesive layer 11s is formed in a Y shape and is formed in a gap between the V-shaped plate members 11v1, 11v2, 11v3, and the V-shaped plate members 11v1, 11v2, 11v3 are bonded to each other.
  • the adhesive layer 11s combines the abrasive grains 11s1 which are examples of a plurality of second abrasive grains that come into contact with the workpiece W when the workpiece W is processed, and the abrasive grains 11s1 to form a V-shaped plate material 11v1, 11v2.
  • An adhesive material 11s2 for adhering between 11v3 is provided.
  • the adhesive 11s2 is located between the two first plate-shaped portions 11a1 and 11a3, between the two second plate-shaped portions 11b2 and 11b3, and between the first plate-shaped portion 11a2 and the second plate-shaped portion 11b1. And glue.
  • the plurality of abrasive grains 11s1 are arranged in a row along the adhesive layer 11s.
  • the adhesive material 11s2 is set to have a thickness equal to or greater than the average particle size of the abrasive grains 11s1, for example, 1.0 to 1.5 times the average particle size of the abrasive grains 11s1.
  • the abrasive grains 11s1 are, for example, diamond abrasive grains, CBN abrasive grains, silicon carbide (SiC), molten alumina (Al 2 O 3 ), and the like.
  • the adhesive 11s2 is, for example, an epoxy resin.
  • the adhesive layer 11s is not limited to the modified example shown in FIG. 4, and may be applied to the modified example shown in FIGS. 3A and 3B. Further, the plurality of abrasive grains 11s1 included in the adhesive layer 11s may be omitted.
  • the grindstone 10 is formed by connecting a V-shaped plate member 11v1 which is an example of a plate material formed by connecting the first plate-shaped portion 11a1 and the second plate-shaped portion 11b1, and connecting the first plate-shaped portion 11a2 and the second plate-shaped portion 11b2.
  • the V-shaped plate material 11v2 which is an example of the plate material
  • the V-shaped plate material 11v3 which is an example of the plate material in which the first plate-shaped portion 11a3 and the second plate-shaped portion 11b3 are connected
  • An adhesive layer 11s provided between them is provided.
  • the V-shaped plate materials 11v1, 11v2, and 11v3 combine the abrasive grains 11e, which is an example of a plurality of first abrasive grains that come into contact with the workpiece W when the workpiece W is processed, and the plurality of abrasive grains 11e, respectively.
  • the binder 11f is provided.
  • the adhesive layer 11s combines the abrasive grains 11s1 which are examples of the plurality of second abrasive grains that come into contact with the workpiece W when the workpiece W is processed, and the plurality of abrasive grains 11s1, and the V-shaped plate material 11v1,
  • An adhesive material 11s2 for adhering between 11v2 and 11v3 is provided. According to this configuration, the processing ability of the grindstone 10 can be improved by including the plurality of abrasive grains 11s1 in the adhesive material 11s2.
  • the three V-shaped plate members 11v1, 11v2, 11v3 each have a V-shaped plate shape, and are arranged so as to open toward different first direction F1, second direction F2, and third direction F3, respectively.
  • the adhesive layer 11s is provided in a Y-shaped gap between the three V-shaped plate members 11v1, 11v2, 11v3, and adheres the three V-shaped plate members 11v1, 11v2, 11v3.
  • the Y-shaped columnar portion 11 is formed by the V-shaped plate members 11v1, 11v2, 11v3 and the adhesive layer 11s in a three-layer structure. Therefore, the strength of the Y-shaped columnar portion 11 can be increased. As a result, the processing capacity of the grindstone 10 can be improved.

Abstract

This grindstone is provided with a plurality of Y-shaped columnar sections (11) that are arranged with a gap therebetween along a processing surface for processing an object to be processed and that extend in a direction intersecting the processing surface. Each Y-shaped columnar section (11) is provided with a first plate-shaped section (11a) and a second plate-shaped section (11b) connected to the first plate-shaped section (11a) and extending in a direction different from that of the first plate-shaped section (11a).

Description

砥石Whetstone
　本発明は、砥石に関する。 The present invention relates to a grindstone.
　例えば、特許文献１に記載の砥石は、多数の平行な貫通孔を有するセラミックス製の多孔支持体と、この多孔支持体の端面に超砥粒を金属メッキ層で固定された砥粒層とを具備する。この砥粒層には貫通孔に対応した開口部が形成されている。 For example, the grindstone described in Patent Document 1 includes a porous support made of ceramics having a large number of parallel through holes, and an abrasive grain layer in which superabrasive grains are fixed to the end face of the porous support with a metal plating layer. Equipped. An opening corresponding to the through hole is formed in this abrasive grain layer.
特開平４－１２９６７５号公報Japanese Unexamined Patent Publication No. 4-129675
　特許文献１の第５図等に示すように、砥粒層は格子状をなす。よって、砥粒層と被加工物の接触面積が大きくなる。このため、砥石が被加工物に加える加工圧力が小さくなり、加工性能が低下するおそれがある。 As shown in FIG. 5 of Patent Document 1, the abrasive grain layer has a lattice shape. Therefore, the contact area between the abrasive grain layer and the workpiece becomes large. Therefore, the processing pressure applied by the grindstone to the work piece is reduced, which may reduce the processing performance.
　本発明は、上記実状を鑑みてなされたものであり、加工性能を向上させることができる砥石を提供することを目的とする。 The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a grindstone capable of improving processing performance.
　上記目的を達成するため、本発明に係る砥石は、被加工物を加工する加工面に沿って並べられ、前記加工面に交わる方向に延びる複数の柱状部を備え、前記各柱状部は、第１板状部と、前記第１板状部と異なる方向に延び、前記第１板状部に連結される第２板状部と、を備える。 In order to achieve the above object, the grindstone according to the present invention is provided with a plurality of columnar portions that are arranged along a processed surface on which the workpiece is processed and extend in a direction intersecting the processed surface, and each of the columnar portions is a first. A plate-shaped portion and a second plate-shaped portion extending in a direction different from that of the first plate-shaped portion and connected to the first plate-shaped portion are provided.
　また、前記各柱状部は、前記第１板状部及び前記第２板状部と異なる方向に延び、前記第１板状部及び前記第２板状部に連結される第３板状部を備える、ようにしてもよい。 Further, each of the columnar portions extends in a direction different from that of the first plate-shaped portion and the second plate-shaped portion, and forms a third plate-shaped portion connected to the first plate-shaped portion and the second plate-shaped portion. You may be prepared.
　また、前記第１板状部、前記第２板状部及び前記第３板状部は等角度間隔で配置される、ようにしてもよい。 Further, the first plate-shaped portion, the second plate-shaped portion, and the third plate-shaped portion may be arranged at equal angular intervals.
　また、前記複数の柱状部は、前記加工面に沿って隙間なく並べられた仮想的な六角形の各角部に配置され、前記第１板状部、前記第２板状部及び前記第３板状部は前記六角形の辺に沿う方向に延びる、ようにしてもよい。 Further, the plurality of columnar portions are arranged at each corner portion of a virtual hexagon arranged without a gap along the machined surface, and the first plate-shaped portion, the second plate-shaped portion, and the third plate-shaped portion are arranged. The plate-shaped portion may extend in a direction along the side of the hexagon.
　また、前記加工面の単位面積あたりの前記柱状部の数は前記砥石の径方向の内側に向かうにつれて多くなる、ようにしてもよい。 Further, the number of the columnar portions per unit area of the processed surface may be increased toward the inside in the radial direction of the grindstone.
　また、前記複数の柱状部はそれぞれ同一の形状及びサイズをなす、ようにしてもよい。 Further, the plurality of columnar portions may have the same shape and size, respectively.
　また、前記砥石は、前記第１板状部及び前記第２板状部が連結されてなる複数の板材と、前記複数の板材の間に設けられる接着層と、を備え、前記板材は、それぞれ、前記被加工物を加工する際に前記被加工物に接触する複数の第１砥粒と、前記複数の第１砥粒を結合する結合材と、を備え、前記接着層は、前記被加工物を加工する際に前記被加工物に接触する複数の第２砥粒と、前記複数の第２砥粒を結合し、前記複数の板材の間を接着する接着材と、を備える、ようにしてもよい。 Further, the grindstone includes a plurality of plate materials formed by connecting the first plate-shaped portion and the second plate-shaped portion, and an adhesive layer provided between the plurality of plate materials, and the plate materials are each provided. A plurality of first abrasive grains that come into contact with the workpiece when the workpiece is processed, and a binder that binds the plurality of first abrasive grains, and the adhesive layer is the workpiece. A plurality of second abrasive grains that come into contact with the workpiece when the object is processed, and an adhesive that combines the plurality of second abrasive grains and adheres between the plurality of plate materials are provided. You may.
　また、３つの前記板材は、それぞれＶ字板状をなし、それぞれ異なる方向に向けて開口する向きに配置され、前記接着層は、前記３つの板材の間のＹ字状の隙間に設けられ、前記３つの板材を接着する、ようにしてもよい。 Further, the three plate materials each have a V-shaped plate shape and are arranged so as to open in different directions, and the adhesive layer is provided in a Y-shaped gap between the three plate materials. The three plate materials may be adhered to each other.
　本発明によれば、砥石において、加工性能を向上させることができる。 According to the present invention, the processing performance of the grindstone can be improved.
本発明の一実施形態に係る砥石の下面図である。It is a bottom view of the grindstone which concerns on one Embodiment of this invention. 本発明の一実施形態に係る図１Ａを部分的に拡大した拡大図である。FIG. 1A is a partially enlarged enlarged view of FIG. 1A according to an embodiment of the present invention. 本発明の一実施形態に係る図１Ｂを部分的に拡大した拡大図である。FIG. 1B is a partially enlarged enlarged view of FIG. 1B according to an embodiment of the present invention. 図１Ａの２－２線の断面図である。It is sectional drawing of line 2-2 of FIG. 1A. 本発明の変形例に係るＸ字柱状部の下面図である。It is a bottom view of the X-shaped columnar part which concerns on the modification of this invention. 本発明の変形例に係るＶ字柱状部の下面図である。It is a bottom view of the V-shaped columnar part which concerns on the modification of this invention. 本発明の変形例に係るＹ字柱状部の横断面図である。It is sectional drawing of the Y-shaped columnar part which concerns on the modification of this invention.
　本発明に係る砥石の一実施形態について図面を参照して説明する。
　図１Ａ及び図２に示すように、砥石ユニット１は、被加工物Ｗを加工する砥石１０と、砥石１０を保持する砥石ホルダー２０と、を備える。 An embodiment of the grindstone according to the present invention will be described with reference to the drawings.
As shown in FIGS. 1A and 2, the grindstone unit 1 includes a grindstone 10 for processing the workpiece W and a grindstone holder 20 for holding the grindstone 10.
　図２に示すように、砥石ホルダー２０は略円板状をなす。砥石ホルダー２０の中心には円柱状のシャフト２５が挿通される。砥石ホルダー２０は、砥石１０とともに、シャフト２５に沿う回転軸Ｏを中心にモータ２７により回転する。砥石１０の下面である加工面１０ａに図示しないチャックに固定された被加工物Ｗが接触した状態で砥石１０が回転する。これにより、砥石１０は被加工物Ｗを加工、すなわち研磨又は研削する。被加工物Ｗは、例えば、セラミックス、シリコンウエハ、半導体基板、ＬＥＤ（Light Emitting Diode）基板、放熱基板、シリコンカーバイド、アルミナ、サファイア又は金属等である。 As shown in FIG. 2, the grindstone holder 20 has a substantially disk shape. A cylindrical shaft 25 is inserted through the center of the grindstone holder 20. The grindstone holder 20 is rotated together with the grindstone 10 by a motor 27 about a rotation shaft O along a shaft 25. The grindstone 10 rotates in a state where the workpiece W fixed to the chuck (not shown) is in contact with the machined surface 10a which is the lower surface of the grindstone 10. As a result, the grindstone 10 processes, that is, polishes or grinds the workpiece W. The workpiece W is, for example, ceramics, a silicon wafer, a semiconductor substrate, an LED (Light Emitting Diode) substrate, a heat radiating substrate, silicon carbide, alumina, sapphire, metal, or the like.
　図１Ａに示すように、砥石１０は円環状をなす。図１Ｂに示すように、砥石１０は、それぞれ同一の形状及びサイズで形成される複数のＹ字柱状部１１を備える。各Ｙ字柱状部１１は、砥石ホルダー２０の下面に固定され、回転軸Ｏに沿うＺ方向に延びる。複数のＹ字柱状部１１の間には、空気及び切りくずが通過可能な隙間が形成される。複数のＹ字柱状部１１の間の隙間は、砥石１０における径方向Ｒの外側及び内側の外部空間に連通する。 As shown in FIG. 1A, the grindstone 10 forms an annular shape. As shown in FIG. 1B, the grindstone 10 includes a plurality of Y-shaped columnar portions 11 each having the same shape and size. Each Y-shaped columnar portion 11 is fixed to the lower surface of the grindstone holder 20 and extends in the Z direction along the rotation axis O. A gap through which air and chips can pass is formed between the plurality of Y-shaped columnar portions 11. The gaps between the plurality of Y-shaped columnar portions 11 communicate with the outer and inner outer spaces of the grindstone 10 in the radial direction R.
　複数のＹ字柱状部１１は、隙間なく並べられた仮想六角形Ｈｘの各角部に配置される。複数のＹ字柱状部１１は、仮想六角形Ｈｘの辺の中央部が省略された形状で形成される。
　仮想六角形Ｈｘは砥石１０の周方向Ｃ及び径方向Ｒに沿って並べられる。仮想六角形Ｈｘの面積は径方向Ｒの内側の列となるにつれて小さくなる。例えば、周方向Ｃに沿う第１列Ｌ１には仮想六角形Ｈｘ１が並び、周方向Ｃに沿う第２列Ｌ２には仮想六角形Ｈｘ２が並ぶ。第２列Ｌ２は、第１列Ｌ１に対して径方向Ｒの内側に隣接して位置する。第２列Ｌ２に並ぶ仮想六角形Ｈｘ２は、第１列Ｌ１に並ぶ仮想六角形Ｈｘ１よりも小さい面積である。また、第２列Ｌ２に並ぶ仮想六角形Ｈｘ２は、第１列Ｌ１に並ぶ仮想六角形Ｈｘ１に対して周方向Ｃに、仮想六角形Ｈｘ１又は仮想六角形Ｈｘ２のハニカム径の半分の距離だけずらされて配置されている。 The plurality of Y-shaped columnar portions 11 are arranged at each corner portion of the virtual hexagonal Hx arranged without gaps. The plurality of Y-shaped columnar portions 11 are formed in a shape in which the central portion of the side of the virtual hexagon Hx is omitted.
The virtual hexagons Hx are arranged along the circumferential direction C and the radial direction R of the grindstone 10. The area of the virtual hexagon Hx becomes smaller as it becomes the inner row in the radial direction R. For example, the virtual hexagon Hx1 is arranged in the first row L1 along the circumferential direction C, and the virtual hexagon Hx2 is arranged in the second row L2 along the circumferential direction C. The second row L2 is located adjacent to the inside of the radial direction R with respect to the first row L1. The virtual hexagon Hx2 arranged in the second row L2 has a smaller area than the virtual hexagon Hx1 arranged in the first row L1. Further, the virtual hexagons Hx2 arranged in the second row L2 are displaced in the circumferential direction C with respect to the virtual hexagons Hx1 arranged in the first row L1 by a distance of half the honeycomb diameter of the virtual hexagons Hx1 or the virtual hexagons Hx2. Have been placed.
　また、砥石１０の加工面１０ａの単位面積あたりのＹ字柱状部１１の数は径方向Ｒの内側に向かうにつれて多くなる。言い換えると、複数のＹ字柱状部１１の周方向Ｃの間隔は径方向Ｒの内側に向かうにつれて狭くなる。 Further, the number of Y-shaped columnar portions 11 per unit area of the machined surface 10a of the grindstone 10 increases toward the inside of the radial direction R. In other words, the distance between the plurality of Y-shaped columnar portions 11 in the circumferential direction C becomes narrower toward the inside of the radial direction R.
　詳しくは、図１Ｃに示すように、Ｙ字柱状部１１は、第１板状部１１ａと、第２板状部１１ｂと、第３板状部１１ｃと、を備える。第１板状部１１ａ、第２板状部１１ｂ及び第３板状部１１ｃは、それぞれ、矩形板状をなす。第１板状部１１ａ、第２板状部１１ｂ及び第３板状部１１ｃは、それぞれ基端部が一点で連結され、基端部から先端部に向けて互いに異なる方向に延びる。第１板状部１１ａ、第２板状部１１ｂ及び第３板状部１１ｃは、等角度間隔、すなわち、１２０°間隔で配置される。言い換えると、第１板状部１１ａが第２板状部１１ｂ及び第３板状部１１ｃに対してなす角度、第２板状部１１ｂが第１板状部１１ａ及び第３板状部１１ｃに対してなす角度、及び第３板状部１１ｃが第１板状部１１ａ及び第２板状部１１ｂに対してなす角度は、何れも１２０°に設定される。 Specifically, as shown in FIG. 1C, the Y-shaped columnar portion 11 includes a first plate-shaped portion 11a, a second plate-shaped portion 11b, and a third plate-shaped portion 11c. The first plate-shaped portion 11a, the second plate-shaped portion 11b, and the third plate-shaped portion 11c each have a rectangular plate shape. The base end portions of the first plate-shaped portion 11a, the second plate-shaped portion 11b, and the third plate-shaped portion 11c are connected at one point, and extend from the base end portion toward the tip end portion in different directions. The first plate-shaped portion 11a, the second plate-shaped portion 11b, and the third plate-shaped portion 11c are arranged at equal angular intervals, that is, at 120 ° intervals. In other words, the angle formed by the first plate-shaped portion 11a with respect to the second plate-shaped portion 11b and the third plate-shaped portion 11c, and the second plate-shaped portion 11b on the first plate-shaped portion 11a and the third plate-shaped portion 11c. The angle formed by the third plate-shaped portion 11c and the angle formed by the third plate-shaped portion 11c with respect to the first plate-shaped portion 11a and the second plate-shaped portion 11b are both set to 120 °.
　第１板状部１１ａ、第２板状部１１ｂ及び第３板状部１１ｃは仮想六角形Ｈｘの各辺に沿って延びる。仮想六角形Ｈｘの６つの角部には、それぞれ向きの異なる６つのＹ字柱状部１１が配置される。第１板状部１１ａ、第２板状部１１ｂ及び第３板状部１１ｃの交点は仮想六角形Ｈｘの角部に一致する。第１板状部１１ａ、第２板状部１１ｂ及び第３板状部１１ｃの板厚は、好ましくは、１００μｍ、より好ましくは、１０μｍ～５００μｍに設定される。また、第１板状部１１ａ、第２板状部１１ｂ及び第３板状部１１ｃは、例えば、各辺が３ｍｍの正方形板状をなす。 The first plate-shaped portion 11a, the second plate-shaped portion 11b, and the third plate-shaped portion 11c extend along each side of the virtual hexagon Hx. Six Y-shaped columnar portions 11 having different orientations are arranged at the six corner portions of the virtual hexagon Hx. The intersection of the first plate-shaped portion 11a, the second plate-shaped portion 11b, and the third plate-shaped portion 11c coincides with the corner portion of the virtual hexagon Hx. The plate thickness of the first plate-shaped portion 11a, the second plate-shaped portion 11b, and the third plate-shaped portion 11c is preferably set to 100 μm, more preferably 10 μm to 500 μm. Further, the first plate-shaped portion 11a, the second plate-shaped portion 11b, and the third plate-shaped portion 11c form, for example, a square plate shape having a side of 3 mm.
　砥石１０は、複数の砥粒及び結合材により形成される。
　複数の砥粒は結合材内に分布している。砥粒は、例えば、ダイヤモンドである。なお、砥粒は、ダイヤモンドに限らず、立方晶窒化ホウ素（ＣＢＮ）砥粒であってもよいし、ＣＢＮ砥粒とダイヤモンドを混合させてもよい。さらには、複数の砥粒は、炭化ケイ素（ＳｉＣ）、又は溶融アルミナ（Ａｌ２Ｏ３）、若しくはこれらを混合したものであってもよい。結合材は、内部に複数の砥粒を保持する。結合材は、ニッケル、アルミニウム等の金属、樹脂又はセラミックにより形成される。 The grindstone 10 is formed of a plurality of abrasive grains and a binder.
A plurality of abrasive grains are distributed in the binder. The abrasive grains are, for example, diamond. The abrasive grains are not limited to diamond, and may be cubic boron nitride (CBN) abrasive grains, or CBN abrasive grains and diamond may be mixed. Further, the plurality of abrasive grains may be silicon carbide (SiC), molten alumina (Al 2 O 3 ), or a mixture thereof. The binder holds a plurality of abrasive grains inside. The binder is formed of a metal such as nickel or aluminum, a resin or a ceramic.
　（効果）
　以上、説明した一実施形態によれば、以下の効果を奏する。
　（１）砥石１０は、被加工物Ｗを加工する加工面１０ａに沿って隙間を持って並べられ、加工面１０ａに交わる方向に延びる複数の柱状部の一例であるＹ字柱状部１１を備える。各Ｙ字柱状部１１は、第１板状部１１ａと、第１板状部１１ａと異なる方向に延び、第１板状部１１ａに連結される第２板状部１１ｂと、を備える。
　この構成によれば、複数のＹ字柱状部１１は隙間を持って並べられるため、砥石１０と被加工物Ｗの接触面積を小さくすることができる。これにより、砥石１０が被加工物Ｗに加える加工圧力が大きくなり、加工性能が向上する。
　また、Ｙ字柱状部１１における第１板状部１１ａ及び第２板状部１１ｂが異なる方向に延びつつ連結される。このため、砥石１０と被加工物Ｗの接触面積が小さくなった場合であっても、Ｙ字柱状部１１が被加工物Ｗから受ける力により撓みづらい。よって、加工性能が向上する。
　また、複数のＹ字柱状部１１の間には隙間が形成されるため閉じた空間が形成されない。例えば、比較例に係る閉じた空間を有する複数の筒状を有する砥石の場合、閉じた空間内の空気によりエアハンマー現象が生じるおそれがある。エアハンマー現象が生じると、例えば、閉じた空間内の空気が膨張して加圧状態となり、砥石が被加工物に接することが妨げられたり、砥石の振動により加工面が粗くなったりすることで、加工精度が低下するおそれがある。この点、本実施形態では、複数のＹ字柱状部１１間には空気が出入りする隙間が形成されるため、エアハンマー現象が生じることが抑制される。これにより、加工精度が低下することが抑制される。
　複数のＹ字柱状部１１の間の隙間には、被加工物Ｗの切りくずが保持される。よって、切りくずが砥石１０と被加工物Ｗの間に進入することが抑制され、これにより、切りくずが加工に影響を与えることが抑制される。 (effect)
According to the embodiment described above, the following effects are obtained.
(1) The grindstone 10 includes a Y-shaped columnar portion 11 which is an example of a plurality of columnar portions which are arranged with a gap along a processed surface 10a on which the workpiece W is processed and extend in a direction intersecting the processed surface 10a. .. Each Y-shaped columnar portion 11 includes a first plate-shaped portion 11a and a second plate-shaped portion 11b extending in a direction different from that of the first plate-shaped portion 11a and connected to the first plate-shaped portion 11a.
According to this configuration, since the plurality of Y-shaped columnar portions 11 are arranged with a gap, the contact area between the grindstone 10 and the workpiece W can be reduced. As a result, the processing pressure applied by the grindstone 10 to the workpiece W is increased, and the processing performance is improved.
Further, the first plate-shaped portion 11a and the second plate-shaped portion 11b of the Y-shaped columnar portion 11 are connected while extending in different directions. Therefore, even when the contact area between the grindstone 10 and the workpiece W becomes small, it is difficult for the Y-shaped columnar portion 11 to bend due to the force received from the workpiece W. Therefore, the processing performance is improved.
Further, since a gap is formed between the plurality of Y-shaped columnar portions 11, a closed space is not formed. For example, in the case of a grindstone having a plurality of tubular shapes having a closed space according to a comparative example, an air hammer phenomenon may occur due to air in the closed space. When the air hammer phenomenon occurs, for example, the air in the closed space expands and becomes a pressurized state, which prevents the grindstone from coming into contact with the work piece or roughens the machined surface due to the vibration of the grindstone. , Machining accuracy may decrease. In this respect, in the present embodiment, since a gap through which air enters and exits is formed between the plurality of Y-shaped columnar portions 11, the occurrence of the air hammer phenomenon is suppressed. As a result, it is possible to prevent the processing accuracy from being lowered.
Chips of the workpiece W are held in the gaps between the plurality of Y-shaped columnar portions 11. Therefore, it is possible to prevent chips from entering between the grindstone 10 and the workpiece W, thereby suppressing the influence of chips on the processing.
　（２）各Ｙ字柱状部１１は、第１板状部１１ａ及び第２板状部１１ｂと異なる方向に延び、第１板状部１１ａ及び第２板状部１１ｂに連結される第３板状部１１ｃを備える。
　この構成によれば、Ｙ字柱状部１１は被加工物Ｗから受ける力により撓みづらい。よって、加工性能が向上する。 (2) Each Y-shaped columnar portion 11 extends in a direction different from that of the first plate-shaped portion 11a and the second plate-shaped portion 11b, and is connected to the first plate-shaped portion 11a and the second plate-shaped portion 11b. The shape portion 11c is provided.
According to this configuration, the Y-shaped columnar portion 11 is difficult to bend due to the force received from the workpiece W. Therefore, the processing performance is improved.
　（３）第１板状部１１ａ、第２板状部１１ｂ及び第３板状部１１ｃは等角度間隔で配置される。
　この構成によれば、Ｙ字柱状部１１は、被加工物Ｗから受ける力の方向に関わらず、撓みづらくすることができる。 (3) The first plate-shaped portion 11a, the second plate-shaped portion 11b, and the third plate-shaped portion 11c are arranged at equal angular intervals.
According to this configuration, the Y-shaped columnar portion 11 can be made difficult to bend regardless of the direction of the force received from the workpiece W.
　（４）複数のＹ字柱状部１１は、加工面１０ａに沿って隙間なく並べられた仮想六角形Ｈｘの各角部に配置される。第１板状部１１ａ、第２板状部１１ｂ及び第３板状部１１ｃは仮想六角形Ｈｘの辺に沿う方向に延びる。
　この構成によれば、仮想六角形Ｈｘの各角部に位置する６つのＹ字柱状部１１の向きが異なるように設置される。よって、Ｙ字柱状部１１は、被加工物Ｗから受ける力の方向に関わらず、撓みづらくすることができる。 (4) The plurality of Y-shaped columnar portions 11 are arranged at each corner portion of the virtual hexagonal Hx arranged without gaps along the machined surface 10a. The first plate-shaped portion 11a, the second plate-shaped portion 11b, and the third plate-shaped portion 11c extend in a direction along the side of the virtual hexagon Hx.
According to this configuration, the six Y-shaped columnar portions 11 located at each corner of the virtual hexagon Hx are installed so as to have different orientations. Therefore, the Y-shaped columnar portion 11 can be made difficult to bend regardless of the direction of the force received from the workpiece W.
　（５）加工面１０ａの単位面積あたりのＹ字柱状部１１の数は砥石１０の径方向Ｒの内側に向かうにつれて多くなる。
　砥石１０が回転軸Ｏを中心に回転すると、砥石１０の径方向Ｒの外側の部位は、砥石１０の径方向Ｒの内側の部位よりも高速で回転する。このため、本実施形態と異なる比較例である同一のサイズの筒部が並べられた砥石の場合、被加工物のうち砥石の径方向外側に接触する部位の加工量は、被加工物のうち砥石の径方向内側に接触する部位の加工量よりも多くなる。よって、この比較例の構成では、被加工物を均一に加工することが困難であった。この点、本実施形態では、単位面積あたりのＹ字柱状部１１の数は砥石１０の径方向の内側に向かうにつれて多くなる。これにより、砥石１０の径方向Ｒにおける周速差に関わらず、被加工物Ｗを均一の加工量にて加工することができる。 (5) The number of Y-shaped columnar portions 11 per unit area of the machined surface 10a increases toward the inside of the grindstone 10 in the radial direction R.
When the grindstone 10 rotates about the rotation axis O, the portion outside the radial direction R of the grindstone 10 rotates at a higher speed than the portion inside the radial direction R of the grindstone 10. For this reason, in the case of a grindstone in which cylinders of the same size are arranged, which is a comparative example different from the present embodiment, the amount of machining of the portion of the work piece that comes into contact with the radial outside of the grindstone is the work piece. It is larger than the amount of processing of the part that contacts the inside of the grindstone in the radial direction. Therefore, in the configuration of this comparative example, it was difficult to uniformly process the workpiece. In this respect, in the present embodiment, the number of Y-shaped columnar portions 11 per unit area increases toward the inside of the grindstone 10 in the radial direction. As a result, the workpiece W can be machined with a uniform machining amount regardless of the difference in peripheral speed in the radial direction R of the grindstone 10.
　（６）複数のＹ字柱状部１１はそれぞれ同一の形状及びサイズをなす。
　筒部が並べられた砥石である比較例では、筒部の径や筒の形状を変更する場合には、砥石を成形する型を新たに用意する必要がある。この点、本実施形態では、Ｙ字柱状部１１の位置関係を変更するだけで済み、砥石を成形する型を新たに用意する必要がない。よって、多種類の砥石を簡単に製造することができる。 (6) The plurality of Y-shaped columnar portions 11 each have the same shape and size.
In the comparative example in which the grindstones are arranged with the cylinders, it is necessary to prepare a new mold for forming the grindstones when changing the diameter of the cylinders or the shape of the cylinders. In this respect, in the present embodiment, it is only necessary to change the positional relationship of the Y-shaped columnar portion 11, and it is not necessary to newly prepare a mold for forming the grindstone. Therefore, many types of grindstones can be easily manufactured.
　なお、本発明は以上の実施形態及び図面によって限定されるものではない。本発明の要旨を変更しない範囲で、適宜、変更（構成要素の削除も含む）を加えることが可能である。以下に、変形の一例を説明する。 The present invention is not limited to the above embodiments and drawings. Changes (including deletion of components) can be made as appropriate without changing the gist of the present invention. An example of the modification will be described below.
　（変形例）
　上記実施形態においては、第１板状部１１ａ、第２板状部１１ｂ及び第３板状部１１ｃは、等角度間隔で配置されていたが、等角度間隔でなくてもよい。例えば、第１板状部１１ａに対する第２板状部１１ｂの角度は鋭角をなすとともに、第３板状部１１ｃに対する第１板状部１１ａ及び第２板状部１１ｂの角度は鈍角をなしてもよい。 (Modification example)
In the above embodiment, the first plate-shaped portion 11a, the second plate-shaped portion 11b, and the third plate-shaped portion 11c are arranged at equal angular intervals, but they do not have to be at equal angular intervals. For example, the angle of the second plate-shaped portion 11b with respect to the first plate-shaped portion 11a is an acute angle, and the angles of the first plate-shaped portion 11a and the second plate-shaped portion 11b with respect to the third plate-shaped portion 11c are obtuse angles. May be good.
　上記実施形態においては、複数のＹ字柱状部１１は、隙間なく並べられた仮想六角形Ｈｘの各角部に配置されていたが、配置態様はこれに限らず、隙間なく並べられた仮想四角形の各角部に配置されてもよい。 In the above embodiment, the plurality of Y-shaped columnar portions 11 are arranged at each corner of the virtual hexagon Hx arranged without gaps, but the arrangement mode is not limited to this, and the virtual quadrangles arranged without gaps. It may be arranged at each corner of.
　上記実施形態においては、単位面積あたりのＹ字柱状部１１の数は砥石１０の径方向Ｒの内側に向かうにつれて多く設定されていた。しかしながら、これに限らず、単位面積あたりのＹ字柱状部１１の数は径方向Ｒの内側に向かうにつれて少なく設定されてもよいし、径方向Ｒに沿って同数に設定されてもよい。 In the above embodiment, the number of Y-shaped columnar portions 11 per unit area is set to increase toward the inside of the radial direction R of the grindstone 10. However, not limited to this, the number of Y-shaped columnar portions 11 per unit area may be set to decrease toward the inside of the radial direction R, or may be set to the same number along the radial direction R.
　上記実施形態においては、複数のＹ字柱状部１１はそれぞれ同一の形状及びサイズで形成されていたが、それぞれ異なる形状又はサイズで形成されてもよい。 In the above embodiment, the plurality of Y-shaped columnar portions 11 are each formed in the same shape and size, but they may be formed in different shapes or sizes.
　上記実施形態においては、柱状部は、Ｙ字柱状部１１であったが、これに限らず、図３Ａに示すように、Ｘ字柱状部１２であってもよい。Ｘ字柱状部１２は、第１板状部１２ａと、第１板状部１２ａに交差する第２板状部１２ｂと、を備える。第１板状部１２ａの中心位置と第２板状部１２ｂの中心位置が交わる。第１板状部１２ａと第２板状部１２ｂがなす角度は略９０°であってもよい。
　また、柱状部は、図３Ｂに示すように、Ｖ字柱状部１３であってもよい。Ｖ字柱状部１３は、第１板状部１３ａと、第１板状部１３ａに対して角度をなす第２板状部１３ｂと、を備える。第１板状部１３ａの端部と第２板状部１３ｂの端部が連結される。第１板状部１３ａと第２板状部１３ｂがなす角度は鋭角である。
　さらに、柱状部は、Ｎ字柱状部、Ｌ字柱状部、Ｔ字柱状部、Ｚ字柱状部、十字柱状部又は三角形筒状の柱状部であってもよい。 In the above embodiment, the columnar portion is a Y-shaped columnar portion 11, but the columnar portion is not limited to this, and may be an X-shaped columnar portion 12 as shown in FIG. 3A. The X-shaped columnar portion 12 includes a first plate-shaped portion 12a and a second plate-shaped portion 12b intersecting the first plate-shaped portion 12a. The center position of the first plate-shaped portion 12a and the center position of the second plate-shaped portion 12b intersect. The angle formed by the first plate-shaped portion 12a and the second plate-shaped portion 12b may be approximately 90 °.
Further, the columnar portion may be a V-shaped columnar portion 13 as shown in FIG. 3B. The V-shaped columnar portion 13 includes a first plate-shaped portion 13a and a second plate-shaped portion 13b at an angle with respect to the first plate-shaped portion 13a. The end of the first plate-shaped portion 13a and the end of the second plate-shaped portion 13b are connected. The angle formed by the first plate-shaped portion 13a and the second plate-shaped portion 13b is an acute angle.
Further, the columnar portion may be an N-shaped columnar portion, an L-shaped columnar portion, a T-shaped columnar portion, a Z-shaped columnar portion, a cross columnar portion, or a triangular tubular columnar portion.
　上記実施形態において、図４に示すように、Ｙ字柱状部１１は、３つのＶ字板材１１ｖ１，１１ｖ２，１１ｖ３と、接着層１１ｓと、を備えていてもよい。
　Ｖ字板材１１ｖ１は、互いに異なる角度で連結される第１板状部１１ａ１及び第２板状部１１ｂ１により構成される。Ｖ字板材１１ｖ２は、互いに異なる角度で連結される第１板状部１１ａ２及び第２板状部１１ｂ２により構成される。Ｖ字板材１１ｖ３は、互いに異なる角度で連結される第１板状部１１ａ３及び第２板状部１１ｂ３により構成される。
　第１板状部１１ａ１，１１ａ３は、互いに対面し、接着層１１ｓを介して互いに接着されている。第２板状部１１ｂ２，１１ｂ３は、互いに対面し、接着層１１ｓを介して互いに接着されている。第１板状部１１ａ２及び第２板状部１１ｂ１は、互いに対面し、接着層１１ｓを介して互いに接着されている。
　Ｖ字板材１１ｖ１，１１ｖ２，１１ｖ３は、それぞれ、被加工物Ｗを加工する際に被加工物Ｗに接触する複数の砥粒１１ｅと、複数の砥粒１１ｅを結合する結合材１１ｆと、を備える。
　複数の砥粒１１ｅは、Ｖ字板材１１ｖ１，１１ｖ２，１１ｖ３に沿って１列に並べられている。結合材１１ｆは、砥粒１１ｅの平均粒径以上の厚さ、例えば、砥粒１１ｅの平均粒径の１．０倍～１．５倍の厚さに設定される。砥粒１１ｅは、例えば、ダイヤモンド砥粒、ＣＢＮ砥粒、ＳｉＣ、又はＡｌ２Ｏ３等である。結合材１１ｆは、ニッケル、アルミニウム等の金属、樹脂又はセラミックにより形成される。 In the above embodiment, as shown in FIG. 4, the Y-shaped columnar portion 11 may include three V-shaped plate members 11v1, 11v2, 11v3 and an adhesive layer 11s.
The V-shaped plate member 11v1 is composed of a first plate-shaped portion 11a1 and a second plate-shaped portion 11b1 connected to each other at different angles. The V-shaped plate member 11v2 is composed of a first plate-shaped portion 11a2 and a second plate-shaped portion 11b2 that are connected to each other at different angles. The V-shaped plate member 11v3 is composed of a first plate-shaped portion 11a3 and a second plate-shaped portion 11b3 that are connected to each other at different angles.
The first plate-shaped portions 11a1 and 11a3 face each other and are adhered to each other via the adhesive layer 11s. The second plate-shaped portions 11b2 and 11b3 face each other and are adhered to each other via the adhesive layer 11s. The first plate-shaped portion 11a2 and the second plate-shaped portion 11b1 face each other and are adhered to each other via the adhesive layer 11s.
The V-shaped plate members 11v1, 11v2, 11v3 each include a plurality of abrasive grains 11e that come into contact with the workpiece W when the workpiece W is processed, and a binder 11f that binds the plurality of abrasive grains 11e. ..
The plurality of abrasive grains 11e are arranged in a row along the V-shaped plate members 11v1, 11v2, 11v3. The binder 11f is set to have a thickness equal to or larger than the average particle size of the abrasive grains 11e, for example, 1.0 to 1.5 times the average particle size of the abrasive grains 11e. The abrasive grains 11e are, for example, diamond abrasive grains, CBN abrasive grains, SiC, Al 2 O 3, and the like. The binder 11f is formed of a metal such as nickel or aluminum, a resin or a ceramic.
　Ｖ字板材１１ｖ１，１１ｖ２，１１ｖ３は、それぞれの角部がＹ字柱状部１１の中心点Ｃｐに近い位置となり、かつ、異なる方向に向けて開口する向きで設置される。Ｖ字板材１１ｖ１は第１方向Ｆ１に向けて開口するＶ字状をなす。Ｖ字板材１１ｖ２は第２方向Ｆ２に向けて開口するＶ字状をなす。Ｖ字板材１１ｖ３は第３方向Ｆ３に向けて開口するＶ字状をなす。第１方向Ｆ１、第２方向Ｆ２及び第３方向Ｆ３は、中心点Ｃｐを中心として互いに１２０°間隔で互いに異なる向きに設定される。 The V-shaped plate members 11v1, 11v2, 11v3 are installed so that their corners are close to the center point Cp of the Y-shaped columnar portion 11 and are opened in different directions. The V-shaped plate material 11v1 has a V-shape that opens in the first direction F1. The V-shaped plate material 11v2 has a V-shape that opens in the second direction F2. The V-shaped plate material 11v3 has a V-shape that opens in the third direction F3. The first direction F1, the second direction F2, and the third direction F3 are set in different directions at intervals of 120 ° about the center point Cp.
　接着層１１ｓは、Ｙ字状に形成され、Ｖ字板材１１ｖ１，１１ｖ２，１１ｖ３の間の隙間に形成され、Ｖ字板材１１ｖ１，１１ｖ２，１１ｖ３を互いに接着する。
　接着層１１ｓは、被加工物Ｗを加工する際に被加工物Ｗに接触する複数の第２砥粒の一例である砥粒１１ｓ１と、砥粒１１ｓ１を結合し、Ｖ字板材１１ｖ１，１１ｖ２，１１ｖ３の間を接着する接着材１１ｓ２と、を備える。接着材１１ｓ２は、２つの第１板状部１１ａ１，１１ａ３の間、２つの第２板状部１１ｂ２，１１ｂ３の間、及び第１板状部１１ａ２及び第２板状部１１ｂ１の間に位置して接着する。
　複数の砥粒１１ｓ１は、接着層１１ｓに沿って１列に並べられている。接着材１１ｓ２は、砥粒１１ｓ１の平均粒径以上の厚さ、例えば、砥粒１１ｓ１の平均粒径の１．０倍～１．５倍の厚さに設定される。砥粒１１ｓ１は、例えば、ダイヤモンド砥粒、ＣＢＮ砥粒、炭化ケイ素（ＳｉＣ）、又は溶融アルミナ（Ａｌ２Ｏ３）等である。接着材１１ｓ２は例えばエポキシ樹脂である。
　なお、接着層１１ｓは、図４に示す変形例に限らず、図３Ａ及び図３Ｂに示す変形例に適用されてもよい。また、接着層１１ｓに含まれる複数の砥粒１１ｓ１は省略されてもよい。 The adhesive layer 11s is formed in a Y shape and is formed in a gap between the V-shaped plate members 11v1, 11v2, 11v3, and the V-shaped plate members 11v1, 11v2, 11v3 are bonded to each other.
The adhesive layer 11s combines the abrasive grains 11s1 which are examples of a plurality of second abrasive grains that come into contact with the workpiece W when the workpiece W is processed, and the abrasive grains 11s1 to form a V-shaped plate material 11v1, 11v2. An adhesive material 11s2 for adhering between 11v3 is provided. The adhesive 11s2 is located between the two first plate-shaped portions 11a1 and 11a3, between the two second plate-shaped portions 11b2 and 11b3, and between the first plate-shaped portion 11a2 and the second plate-shaped portion 11b1. And glue.
The plurality of abrasive grains 11s1 are arranged in a row along the adhesive layer 11s. The adhesive material 11s2 is set to have a thickness equal to or greater than the average particle size of the abrasive grains 11s1, for example, 1.0 to 1.5 times the average particle size of the abrasive grains 11s1. The abrasive grains 11s1 are, for example, diamond abrasive grains, CBN abrasive grains, silicon carbide (SiC), molten alumina (Al 2 O 3 ), and the like. The adhesive 11s2 is, for example, an epoxy resin.
The adhesive layer 11s is not limited to the modified example shown in FIG. 4, and may be applied to the modified example shown in FIGS. 3A and 3B. Further, the plurality of abrasive grains 11s1 included in the adhesive layer 11s may be omitted.
　図４の変形例には以下の技術的思想が開示されている。
　砥石１０は、第１板状部１１ａ１及び第２板状部１１ｂ１が連結されてなる板材の一例であるＶ字板材１１ｖ１と、第１板状部１１ａ２及び第２板状部１１ｂ２が連結されてなる板材の一例であるＶ字板材１１ｖ２と、第１板状部１１ａ３及び第２板状部１１ｂ３が連結されてなる板材の一例であるＶ字板材１１ｖ３と、Ｖ字板材１１ｖ１，１１ｖ２，１１ｖ３の間に設けられる接着層１１ｓと、を備える。Ｖ字板材１１ｖ１，１１ｖ２，１１ｖ３は、それぞれ、被加工物Ｗを加工する際に被加工物Ｗに接触する複数の第１砥粒の一例である砥粒１１ｅと、複数の砥粒１１ｅを結合する結合材１１ｆと、を備える。接着層１１ｓは、被加工物Ｗを加工する際に被加工物Ｗに接触する複数の第２砥粒の一例である砥粒１１ｓ１と、複数の砥粒１１ｓ１を結合し、Ｖ字板材１１ｖ１，１１ｖ２，１１ｖ３の間を接着する接着材１１ｓ２と、を備える。
　この構成によれば、接着材１１ｓ２に複数の砥粒１１ｓ１が含まれることにより、砥石１０の加工能力を向上させることができる。 The following technical ideas are disclosed in the modified example of FIG.
The grindstone 10 is formed by connecting a V-shaped plate member 11v1 which is an example of a plate material formed by connecting the first plate-shaped portion 11a1 and the second plate-shaped portion 11b1, and connecting the first plate-shaped portion 11a2 and the second plate-shaped portion 11b2. The V-shaped plate material 11v2, which is an example of the plate material, the V-shaped plate material 11v3, which is an example of the plate material in which the first plate-shaped portion 11a3 and the second plate-shaped portion 11b3 are connected, and the V-shaped plate material 11v1, 11v2, 11v3. An adhesive layer 11s provided between them is provided. The V-shaped plate materials 11v1, 11v2, and 11v3 combine the abrasive grains 11e, which is an example of a plurality of first abrasive grains that come into contact with the workpiece W when the workpiece W is processed, and the plurality of abrasive grains 11e, respectively. The binder 11f is provided. The adhesive layer 11s combines the abrasive grains 11s1 which are examples of the plurality of second abrasive grains that come into contact with the workpiece W when the workpiece W is processed, and the plurality of abrasive grains 11s1, and the V-shaped plate material 11v1, An adhesive material 11s2 for adhering between 11v2 and 11v3 is provided.
According to this configuration, the processing ability of the grindstone 10 can be improved by including the plurality of abrasive grains 11s1 in the adhesive material 11s2.
　３つのＶ字板材１１ｖ１，１１ｖ２，１１ｖ３は、それぞれＶ字板状をなし、それぞれ異なる第１方向Ｆ１、第２方向Ｆ２及び第３方向Ｆ３に向けて開口する向きに配置される。接着層１１ｓは、３つのＶ字板材１１ｖ１，１１ｖ２，１１ｖ３の間のＹ字状の隙間に設けられ、３つのＶ字板材１１ｖ１，１１ｖ２，１１ｖ３を接着する。
　この構成によれば、Ｙ字柱状部１１は、Ｖ字板材１１ｖ１，１１ｖ２，１１ｖ３と接着層１１ｓにより３層構造で形成される。よって、Ｙ字柱状部１１の強度を高めることができる。これにより、砥石１０の加工能力を向上させることができる。 The three V-shaped plate members 11v1, 11v2, 11v3 each have a V-shaped plate shape, and are arranged so as to open toward different first direction F1, second direction F2, and third direction F3, respectively. The adhesive layer 11s is provided in a Y-shaped gap between the three V-shaped plate members 11v1, 11v2, 11v3, and adheres the three V-shaped plate members 11v1, 11v2, 11v3.
According to this configuration, the Y-shaped columnar portion 11 is formed by the V-shaped plate members 11v1, 11v2, 11v3 and the adhesive layer 11s in a three-layer structure. Therefore, the strength of the Y-shaped columnar portion 11 can be increased. As a result, the processing capacity of the grindstone 10 can be improved.
　本発明は、本発明の広義の精神と範囲を逸脱することなく、様々な実施の形態及び変形が可能とされるものである。また、上述した実施の形態は、この発明を説明するためのものであり、本発明の範囲を限定するものではない。すなわち、本発明の範囲は、実施の形態ではなく、特許請求の範囲によって示される。そして、特許請求の範囲内及びそれと同等の発明の意義の範囲内で施される様々な変形が、この発明の範囲内とみなされる。 The present invention enables various embodiments and modifications without departing from the broad spirit and scope of the present invention. Moreover, the above-described embodiment is for explaining the present invention, and does not limit the scope of the present invention. That is, the scope of the present invention is indicated by the scope of claims, not by the embodiment. Then, various modifications made within the scope of the claims and the equivalent meaning of the invention are considered to be within the scope of the present invention.
　本出願は、２０１９年３月１５日に出願された、日本国特許出願２０１９－０４８０５３号に基づく。本明細書中に日本国特許出願２０１９－０４８０５３号の明細書、特許請求の範囲、及び図面全体を参照として取り込むものとする。 This application is based on Japanese Patent Application No. 2019-048053 filed on March 15, 2019. The specification, claims, and the entire drawing of Japanese Patent Application No. 2019-048053 shall be incorporated into this specification as a reference.
１　砥石ユニット
１０　砥石
１０ａ　加工面
１１　Ｙ字柱状部
１１ｖ１，１１ｖ２，１１ｖ３　Ｖ字板材
１１ａ，１２ａ，１３ａ，１１ａ１，１１ａ２，１１ａ３　第１板状部
１１ｂ，１２ｂ，１３ｂ，１１ｂ１，１１ｂ２，１１ｂ３　第２板状部
１１ｃ　第３板状部
１１ｓ　接着層
１１ｓ１　砥粒
１１ｓ２　接着材
１１ｅ　砥粒
１１ｆ　結合材
１２　Ｘ字柱状部
１３　Ｖ字柱状部
２０　砥石ホルダー
２５　シャフト
２７　モータ
Ｃ　周方向
Ｌ１　第１列
Ｌ２　第２列
Ｏ　回転軸
Ｒ　径方向
Ｗ　被加工物
Ｈｘ，Ｈｘ１，Ｈｘ２　仮想六角形 1 Grindstone unit 10 Grindstone 10a Machined surface 11 Y-shaped columnar portion 11v1, 11v2, 11v3 V-shaped plate material 11a, 12a, 13a, 11a1, 11a2, 11a3 First plate-shaped portion 11b, 12b, 13b, 11b1, 11b2, 11b3 Second Plate-shaped part 11c Third plate-shaped part 11s Adhesive layer 11s1 Abrasive grains 11s2 Adhesive material 11e Abrasive grains 11f Bonding material 12 X-shaped columnar part 13 V-shaped columnar part 20 Grindstone holder 25 Shaft 27 Motor C Circumferential direction L1 First row L2 First 2 rows O Rotating axis R Radial direction W Work piece Hx, Hx1, Hx2 Virtual hexagon

Claims (8)

  1. 　被加工物を加工する加工面に沿って並べられ、前記加工面に交わる方向に延びる複数の柱状部を備え、
    　前記各柱状部は、
    　第１板状部と、
    　前記第１板状部と異なる方向に延び、前記第１板状部に連結される第２板状部と、を備える、
    　砥石。     A plurality of columnar portions arranged along a machined surface on which the workpiece is machined and extending in a direction intersecting the machined surface are provided.
    Each columnar portion is
    The first plate-shaped part and
    A second plate-shaped portion extending in a direction different from that of the first plate-shaped portion and connected to the first plate-shaped portion is provided.
    Whetstone.
  2. 　前記各柱状部は、
    　前記第１板状部及び前記第２板状部と異なる方向に延び、前記第１板状部及び前記第２板状部に連結される第３板状部を備える、
    　請求項１に記載の砥石。     Each columnar portion is
    A third plate-shaped portion extending in a direction different from that of the first plate-shaped portion and the second plate-shaped portion and connected to the first plate-shaped portion and the second plate-shaped portion is provided.
    The grindstone according to claim 1.
  3. 　前記第１板状部、前記第２板状部及び前記第３板状部は等角度間隔で配置される、
    　請求項２に記載の砥石。     The first plate-shaped portion, the second plate-shaped portion, and the third plate-shaped portion are arranged at equal angular intervals.
    The grindstone according to claim 2.
  4. 　前記複数の柱状部は、前記加工面に沿って隙間なく並べられた仮想的な六角形の各角部に配置され、
    　前記第１板状部、前記第２板状部及び前記第３板状部は前記六角形の辺に沿う方向に延びる、
    　請求項２又は３に記載の砥石。     The plurality of columnar portions are arranged at each corner portion of a virtual hexagon arranged without gaps along the machined surface.
    The first plate-shaped portion, the second plate-shaped portion, and the third plate-shaped portion extend in a direction along the side of the hexagon.
    The grindstone according to claim 2 or 3.
  5. 　前記加工面の単位面積あたりの前記柱状部の数は前記砥石の径方向の内側に向かうにつれて多くなる、
    　請求項１から４の何れか１項に記載の砥石。     The number of the columnar portions per unit area of the machined surface increases toward the inside in the radial direction of the grindstone.
    The grindstone according to any one of claims 1 to 4.
  6. 　前記複数の柱状部はそれぞれ同一の形状及びサイズをなす、
    　請求項１から５の何れか１項に記載の砥石。     The plurality of columnar portions each have the same shape and size.
    The grindstone according to any one of claims 1 to 5.
  7. 　前記砥石は、前記第１板状部及び前記第２板状部が連結されてなる複数の板材と、
    　前記複数の板材の間に設けられる接着層と、を備え、
    　前記板材は、それぞれ、
    　前記被加工物を加工する際に前記被加工物に接触する複数の第１砥粒と、
    　前記複数の第１砥粒を結合する結合材と、を備え、
    　前記接着層は、
    　前記被加工物を加工する際に前記被加工物に接触する複数の第２砥粒と、
    　前記複数の第２砥粒を結合し、前記複数の板材の間を接着する接着材と、を備える、
    　請求項１から６の何れか１項に記載の砥石。     The grindstone includes a plurality of plate materials formed by connecting the first plate-shaped portion and the second plate-shaped portion.
    An adhesive layer provided between the plurality of plate materials is provided.
    Each of the plate materials
    A plurality of first abrasive grains that come into contact with the work piece when processing the work piece,
    A binder that binds the plurality of first abrasive grains is provided.
    The adhesive layer is
    A plurality of second abrasive grains that come into contact with the work piece when processing the work piece,
    An adhesive material for bonding the plurality of second abrasive grains and adhering between the plurality of plate materials is provided.
    The grindstone according to any one of claims 1 to 6.
  8. 　３つの前記板材は、それぞれＶ字板状をなし、それぞれ異なる方向に向けて開口する向きに配置され、
    　前記接着層は、前記３つの板材の間のＹ字状の隙間に設けられ、前記３つの板材を接着する、
    　請求項７に記載の砥石。     The three plate members each have a V-shaped plate shape, and are arranged so as to open in different directions.
    The adhesive layer is provided in a Y-shaped gap between the three plate materials, and adheres the three plate materials.
    The grindstone according to claim 7.
PCT/JP2020/009963 2019-03-15 2020-03-09 Grindstone WO2020189368A1 (en)

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JP2022014952A (en) * 2020-07-08 2022-01-21 株式会社ナノテム Polishing plate
JP2022076183A (en) * 2020-11-09 2022-05-19 株式会社ナノテム Tool, diameter adjustment method, and drill

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WO2002022310A1 (en) * 2000-09-13 2002-03-21 A.L.M.T. Corp. Ultra abrasive grain wheel for mirror finish
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JP7418009B2 (en) 2020-07-08 2024-01-19 株式会社ナノテム polishing plate
JP2022076183A (en) * 2020-11-09 2022-05-19 株式会社ナノテム Tool, diameter adjustment method, and drill

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