JP7426692B2 - Grinding wheels and machine tools - Google Patents

Grinding wheels and machine tools Download PDF

Info

Publication number
JP7426692B2
JP7426692B2 JP2019221063A JP2019221063A JP7426692B2 JP 7426692 B2 JP7426692 B2 JP 7426692B2 JP 2019221063 A JP2019221063 A JP 2019221063A JP 2019221063 A JP2019221063 A JP 2019221063A JP 7426692 B2 JP7426692 B2 JP 7426692B2
Authority
JP
Japan
Prior art keywords
grindstone
corrugated plate
portions
workpiece
rotation axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2019221063A
Other languages
Japanese (ja)
Other versions
JP2021088045A (en
Inventor
篤 ▲高▼田
恭介 大橋
大地 ▲高▼田
大和 ▲高▼田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nano TEM Co Ltd
Original Assignee
Nano TEM Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nano TEM Co Ltd filed Critical Nano TEM Co Ltd
Priority to JP2019221063A priority Critical patent/JP7426692B2/en
Publication of JP2021088045A publication Critical patent/JP2021088045A/en
Application granted granted Critical
Publication of JP7426692B2 publication Critical patent/JP7426692B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Landscapes

  • Polishing Bodies And Polishing Tools (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)

Description

本発明は、砥石及び工作機械に関する。 The present invention relates to a grindstone and a machine tool.

例えば、特許文献1に記載の回転砥石は、円板状に形成され、被加工物を研削又は研磨する。 For example, the rotary grindstone described in Patent Document 1 is formed in a disc shape and grinds or polishes a workpiece.

特開2019-34356号公報JP2019-34356A

上記特許文献1に記載の回転砥石では、研削層の底面を利用した研削又は研磨を行うのみで、多彩な加工を行うことが困難であった。 The rotary grindstone described in Patent Document 1 only performs grinding or polishing using the bottom surface of the grinding layer, making it difficult to perform various types of processing.

本発明は、上記実状を鑑みてなされたものであり、多彩な加工を行うことができる砥石及び工作機械を提供することを目的とする。 The present invention was made in view of the above-mentioned circumstances, and an object of the present invention is to provide a grindstone and a machine tool that can perform a variety of processing.

上記目的を達成するため、本発明の第1の観点に係る砥石は、回転軸を中心に回転し、被加工物を加工する砥石であって、前記砥石が前記回転軸を中心に回転する際に前記被加工物に接触することにより前記被加工物を加工する第1面、第2面及び第3面を備え、前記第1面は、前記回転軸に沿う方向に延び、前記回転軸の周囲を囲む側周面であり、前記第2面は、前記回転軸が延びる方向において前記第1面から離れた位置にあり、前記回転軸が延びる方向から見て前記側周面の内側に位置し、前記回転軸に交わる端面であり、前記第3面は、前記第2面の前記回転軸から遠い外周端部と前記第1面の前記第2面に近い端部とを繋ぐ前記回転軸に沿う方向に対して傾斜する傾斜面であり、前記砥石は、前記第1面に設けられ、前記第1面に交わる方向に延びる複数の第1柱部と、前記第2面に設けられ、前記第2面に交わる方向に延びる複数の第2柱部と、前記第3面に設けられ、前記第3面に交わる方向に延びる複数の第3柱部と、を備え、前記第1柱部、前記第2柱部及び前記第3柱部のそれぞれは、前記砥石のうち前記第1柱部、前記第2柱部及び前記第3柱部のみに設けられ、前記被加工物を加工する際に前記被加工物に接触する複数の砥粒と、前記複数の砥粒を結合する結合材と、を備える。 In order to achieve the above object, a grindstone according to a first aspect of the present invention is a grindstone that rotates around a rotation axis and processes a workpiece, and when the grindstone rotates around the rotation axis, a first surface, a second surface, and a third surface for machining the workpiece by contacting the workpiece, the first surface extending in a direction along the rotation axis; a side circumferential surface surrounding a surrounding area, and the second surface is located at a position away from the first surface in the direction in which the rotating shaft extends, and is located inside the side circumferential surface when viewed from the direction in which the rotating shaft extends. and the third surface is an end surface that intersects with the rotation axis, and the third surface connects an outer peripheral end of the second surface far from the rotation axis and an end of the first surface close to the second surface. The grindstone is an inclined surface inclined with respect to a direction along the rotation axis, and the grindstone includes a plurality of first column parts provided on the first surface and extending in a direction intersecting the first surface, and a plurality of first column parts provided on the second surface. a plurality of second pillar portions provided on the third surface and extending in a direction intersecting the second surface; and a plurality of third pillar portions provided on the third surface and extending in a direction intersecting the third surface; Each of the first pillar part, the second pillar part, and the third pillar part is provided only in the first pillar part, the second pillar part, and the third pillar part of the grindstone, and It includes a plurality of abrasive grains that come into contact with the workpiece during processing, and a binding material that binds the plurality of abrasive grains.

また、前記第1柱部、前記第2柱部及び前記第3柱部は、それぞれ、筒状に形成される、ようにしてもよい。 Further, each of the first pillar part, the second pillar part, and the third pillar part may be formed in a cylindrical shape.

また、前記砥石は、前記回転軸及び前記第1面に沿って延びる矩形波板状をなす2つの第1波板部と、前記回転軸及び前記第2面に沿って延びる矩形波板状をなす2つの第2波板部と、前記回転軸及び前記第3面に沿って延びる矩形波板状をなす2つの第3波板部と、を備え、前記2つの第1波板部は、それぞれ、第1矩形波部を有し、前記砥石の周方向において互いに前記第1矩形波部が向き合うように重ね合わされることにより筒状の前記第1柱部が形成され、前記2つの第2波板部は、それぞれ、第2矩形波部を有し、前記砥石の前記周方向において互いに前記第2矩形波部が向き合うように重ね合わされることにより筒状の前記第2柱部が形成され、前記2つの第3波板部は、それぞれ、第3矩形波部を有し、前記砥石の前記周方向において互いに前記第3矩形波部が向き合うように重ね合わされることにより筒状の前記第3柱部が形成される、ようにしてもよい。 Further , the grindstone includes two first corrugated plate portions each having a rectangular corrugated plate shape extending along the rotation axis and the first surface, and a rectangular corrugated plate portion extending along the rotation axis and the second surface. and two third corrugated plate portions each having a rectangular corrugated plate shape extending along the rotating shaft and the third surface, and the two first corrugated plate portions include: , each having a first rectangular wave part, and the first columnar part having a cylindrical shape is formed by overlapping each other so that the first rectangular wave parts face each other in the circumferential direction of the grindstone, and the first pillar part is formed in a cylindrical shape. The two-corrugated plate portions each have a second rectangular corrugated portion, and are overlapped such that the second rectangular corrugated portions face each other in the circumferential direction of the grindstone, thereby forming the cylindrical second pillar portion. The two third corrugated plate portions each have a third rectangular corrugated portion, and are overlapped so that the third rectangular corrugated portions face each other in the circumferential direction of the grindstone, thereby forming the cylindrical shape. A third pillar portion may be formed.

また、前記2つの第1波板部における前記第3波板部に近い下端は、前記2つの第3波板部における前記2つの第1波板部に近い上端に前記周方向に重なった状態で接着されている、ようにしてもよい。 Further, lower ends of the two first corrugated plate portions close to the third corrugated plate portion overlap in the circumferential direction with upper ends of the two third corrugated plate portions close to the two first corrugated plate portions . It may also be glued in a state where it is glued .

また、前記2つの第3波板部における前記第2波板部に近い下端は、前記2つの第2波板部の前記砥石の径方向の外側の端部に前記周方向に重なった状態で接着されている、ようにしてもよい。 Further, lower ends of the two third corrugated plate portions close to the second corrugated plate portion overlap in the circumferential direction with outer end portions of the two second corrugated plate portions in the radial direction of the grinding wheel. It may be glued in place .

上記目的を達成するため、本発明の第2の観点に係る工作機械は、前記砥石と、前記砥石を保持する砥石ホルダーと、前記砥石ホルダーに固定され、前記砥石の前記回転軸に沿って延びるシャフトと、前記シャフトを軸回転させる駆動部と、を備える。 To achieve the above object, a machine tool according to a second aspect of the present invention includes the grindstone, a grindstone holder that holds the grindstone, and a machine tool that is fixed to the grindstone holder and extends along the rotation axis of the grindstone. The device includes a shaft and a drive unit that rotates the shaft.

本発明によれば、砥石及び工作機械において、多彩な加工を行うことができる。 According to the present invention, various types of processing can be performed using a grindstone and a machine tool.

本発明の一実施形態に係る工作機械の模式的な断面図である。1 is a schematic cross-sectional view of a machine tool according to an embodiment of the present invention. 本発明の一実施形態に係る砥石の正面図である。FIG. 1 is a front view of a grindstone according to an embodiment of the present invention. 本発明の一実施形態に係る砥石の底面図である。FIG. 2 is a bottom view of a grindstone according to an embodiment of the present invention. 図1の範囲Aを示す拡大図である。FIG. 2 is an enlarged view showing range A in FIG. 1. FIG. 図2の範囲Bの拡大図である。3 is an enlarged view of range B in FIG. 2. FIG. 本発明の一実施形態に係る(a)は側面加工部、傾斜面加工部及び端面加工部それぞれの波板部の側面図であり、(b)は側面加工部、傾斜面加工部及び端面加工部それぞれの波板部の正面図であり、(c)は側面加工部、傾斜面加工部及び端面加工部それぞれの波板部の底面図である。(a) is a side view of a corrugated plate portion of a side surface processing section, an inclined surface processing section, and an end surface processing section according to an embodiment of the present invention; FIG. (c) is a bottom view of the corrugated plate portions of each of the side surface processing section, the inclined surface processing section, and the end surface processing section. 本発明の一実施形態に係る砥石により被加工物が加工される際の柱部の動作を示す概略図である。It is a schematic diagram showing operation of a column part when a workpiece is processed by a grindstone concerning one embodiment of the present invention.

本発明に係る砥石及び工作機械の一実施形態について図面を参照して説明する。
図1に示すように、工作機械5は、砥石ユニット1と、シャフト25と、駆動部27と、を備える。砥石ユニット1は、被加工物Wを加工する砥石10と、砥石10を保持する砥石ホルダー20と、を備える。
An embodiment of a grindstone and a machine tool according to the present invention will be described with reference to the drawings.
As shown in FIG. 1, the machine tool 5 includes a grindstone unit 1, a shaft 25, and a drive section 27. The grindstone unit 1 includes a grindstone 10 for processing a workpiece W, and a grindstone holder 20 for holding the grindstone 10.

砥石ホルダー20は、金属により形成され、円錐台状をなす。砥石ホルダー20の中心には円柱状のシャフト25が挿通される。砥石ホルダー20は、シャフト25と一体でシャフト25に沿う回転軸Oを中心に回転する。 The grindstone holder 20 is made of metal and has a truncated cone shape. A cylindrical shaft 25 is inserted through the center of the grindstone holder 20. The grindstone holder 20 rotates integrally with the shaft 25 around a rotation axis O along the shaft 25.

駆動部27は、シャフト25を介して砥石ユニット1をX方向、Y方向及びZ方向に移動させるとともに、シャフト25を介して砥石ユニット1を回転軸Oを中心に軸回転させる。これにより、砥石10は、図示しないチャックに固定された被加工物Wを加工、すなわち切削、研磨又は研削する。被加工物Wは、セラミックス、シリコンウエハ、半導体基板、LED(Light Emitting Diode)基板、放熱基板、シリコンカーバイド、アルミナ、サファイア又は金属等である。 The drive unit 27 moves the grindstone unit 1 in the X direction, Y direction, and Z direction via the shaft 25, and rotates the grindstone unit 1 around the rotation axis O via the shaft 25. Thereby, the grindstone 10 processes, that is, cuts, polishes, or grinds the workpiece W fixed to a chuck (not shown). The workpiece W is ceramics, silicon wafer, semiconductor substrate, LED (Light Emitting Diode) substrate, heat dissipation substrate, silicon carbide, alumina, sapphire, metal, or the like.

図1に示すように、砥石10は、砥石ホルダー20が内部に位置する円錐台の筒状をなす。詳しくは、砥石10は、保持材37、複数の柱部32及び接着部34を有する端面加工部30と、保持材47、複数の柱部42及び連結部44を有する側面加工部40と、保持材57、複数の柱部52及び連結部54を有する傾斜面加工部50と、を備える。 As shown in FIG. 1, the grindstone 10 has a cylindrical shape of a truncated cone in which a grindstone holder 20 is located. Specifically, the grindstone 10 includes an end face processing section 30 having a holding material 37, a plurality of pillars 32, and an adhesive part 34, a side surface processing section 40 having a holding material 47, a plurality of pillars 42, and a connecting part 44, and a holding material The inclined surface processing part 50 has a material 57, a plurality of pillar parts 52, and a connecting part 54.

図1及び図3に示すように、端面加工部30は、回転軸Oに対して直交するXY平面に沿う円環板状に形成される。端面加工部30は、加工時に被加工物Wが接するXY平面に沿う端面31を有する。
各柱部32は、端面31に直交するZ方向に沿って延びる。各柱部32は、回転軸Oに沿って延びる筒状、例えば、正六角形筒状に形成される。各柱部32は、被加工物Wを加工、例えば、研磨又は研削するために設けられる。複数の柱部32は、柱部32の先端が端面31に位置するように、砥石10の端面31に沿って並べられている。
図3に示すように、複数の筒状の柱部32は、互いに同一のサイズで形成され、周方向Cに沿って並べられる。複数の柱部32は、周方向Cに沿って等角度、例えば45°間隔で配置されている。各柱部32は、6つの壁部33により構成される。隣り合う2つの壁部33は、所定角度、例えば60°の角度で交わるように一体をなす。2つの接着部34は、各柱部32の径方向Rに対向する2つの頂点から径方向Rに沿って各柱部32から離れる方向に延びる平板状をなす。
As shown in FIGS. 1 and 3, the end face processing portion 30 is formed in an annular plate shape along an XY plane orthogonal to the rotation axis O. As shown in FIGS. The end surface processing section 30 has an end surface 31 along the XY plane with which the workpiece W contacts during processing.
Each column portion 32 extends along the Z direction orthogonal to the end surface 31. Each column portion 32 is formed into a cylindrical shape extending along the rotation axis O, for example, a regular hexagonal cylindrical shape. Each column portion 32 is provided for processing the workpiece W, for example, polishing or grinding it. The plurality of pillars 32 are arranged along the end surface 31 of the grindstone 10 such that the tips of the pillars 32 are located on the end surface 31.
As shown in FIG. 3, the plurality of cylindrical pillar portions 32 are formed to have the same size and are arranged along the circumferential direction C. The plurality of pillar portions 32 are arranged at equal angles along the circumferential direction C, for example, at intervals of 45°. Each column portion 32 is composed of six wall portions 33. The two adjacent wall portions 33 are integrated so as to intersect at a predetermined angle, for example, an angle of 60°. The two adhesive portions 34 have a flat plate shape extending in the direction away from each column portion 32 along the radial direction R from two vertices of each column portion 32 that are opposed to each other in the radial direction R.

図1及び図2に示すように、側面加工部40は、回転軸Oに沿って延び、回転軸Oを囲むように位置し、加工時に被加工物Wが接する側周面41を有する。側周面41は、端面31に直交するように延びる円筒状をなす。側周面41は端面31の外径よりも大きい径を有する。
各柱部42は、側周面41に直交する径方向Rに沿って延びる。各柱部42は、径方向Rに沿って延びる筒状、例えば、正六角形筒状に形成される。各柱部42は、被加工物Wを加工、例えば、研削又は切削するために設けられる。複数の柱部42は、柱部42の先端が側周面41に位置するように、砥石10の側周面41に沿って並べられる。
図2に示すように、複数の筒状の柱部42はZ方向に沿って並べられ、Z方向に沿って並ぶ1列の複数の柱部42は砥石10の周方向Cに並べられる。複数の柱部42は、周方向Cに沿って等角度間隔、例えば45°間隔で配置されている。
As shown in FIGS. 1 and 2, the side surface machining section 40 extends along the rotation axis O, is located so as to surround the rotation axis O, and has a side circumferential surface 41 with which the workpiece W contacts during machining. The side circumferential surface 41 has a cylindrical shape that extends orthogonally to the end surface 31 . The side circumferential surface 41 has a diameter larger than the outer diameter of the end surface 31.
Each column portion 42 extends along the radial direction R perpendicular to the side circumferential surface 41. Each column portion 42 is formed into a cylindrical shape extending along the radial direction R, for example, a regular hexagonal cylindrical shape. Each column portion 42 is provided for processing, for example, grinding or cutting the workpiece W. The plurality of pillars 42 are arranged along the side peripheral surface 41 of the grindstone 10 such that the tips of the pillars 42 are located on the side peripheral surface 41.
As shown in FIG. 2, the plurality of cylindrical pillars 42 are arranged along the Z direction, and one row of the plurality of pillars 42 arranged along the Z direction are arranged in the circumferential direction C of the grindstone 10. The plurality of pillar portions 42 are arranged at equal angular intervals along the circumferential direction C, for example, at 45° intervals.

図2に示すように、複数の連結部44は、それぞれZ方向に隣り合う2つの柱部42を連結する。連結部44は、Z方向に隣り合う2つの柱部42の各々の頂点P1,P2を連結する平板状をなす。2つの頂点P1,P2はZ方向に対向して位置する。各柱部42は、6つの壁部43により構成される。隣り合う2つの壁部43は、所定角度、例えば60°の角度で交わるように一体をなす。 As shown in FIG. 2, each of the plurality of connecting portions 44 connects two adjacent column portions 42 in the Z direction. The connecting portion 44 has a flat plate shape that connects the vertices P1 and P2 of each of the two pillar portions 42 adjacent in the Z direction. The two vertices P1 and P2 are located opposite to each other in the Z direction. Each column portion 42 is composed of six wall portions 43. Two adjacent wall portions 43 are integrated so as to intersect at a predetermined angle, for example, an angle of 60°.

図2に示すように、傾斜面加工部50は、端面加工部30と側面加工部40を連結し、回転軸Oを中心とした円錐台の筒状をなす。傾斜面加工部50は、上方向に向かうにつれて径方向R外側に近づくように傾斜する。傾斜面加工部50は、側周面41と端面31の間を繋ぐテーパ面である傾斜面51を有する。傾斜面51は、回転軸Oに対して傾斜し、加工時に被加工物W(図1参照)が接する。傾斜面51は、側周面41から端面31に近づくにつれて直径が小さくなるように傾斜する。
詳しくは、図1及び図2に示すように、各柱部52は、傾斜面51に直交する方向に延びる。各柱部52は、傾斜面51に直交する方向に延びる筒状、例えば、正六角形筒状に形成される。各柱部52は、被加工物Wを加工、例えば、研磨又は研削するために設けられる。複数の柱部52は、柱部52の先端が傾斜面51に位置するように、砥石10の傾斜面51に沿って並べられている。
図3に示すように、複数の柱部52は、互いに同一のサイズで形成される。複数の筒状の柱部52はZ方向に沿って並べられ、Z方向に沿って並ぶ1列の複数の柱部52は砥石10の周方向Cに並べられる。複数の柱部52は、周方向Cに沿って等角度間隔、例えば45°間隔で配置されている。各柱部52は、6つの壁部53により構成される。隣り合う2つの壁部53は、所定角度、例えば60°の角度で交わるように一体をなす。複数の連結部54は、それぞれZ方向に隣り合う2つの柱部52を連結する平板状をなす。
As shown in FIG. 2, the inclined surface processing section 50 connects the end surface processing section 30 and the side surface processing section 40, and has a cylindrical shape of a truncated cone centered on the rotation axis O. The inclined surface processing portion 50 is inclined so as to approach the outer side in the radial direction R as it goes upward. The sloped surface processing portion 50 has a sloped surface 51 that is a tapered surface that connects the side circumferential surface 41 and the end surface 31. The inclined surface 51 is inclined with respect to the rotation axis O, and is in contact with the workpiece W (see FIG. 1) during processing. The inclined surface 51 is inclined so that its diameter decreases as it approaches the end surface 31 from the side circumferential surface 41.
Specifically, as shown in FIGS. 1 and 2, each column portion 52 extends in a direction perpendicular to the inclined surface 51. As shown in FIGS. Each column portion 52 is formed into a cylindrical shape extending in a direction perpendicular to the inclined surface 51, for example, a regular hexagonal cylindrical shape. Each column portion 52 is provided for processing, for example polishing or grinding, the workpiece W. The plurality of pillars 52 are arranged along the inclined surface 51 of the grindstone 10 such that the tips of the pillars 52 are located on the inclined surface 51.
As shown in FIG. 3, the plurality of pillar portions 52 are formed to have the same size. The plurality of cylindrical pillars 52 are arranged along the Z direction, and the plurality of pillars 52 in one row along the Z direction are arranged in the circumferential direction C of the grindstone 10 . The plurality of pillar portions 52 are arranged along the circumferential direction C at equal angular intervals, for example, at 45° intervals. Each column portion 52 is composed of six wall portions 53. The two adjacent wall portions 53 are integrally formed so as to intersect at a predetermined angle, for example, an angle of 60°. Each of the plurality of connecting portions 54 has a flat plate shape that connects two pillar portions 52 adjacent to each other in the Z direction.

図5に示すように、側面加工部40は、Z方向に沿って並べられる柱部42である複数、例えば3つの柱部42a,42b,42cと、複数の柱部42a,42b,42cを連結する連結部44である複数、例えば2つの連結部44a,44bと、を備える。連結部44aは、2つの柱部42a,42bの間に位置し、2つの柱部42a,42bを連結する。連結部44bは、2つの柱部42b,42cの間に位置し、2つの柱部42b,42cを連結する。 As shown in FIG. 5, the side surface processing section 40 connects a plurality of column sections 42 arranged along the Z direction, for example, three column sections 42a, 42b, 42c, and a plurality of column sections 42a, 42b, 42c. A plurality of connecting portions 44, for example two connecting portions 44a and 44b, are provided. The connecting part 44a is located between the two pillar parts 42a and 42b, and connects the two pillar parts 42a and 42b. The connecting part 44b is located between the two pillar parts 42b and 42c, and connects the two pillar parts 42b and 42c.

柱部42a,42b,42c及び連結部44a,44bは、2つの第1波板部45,46により構成される。2つの第1波板部45,46は、それぞれZ方向に沿って折り曲げられたZ方向に沿う台形の矩形波状をなす。第1波板部45は複数の第1矩形波部45aを有し、第1波板部46は複数の第1矩形波部46aを有する。第1矩形波部45a,46aは、底辺が省略された台形形状をなす。2つの第1波板部45,46は、それぞれの第1矩形波部45a,46aが周方向Cに互いに向き合うように重ね合わされる。第1矩形波部45a,46aが互いに向き合うように設けられることにより、各柱部42a,42b,42cが形成される。2つの第1波板部45,46は、連結部44において図示しない接着剤により接着されている。この接着剤は、例えば、エポキシ樹脂である。この接着剤は、複数の砥粒を含んでいてもよい。 The pillar portions 42a, 42b, 42c and the connecting portions 44a, 44b are constituted by two first corrugated plate portions 45, 46. The two first corrugated plate portions 45 and 46 each have a trapezoidal rectangular wave shape along the Z direction, which is bent along the Z direction. The first corrugated plate part 45 has a plurality of first rectangular wave parts 45a, and the first corrugated plate part 46 has a plurality of first rectangular wave parts 46a. The first rectangular wave portions 45a and 46a have a trapezoidal shape with the bottom side omitted. The two first corrugated plate parts 45 and 46 are stacked so that the respective first rectangular wave parts 45a and 46a face each other in the circumferential direction C. Each column part 42a, 42b, 42c is formed by providing the first rectangular wave parts 45a, 46a so as to face each other. The two first corrugated plate parts 45 and 46 are bonded together at the connecting part 44 with an adhesive (not shown). This adhesive is, for example, an epoxy resin. This adhesive may contain a plurality of abrasive grains.

図6(a),(b)に示すように、傾斜面加工部50の柱部52及び連結部54は、2つの第3波板部55,56により構成される。2つの第3波板部55,56は、それぞれZ方向の下側に向かうにつれて砥石10の径方向R内側に近づくように傾斜した方向に延びる台形の矩形波状をなす。
第3波板部55は複数の第3矩形波部55aを有し、第3波板部56は複数の第3矩形波部56aを有する。第3矩形波部55a,56aは、底辺が省略された台形形状をなす。2つの第3波板部55,56は、それぞれの第3矩形波部55a,56aが周方向Cに互いに向き合うように重ね合わされる。第3矩形波部55a,56aが互いに向き合うように設けられることにより、筒状の柱部52が形成される。2つの第3波板部55,56は、連結部54において図示しない接着剤により接着されている。この接着剤は、例えば、エポキシ樹脂である。この接着剤は、複数の砥粒を含んでいてもよい。
As shown in FIGS. 6A and 6B, the column part 52 and the connecting part 54 of the inclined surface processing part 50 are constituted by two third corrugated plate parts 55 and 56. The two third corrugated plate portions 55 and 56 each have a trapezoidal rectangular wave shape that extends in an inclined direction so as to approach the inside of the grindstone 10 in the radial direction R as it goes downward in the Z direction.
The third corrugated plate part 55 has a plurality of third rectangular wave parts 55a, and the third corrugated plate part 56 has a plurality of third rectangular wave parts 56a. The third rectangular wave portions 55a and 56a have a trapezoidal shape with the bottom side omitted. The two third corrugated plate parts 55 and 56 are stacked so that the respective third rectangular wave parts 55a and 56a face each other in the circumferential direction C. A cylindrical column portion 52 is formed by providing the third rectangular wave portions 55a and 56a so as to face each other. The two third corrugated plate portions 55 and 56 are bonded together at the connecting portion 54 with an adhesive (not shown). This adhesive is, for example, an epoxy resin. This adhesive may contain a plurality of abrasive grains.

図6(a),(c)に示すように、端面加工部30の柱部32は、2つの第2波板部35,36により構成される。2つの第2波板部35,36は、砥石10の径方向Rに延びる台形の矩形波状をなす。第2波板部35は第2矩形波部35aを有し、第2波板部36は第2矩形波部36aを有する。第2矩形波部35a,36aは、底辺が省略された台形形状をなす。2つの第2波板部35,36は、それぞれの第2矩形波部35a,36aが周方向Cに互いに向き合うように重ね合わされる。第2矩形波部35a,36aが互いに向き合うように設けられることにより、筒状の柱部32が形成される。2つの第2波板部35,36は、接着部34において図示しない接着剤により接着されている。この接着剤は、例えば、エポキシ樹脂である。この接着剤は、複数の砥粒を含んでいてもよい。 As shown in FIGS. 6A and 6C, the column part 32 of the end face processing part 30 is composed of two second corrugated plate parts 35 and 36. The two second corrugated plate portions 35 and 36 have a trapezoidal rectangular wave shape extending in the radial direction R of the grindstone 10. The second corrugated plate part 35 has a second rectangular wave part 35a, and the second corrugated plate part 36 has a second rectangular wave part 36a. The second rectangular wave portions 35a and 36a have a trapezoidal shape with the bottom side omitted. The two second corrugated plate parts 35 and 36 are stacked so that the respective second rectangular wave parts 35a and 36a face each other in the circumferential direction C. A cylindrical column portion 32 is formed by providing the second rectangular wave portions 35a and 36a so as to face each other. The two second corrugated plate portions 35 and 36 are bonded together at the adhesive portion 34 with an adhesive (not shown). This adhesive is, for example, an epoxy resin. This adhesive may contain a plurality of abrasive grains.

図6(b)の範囲Dに示すように、2つの第1波板部45,46の下端は、2つの第3波板部55,56の上端に周方向Cに重なる。第1波板部45の下端と第1波板部46の下端の間には、2つの第3波板部55,56の上端を挟み込むように位置する。第1波板部45,46及び第3波板部55,56は互いに接着されている。これにより、図6(a)に示すように、側面加工部40及び傾斜面加工部50の間の角部に第1波板部45,46及び第3波板部55,56の4枚が重なる重複領域Gを形成することができる。よって、側面加工部40及び傾斜面加工部50の間の角部の強度を高めることができる。 As shown in range D in FIG. 6(b), the lower ends of the two first corrugated plate parts 45 and 46 overlap the upper ends of the two third corrugated plate parts 55 and 56 in the circumferential direction C. The upper ends of the two third corrugated sheet portions 55 and 56 are located between the lower end of the first corrugated sheet portion 45 and the lower end of the first corrugated sheet portion 46 . The first corrugated sheet portions 45, 46 and the third corrugated sheet portions 55, 56 are bonded to each other. As a result, as shown in FIG. 6(a), four pieces, the first corrugated plate parts 45 and 46 and the third corrugated plate parts 55 and 56, are formed at the corner between the side surface processed part 40 and the inclined surface processed part 50. An overlapping region G can be formed. Therefore, the strength of the corner between the side surface processed portion 40 and the inclined surface processed portion 50 can be increased.

図6(b)の範囲Eに示すように、2つの第3波板部55,56の下端は、2つの第2波板部35,36の径方向Rの外側の端部に周方向Cに重なる。第2波板部35の径方向Rの外側の端部と第2波板部36の径方向Rの外側の端部の間には、2つの第3波板部55,56の下端を挟み込むように位置する。第2波板部35,36及び第3波板部55,56は互いに接着されている。これにより、図6(a)に示すように、傾斜面加工部50及び端面加工部30の間の角部に第3波板部55,56及び第2波板部35,36の4枚が重なる重複領域Hを形成することができる。よって、傾斜面加工部50及び端面加工部30の間の角部の強度を高めることができる。 As shown in range E in FIG. 6(b), the lower ends of the two third corrugated plate parts 55, 56 are located at the outer ends of the two second corrugated plate parts 35, 36 in the radial direction R. overlaps with The lower ends of the two third corrugated plate parts 55 and 56 are sandwiched between the outer end of the second corrugated plate part 35 in the radial direction R and the outer end of the second corrugated plate part 36 in the radial direction R. It is located like this. The second corrugated sheet portions 35, 36 and the third corrugated sheet portions 55, 56 are bonded to each other. As a result, as shown in FIG. 6(a), four pieces, the third corrugated plate parts 55 and 56 and the second corrugated plate parts 35 and 36, are formed at the corner between the inclined surface processed part 50 and the end face processed part 30. An overlapping region H can be formed. Therefore, the strength of the corner between the inclined surface processed portion 50 and the end surface processed portion 30 can be increased.

図1及び図3に示すように、保持材37は、端面加工部30の全域にわたって形成され、複数の柱部32を保持する。保持材37は、各柱部32の内部空間に充填されるとともに、各柱部32の外部空間である複数の柱部32の間に充填される。
保持材57は、傾斜面加工部50の全域にわたって形成され、複数の柱部52を保持する。保持材57は、各柱部52の内部空間に充填されるとともに、各柱部52の外部空間である複数の柱部52の間に充填される。
図1及び図2に示すように、保持材47は、側面加工部40の全域にわたって形成され、複数の柱部42を保持する。各柱部42の内部空間に充填されるとともに、各柱部42の外部空間である複数の柱部42の間に充填される。
As shown in FIGS. 1 and 3, the holding member 37 is formed over the entire area of the end face processed portion 30, and holds the plurality of pillar portions 32. The holding material 37 is filled into the internal space of each columnar section 32 and between the plurality of columnar sections 32 which is the external space of each columnar section 32 .
The holding member 57 is formed over the entire area of the sloped surface processing portion 50 and holds the plurality of pillar portions 52. The holding material 57 is filled into the internal space of each columnar section 52 and between the plurality of columnar sections 52 which is the external space of each columnar section 52 .
As shown in FIGS. 1 and 2, the holding member 47 is formed over the entire area of the side surface processing portion 40, and holds the plurality of pillar portions 42. It is filled into the internal space of each columnar section 42 and between the plurality of columnar sections 42 which is the external space of each columnar section 42 .

図1に示すように、保持材37,47,57は柱部32,42,52と略同一の高さに設定されている。保持材37,47,57は、柱部32,42,52よりも弾性率が小さい材質により形成される。すなわち、保持材37,47,57は、柱部32,42,52に比べて、外力により変形しやすく、被加工物Wとの摩擦による摩耗量が多い材質により形成される。砥石10での被加工物Wの加工時に、保持材37,47,57は、柱部32,42,52よりも削れやすく、かつ弾性変形しやすい。このため、図4に示すように、砥石10の側周面41が被加工物Wの加工により摩耗した場合であっても、保持材47は、柱部42よりも距離Fだけ被加工物Wに対して退避した状態に維持される。保持材37,57も、保持材47と同様である。従って、保持材37,47,57は、柱部32,42,52よりも被加工物Wに向けて突出することが抑制され、柱部32,42,52による被加工物Wの加工を阻害しない。
保持材37,47,57は、例えば、気体又は液体である流体を通過させるポーラス材料、すなわち多孔質材料により形成される。保持材37,47,57は、例えば、多孔質の樹脂又はセラミックからなる。
As shown in FIG. 1, the holding members 37, 47, 57 are set at substantially the same height as the column parts 32, 42, 52. The holding members 37, 47, 57 are made of a material having a lower elastic modulus than the columnar parts 32, 42, 52. That is, the holding members 37, 47, and 57 are formed of a material that is more easily deformed by external force than the pillar portions 32, 42, and 52, and has a greater amount of wear due to friction with the workpiece W. When processing the workpiece W with the grindstone 10, the holding members 37, 47, 57 are more easily ground than the pillars 32, 42, 52, and are more easily elastically deformed. Therefore, as shown in FIG. 4, even if the side circumferential surface 41 of the grinding wheel 10 is worn out due to machining of the workpiece W, the holding member 47 is attached to the workpiece W by a distance F from the pillar portion 42. It is maintained in a evacuated state against. The holding materials 37 and 57 are also similar to the holding material 47. Therefore, the holding members 37, 47, 57 are suppressed from protruding more toward the workpiece W than the pillars 32, 42, 52, and inhibit the processing of the workpiece W by the pillars 32, 42, 52. do not.
The holding members 37, 47, and 57 are formed of, for example, a porous material that allows a gas or liquid fluid to pass therethrough. The holding materials 37, 47, and 57 are made of, for example, porous resin or ceramic.

図4に示すように、柱部42は、複数の砥粒15と、複数の砥粒15を結合する結合材16と、を備える。複数の砥粒15は、結合材16内に分布している。砥粒15は、例えば、ダイヤモンドである。なお、砥粒15は、ダイヤモンドに限らず、立方晶窒化ホウ素(CBN)砥粒であってもよいし、CBN砥粒とダイヤモンドを混合させてもよい。さらには、複数の砥粒15は、炭化ケイ素(SiC)、又は溶融アルミナ(Al)、若しくはこれらを混合したものであってもよい。 As shown in FIG. 4 , the column portion 42 includes a plurality of abrasive grains 15 and a binding material 16 that binds the plurality of abrasive grains 15 together. A plurality of abrasive grains 15 are distributed within the bonding material 16. The abrasive grains 15 are, for example, diamond. Note that the abrasive grains 15 are not limited to diamond, but may be cubic boron nitride (CBN) abrasive grains, or may be a mixture of CBN abrasive grains and diamond. Furthermore, the plurality of abrasive grains 15 may be silicon carbide (SiC), fused alumina (Al 2 O 3 ), or a mixture thereof.

結合材16は、内部に複数の砥粒15を保持する。結合材16は、ニッケル、アルミニウム等の金属、樹脂又はセラミック等により形成される。柱部32は、柱部42,52と同様に、複数の砥粒及び結合材を備える。
図4に示すように、保持材47は、複数の目立て粒47aを含む。目立て粒47aは、結合材16よりも硬く、かつ、砥粒15よりも柔らかい材質により形成される。目立て粒47aは、例えば、炭化ケイ素(SiC)又は二酸化ケイ素(SiO)からなる粒である。目立て粒47aは、保持材47から脱落した後、柱部42の結合材16を削る。これにより、柱部42の砥粒15が目立てされる。保持材37,57も、保持材47と同様に、複数の目立て粒を含む。
The binding material 16 holds a plurality of abrasive grains 15 inside. The bonding material 16 is made of metal such as nickel or aluminum, resin, ceramic, or the like. The column portion 32, like the column portions 42 and 52, includes a plurality of abrasive grains and a bonding material.
As shown in FIG. 4, the holding material 47 includes a plurality of dressing grains 47a. The dressing grains 47a are made of a material that is harder than the binding material 16 and softer than the abrasive grains 15. The dressing grains 47a are, for example, grains made of silicon carbide (SiC) or silicon dioxide (SiO 2 ). After falling off from the holding material 47, the dressing grains 47a scrape the binding material 16 of the columnar portion 42. As a result, the abrasive grains 15 of the pillar portions 42 are sharpened. Like the holding material 47, the holding materials 37 and 57 also include a plurality of dressing grains.

次に、工作機械5の作用について説明する。
図1に示すように、工作機械5は、駆動部27を介して、シャフト25とともに回転軸Oを中心に砥石ユニット1を回転させつつ、砥石10の側周面41を被加工物Wに接触させる。これにより、側面加工部40は被加工物Wの側面を加工する。砥石10は、砥粒15(図4参照)を有する柱部42と砥粒15を有しない保持材47が周方向Cに沿って交互に配置される。よって、砥石10が周方向Cに回転すると、被加工物Wには、被加工物Wを加工する柱部42と被加工物Wを加工しない保持材47が交互に接触する。これにより、図7に示すように、柱部42が周方向Cに沿って被加工物Wに向かって回転し、柱部42の先端が被加工物Wに加工量Kにて被加工物Wに切り込まれるとともに、柱部42の先端が被加工物Wに摩擦する。これにより、被加工物Wの側面が加工される。
従来の砥石では砥粒が周方向に沿って均一に分布しており、砥粒は被加工物を研磨するのみである。よって、従来の砥石では、本実施形態に比べて、被加工物Wに切り込む加工量は少ない。一方、本実施形態の砥石10の柱部42は、フライス工具の刃先と同様に機能し、被加工物Wに切り込まれやすい。これにより、本実施形態の砥石10は、従来の砥石よりも加工量Kを増やすことができる。また、加工時には、砥石10の柱部42の先端が摩耗する前に砥粒15が柱部42から脱落し、新たな砥粒15が柱部42の先端に露出する。よって、砥石10の加工能力がフライス工具に比べて低下することが抑制される。
Next, the operation of the machine tool 5 will be explained.
As shown in FIG. 1, the machine tool 5 rotates the grindstone unit 1 together with the shaft 25 about the rotation axis O through the drive unit 27, and brings the side circumferential surface 41 of the grindstone 10 into contact with the workpiece W. let Thereby, the side surface processing section 40 processes the side surface of the workpiece W. In the whetstone 10, column parts 42 having abrasive grains 15 (see FIG. 4) and holding members 47 not having abrasive grains 15 are alternately arranged along the circumferential direction C. Therefore, when the grindstone 10 rotates in the circumferential direction C, the column part 42 that processes the workpiece W and the holding member 47 that does not process the workpiece W alternately contact the workpiece W. As a result, as shown in FIG. 7, the column part 42 rotates toward the workpiece W along the circumferential direction C, and the tip of the column part 42 is applied to the workpiece W by a machining amount K. At the same time, the tip of the column portion 42 rubs against the workpiece W. As a result, the side surface of the workpiece W is processed.
In conventional grindstones, abrasive grains are uniformly distributed along the circumferential direction, and the abrasive grains only polish the workpiece. Therefore, with the conventional grindstone, the amount of cutting into the workpiece W is smaller than that of the present embodiment. On the other hand, the pillar portion 42 of the grindstone 10 of this embodiment functions similarly to the cutting edge of a milling tool, and is easily cut into the workpiece W. Thereby, the grindstone 10 of this embodiment can increase the processing amount K compared to the conventional grindstone. Further, during processing, the abrasive grains 15 fall off from the pillars 42 before the tips of the pillars 42 of the grindstone 10 are worn out, and new abrasive grains 15 are exposed at the tips of the pillars 42. Therefore, the processing ability of the grindstone 10 is prevented from decreasing compared to a milling tool.

図1に示すように、工作機械5は、駆動部27を介して、シャフト25とともに回転軸Oを中心に砥石ユニット1を回転させつつ、砥石10の端面31を被加工物Wの上面に接触させる。これにより、被加工物Wの上面が加工される。 As shown in FIG. 1, the machine tool 5 rotates the grindstone unit 1 together with the shaft 25 around the rotation axis O via the drive unit 27, and brings the end surface 31 of the grindstone 10 into contact with the upper surface of the workpiece W. let As a result, the upper surface of the workpiece W is processed.

図1に示すように、工作機械5は、駆動部27を介して、シャフト25とともに回転軸Oを中心に砥石ユニット1を回転させつつ、砥石10の傾斜面51を被加工物Wの角部に接触させる。これにより、被加工物Wの角部が加工、すなわち面取り加工される。
なお、傾斜面51による面取り加工は、端面31による加工及び側周面41による加工に伴い被加工物Wの角部に形成されるバリをとるために、端面31による加工及び側周面41による加工の後で行われることが好ましい。
As shown in FIG. 1, the machine tool 5 rotates the grinding wheel unit 1 together with the shaft 25 around the rotation axis O through the drive unit 27, and rotates the inclined surface 51 of the grinding wheel 10 at the corner of the workpiece W. contact with. As a result, the corners of the workpiece W are processed, that is, chamfered.
Note that the chamfering process using the inclined surface 51 is performed by chamfering using the end surface 31 and the side circumferential surface 41 in order to remove burrs formed at the corners of the workpiece W due to the process using the end surface 31 and the side circumferential surface 41. Preferably, this is done after processing.

(効果)
以上、説明した一実施形態によれば、以下の効果を奏する。
(1)回転軸Oを中心に回転し、被加工物Wを加工する砥石10は、砥石10が回転軸Oを中心に回転する際に被加工物Wに接触することにより被加工物Wを加工する第1面、第2面及び第3面を備える。第1面は、回転軸Oに沿う方向に延び、回転軸Oの周囲を囲む側周面41である。第2面は、側周面41に交わる方向に延びる端面31である。第3面は、回転軸Oに沿う方向に対して傾斜し、側周面41と端面31を繋ぐ傾斜面51である。
この構成によれば、砥石10の側周面41、端面31及び傾斜面51を利用して多彩な加工を行うことができる。例えば、回転軸Oを中心に砥石10を回転させた状態で、砥石10の側周面41を被加工物Wの側面に接触させることにより、砥石10は被加工物Wの側面を加工する。また、回転軸Oを中心に砥石10を回転させた状態で、砥石10の端面31を被加工物Wの平面に接触させることにより、砥石10は被加工物Wの平面を加工する。また、回転軸Oを中心に砥石10を回転させた状態で、砥石10の傾斜面51を被加工物Wの角部に接触させることにより、砥石10は被加工物Wの角部を加工する。
(effect)
According to the embodiment described above, the following effects are achieved.
(1) The grindstone 10 rotates around the rotation axis O and processes the workpiece W. When the grindstone 10 rotates around the rotation axis O, it contacts the workpiece W and processes the workpiece W. It has a first surface, a second surface, and a third surface to be processed. The first surface is a side circumferential surface 41 that extends in the direction along the rotation axis O and surrounds the rotation axis O. The second surface is an end surface 31 extending in a direction intersecting the side circumferential surface 41. The third surface is an inclined surface 51 that is inclined with respect to the direction along the rotation axis O and connects the side circumferential surface 41 and the end surface 31.
According to this configuration, various types of processing can be performed using the side circumferential surface 41, end surface 31, and inclined surface 51 of the grindstone 10. For example, the grindstone 10 processes the side surface of the workpiece W by bringing the side circumferential surface 41 of the grindstone 10 into contact with the side surface of the workpiece W while the grindstone 10 is rotated about the rotation axis O. Further, while the grindstone 10 is rotated about the rotation axis O, the end surface 31 of the grindstone 10 is brought into contact with the plane of the workpiece W, so that the grindstone 10 processes the plane of the workpiece W. Further, while the whetstone 10 is rotated about the rotation axis O, the inclined surface 51 of the whetstone 10 is brought into contact with the corner of the workpiece W, so that the whetstone 10 processes the corner of the workpiece W. .

(2)砥石10は、側周面41に設けられ、砥石10の周方向Cに沿って間隔を持って並べられ、側周面41に交わる方向に延びる複数の第1柱部の一例である柱部42と、端面31に設けられ、端面31に交わる方向に延びる複数の第2柱部の一例である柱部32と、傾斜面51に設けられ、傾斜面51に交わる方向に延びる複数の第3柱部の一例である柱部52と、を備える。柱部32,42,52のそれぞれは、被加工物Wを加工する際に被加工物Wに接触する複数の砥粒15と、複数の砥粒15を結合する結合材16と、を備える。
この構成によれば、砥石10の側周面41は、砥粒15を有する柱部42が周方向Cに沿って間隔を持って並べられる。これにより、図7に示すように、柱部42が周方向Cに沿って被加工物Wに向かって回転し、柱部42の先端が被加工物Wに加工量Kにて被加工物Wに切り込まれる。よって、砥石10の加工量Kを従来の砥石及び砥石10の端面31よりも増やすことができる。また、砥石10による被加工物Wの加工時に、砥粒15が被加工物Wとの摩擦により丸くなって研削能力が低下する前に、砥粒15が柱部42から脱落して新たな砥粒15が被加工物Wに接触可能に柱部42から露出する。このため、砥石10は、従来のフライス工具に比べて加工能力の低下が抑制される。砥石10の傾斜面51は、砥石10の側周面41と同様の作用効果を有する。
(2) The grindstone 10 is an example of a plurality of first column parts provided on the side circumferential surface 41, arranged at intervals along the circumferential direction C of the grindstone 10, and extending in a direction intersecting the side circumferential surface 41. The pillar part 42 is an example of a plurality of second pillar parts provided on the end surface 31 and extends in a direction intersecting the end surface 31, and the plurality of second pillar parts provided on the inclined surface 51 and extending in a direction intersecting the inclined surface 51. A column portion 52, which is an example of a third column portion, is provided. Each of the column parts 32, 42, and 52 includes a plurality of abrasive grains 15 that come into contact with the workpiece W when processing the workpiece W, and a binding material 16 that binds the plurality of abrasive grains 15 together.
According to this configuration, on the side circumferential surface 41 of the grindstone 10, the pillar portions 42 having the abrasive grains 15 are arranged at intervals along the circumferential direction C. As a result, as shown in FIG. 7, the column part 42 rotates toward the workpiece W along the circumferential direction C, and the tip of the column part 42 is applied to the workpiece W by a machining amount K. is cut into. Therefore, the processing amount K of the grindstone 10 can be increased compared to the conventional grindstone and the end surface 31 of the grindstone 10. Further, when the workpiece W is processed by the grindstone 10, the abrasive grains 15 fall off from the pillars 42 and a new The grains 15 are exposed from the pillar portion 42 so as to be able to contact the workpiece W. For this reason, the grindstone 10 suppresses a decrease in machining ability compared to conventional milling tools. The inclined surface 51 of the grindstone 10 has the same effect as the side peripheral surface 41 of the grindstone 10.

(3)柱部32,42,52は、それぞれ、筒状に形成される。
この構成によれば、柱部32,42,52の剛性を高めることができ、砥石10の加工能力を向上させることができる。
(3) The pillar portions 32, 42, and 52 are each formed in a cylindrical shape.
According to this configuration, the rigidity of the column parts 32, 42, and 52 can be increased, and the processing ability of the grindstone 10 can be improved.

(4)傾斜面51は、側周面41と端面31を繋ぐように回転軸Oに沿う方向において側周面41と端面31の間に位置する。砥石10は、回転軸O及び側周面41に沿って延びる矩形波板状をなす2つの第1波板部45,46と、回転軸O及び端面31に沿って延びる矩形波板状をなす2つの第2波板部35,36と、回転軸O及び傾斜面51に沿って延びる矩形波板状をなす2つの第3波板部55,56と、を備える。2つの第1波板部45,46は、それぞれ、第1矩形波部45a,46aを有し、砥石10の周方向Cにおいて互いに第1矩形波部45a,46aが向き合うように重ね合わされることにより筒状の柱部42が形成される。2つの第2波板部35,36は、それぞれ、第2矩形波部35a,36aを有し、砥石10の周方向Cにおいて互いに第2矩形波部35a,36aが向き合うように重ね合わされることにより筒状の柱部32が形成される。2つの第3波板部55,56は、それぞれ、第3矩形波部55a,56aを有し、砥石10の周方向Cにおいて互いに第3矩形波部55a,56aが向き合うように重ね合わされることにより筒状の柱部52が形成される。
この構成によれば、簡単に、かつ強度が高い複数の筒状の柱部32,42,52を形成することができる。
(4) The inclined surface 51 is located between the side circumferential surface 41 and the end surface 31 in the direction along the rotation axis O so as to connect the side circumferential surface 41 and the end surface 31. The grindstone 10 has two first corrugated plate portions 45 and 46 that are rectangularly corrugated and extend along the rotational axis O and the side circumferential surface 41, and a rectangular corrugated plate that extends along the rotational axis O and the end surface 31. It includes two second corrugated plate parts 35 and 36 and two third corrugated plate parts 55 and 56 that extend along the rotation axis O and the inclined surface 51 and have a rectangular corrugated plate shape. The two first corrugated plate portions 45 and 46 have first rectangular wave portions 45a and 46a, respectively, and are superimposed so that the first rectangular wave portions 45a and 46a face each other in the circumferential direction C of the grindstone 10. Thus, a cylindrical column portion 42 is formed. The two second corrugated plate portions 35 and 36 have second rectangular wave portions 35a and 36a, respectively, and are superimposed so that the second rectangular wave portions 35a and 36a face each other in the circumferential direction C of the grindstone 10. Thus, a cylindrical column portion 32 is formed. The two third corrugated plate portions 55 and 56 have third rectangular wave portions 55a and 56a, respectively, and are superimposed so that the third rectangular wave portions 55a and 56a face each other in the circumferential direction C of the grindstone 10. A cylindrical column portion 52 is formed by this.
According to this configuration, the plurality of cylindrical columnar parts 32, 42, 52 with high strength can be easily formed.

(5)2つの第1波板部45,46における第3波板部55,56に近い下端は、2つの第3波板部55,56における第1波板部45,46に近い上端に周方向Cに重なる。
この構成によれば、側面加工部40及び傾斜面加工部50の間の角部に第1波板部45,46及び第3波板部55,56の4枚が重なる重複領域Gを形成することができる。よって、側面加工部40及び傾斜面加工部50の間の角部の強度を高めることができる。砥石10の角部には応力集中が発生しやすいため、砥石10の角部の強度を高めることは好ましい。
(5) The lower ends of the two first corrugated sheet portions 45, 46 near the third corrugated sheet portions 55, 56 are connected to the upper ends of the two third corrugated sheet portions 55, 56 near the first corrugated sheet portions 45, 46. They overlap in the circumferential direction C.
According to this configuration, an overlapping region G is formed in the corner between the side surface processing section 40 and the inclined surface processing section 50, where the first corrugated sheet sections 45, 46 and the third corrugated sheet sections 55, 56 overlap. be able to. Therefore, the strength of the corner between the side surface processed portion 40 and the inclined surface processed portion 50 can be increased. Since stress concentration tends to occur at the corners of the grindstone 10, it is preferable to increase the strength of the corners of the grindstone 10.

(6)2つの第3波板部55,56における第2波板部35,36に近い下端は、2つの第2波板部35,36の砥石10の径方向Rの外側の端部に周方向Cに重なる。
この構成によれば、傾斜面加工部50及び端面加工部30の間の角部に第3波板部55,56及び第2波板部35,36の4枚が重なる重複領域Hを形成することができる。よって、傾斜面加工部50及び端面加工部30の間の角部の強度を高めることができる。砥石10の角部には応力集中が発生しやすいため、砥石10の角部の強度を高めることは好ましい。
(6) The lower ends of the two third corrugated plate parts 55 and 56 close to the second corrugated plate parts 35 and 36 are connected to the outer ends of the two second corrugated plate parts 35 and 36 in the radial direction R of the grinding wheel 10. They overlap in the circumferential direction C.
According to this configuration, an overlapping region H is formed in the corner between the inclined surface processed portion 50 and the end surface processed portion 30, where the four third corrugated plate portions 55, 56 and the second corrugated plate portions 35, 36 overlap. be able to. Therefore, the strength of the corner between the inclined surface processed portion 50 and the end surface processed portion 30 can be increased. Since stress concentration tends to occur at the corners of the grindstone 10, it is preferable to increase the strength of the corners of the grindstone 10.

(7)工作機械5は、砥石10と、砥石10を保持する砥石ホルダー20と、砥石ホルダー20に固定され、砥石10の回転軸Oに沿って延びるシャフト25と、シャフト25を軸回転させる駆動部27と、を備える。
この構成によれば、工作機械5は、砥石10の側周面41、端面31及び傾斜面51を利用して多彩な加工を行うことができる。
(7) The machine tool 5 includes a grindstone 10, a grindstone holder 20 that holds the grindstone 10, a shaft 25 that is fixed to the grindstone holder 20 and extends along the rotation axis O of the grindstone 10, and a drive that rotates the shaft 25. 27.
According to this configuration, the machine tool 5 can perform various types of processing using the side circumferential surface 41, end surface 31, and inclined surface 51 of the grindstone 10.

(8)柱部32,42,52は、それぞれ、互いに異なる角度で交わるように一体をなす2つの壁部33,43,53を備える。
この構成によれば、2つの壁部33,43,53が互いに異なる角度で交わるように一体をなすため、2つの壁部が平板状に一体をなす場合に比べて、柱部32,42,52の剛性を高めることができる。これにより、砥石10の加工能力を向上させることができる。
(8) The pillar portions 32, 42, and 52 each include two wall portions 33, 43, and 53 that are integral with each other so as to intersect at different angles.
According to this configuration, since the two wall parts 33, 43, 53 are integrated so as to intersect at different angles, the pillar parts 32, 42, 52 can be increased in rigidity. Thereby, the processing ability of the grindstone 10 can be improved.

(9)工作機械5による加工方法は、回転軸Oを中心に砥石10を回転させつつ砥石10の端面31を被加工物W(例えば、被加工物Wの上面)に接触させることにより被加工物Wを加工する工程と、回転軸Oを中心に砥石10を回転させつつ砥石10の側周面41を被加工物W(例えば、被加工物Wの側面)に接触させることにより被加工物Wを加工する工程と、回転軸Oを中心に砥石10を回転させつつ砥石10の傾斜面51を被加工物W(例えば、被加工物Wの角部)に接触させることにより被加工物Wを加工する工程と、を備える。
この構成によれば、1つの砥石で、被加工物Wに対して多種類の加工を行うことができる。よって、砥石を含む多数の工具を準備する必要がない。
(9) The processing method using the machine tool 5 is to rotate the grindstone 10 around the rotation axis O and bring the end surface 31 of the grindstone 10 into contact with the workpiece W (for example, the upper surface of the workpiece W). The process of machining the workpiece W, and the process of rotating the whetstone 10 around the rotation axis O and bringing the side circumferential surface 41 of the whetstone 10 into contact with the workpiece W (for example, the side surface of the workpiece W) The process of machining W and rotating the whetstone 10 around the rotation axis O while bringing the inclined surface 51 of the whetstone 10 into contact with the workpiece W (for example, a corner of the workpiece W) A step of processing the.
According to this configuration, the workpiece W can be processed in many different ways using one grindstone. Therefore, there is no need to prepare a large number of tools including grindstones.

(変形例)
なお、上記実施形態は、これを適宜変更した以下の形態にて実施することができる。
上記実施形態においては、柱部32,42,52は正六角形筒状に形成されていたが、六角形筒状であれば、正六角形筒状でなくてもよい。また、柱部32,42,52は、多角形筒状であれば、六角形筒状でなくてもよく、例えば、五角以下又は七角以上の多角形筒状であってもよい。さらに、柱部32,42,52は、筒状であれば、多角形筒状でなくてもよく、円筒状であってもよい。
また、例えば、柱部32,42,52は、V字状、L字状、X字状、N字状、U字状、Z字状、C字状又はI字状等をなしていてもよい。また、柱部32,42,52毎に形状が異なっていてもよい。
(Modified example)
Note that the above embodiment can be implemented in the following forms with appropriate modifications.
In the embodiment described above, the columnar portions 32, 42, and 52 are formed in a regular hexagonal cylindrical shape, but the columnar portions 32, 42, and 52 do not need to be in a regular hexagonal cylindrical shape as long as they have a hexagonal cylindrical shape. Moreover, the pillar parts 32, 42, 52 do not have to be hexagonal cylinders as long as they are polygonal cylinders, and may be polygonal cylinders having five or less or seven sides or more, for example. Furthermore, the columnar parts 32, 42, 52 do not have to be polygonal cylinders as long as they are cylindrical, and may be cylindrical.
Further, for example, the pillar portions 32, 42, 52 may have a V-shape, an L-shape, an X-shape, an N-shape, a U-shape, a Z-shape, a C-shape, or an I-shape. good. Further, the shapes of the pillar portions 32, 42, and 52 may be different.

上記実施形態においては、柱部42は、砥石10の側周面41に直交する方向に延びていたが、砥石10の側周面41に交わる方向であれば、側周面41に直交する方向に限定されない。また、柱部32は端面31に交わる方向であれば、端面31に直交してなくてもよく、柱部52は傾斜面51に交わる方向であれば、傾斜面51に直交してなくてもよい。 In the above embodiment, the pillar portion 42 extends in a direction perpendicular to the side circumferential surface 41 of the grindstone 10, but if the column portion 42 extends in a direction intersecting the side circumferential surface 41 of the grindstone 10, the column portion 42 extends in a direction perpendicular to the side circumferential surface 41. but not limited to. Further, the columnar portion 32 does not need to be orthogonal to the end surface 31 as long as it intersects with the end surface 31, and the column portion 52 does not need to be orthogonal to the inclined surface 51 as long as it intersects with the inclined surface 51. good.

上記実施形態においては、連結部44,54は、Z方向に隣り合う2つの柱部42,52を連結していたが、これに限らず、例えば、周方向Cに隣り合う2つの柱部42,52を連結してもよい。また、接着部34も、周方向Cに隣り合う2つの柱部32を連結してもよい。 In the embodiment described above, the connecting parts 44 and 54 connect the two pillar parts 42 and 52 adjacent in the Z direction, but the invention is not limited to this. For example, the connecting parts 44 and 54 connect the two pillar parts 42 and 52 adjacent in the circumferential direction C. , 52 may be connected. Further, the adhesive portion 34 may also connect two pillar portions 32 adjacent in the circumferential direction C.

上記実施形態において、端面31による加工、傾斜面51による加工及び側周面41による加工の順番はどのような順番であってもよい。また、端面31による加工、傾斜面51による加工及び側周面41による加工は、複数の被加工物Wに対して同時に行われてもよいし、被加工物Wの同一の部分に対して順番に行われてもよい。 In the embodiment described above, the processing using the end surface 31, the processing using the inclined surface 51, and the processing using the side circumferential surface 41 may be carried out in any order. Further, the machining by the end surface 31, the machining by the inclined surface 51, and the machining by the side circumferential surface 41 may be performed simultaneously on a plurality of workpieces W, or sequentially on the same part of the workpiece W. may be carried out.

上記実施形態においては、側周面41の直径は、端面31の直径よりも大きく設定されていたが、これに限らず、側周面41の直径は、端面31の直径よりも小さく設定されていてもよい。この場合、傾斜面51は、側周面41から端面31に近づくにつれて直径が大きくなるように傾斜する。 In the above embodiment, the diameter of the side circumferential surface 41 is set larger than the diameter of the end surface 31; however, the diameter of the side circumferential surface 41 is not limited to this, and the diameter of the side circumferential surface 41 is set smaller than the diameter of the end surface 31. It's okay. In this case, the inclined surface 51 is inclined so that its diameter increases as it approaches the end surface 31 from the side circumferential surface 41.

1…砥石ユニット、5…工作機械、10…砥石、15…砥粒、16…結合材、20…砥石ホルダー、25…シャフト、27…駆動部、30…端面加工部、31…端面、32,42,42a,42b,42c,52…柱部、33,43,53…壁部、34…接着部、44,44a,44b,54…連結部、35,36…第2波板部、35a,36a…第2矩形波部、37,47,57…保持材、40…側面加工部、41…側周面、45,46…第1波板部、45a,46a…第1矩形波部、47a…目立て粒、50…傾斜面加工部、51…傾斜面、55,56…第3波板部、55a,56a…第3矩形波部、C…周方向、D,E…範囲、F…距離、G,H…重複領域、K…加工量、O…回転軸、P1,P2…頂点、R…径方向、W…被加工物 DESCRIPTION OF SYMBOLS 1... Grinding wheel unit, 5... Machine tool, 10... Grinding wheel, 15... Abrasive grain, 16... Binding material, 20... Grinding wheel holder, 25... Shaft, 27... Drive part, 30... End face processing part, 31... End face, 32, 42, 42a, 42b, 42c, 52... Pillar part, 33, 43, 53... Wall part, 34... Adhesive part, 44, 44a, 44b, 54... Connecting part, 35, 36... Second corrugated plate part, 35a, 36a... Second rectangular wave part, 37, 47, 57... Holding material, 40... Side surface processing part, 41... Side peripheral surface, 45, 46... First corrugated plate part, 45a, 46a... First rectangular wave part, 47a ...Sharpening grain, 50...Sloped surface processed part, 51...Slanted surface, 55, 56...Third corrugated plate part, 55a, 56a...Third rectangular wave part, C...Circumferential direction, D, E...Range, F...Distance , G, H...overlapping area, K...machining amount, O...rotation axis, P1, P2...apex, R...radial direction, W...workpiece

Claims (6)

回転軸を中心に回転し、被加工物を加工する砥石であって、
前記砥石が前記回転軸を中心に回転する際に前記被加工物に接触することにより前記被加工物を加工する第1面、第2面及び第3面を備え、
前記第1面は、前記回転軸に沿う方向に延び、前記回転軸の周囲を囲む側周面であり、
前記第2面は、前記回転軸が延びる方向において前記第1面から離れた位置にあり、前記回転軸が延びる方向から見て前記側周面の内側に位置し、前記回転軸に交わる端面であり、
前記第3面は、前記第2面の前記回転軸から遠い外周端部と前記第1面の前記第2面に近い端部とを繋ぐ前記回転軸に沿う方向に対して傾斜する傾斜面であり、
前記砥石は、
前記第1面に設けられ、前記第1面に交わる方向に延びる複数の第1柱部と、
前記第2面に設けられ、前記第2面に交わる方向に延びる複数の第2柱部と、
前記第3面に設けられ、前記第3面に交わる方向に延びる複数の第3柱部と、を備え、
前記第1柱部、前記第2柱部及び前記第3柱部のそれぞれは、
前記砥石のうち前記第1柱部、前記第2柱部及び前記第3柱部のみに設けられ、前記被加工物を加工する際に前記被加工物に接触する複数の砥粒と、
前記複数の砥粒を結合する結合材と、を備える、
砥石。
A grindstone that rotates around a rotating shaft and processes a workpiece,
A first surface, a second surface, and a third surface that process the workpiece by contacting the workpiece when the grindstone rotates around the rotation axis,
The first surface is a side circumferential surface that extends in a direction along the rotation axis and surrounds the rotation axis,
The second surface is located at a position away from the first surface in the direction in which the rotation shaft extends, is located inside the side circumferential surface when viewed from the direction in which the rotation shaft extends, and has an end that intersects with the rotation shaft. surface,
The third surface is an inclined surface that is inclined with respect to the direction along the rotation axis, connecting an outer peripheral end of the second surface far from the rotation axis and an end of the first surface close to the second surface. can be,
The whetstone is
a plurality of first pillar portions provided on the first surface and extending in a direction intersecting the first surface;
a plurality of second pillar portions provided on the second surface and extending in a direction intersecting the second surface;
a plurality of third pillar portions provided on the third surface and extending in a direction intersecting the third surface;
Each of the first pillar part, the second pillar part, and the third pillar part is
A plurality of abrasive grains that are provided only in the first pillar part, the second pillar part, and the third pillar part of the grindstone and come into contact with the workpiece when processing the workpiece;
a binding material that binds the plurality of abrasive grains;
Whetstone.
前記第1柱部、前記第2柱部及び前記第3柱部は、それぞれ、筒状に形成される、
請求項に記載の砥石。
The first pillar part, the second pillar part, and the third pillar part are each formed in a cylindrical shape,
The grindstone according to claim 1 .
記砥石は、
前記回転軸及び前記第1面に沿って延びる矩形波板状をなす2つの第1波板部と、
前記回転軸及び前記第2面に沿って延びる矩形波板状をなす2つの第2波板部と、
前記回転軸及び前記第3面に沿って延びる矩形波板状をなす2つの第3波板部と、を備え、
前記2つの第1波板部は、それぞれ、第1矩形波部を有し、前記砥石の周方向において互いに前記第1矩形波部が向き合うように重ね合わされることにより筒状の前記第1柱部が形成され、
前記2つの第2波板部は、それぞれ、第2矩形波部を有し、前記砥石の前記周方向において互いに前記第2矩形波部が向き合うように重ね合わされることにより筒状の前記第2柱部が形成され、
前記2つの第3波板部は、それぞれ、第3矩形波部を有し、前記砥石の前記周方向において互いに前記第3矩形波部が向き合うように重ね合わされることにより筒状の前記第3柱部が形成される、
請求項に記載の砥石。
The whetstone is
two first corrugated plate portions each having a rectangular corrugated plate shape extending along the rotation axis and the first surface;
two second corrugated plate portions each having a rectangular corrugated plate shape extending along the rotation axis and the second surface;
two third corrugated plate portions each having a rectangular corrugated plate shape extending along the rotation axis and the third surface;
The two first corrugated plate portions each have a first rectangular corrugated portion, and are overlapped such that the first rectangular corrugated portions face each other in the circumferential direction of the grindstone, thereby forming the cylindrical first column. part is formed,
The two second corrugated plate portions each have a second rectangular corrugated portion, and are superimposed so that the second rectangular corrugated portions face each other in the circumferential direction of the grindstone, thereby forming the cylindrical second corrugated plate portion. A column is formed,
The two third corrugated plate portions each have a third rectangular corrugated portion, and are overlapped so that the third rectangular corrugated portions face each other in the circumferential direction of the grindstone, thereby forming the cylindrical third corrugated plate portion. A column is formed.
The grindstone according to claim 2 .
前記2つの第1波板部における前記第3波板部に近い下端は、前記2つの第3波板部における前記2つの第1波板部に近い上端に前記周方向に重なった状態で接着されている、
請求項に記載の砥石。
Lower ends of the two first corrugated plate portions close to the third corrugated plate portion overlap in the circumferential direction with upper ends of the two third corrugated plate portions close to the two first corrugated plate portions. It is glued with
The grindstone according to claim 3 .
前記2つの第3波板部における前記第2波板部に近い下端は、前記2つの第2波板部の前記砥石の径方向の外側の端部に前記周方向に重なった状態で接着されている、
請求項又はに記載の砥石。
The lower ends of the two third corrugated plate portions close to the second corrugated plate portion overlap in the circumferential direction with the outer ends of the two second corrugated plate portions in the radial direction of the grinding wheel. is glued,
The whetstone according to claim 3 or 4 .
請求項1からの何れか1項に記載の砥石と、
前記砥石を保持する砥石ホルダーと、
前記砥石ホルダーに固定され、前記砥石の前記回転軸に沿って延びるシャフトと、
前記シャフトを軸回転させる駆動部と、を備える、
工作機械。
The whetstone according to any one of claims 1 to 5 ,
a whetstone holder that holds the whetstone;
a shaft fixed to the grindstone holder and extending along the rotation axis of the grindstone;
a drive unit that rotates the shaft;
Machine Tools.
JP2019221063A 2019-12-06 2019-12-06 Grinding wheels and machine tools Active JP7426692B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2019221063A JP7426692B2 (en) 2019-12-06 2019-12-06 Grinding wheels and machine tools

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2019221063A JP7426692B2 (en) 2019-12-06 2019-12-06 Grinding wheels and machine tools

Publications (2)

Publication Number Publication Date
JP2021088045A JP2021088045A (en) 2021-06-10
JP7426692B2 true JP7426692B2 (en) 2024-02-02

Family

ID=76219054

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2019221063A Active JP7426692B2 (en) 2019-12-06 2019-12-06 Grinding wheels and machine tools

Country Status (1)

Country Link
JP (1) JP7426692B2 (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000190194A (en) 1998-12-28 2000-07-11 Matsushita Electric Works Ltd Keratin grinding implement
US20090042495A1 (en) 2007-08-09 2009-02-12 Bong Won CHO Rotary-Type Polishing Device Having Protrusion Members
WO2019069847A1 (en) 2017-10-03 2019-04-11 株式会社ナノテム Three-dimensional structure grindstone and manufacturing method therefor

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63169260U (en) * 1987-04-23 1988-11-04

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000190194A (en) 1998-12-28 2000-07-11 Matsushita Electric Works Ltd Keratin grinding implement
US20090042495A1 (en) 2007-08-09 2009-02-12 Bong Won CHO Rotary-Type Polishing Device Having Protrusion Members
WO2019069847A1 (en) 2017-10-03 2019-04-11 株式会社ナノテム Three-dimensional structure grindstone and manufacturing method therefor

Also Published As

Publication number Publication date
JP2021088045A (en) 2021-06-10

Similar Documents

Publication Publication Date Title
JP4742845B2 (en) Method for processing chamfered portion of semiconductor wafer and method for correcting groove shape of grindstone
JP2001062734A (en) Monolayer grinding wheel
JP2012232378A (en) Tip for precision polishing tool, its manufacturing method, and polishing tool using tip
JP7145494B2 (en) whetstone
TWI684494B (en) Grinding stone
JP7426692B2 (en) Grinding wheels and machine tools
JP2011161584A (en) Grinding tool
JP4340184B2 (en) Whetstone
JP7417988B2 (en) Grinding wheels, grinding wheel units and machine tools
JP2006247753A (en) Diamond brazed tool
US20090191793A1 (en) Method of and device for abrasive machining and abrasive tool provided therefor
JP7140373B2 (en) whetstone
JP2010036303A (en) Grinding wheel for semiconductor wafer back-surface and grinding method for semiconductor wafer back-surface
JP7441527B2 (en) whetstone
JP7418009B2 (en) polishing plate
JP7356185B2 (en) Processing grindstone and core drill
WO2023234152A1 (en) Superabrasive wheel and processing method using same
TW202222590A (en) Processing sheet, processing grindstone, processing column member, and core drill
JP2007050471A (en) Dressing method and rotary dressing device
JP2019126868A (en) Grinding wheel
TWI469207B (en) Chemical mechanical grinding dresser
JP3115420U (en) Segment type grinding wheel for vertical surface grinding
JP2022076181A (en) Grindstone for processing
JP5860216B2 (en) Wafer chamfer removal method
KR20080100713A (en) Wheel with grinding grain, grinding apparatus and dresser

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20220902

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20230629

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20230808

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20230914

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20240109

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20240116

R150 Certificate of patent or registration of utility model

Ref document number: 7426692

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150