JP2020047781A - 光検出素子、光検出器、光検出システム、ライダー装置及び車 - Google Patents
光検出素子、光検出器、光検出システム、ライダー装置及び車 Download PDFInfo
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 39
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 19
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- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 9
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- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
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- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- WTEOIRVLGSZEPR-UHFFFAOYSA-N boron trifluoride Chemical compound FB(F)F WTEOIRVLGSZEPR-UHFFFAOYSA-N 0.000 description 1
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- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0352—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions
- H01L31/035272—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions characterised by at least one potential jump barrier or surface barrier
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- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
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- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
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- G01S7/481—Constructional features, e.g. arrangements of optical elements
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- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
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- G01S7/483—Details of pulse systems
- G01S7/486—Receivers
- G01S7/4861—Circuits for detection, sampling, integration or read-out
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- H01L27/14601—Structural or functional details thereof
- H01L27/14609—Pixel-elements with integrated switching, control, storage or amplification elements
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- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by potential barriers, e.g. phototransistors
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- H01L31/107—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier the potential barrier working in avalanche mode, e.g. avalanche photodiodes
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- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/88—Lidar systems specially adapted for specific applications
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- Measurement Of Optical Distance (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Solid State Image Pick-Up Elements (AREA)
Abstract
Description
図1は、第1の実施形態に係る光検出素子1を含む光検出器の断面図(a)及び上面図(b)である。図1(a)は、図1(b)の点線の断面図である。
この後、n型層113を活性化するラピッドアニール処理する。
第1の実施形態の変形例を第1の実施形態と異なる点を中心に説明する。
図20に第2の実施形態に係るライダー(Laser Imaging Detection and Ranging:LIDAR)装置5001を示す。
Claims (21)
- 第1導電型の第1領域と、
第2導電型の第2領域と、
前記第2領域と前記第1領域の間に設けられた第1導電型の第3領域と、
前記前記第1領域と前記第2領域の間に前記第3領域から前記第2領域に向かう第1方向と交差する第2方向に離間して複数設けられた第1導電型の構造体と、を含む光検出素子。 - 前記構造体同士は、前記第2方向に同程度の間隔で離間する請求項1に記載の光検出素子。
- 前記構造体同士の離間距離は、前記第2方向における前記光検出素子の幅の30%以下である請求項1又は2に記載の光検出素子。
- 前記第2方向において、前記第2領域の周りを囲むように設けられた第2導電型の第4領域と、
前記第1領域と前記第4領域の間に設けられた第1導電型の第5領域と、を含む請求項1から3のいずれか1項に記載の光検出素子。 - 第1方向における前記第5領域の不純物の濃度のピーク深さは、前記構造体の不純物の濃度のピーク深さと同程度である請求項4に記載の光検出素子。
- 前記第5領域の不純物のピーク濃度は、前記構造体の不純物のピーク濃度と同程度である請求項4又は5に記載の光検出素子。
- 前記第5領域は、前記第3領域と前記第4領域の間に少なくとも一部設けられる請求項4から6のいずれか1項に記載の光検出素子。
- 第1方向における前記第5領域の不純物の濃度のピーク深さは、前記第3領域の濃度のピーク深さより深い請求項4から7のいずれか1項に記載の光検出素子。
- 前記第5領域の不純物のピーク濃度は、前記第3領域の不純物のピーク濃度より高い請求項4から8のいずれか1項に記載の光検出素子。
- 前記第4領域は前記第2領域の縁を少なくとも一部を覆う請求項4から9のいずれか1項に記載の光検出素子。
- 前記第4領域の不純物のピーク濃度は前記第2領域の不純物のピーク濃度より低い請求項4から10のいずれか1項に記載の光検出素子。
- 前記第2領域、前記第3領域、前記第4領域、前記第5領域及び前記構造体のうち少なくとも1つは、光入射方向から見て四隅に曲率を有する請求項4から11のいずれか1項に記載の光検出素子。
- 前記第2領域と前記第3領域間でpn接合ダイオードが形成されている請求項1から12のいずれか1項に記載の光検出素子。
- 降伏電圧以上の逆バイアスを印加する電極と、を含む請求項13に記載の光検出素子。
- 少なくとも2つ以上の請求項1から14のいずれか1項に記載の光検出素子と、前記光検出素子の間に設けられる素子分離構造と、を含む光検出器。
- 前記第4領域は、前記素子分離構造の少なくとも一部を覆う請求項15に記載の光検出器。
- 前記第4領域は、濃度のピーク深さが前記素子分離構造と同程度以上に深い請求項15又は16に記載の光検出器。
- 請求項15から17のいずれか1項に記載の光検出器と、
前記光検出器の出力信号から光の飛行時間を算出する距離計測回路と、
を備える光検出システム。 - 物体に光を照射する光源と、
前記物体に反射された光を検出する請求項18に記載の光検出システムと、
を備えるライダー装置。 - 前記光源と前記光検出器の配置関係に基づいて、三次元画像を生成する画像認識システムと、を備える請求項19に記載のライダー装置。
- 車体の4つの隅に請求項19又は20に記載のライダー装置を備える車。
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US16/293,696 US11233163B2 (en) | 2018-09-19 | 2019-03-06 | Photo detection element, photo detector, photo detection system, lidar device and vehicle comprising a plurality of structure bodies separately provided between first and second regions |
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Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009260160A (ja) * | 2008-04-21 | 2009-11-05 | Panasonic Corp | 光半導体装置 |
WO2010047058A1 (ja) * | 2008-10-22 | 2010-04-29 | パナソニック株式会社 | 光半導体装置 |
US20100148040A1 (en) * | 2008-12-17 | 2010-06-17 | Stmicroelectronics S.R.L. | Geiger-mode photodiode with integrated and adjustable quenching resistor, photodiode array, and manufacturing method thereof |
JP2011071455A (ja) * | 2009-09-28 | 2011-04-07 | Samsung Electro-Mechanics Co Ltd | シリコン光電子増倍管 |
JP2014059301A (ja) * | 2012-09-18 | 2014-04-03 | Sick Ag | 光電センサおよびデプスマップ検出方法 |
JP2017032359A (ja) * | 2015-07-30 | 2017-02-09 | 株式会社ユーシン | 光レーダ装置、車載レーダ装置、インフラレーダ装置 |
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Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06224463A (ja) | 1993-01-22 | 1994-08-12 | Mitsubishi Electric Corp | 半導体受光装置 |
JP2009105489A (ja) | 2007-10-19 | 2009-05-14 | Sumitomo Electric Ind Ltd | 光トランシーバ及び光トランシーバの制御方法 |
US8901652B2 (en) * | 2009-09-01 | 2014-12-02 | Stmicroelectronics S.R.L. | Power MOSFET comprising a plurality of columnar structures defining the charge balancing region |
JP5211095B2 (ja) | 2010-03-25 | 2013-06-12 | 株式会社豊田中央研究所 | 光検出器 |
JP5872197B2 (ja) | 2011-07-04 | 2016-03-01 | 浜松ホトニクス株式会社 | フォトダイオードアレイモジュール |
-
2018
- 2018-09-19 JP JP2018175272A patent/JP6975113B2/ja active Active
-
2019
- 2019-03-06 US US16/293,696 patent/US11233163B2/en active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009260160A (ja) * | 2008-04-21 | 2009-11-05 | Panasonic Corp | 光半導体装置 |
WO2010047058A1 (ja) * | 2008-10-22 | 2010-04-29 | パナソニック株式会社 | 光半導体装置 |
US20100148040A1 (en) * | 2008-12-17 | 2010-06-17 | Stmicroelectronics S.R.L. | Geiger-mode photodiode with integrated and adjustable quenching resistor, photodiode array, and manufacturing method thereof |
JP2011071455A (ja) * | 2009-09-28 | 2011-04-07 | Samsung Electro-Mechanics Co Ltd | シリコン光電子増倍管 |
JP2014059301A (ja) * | 2012-09-18 | 2014-04-03 | Sick Ag | 光電センサおよびデプスマップ検出方法 |
JP2017032359A (ja) * | 2015-07-30 | 2017-02-09 | 株式会社ユーシン | 光レーダ装置、車載レーダ装置、インフラレーダ装置 |
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