JP2020043102A - 半導体装置および電力変換装置 - Google Patents
半導体装置および電力変換装置 Download PDFInfo
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Abstract
Description
本発明に係る半導体装置では、絶縁板の端部に第1下部導体を露出させる切り欠きが形成される。このため、外部電極を接続するための突出部が設ける必要がなく、中継基板の加工を容易にできる。従って、半導体装置を容易に製造できる。
図1は、実施の形態1に係る半導体装置100の断面図である。図2は、実施の形態1に係る半導体装置100の別の位置の断面図である。半導体装置100は、基板15を備える。基板15は絶縁基板である。基板15は、金属で形成されたベース板10を備える。ベース板10の上には絶縁層12が設けられる。絶縁層12の上には、回路パターン14が設けられる。
図6は、実施の形態2に係る中継基板220の平面図である。中継基板220では、絶縁板221の上面に上部導体22が設けられ、下面に下部導体23が設けられる。絶縁板221の端部には、第1下部導体23aを露出させる切り欠き221aが形成される。図6では、切り欠き221aにより絶縁板221から突出部23c、23dが露出している。第1外部電極31は、第1下部導体23aの切り欠き221aから露出した部分に電気的に接続される。
図7は、実施の形態3に係る半導体装置300の断面図である。中継基板320は、接合先の部品と絶縁板21との距離が大きい部分ほど、下部導体323が厚く設けられる。図7において、半導体チップ18a、18bと接合される第1下部導体23aよりも、基板15と接合される第2下部導体323bは厚く設けられる。
図8は、実施の形態4に係る半導体装置400の断面図である。中継基板420には、能動部品62または受動部品60が設けられる。能動部品62または受動部品60は、上部導体422に電気的に接続されている。受動部品60は、例えば抵抗またはコンデンサである。能動部品62は、例えば制御IC等である。能動部品62および受動部品60は例えば、半導体チップ18a、18b又は半導体装置400の保護機能を担う。
図9は、実施の形態5に係る半導体装置500の断面図である。半導体装置500はケース50を備えない。半導体装置500は、基板15、半導体チップ18a、18b、中継基板20および外部電極が一括して組み付けられた半完成品を、ケースを使用せず、樹脂40で封止することで形成される。樹脂40による封止では、金型を外枠として使用する。
本実施の形態は、上述した実施の形態1〜5に係る半導体装置を電力変換装置に適用したものである。本実施の形態は特定の電力変換装置に限定されるものではないが、以下、実施の形態6として、三相のインバータに実施の形態1〜5に係る半導体装置を適用した場合について説明する。
Claims (11)
- 基板と、
前記基板の上に設けられた複数の半導体チップと、
前記複数の半導体チップの上に設けられた中継基板と、
第1外部電極と、
第2外部電極と、
を備え、
前記中継基板は、
貫通孔が形成された絶縁板と、
前記絶縁板の下面に設けられ、前記複数の半導体チップの何れかと電気的に接続された第1下部導体と、前記複数の半導体チップの何れかと電気的に接続された第2下部導体と、を有する下部導体と、
前記絶縁板の上面に設けられた上部導体と、
前記貫通孔に設けられ、前記第2下部導体と、前記上部導体と、を電気的に接続する接続部と、
前記第1下部導体および前記上部導体の一方の一部であり、平面視で前記絶縁板から外側に突出する突出部と、
を備え、
前記突出部は前記第1外部電極と電気的に接続され、
前記第1下部導体および前記上部導体の他方は、前記第2外部電極と電気的に接続され、平面視で前記絶縁板の内側に収まることを特徴とする半導体装置。 - 前記突出部は前記第1下部導体に設けられることを特徴とする請求項1に記載の半導体装置。
- 基板と、
前記基板の上に設けられた複数の半導体チップと、
前記複数の半導体チップの上に設けられた中継基板と、
第1外部電極と、
第2外部電極と、
を備え、
前記中継基板は、
貫通孔が形成された絶縁板と、
前記絶縁板の下面に設けられ、それぞれが前記複数の半導体チップの何れかと電気的に接続された第1下部導体と、第2下部導体と、を有する下部導体と、
前記絶縁板の上面に設けられた上部導体と、
前記貫通孔に設けられ、前記第2下部導体と、前記上部導体と、を電気的に接続する接続部と、
を備え、
前記絶縁板の端部には、前記第1下部導体を露出させる切り欠きが形成され、
前記第1外部電極は、前記第1下部導体の前記切り欠きから露出した部分に電気的に接続され、
前記第2外部電極は前記上部導体に電気的に接続されることを特徴とする半導体装置。 - 前記第1下部導体は前記絶縁板の端部よりも内側に設けられることを特徴とする請求項3に記載の半導体装置。
- 前記中継基板は、接合先の部品と前記絶縁板との距離が大きい部分ほど、前記下部導体が厚く設けられることを特徴とする請求項1から4の何れか1項に記載の半導体装置。
- 前記下部導体と前記上部導体には反対方向に電流が流れることを特徴とする請求項1から5の何れか1項に記載の半導体装置。
- 前記第1下部導体および前記上部導体の一方は前記複数の半導体チップのいずれかのコレクタと電気的に接続され、
前記第1下部導体および前記上部導体の他方は前記複数の半導体チップのいずれかのエミッタと電気的に接続されることを特徴とする請求項1から6の何れか1項に記載の半導体装置。 - 前記中継基板には、能動部品または受動部品が設けられ、
前記下部導体または前記上部導体のうち、前記能動部品または前記受動部品と接合される部分は、前記半導体チップの主電流が流れる部分よりも薄く設けられることを特徴とする請求項1から7の何れか1項に記載の半導体装置。 - 前記半導体チップはワイドバンドギャップ半導体によって形成されていることを特徴とする請求項1から8の何れか1項に記載の半導体装置。
- 前記ワイドバンドギャップ半導体は、炭化珪素、窒化ガリウム系材料またはダイヤモンドであることを特徴とする請求項9に記載の半導体装置。
- 請求項1から10の何れか1項に記載の半導体装置を有し、入力される電力を変換して出力する主変換回路と、
前記半導体装置を駆動する駆動信号を前記半導体装置に出力する駆動回路と、
前記駆動回路を制御する制御信号を前記駆動回路に出力する制御回路と、
を備えた電力変換装置。
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