JP2020025027A - 電力用半導体装置及びその製造方法、並びに、電力変換装置 - Google Patents
電力用半導体装置及びその製造方法、並びに、電力変換装置 Download PDFInfo
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- 238000006243 chemical reaction Methods 0.000 title claims description 35
- 238000004519 manufacturing process Methods 0.000 title claims description 3
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- 239000000835 fiber Substances 0.000 claims abstract description 6
- 238000003466 welding Methods 0.000 claims description 13
- 238000000034 method Methods 0.000 abstract description 5
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- 238000009413 insulation Methods 0.000 abstract 1
- 239000000463 material Substances 0.000 description 7
- 239000010949 copper Substances 0.000 description 4
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 4
- 229910010271 silicon carbide Inorganic materials 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
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- 229910000679 solder Inorganic materials 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
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- 238000003860 storage Methods 0.000 description 2
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- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
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- 229910003460 diamond Inorganic materials 0.000 description 1
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- 229910052751 metal Inorganic materials 0.000 description 1
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Abstract
Description
まず、本発明の実施の形態1に係る電力用半導体装置及について説明する前に、これと関連する半導体装置(以下、「関連半導体装置」と記す)について説明する。
本実施の形態1に係る電力用半導体装置によれば、ビーム品質が良いファイバーレーザーを用いるので、微小領域に対して安定した溶接を行うことができ、かつ、回路パターン1bが難溶融材であっても溶接を行うことができる。また本実施の形態1に係る電極端子3の薄肉部分3bは、回路パターン1bの厚さの1倍以上2倍以下であるように構成される。これにより、ピール強度の向上、電流容量の不足の抑制、寿命の低減の抑制、及び、絶縁層1aが破壊される確率の低減が期待できる。したがって、電力用半導体装置の信頼性を高めることができる。
実施の形態1では、電力用半導体素子2と回路パターン1bとの間のダイボンド材は、はんだであったが、これに限ったものではなく、例えば、焼結性のAg(銀)粒子またはCu(銅)粒子を含む接合材であってもよい。焼結性の接合材をダイボンド材に用いた構成によれば、はんだをダイボンド材に用いた構成よりも、電力用半導体素子2と回路パターン1bとの接合部の寿命を向上させることができる。
図4は、本発明の実施の形態2に係る電力用半導体装置の一部の構成を模式的に示す断面図である。以下、本実施の形態2に係る構成要素のうち、上述の構成要素と同じまたは類似する構成要素については同じ参照符号を付し、異なる構成要素について主に説明する。
図5は、本発明の実施の形態3に係る電力用半導体装置の一部(電極端子)の構成を模式的に示す斜視図である。以下、本実施の形態3に係る構成要素のうち、上述の構成要素と同じまたは類似する構成要素については同じ参照符号を付し、異なる構成要素について主に説明する。
図6は、本発明の実施の形態4に係る電力用半導体装置の一部(電極端子)の構成を模式的に示す斜視図である。以下、本実施の形態4に係る構成要素のうち、上述の構成要素と同じまたは類似する構成要素については同じ参照符号を付し、異なる構成要素について主に説明する。
本発明の実施の形態5に係る電力変換装置は、実施の形態1〜4のいずれかに係る電力用半導体装置を有する主変換回路を備えた電力変換装置である。以上で説明した電力用半導体装置は特定の電力変換装置に限定されるものではないが、以下、本実施の形態5として、三相のインバータに、実施の形態1〜4のいずれかに係る電力用半導体装置を適用した場合について説明する。
Claims (7)
- 絶縁層及び回路パターンが順に配設された基板と、
前記回路パターンと電気的に接続された電力用半導体素子と、
ファイバーレーザーによって前記回路パターンに溶接された溶接部分を含む薄肉部分を有する電極端子と
を備え、
前記回路パターンの厚さは、0.2mm以上0.5mm以下であり、
前記電極端子の前記薄肉部分は、前記回路パターンの厚さの1倍以上2倍以下である、電力用半導体装置。 - 請求項1に記載の電力用半導体装置であって、
前記電極端子の前記薄肉部分以外の部分の厚みは、0.6mm以上2.0mm以下であり、
前記電力用半導体素子はワイドバンドギャップ半導体を含む、電力用半導体装置。 - 請求項1または請求項2に記載の電力用半導体装置であって、
平面視において、前記薄肉部分の形状は前記溶接部分の形状と同じである、電力用半導体装置。 - 請求項1から請求項3のうちのいずれか1項に記載の電力用半導体装置であって、
前記電極端子は、前記薄肉部分が底部である凹部を有し、
前記凹部に埋設された導電性部材をさらに備える、電力用半導体装置。 - 請求項4に記載の電力用半導体装置であって、
前記導電性部材は、Cuペースト、及び、Agペーストの少なくともいずれか1つを含む、電力用半導体装置。 - 請求項1から請求項5のうちのいずれか1項に記載の電力用半導体装置を有し、入力される電力を変換して出力する主変換回路と、
前記主変換回路を制御する制御信号を前記主変換回路に出力する制御回路と
を備える、電力変換装置。 - (a)絶縁層及び回路パターンが順に配設された基板を準備する工程と、
(b)電力用半導体素子を前記回路パターンと電気的に接続する工程と、
(c)電極端子が有する薄肉部分を、ファイバーレーザーによって前記回路パターンに溶接する工程と、
を備え、
前記回路パターンの厚さは、0.2mm以上0.5mm以下であり、
前記電極端子の前記薄肉部分は、前記回路パターンの厚さの1倍以上2倍以下である、電力用半導体装置の製造方法。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018148968A JP6987031B2 (ja) | 2018-08-08 | 2018-08-08 | 電力用半導体装置及びその製造方法、並びに、電力変換装置 |
US16/442,755 US11271352B2 (en) | 2018-08-08 | 2019-06-17 | Power semiconductor device and manufacturing method thereof, and power conversion device |
DE102019211221.8A DE102019211221B4 (de) | 2018-08-08 | 2019-07-29 | Leistungs-Halbleitervorrichtung und deren Herstellungsverfahren und Leistungsumwandlungsvorrichtung |
CN201910712422.4A CN110828410A (zh) | 2018-08-08 | 2019-08-02 | 电力用半导体装置及其制造方法、以及电力变换装置 |
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JP7319295B2 (ja) * | 2018-11-22 | 2023-08-01 | ローム株式会社 | 半導体装置 |
US20220310409A1 (en) * | 2021-03-24 | 2022-09-29 | Littelfuse, Inc. | Method to connect power terminal to substrate within semiconductor package |
JP2022165097A (ja) * | 2021-04-19 | 2022-10-31 | 三菱電機株式会社 | 半導体装置および半導体装置の製造方法 |
EP4187594A1 (en) * | 2021-11-26 | 2023-05-31 | Hitachi Energy Switzerland AG | Metal substrate structure and method of attaching a terminal to a metal substrate structure for a semiconductor power module and semiconductor power module |
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JP4940743B2 (ja) * | 2006-04-20 | 2012-05-30 | 富士電機株式会社 | 半導体装置 |
WO2009081723A1 (ja) * | 2007-12-20 | 2009-07-02 | Fuji Electric Device Technology Co., Ltd. | 半導体装置およびその製造方法 |
US9899345B2 (en) * | 2014-01-27 | 2018-02-20 | Mitsubishi Electric Cooperation | Electrode terminal, semiconductor device for electrical power, and method for manufacturing semiconductor device for electrical power |
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JPWO2017195625A1 (ja) | 2016-05-11 | 2019-03-07 | 三菱電機株式会社 | 半導体装置および半導体装置の製造方法 |
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JP2018500172A (ja) * | 2014-11-07 | 2018-01-11 | ヴェバスト ソシエタス エウロペアWebasto Societas Europaea | レーザ溶接による第1部品及び第2部品の加工方法及び関連装置 |
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