JP2020027825A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2020027825A5 JP2020027825A5 JP2018150541A JP2018150541A JP2020027825A5 JP 2020027825 A5 JP2020027825 A5 JP 2020027825A5 JP 2018150541 A JP2018150541 A JP 2018150541A JP 2018150541 A JP2018150541 A JP 2018150541A JP 2020027825 A5 JP2020027825 A5 JP 2020027825A5
- Authority
- JP
- Japan
- Prior art keywords
- oxide
- insulator
- conductor
- film
- insulating film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012212 insulator Substances 0.000 claims 13
- 239000004020 conductor Substances 0.000 claims 12
- 238000010438 heat treatment Methods 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 2
- 239000000470 constituent Substances 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018150541A JP7254462B2 (ja) | 2018-08-09 | 2018-08-09 | 半導体装置の作製方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018150541A JP7254462B2 (ja) | 2018-08-09 | 2018-08-09 | 半導体装置の作製方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2020027825A JP2020027825A (ja) | 2020-02-20 |
| JP2020027825A5 true JP2020027825A5 (enExample) | 2021-09-16 |
| JP7254462B2 JP7254462B2 (ja) | 2023-04-10 |
Family
ID=69620330
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018150541A Active JP7254462B2 (ja) | 2018-08-09 | 2018-08-09 | 半導体装置の作製方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP7254462B2 (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7705378B2 (ja) * | 2020-03-26 | 2025-07-09 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
| DE112021004337T5 (de) * | 2020-08-19 | 2023-05-25 | Semiconductor Energy Laboratory Co., Ltd. | Herstellungsverfahren eines Metalloxids |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017072627A1 (ja) * | 2015-10-28 | 2017-05-04 | 株式会社半導体エネルギー研究所 | 半導体装置、モジュール、電子機器および半導体装置の作製方法 |
| US10115741B2 (en) * | 2016-02-05 | 2018-10-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
| JP2018022879A (ja) * | 2016-07-20 | 2018-02-08 | 株式会社リコー | 電界効果型トランジスタ、及びその製造方法、並びに表示素子、画像表示装置、及びシステム |
-
2018
- 2018-08-09 JP JP2018150541A patent/JP7254462B2/ja active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2014187166A5 (enExample) | ||
| JP2016213468A5 (enExample) | ||
| JPWO2020003047A5 (ja) | 半導体装置 | |
| JP2017005282A5 (enExample) | ||
| JP2016189460A5 (ja) | 半導体装置及びその製造方法 | |
| JP2014209613A5 (enExample) | ||
| JP2017103467A5 (ja) | 表示装置の作製方法 | |
| JP2017028252A5 (ja) | トランジスタ | |
| JP2016149546A5 (enExample) | ||
| JP2017063192A5 (ja) | 半導体装置の作製方法、電子機器の作製方法、半導体装置、及び電子機器 | |
| JP2016006871A5 (enExample) | ||
| JP2016197708A5 (ja) | 半導体装置 | |
| JP2016039328A5 (enExample) | ||
| JP2017076785A5 (enExample) | ||
| JPWO2020008296A5 (ja) | 半導体装置 | |
| JP2017017320A5 (enExample) | ||
| JP2016066792A5 (enExample) | ||
| JP2015019057A5 (enExample) | ||
| JP2014215485A5 (enExample) | ||
| JP2011151389A5 (ja) | 半導体装置及びその作製方法 | |
| JP2019033253A5 (ja) | 半導体装置 | |
| JP2016526789A5 (enExample) | ||
| JP2019029641A5 (ja) | 半導体装置及び半導体装置の作製方法 | |
| JPWO2020021383A5 (enExample) | ||
| JP2018022713A5 (ja) | 半導体装置 |