JP2020014000A - 集積回路装置及びその製造方法 - Google Patents
集積回路装置及びその製造方法 Download PDFInfo
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- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 6
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- -1 CuMg Inorganic materials 0.000 description 2
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- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- GPXJNWSHGFTCBW-UHFFFAOYSA-N Indium phosphide Chemical compound [In]#P GPXJNWSHGFTCBW-UHFFFAOYSA-N 0.000 description 1
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- 229910052732 germanium Inorganic materials 0.000 description 1
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- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
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- 229910052697 platinum Inorganic materials 0.000 description 1
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- 229910052702 rhenium Inorganic materials 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
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- 229910052725 zinc Inorganic materials 0.000 description 1
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- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76802—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics
- H01L21/76814—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics post-treatment or after-treatment, e.g. cleaning or removal of oxides on underlying conductors
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- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
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- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/5226—Via connections in a multilevel interconnection structure
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- H01L24/02—Bonding areas ; Manufacturing methods related thereto
- H01L24/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L24/06—Structure, shape, material or disposition of the bonding areas prior to the connecting process of a plurality of bonding areas
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- H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L24/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
- H01L24/30—Structure, shape, material or disposition of the layer connectors prior to the connecting process of a plurality of layer connectors
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- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
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- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
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- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
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- H01L2924/153—Connection portion
- H01L2924/1531—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
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- H01L2924/181—Encapsulation
Abstract
Description
120 層間絶縁膜
130 金属層間絶縁膜
134 ランディングパッド
134B ランディングパッドバリア層
134W ランディングパッド金属層
150 貫通ビア構造物
150H 貫通ビアホール
150HS 段差部
152 導電性プラグ
154 第1導電性バリア層
156 第2導電性バリア層
158 ビア絶縁層
159 金属アイランド
Claims (22)
- 基板と、
前記基板上に配置されるランディングパッドと、
前記基板を貫通し、前記ランディングパッドと連結される貫通ビア構造物と、を含み、
前記貫通ビア構造物は、
導電性プラグと、
前記導電性プラグの側壁及び底面を覆う第1導電性バリア層と、
前記第1導電性バリア層の側壁を覆う第2導電性バリア層と、を含む集積回路装置。 - 前記貫通ビア構造物は、前記第2導電性バリア層の側壁を覆うビア絶縁層をさらに含み、
前記ビア絶縁層は、前記ランディングパッドと接触せず、前記第2導電性バリア層は前記ランディングパッドと接触することを特徴とする請求項1に記載の集積回路装置。 - 前記ランディングパッドは、
前記基板上に配置されるランディングパッド金属層と、
前記ランディングパッド金属層の上面及び側面を覆うランディングパッドバリア層と、を含み、
前記第1導電性バリア層の底面は、前記ランディングパッド金属層と接触し、
前記第2導電性バリア層の底面は、前記ランディングパッドバリア層と接触することを特徴とする請求項1に記載の集積回路装置。 - 前記第2導電性バリア層は、前記ランディングパッド金属層と接触しないことを特徴とする請求項3に記載の集積回路装置。
- 前記基板上に配置される層間絶縁膜と、
前記層間絶縁膜において、前記ランディングパッドを覆う金属層間絶縁膜と、をさらに含み、
前記貫通ビア構造物の側壁の一部分は、前記層間絶縁膜によって覆われ、
前記貫通ビア構造物の底面は、前記ランディングパッドと接触することを特徴とする請求項1に記載の集積回路装置。 - 前記貫通ビア構造物は、前記基板と前記層間絶縁膜とを貫通する貫通ビアホール内に配置され、
前記貫通ビアホールの底部に、段差部が形成されることを特徴とする請求項5に記載の集積回路装置。 - 前記貫通ビア構造物は、前記第2導電性バリア層の側壁を覆うビア絶縁層をさらに含み、
前記貫通ビアホールの内壁上に、前記ビア絶縁層、前記第2導電性バリア層、前記第1導電性バリア層及び前記導電性プラグが順次に配置されることを特徴とする請求項6に記載の集積回路装置。 - 前記貫通ビアホールの前記段差部は、前記ビア絶縁層の底面と、前記第2導電性バリア層の前記側壁とによって形成されることを特徴とする請求項7に記載の集積回路装置。
- 前記貫通ビアホールは、前記基板と前記層間絶縁膜との境界において、拡張領域を含むことを特徴とする請求項6に記載の集積回路装置。
- 基板と、
前記基板上に配置される層間絶縁膜と、
前記層間絶縁膜上に配置されるランディングパッドと、
前記基板及び前記層間絶縁膜を貫通する貫通ビアホール内に配置され、前記ランディングパッドと連結される貫通ビア構造物と、を含み、
前記貫通ビア構造物は、
導電性プラグと、
前記導電性プラグの側壁及び底面を覆う第1導電性バリア層と、
前記第1導電性バリア層の側壁を覆う第2導電性バリア層と、を含む集積回路装置。 - 前記第1導電性バリア層の底面は、前記基板の第1面から第1垂直距離に位置し、
前記第2導電性バリア層の底面は、前記基板の前記第1面から第2垂直距離に位置し、
前記第2垂直距離が、前記第1垂直距離よりさらに短いことを特徴とする請求項3又は10に記載の集積回路装置。 - 前記貫通ビア構造物は、
前記第1導電性バリア層と前記第2導電性バリア層との間に配置され、前記ランディングパッドと同一金属を含む金属アイランドをさらに含むことを特徴とする請求項3又は10に記載の集積回路装置。 - 前記貫通ビア構造物は、前記第2導電性バリア層の側壁を覆うビア絶縁層をさらに含み、
前記ビア絶縁層は、前記金属アイランドと接触しないことを特徴とする請求項12に記載の集積回路装置。 - 基板と、
前記基板上に配置されるランディングパッドと、
前記基板を貫通し、前記ランディングパッドと連結される貫通ビア構造物と、を含み、
前記貫通ビア構造物は、
導電性プラグと、
前記導電性プラグの側壁及び底面を覆う第1導電性バリア層と、
前記第1導電性バリア層の側壁を覆う第2導電性バリア層と、
前記第2導電性バリア層の側壁の一部分を覆い、前記ランディングパッドと接触しないビア絶縁層と、を含む集積回路装置。 - 前記ランディングパッドは、
前記基板上に配置されるランディングパッド金属層と、
前記ランディングパッド金属層の上面及び側面を覆うランディングパッドバリア層と、を含むことを特徴とする請求項14に記載の集積回路装置。 - 前記第1導電性バリア層の底面は、前記ランディングパッド金属層と接触し、
前記第2導電性バリア層の底面は、前記ランディングパッドバリア層と接触することを特徴とする請求項15に記載の集積回路装置。 - 前記基板上に配置される層間絶縁膜と、
前記層間絶縁膜において、前記ランディングパッドを覆う金属層間絶縁膜と、をさらに含み、
前記貫通ビア構造物は、前記基板と前記層間絶縁膜とを貫通する貫通ビアホール内に配置され、前記貫通ビアホールの底部に段差部が形成されることを特徴とする請求項14に記載の集積回路装置。 - 基板の第1面上に、ランディングパッド金属層とランディングパッドバリア層とを含むランディングパッドを形成する段階と、
前記基板の前記第1面と対向する第2面から前記基板を貫通し、かつ前記ランディングパッドバリア層の上面を露出させる、貫通ビアホールを形成する段階と、
前記貫通ビアホールの内壁上に、第2導電性バリア層を形成する段階と、
前記ランディングパッド金属層の上面を露出させるように、前記貫通ビアホールの底部を拡張させる段階と、
前記貫通ビアホールの内壁上に、第1導電性バリア層を形成する段階と、を含む集積回路装置の製造方法。 - 前記第1導電性バリア層上に、前記貫通ビアホールの内部を充填する導電性プラグを形成する段階をさらに含むことを特徴とする請求項18に記載の集積回路装置の製造方法。
- 前記ランディングパッドを形成する段階は、
前記基板の前記第1面上に、層間絶縁膜を形成する段階と、
前記層間絶縁膜上に、金属層間絶縁膜を形成する段階と、
前記金属層間絶縁膜に、ランディングパッドホールを形成する段階と、
前記ランディングパッドホール内に、前記ランディングパッドを形成する段階と、を含むことを特徴とする請求項18に記載の集積回路装置の製造方法。 - 前記貫通ビアホールを拡張させる段階において、前記層間絶縁膜は、前記貫通ビアホールの内壁上に露出されないことを特徴とする請求項20に記載の集積回路装置の製造方法。
- 前記第2導電性バリア層を形成する段階の前に、前記貫通ビアホールの内壁上に、ビア絶縁層を形成する段階をさらに含み、
前記貫通ビアホールを拡張させる段階において、前記ビア絶縁層は、前記貫通ビアホールの内壁上に露出されないことを特徴とする請求項20に記載の集積回路装置の製造方法。
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