JP2006165454A - 半導体装置の製造方法および半導体装置 - Google Patents
半導体装置の製造方法および半導体装置 Download PDFInfo
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- JP2006165454A JP2006165454A JP2004358140A JP2004358140A JP2006165454A JP 2006165454 A JP2006165454 A JP 2006165454A JP 2004358140 A JP2004358140 A JP 2004358140A JP 2004358140 A JP2004358140 A JP 2004358140A JP 2006165454 A JP2006165454 A JP 2006165454A
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Abstract
【解決手段】基板11上に設けられた下層配線15上に層間絶縁膜17を形成し、層間絶縁膜17に接続孔18を形成する第1工程と、下層配線15の表面側の接続孔18の底部となる領域に、下層配線15を構成する第1の金属材料と当該第1の金属材料とは異なる第2の金属材料とからなる合金層31を形成する第2工程と、合金層31をスパッタエッチングする第3工程と、接続孔18に下層配線15に達する状態のヴィアを形成する第4工程とを有することを特徴とする半導体装置の製造方法および半導体装置である。
【選択図】図1
Description
本発明の半導体装置の製造方法に係わる実施の形態の一例を、図1〜図3の製造工程断面図によって説明する。本実施形態では、デュアルダマシン法を用いたCuと低誘電率膜とからなる多層配線構造の形成方法について説明する。なお、背景技術で説明した半導体装置の製造方法と同様の構成には同一の番号を付して説明する。
上述した第1実施形態では、スパッタエッチングにより合金層31を掘り込むことで、接続孔18に形成するヴィア23が下層配線15に食い込んだ状態のアンカー構造を形成する例について説明した。しかし、本発明はこれに限定されず、図4に示すように、接続孔18を合金層31の表面に達する状態で形成し、接続孔18に形成するヴィア23をアンカー構造としない場合であっても、適用可能である。この場合であっても、接続孔18の内壁にバリア膜20を形成する工程の前に、合金層31の表面に、Arを用いたスパッタエッチングを行うことで合金層31の表面を清浄化することから、接続孔18の側壁にCuTa合金からなる飛散物31’が付着する。
次に、本発明の半導体装置の製造方法にかかる第2の実施形態について、図5の製造工程断面図を用いて説明する。なお、第1実施形態と同様の構成には同一の番号を付して説明し、詳細な説明は省略する。また、図2(e)を用いて説明した層間絶縁膜17に接続孔18に連通する状態の配線溝19を形成した後、接続孔18の底部のエッチングストッパー膜16を除去する工程までは、第1実施形態と同様であることとする。
次に、本発明の半導体装置の製造方法にかかる第3の実施形態について、図6の製造工程断面図を用いて説明する。なお、第1実施形態で図1(a)を用いて説明したように、下層配線15上および層間絶縁膜12上に、例えばSiCNからなるエッチングストッパー膜16を形成する工程までは、第1実施形態と同様であることとする。
なお、上述した第3実施形態では、イオン注入法により合金層31を形成する例について説明したが、合金層31を熱処理により形成してもよい。この場合の例について、図7の製造工程断面図を用いて説明する。なお、エッチングストッパー膜16上に、接続孔パターンの設けられたレジストマスクR’を形成する工程までは、第3実施形態と同様であることとする。
なお、上述した第3実施形態では、イオン注入法により合金層31を形成する例について説明したが、合金層31を埋め込み法により形成してもよい。この場合の例について、図8の製造工程断面図を用いて説明する。なお、エッチングストッパー膜16上にレジストマスクR’を形成する工程までは、第3実施形態と同様であることとする。
Claims (16)
- 基板上に設けられた配線を覆う状態で、当該基板上に絶縁膜を形成し、当該絶縁膜に接続孔を形成する第1工程と、
前記配線の表面側の前記接続孔の底部となる領域に、前記配線を構成する第1の金属材料と当該第1の金属材料とは異なる第2の金属材料とからなる合金層を形成する第2工程と、
前記合金層をスパッタエッチングする第3工程と、
前記接続孔に前記配線に達する状態のヴィアを形成する第4工程とを有する
ことを特徴とする半導体装置の製造方法。 - 前記第2工程では、
イオン注入法により、前記接続孔の底部となる領域に前記第2の金属材料を導入することで、前記合金層を形成する
ことを特徴とする請求項1記載の半導体装置の製造方法。 - 前記第2工程では、
前記接続孔の内壁を覆う状態で、前記絶縁膜上に前記第2の金属材料を含む金属含有膜を形成した後、熱処理を行い、前記金属含有膜から前記配線の表面側に前記第2の金属材料を拡散させることで、前記合金層を形成する
ことを特徴とする請求項1記載の半導体装置の製造方法。 - 前記第3工程では、
前記合金層を前記配線の表面側に残存させるように、前記合金層をスパッタエッチングする
ことを特徴とする請求項1記載の半導体装置の製造方法。 - 前記第3工程では、
前記合金層を掘り込むことで、前記接続孔を前記配線の内部に達する状態にする
ことを特徴とする請求項1記載の半導体装置の製造方法。 - 前記第3工程と前記第4工程の間に、
前記接続孔の内壁を覆う状態で、前記ヴィアからの前記絶縁膜への金属の拡散を防止するとともに前記第2の金属材料を含むバリア膜を形成する工程を有し、
前記第4工程では、前記接続孔の内部に前記バリア膜を介して前記ヴィアを形成する
ことを特徴とする請求項1記載の半導体装置の製造方法。 - 基板上に設けられた配線を覆う状態で、当該基板上に接続孔パターンの設けられたマスクを形成し、前記マスクから露出された前記配線の表面側に、前記配線を構成する第1の金属材料と当該第1の金属材料とは異なる第2の金属材料とからなる合金層を形成する第1工程と、
前記マスクの除去された前記配線上または前記配線上を含む前記マスク上に、絶縁膜を形成し、当該絶縁膜に前記合金層に達する状態の接続孔を形成する第2工程と、
前記合金層をスパッタエッチングする第3工程と、
前記接続孔に前記配線に達する状態のヴィアを形成する第4工程とを有する
ことを特徴とする半導体装置の製造方法。 - 前記第1工程では、
イオン注入法により、前記マスクから露出された前記配線の表面側に前記第2の金属材料を導入することで、前記合金層を形成する
ことを特徴とする請求項7記載の半導体装置の製造方法。 - 前記第1工程では、
前記配線上を含む前記マスク上に、前記第2の金属材料を含む金属含有膜を形成し、熱処理を行うことで、前記マスクから露出された前記配線の表面側に前記第2の金属材料を拡散させた後、前記マスク上の前記金属含有膜を除去することで、前記合金層を形成する
ことを特徴とする請求項7記載の半導体装置の製造方法。 - 前記第1工程では、
前記マスクを用いたエッチングにより、前記マスクから露出された前記配線の表面側に凹部を形成した後、当該凹部を前記合金層で埋め込む
ことを特徴とする請求項7記載の半導体装置の製造方法。 - 前記第3工程では、
前記合金層を前記配線の表面側に残存させるように、前記合金層をスパッタエッチングする
ことを特徴とする請求項7記載の半導体装置の製造方法。 - 前記第3工程では、
前記合金層を掘り込むことで、前記接続孔を前記配線の内部に達する状態にする
ことを特徴とする請求項7記載の半導体装置の製造方法。 - 前記第3工程と前記第4工程との間に、
前記接続孔の内壁を覆う状態で前記絶縁膜上に、前記ヴィアからの前記絶縁膜への金属の拡散を防止するとともに前記第2の金属材料を含むバリア膜を形成する工程を有し、
前記第4工程では、前記接続孔の内部に前記バリア膜を介して前記ヴィアを形成する
ことを特徴とする請求項7記載の半導体装置の製造方法。 - 基板上に設けられた配線と、
前記配線を覆う状態で前記基板上に設けられた絶縁膜と、
前記絶縁膜に設けられた接続孔に、前記配線に達する状態で設けられたヴィアとを備えた半導体装置において、
前記配線の表面側には、前記配線を構成する第1の金属材料と、当該第1の金属材料とは異なる第2の金属材料とからなる合金層が、前記ヴィアとの接合領域に選択的に設けられている
ことを特徴とする半導体装置。 - 前記ヴィアは、前記配線の内部に達する状態で設けられている
ことを特徴とする請求項14記載の半導体装置。 - 前記ヴィアは、当該ヴィアから前記絶縁膜への金属の拡散を防止するとともに前記第2の金属材料を含むバリア膜を介して、前記接続孔に設けられている
ことを特徴とする請求項14記載の半導体装置。
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US11/287,532 US7416974B2 (en) | 2004-12-10 | 2005-11-22 | Method of manufacturing semiconductor device, and semiconductor device |
TW094141805A TW200631132A (en) | 2004-12-10 | 2005-11-29 | Semiconductor device and method for manufacturing the same |
KR1020050119236A KR20060065512A (ko) | 2004-12-10 | 2005-12-08 | 반도체 장치의 제조 방법 및 반도체 장치 |
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