JP2019530222A5 - - Google Patents

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JP2019530222A5
JP2019530222A5 JP2019513013A JP2019513013A JP2019530222A5 JP 2019530222 A5 JP2019530222 A5 JP 2019530222A5 JP 2019513013 A JP2019513013 A JP 2019513013A JP 2019513013 A JP2019513013 A JP 2019513013A JP 2019530222 A5 JP2019530222 A5 JP 2019530222A5
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JP
Japan
Prior art keywords
ions
features
surface features
layer
feature
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JP2019513013A
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Japanese (ja)
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JP2019530222A (ja
JP6889773B2 (ja
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Priority claimed from US15/384,496 external-priority patent/US10229832B2/en
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JP2019513013A 2016-09-22 2017-09-11 基板およびその上に配置された層のパターニング方法、ならびにデバイス構造の形成方法 Active JP6889773B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201662398032P 2016-09-22 2016-09-22
US62/398,032 2016-09-22
US15/384,496 2016-12-20
US15/384,496 US10229832B2 (en) 2016-09-22 2016-12-20 Techniques for forming patterned features using directional ions
PCT/US2017/050958 WO2018057327A1 (en) 2016-09-22 2017-09-11 Techniques for forming patterned features using directional ions

Publications (3)

Publication Number Publication Date
JP2019530222A JP2019530222A (ja) 2019-10-17
JP2019530222A5 true JP2019530222A5 (OSRAM) 2020-05-28
JP6889773B2 JP6889773B2 (ja) 2021-06-18

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JP2019513013A Active JP6889773B2 (ja) 2016-09-22 2017-09-11 基板およびその上に配置された層のパターニング方法、ならびにデバイス構造の形成方法

Country Status (6)

Country Link
US (1) US10229832B2 (OSRAM)
JP (1) JP6889773B2 (OSRAM)
KR (1) KR102363138B1 (OSRAM)
CN (1) CN109791874B (OSRAM)
TW (1) TWI725230B (OSRAM)
WO (1) WO2018057327A1 (OSRAM)

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US20260082879A1 (en) * 2024-09-18 2026-03-19 Tel Manufacturing And Engineering Of America, Inc. Directional sidewall deposition using directional beam

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