JP2019525992A - 保護フィルムを備えたフレキシブル基材を被覆する方法 - Google Patents
保護フィルムを備えたフレキシブル基材を被覆する方法 Download PDFInfo
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- JP2019525992A JP2019525992A JP2018564329A JP2018564329A JP2019525992A JP 2019525992 A JP2019525992 A JP 2019525992A JP 2018564329 A JP2018564329 A JP 2018564329A JP 2018564329 A JP2018564329 A JP 2018564329A JP 2019525992 A JP2019525992 A JP 2019525992A
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- Prior art keywords
- flexible substrate
- protective film
- roller
- coating
- flexible
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
- C23C16/545—Apparatus specially adapted for continuous coating for coating elongated substrates
Abstract
Description
Claims (4)
- フレキシブル基材(4)を被覆する方法であって、第1の保護フィルム(6)を有する前記フレキシブル基材(4)を、プロセスローラ(3)を介して案内し、前記第1の保護フィルム(6)を前記フレキシブル基材(4)から除去してから、前記プロセスローラ(3)に対向して位置する被覆装置(2)の被覆ゾーンに前記フレキシブル基材(4)を到達させる方法において、
a)前記フレキシブル基材(4)が前記プロセスローラ(3)の表面との機械的な接触を形成した後に、前記第1の保護フィルム(6)を、ガイドローラ(9)を用いて前記フレキシブル基材(4)から除去し、
b)前記ガイドローラ(9)を、前記プロセスローラ(3)から0.5mm〜5mmの寸法だけ間隔をあけて配置し、
c)前記基材(4)から除去された前記保護フィルム(6)の、前記プロセスローラ(3)と前記ガイドローラ(9)との間での自由振動寸法を、5mm〜50mmの長さで形成し、
d)前記フレキシブル基材(4)が前記被覆装置(2)の被覆ゾーンから出た後で、前記プロセスローラ(3)と前記フレキシブル基材(4)との間の前記機械的な接触が終了する前に、前記フレキシブル基材(4)の被覆面に、第2の保護フィルム(7)を被着することを特徴とする、方法。 - 被覆された前記フレキシブル基材(4)と前記第2の保護フィルム(7)とから成る複合体(8)が、前記プロセスローラ(3)の少なくとも10°の角度セグメント(10)のうちにおいて前記プロセスローラ(3)の表面との機械的な接触を形成するように、前記第2の保護フィルム(7)を前記フレキシブル基材(4)の被覆面に被着する、請求項1記載の方法。
- 前記ガイドローラ(9)に作用する圧力の実際値を検出し、目標値と比較し、比較結果に応じて前記ガイドローラ(9)のトルクを調整する、請求項1記載の方法。
- 前記ガイドローラ(9)を、圧力測定ローラとして形成する、請求項3記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102016110737.9 | 2016-06-10 | ||
DE102016110737 | 2016-06-10 | ||
PCT/EP2017/064030 WO2017211989A1 (de) | 2016-06-10 | 2017-06-08 | Verfahren zum beschichten eines mit einer schutzfolie versehenen flexiblen substrates |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2019525992A true JP2019525992A (ja) | 2019-09-12 |
JP6914280B2 JP6914280B2 (ja) | 2021-08-04 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018564329A Active JP6914280B2 (ja) | 2016-06-10 | 2017-06-08 | 保護フィルムを備えたフレキシブル基材を被覆する方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US10907249B2 (ja) |
EP (1) | EP3469113B1 (ja) |
JP (1) | JP6914280B2 (ja) |
WO (1) | WO2017211989A1 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111020522B (zh) * | 2019-12-09 | 2022-05-27 | 王殿儒 | 基于气体放电型大功率电子枪的复合型基材连续镀膜系统 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012177179A (ja) * | 2011-02-28 | 2012-09-13 | Fujifilm Corp | 機能性フィルムの製造方法および製造装置 |
JP2014051429A (ja) * | 2012-08-07 | 2014-03-20 | Kobe Steel Ltd | ガラスフィルム搬送装置 |
US20140290861A1 (en) * | 2013-03-28 | 2014-10-02 | Applied Materials, Inc. | Deposition platform for flexible substrates and method of operation thereof |
WO2015010036A1 (en) * | 2013-07-18 | 2015-01-22 | General Plasma, Inc. | Method for manufacturing barrier films |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19807897A1 (de) * | 1998-02-25 | 1999-08-26 | Voith Sulzer Papiertech Patent | Verfahren und Vorrichtung zum kontinuierlichen Aufwickeln einer Materialbahn |
DE102008028542B4 (de) | 2008-06-16 | 2012-07-12 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren und Vorrichtung zum Abscheiden einer Schicht auf einem Substrat mittels einer plasmagestützten chemischen Reaktion |
CN101818331B (zh) | 2009-02-26 | 2013-10-09 | 富士胶片株式会社 | 功能性膜和用于制备功能性膜的方法 |
JP2014074221A (ja) | 2012-09-13 | 2014-04-24 | Oji Holdings Corp | 真空成膜装置及び真空成膜方法 |
WO2015198701A1 (ja) | 2014-06-27 | 2015-12-30 | 富士フイルム株式会社 | 機能性フィルムの製造方法 |
-
2017
- 2017-06-08 EP EP17732345.8A patent/EP3469113B1/de active Active
- 2017-06-08 US US16/308,243 patent/US10907249B2/en active Active
- 2017-06-08 JP JP2018564329A patent/JP6914280B2/ja active Active
- 2017-06-08 WO PCT/EP2017/064030 patent/WO2017211989A1/de unknown
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012177179A (ja) * | 2011-02-28 | 2012-09-13 | Fujifilm Corp | 機能性フィルムの製造方法および製造装置 |
JP2014051429A (ja) * | 2012-08-07 | 2014-03-20 | Kobe Steel Ltd | ガラスフィルム搬送装置 |
US20140290861A1 (en) * | 2013-03-28 | 2014-10-02 | Applied Materials, Inc. | Deposition platform for flexible substrates and method of operation thereof |
JP2016519213A (ja) * | 2013-03-28 | 2016-06-30 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | フレキシブル基板のための堆積プラットフォーム及びその操作方法 |
WO2015010036A1 (en) * | 2013-07-18 | 2015-01-22 | General Plasma, Inc. | Method for manufacturing barrier films |
Also Published As
Publication number | Publication date |
---|---|
US10907249B2 (en) | 2021-02-02 |
EP3469113B1 (de) | 2021-11-03 |
WO2017211989A1 (de) | 2017-12-14 |
JP6914280B2 (ja) | 2021-08-04 |
US20190256971A1 (en) | 2019-08-22 |
EP3469113A1 (de) | 2019-04-17 |
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