JP2019522108A5 - - Google Patents

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Publication number
JP2019522108A5
JP2019522108A5 JP2018563020A JP2018563020A JP2019522108A5 JP 2019522108 A5 JP2019522108 A5 JP 2019522108A5 JP 2018563020 A JP2018563020 A JP 2018563020A JP 2018563020 A JP2018563020 A JP 2018563020A JP 2019522108 A5 JP2019522108 A5 JP 2019522108A5
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JP
Japan
Prior art keywords
chamber
processing
space
actuating arm
processing chambers
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JP2018563020A
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English (en)
Japanese (ja)
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JP2019522108A (ja
JP7146645B2 (ja
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Priority claimed from PCT/US2017/035728 external-priority patent/WO2017210583A1/en
Publication of JP2019522108A publication Critical patent/JP2019522108A/ja
Publication of JP2019522108A5 publication Critical patent/JP2019522108A5/ja
Application granted granted Critical
Publication of JP7146645B2 publication Critical patent/JP7146645B2/ja
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JP2018563020A 2016-06-02 2017-06-02 連続基板上に材料を堆積する方法及び装置 Active JP7146645B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201662344962P 2016-06-02 2016-06-02
US62/344,962 2016-06-02
PCT/US2017/035728 WO2017210583A1 (en) 2016-06-02 2017-06-02 Methods and apparatus for depositing materials on a continuous substrate

Publications (3)

Publication Number Publication Date
JP2019522108A JP2019522108A (ja) 2019-08-08
JP2019522108A5 true JP2019522108A5 (enExample) 2021-10-21
JP7146645B2 JP7146645B2 (ja) 2022-10-04

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ID=60479088

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2018563020A Active JP7146645B2 (ja) 2016-06-02 2017-06-02 連続基板上に材料を堆積する方法及び装置

Country Status (7)

Country Link
US (1) US11578004B2 (enExample)
EP (1) EP3464218A4 (enExample)
JP (1) JP7146645B2 (enExample)
CN (1) CN109195931B (enExample)
SG (2) SG11201810649PA (enExample)
TW (1) TWI757299B (enExample)
WO (1) WO2017210583A1 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3957619B1 (en) * 2020-08-19 2025-11-12 Rolls-Royce High Temperature Composites Inc Method of making a ceramic matrix composite that exhibits chemical resistance
US20240240391A1 (en) * 2023-01-12 2024-07-18 Honeywell International Inc. Continuous vacuum processing of fiber tows

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS605688B2 (ja) * 1976-01-10 1985-02-13 東レ株式会社 交絡巻縮糸の製造方法
US4343836A (en) * 1979-07-26 1982-08-10 United States Of America As Represented By The United States Department Of Energy One-directional uniformly coated fibers, method of preparation, and uses therefor
US4601260A (en) * 1985-04-01 1986-07-22 Sovonics Solar Systems Vertical semiconductor processor
DE3582682D1 (de) * 1985-12-19 1991-05-29 Hewlett Packard Co Vorrichtung zur chemischen dampfphasenabscheidung einer beschichtung auf eine optische faser.
US4968918A (en) 1987-07-06 1990-11-06 Kanebo, Ltd. Apparatus for plasma treatment
JPH0663102B2 (ja) * 1988-05-10 1994-08-17 鐘紡株式会社 プラズマ処理装置
JPH05124841A (ja) * 1991-06-12 1993-05-21 Sumitomo Electric Ind Ltd ハーメチツクコート光フアイバの製造方法
KR100492769B1 (ko) 2001-05-17 2005-06-07 주식회사 엘지이아이 수직챔버를 구비한 플라즈마중합 연속처리장치
JP2002356751A (ja) 2001-05-29 2002-12-13 Kawasaki Steel Corp 超低鉄損一方向性珪素鋼板およびその製造方法
US20050005846A1 (en) * 2003-06-23 2005-01-13 Venkat Selvamanickam High throughput continuous pulsed laser deposition process and apparatus
US20070111367A1 (en) * 2005-10-19 2007-05-17 Basol Bulent M Method and apparatus for converting precursor layers into photovoltaic absorbers
US20070099527A1 (en) * 2005-11-01 2007-05-03 General Electric Company Method and reactor to coat fiber tows and article
US20070148346A1 (en) * 2005-12-23 2007-06-28 General Electric Company Systems and methods for deposition of graded materials on continuously fed objects
EP2000008B1 (en) * 2006-03-26 2011-04-27 Lotus Applied Technology, Llc Atomic layer deposition system and method for coating flexible substrates
JP5325016B2 (ja) 2009-05-11 2013-10-23 日立造船株式会社 減圧ユニット及び圧力復元ユニット
US20100310766A1 (en) * 2009-06-07 2010-12-09 Veeco Compound Semiconductor, Inc. Roll-to-Roll Chemical Vapor Deposition System
EP2299473A1 (en) 2009-09-22 2011-03-23 Applied Materials, Inc. Modular substrate processing system and method
US20110143019A1 (en) * 2009-12-14 2011-06-16 Amprius, Inc. Apparatus for Deposition on Two Sides of the Web
CN201634580U (zh) * 2010-01-25 2010-11-17 上海台姆超声设备有限公司 自动太阳能玻璃镀膜设备
WO2012012394A1 (en) * 2010-07-23 2012-01-26 First Solar, Inc In-line deposition system
CN202164233U (zh) * 2011-07-22 2012-03-14 江苏阳帆机电设备制造有限公司 全自动坩埚烘烤喷涂流水线
JP6003513B2 (ja) * 2012-10-15 2016-10-05 株式会社Ihi 高温処理炉及び強化繊維の継ぎ方法
CN104164661A (zh) * 2013-05-16 2014-11-26 理想能源设备(上海)有限公司 直列式多腔叠层并行处理真空设备及其使用方法

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