JP7146645B2 - 連続基板上に材料を堆積する方法及び装置 - Google Patents

連続基板上に材料を堆積する方法及び装置 Download PDF

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JP7146645B2
JP7146645B2 JP2018563020A JP2018563020A JP7146645B2 JP 7146645 B2 JP7146645 B2 JP 7146645B2 JP 2018563020 A JP2018563020 A JP 2018563020A JP 2018563020 A JP2018563020 A JP 2018563020A JP 7146645 B2 JP7146645 B2 JP 7146645B2
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JP2019522108A (ja
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デーヴィッド マサユキ イシカワ，
ブライアン エイチ． バロウズ，
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Applied Materials Inc
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    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
    • C04B35/628—Coating the powders or the macroscopic reinforcing agents
    • C04B35/62884—Coating the powders or the macroscopic reinforcing agents by gas phase techniques
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    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
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    • C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
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    • C04B35/628—Coating the powders or the macroscopic reinforcing agents
    • C04B35/62844—Coating fibres
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    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
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    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
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    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Vapour Deposition (AREA)
  • Physical Vapour Deposition (AREA)
  • Prostheses (AREA)
JP2018563020A 2016-06-02 2017-06-02 連続基板上に材料を堆積する方法及び装置 Active JP7146645B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201662344962P 2016-06-02 2016-06-02
US62/344,962 2016-06-02
PCT/US2017/035728 WO2017210583A1 (en) 2016-06-02 2017-06-02 Methods and apparatus for depositing materials on a continuous substrate

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JP2019522108A JP2019522108A (ja) 2019-08-08
JP2019522108A5 JP2019522108A5 (enExample) 2021-10-21
JP7146645B2 true JP7146645B2 (ja) 2022-10-04

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US (1) US11578004B2 (enExample)
EP (1) EP3464218A4 (enExample)
JP (1) JP7146645B2 (enExample)
CN (1) CN109195931B (enExample)
SG (2) SG11201810649PA (enExample)
TW (1) TWI757299B (enExample)
WO (1) WO2017210583A1 (enExample)

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US20240240391A1 (en) * 2023-01-12 2024-07-18 Honeywell International Inc. Continuous vacuum processing of fiber tows

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US11578004B2 (en) 2023-02-14
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