CN109195931B - 用于沉积材料在连续基板上的方法及设备 - Google Patents

用于沉积材料在连续基板上的方法及设备 Download PDF

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CN109195931B
CN109195931B CN201780033767.6A CN201780033767A CN109195931B CN 109195931 B CN109195931 B CN 109195931B CN 201780033767 A CN201780033767 A CN 201780033767A CN 109195931 B CN109195931 B CN 109195931B
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processing
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CN109195931A (zh
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戴维·马萨尤基·石川
布莱恩·H·伯罗斯
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Applied Materials Inc
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    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
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    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
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  • Chemical & Material Sciences (AREA)
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  • Ceramic Engineering (AREA)
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  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Vapour Deposition (AREA)
  • Physical Vapour Deposition (AREA)
  • Prostheses (AREA)
CN201780033767.6A 2016-06-02 2017-06-02 用于沉积材料在连续基板上的方法及设备 Expired - Fee Related CN109195931B (zh)

Applications Claiming Priority (3)

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US201662344962P 2016-06-02 2016-06-02
US62/344,962 2016-06-02
PCT/US2017/035728 WO2017210583A1 (en) 2016-06-02 2017-06-02 Methods and apparatus for depositing materials on a continuous substrate

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CN109195931A CN109195931A (zh) 2019-01-11
CN109195931B true CN109195931B (zh) 2022-08-09

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US (1) US11578004B2 (enExample)
EP (1) EP3464218A4 (enExample)
JP (1) JP7146645B2 (enExample)
CN (1) CN109195931B (enExample)
SG (2) SG11201810649PA (enExample)
TW (1) TWI757299B (enExample)
WO (1) WO2017210583A1 (enExample)

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US20240240391A1 (en) * 2023-01-12 2024-07-18 Honeywell International Inc. Continuous vacuum processing of fiber tows

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EP3464218A1 (en) 2019-04-10
SG10202011721TA (en) 2020-12-30
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WO2017210583A1 (en) 2017-12-07
TWI757299B (zh) 2022-03-11
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