JP2019182813A5 - - Google Patents
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- JP2019182813A5 JP2019182813A5 JP2018078963A JP2018078963A JP2019182813A5 JP 2019182813 A5 JP2019182813 A5 JP 2019182813A5 JP 2018078963 A JP2018078963 A JP 2018078963A JP 2018078963 A JP2018078963 A JP 2018078963A JP 2019182813 A5 JP2019182813 A5 JP 2019182813A5
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- JP
- Japan
- Prior art keywords
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- carbon atoms
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- 125000004432 carbon atom Chemical group C* 0.000 claims 20
- 125000001424 substituent group Chemical group 0.000 claims 16
- 125000003118 aryl group Chemical group 0.000 claims 8
- 125000006165 cyclic alkyl group Chemical group 0.000 claims 7
- 125000001570 methylene group Chemical group [H]C([H])([*:1])[*:2] 0.000 claims 7
- 125000002947 alkylene group Chemical group 0.000 claims 6
- 238000004519 manufacturing process Methods 0.000 claims 6
- 125000004434 sulfur atom Chemical group 0.000 claims 6
- 125000004122 cyclic group Chemical group 0.000 claims 5
- 125000001072 heteroaryl group Chemical group 0.000 claims 5
- 238000000034 method Methods 0.000 claims 5
- 125000004430 oxygen atom Chemical group O* 0.000 claims 5
- 239000011347 resin Substances 0.000 claims 5
- 229920005989 resin Polymers 0.000 claims 5
- 229910052717 sulfur Inorganic materials 0.000 claims 5
- 125000000732 arylene group Chemical group 0.000 claims 4
- 230000001678 irradiating effect Effects 0.000 claims 4
- 150000003839 salts Chemical class 0.000 claims 4
- 239000002253 acid Substances 0.000 claims 3
- 125000003342 alkenyl group Chemical group 0.000 claims 3
- 125000000217 alkyl group Chemical group 0.000 claims 3
- 125000006575 electron-withdrawing group Chemical group 0.000 claims 3
- 125000005842 heteroatom Chemical group 0.000 claims 3
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims 3
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims 3
- 229910052757 nitrogen Inorganic materials 0.000 claims 3
- 125000004433 nitrogen atom Chemical group N* 0.000 claims 3
- -1 acryloyloxy group Chemical group 0.000 claims 2
- 125000004450 alkenylene group Chemical group 0.000 claims 2
- 125000003545 alkoxy group Chemical group 0.000 claims 2
- 125000004448 alkyl carbonyl group Chemical group 0.000 claims 2
- 125000004644 alkyl sulfinyl group Chemical group 0.000 claims 2
- 125000004390 alkyl sulfonyl group Chemical group 0.000 claims 2
- 125000004414 alkyl thio group Chemical group 0.000 claims 2
- 125000003277 amino group Chemical group 0.000 claims 2
- 125000004391 aryl sulfonyl group Chemical group 0.000 claims 2
- 229910052799 carbon Inorganic materials 0.000 claims 2
- 125000006297 carbonyl amino group Chemical group [H]N([*:2])C([*:1])=O 0.000 claims 2
- 125000002915 carbonyl group Chemical group [*:2]C([*:1])=O 0.000 claims 2
- 150000001875 compounds Chemical class 0.000 claims 2
- 125000004093 cyano group Chemical group *C#N 0.000 claims 2
- 125000005843 halogen group Chemical group 0.000 claims 2
- 238000010438 heat treatment Methods 0.000 claims 2
- 125000000449 nitro group Chemical group [O-][N+](*)=O 0.000 claims 2
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical group [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 claims 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims 1
- 125000004453 alkoxycarbonyl group Chemical group 0.000 claims 1
- 125000002521 alkyl halide group Chemical group 0.000 claims 1
- 125000005529 alkyleneoxy group Chemical group 0.000 claims 1
- 150000001450 anions Chemical class 0.000 claims 1
- 125000005129 aryl carbonyl group Chemical group 0.000 claims 1
- 125000005161 aryl oxy carbonyl group Chemical group 0.000 claims 1
- 125000005163 aryl sulfanyl group Chemical group 0.000 claims 1
- 125000005135 aryl sulfinyl group Chemical group 0.000 claims 1
- 125000004104 aryloxy group Chemical group 0.000 claims 1
- 125000005708 carbonyloxy group Chemical group [*:2]OC([*:1])=O 0.000 claims 1
- 239000003795 chemical substances by application Substances 0.000 claims 1
- 238000009792 diffusion process Methods 0.000 claims 1
- 238000010894 electron beam technology Methods 0.000 claims 1
- 229910052731 fluorine Inorganic materials 0.000 claims 1
- 125000001153 fluoro group Chemical group F* 0.000 claims 1
- 125000005549 heteroarylene group Chemical group 0.000 claims 1
- 229910052739 hydrogen Inorganic materials 0.000 claims 1
- 239000001257 hydrogen Substances 0.000 claims 1
- XMBWDFGMSWQBCA-UHFFFAOYSA-N hydrogen iodide Chemical group I XMBWDFGMSWQBCA-UHFFFAOYSA-N 0.000 claims 1
- 125000000468 ketone group Chemical class 0.000 claims 1
- 239000012528 membrane Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 125000000475 sulfinyl group Chemical group [*:2]S([*:1])=O 0.000 claims 1
- RWSOTUBLDIXVET-UHFFFAOYSA-O sulfonium group Chemical group [SH3+] RWSOTUBLDIXVET-UHFFFAOYSA-O 0.000 claims 1
- 125000000472 sulfonyl group Chemical group *S(*)(=O)=O 0.000 claims 1
- 125000003396 thiol group Chemical group [H]S* 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018078963A JP7079647B2 (ja) | 2018-04-17 | 2018-04-17 | 組成物及びそれを用いたデバイスの製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018078963A JP7079647B2 (ja) | 2018-04-17 | 2018-04-17 | 組成物及びそれを用いたデバイスの製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2019182813A JP2019182813A (ja) | 2019-10-24 |
| JP2019182813A5 true JP2019182813A5 (enExample) | 2021-05-27 |
| JP7079647B2 JP7079647B2 (ja) | 2022-06-02 |
Family
ID=68339604
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018078963A Active JP7079647B2 (ja) | 2018-04-17 | 2018-04-17 | 組成物及びそれを用いたデバイスの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP7079647B2 (enExample) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11281099B2 (en) * | 2018-05-28 | 2022-03-22 | Tokyo Ohka Kogyo Co., Ltd. | Resist composition, method of forming resist pattern, compound, acid generator, and method of producing compound |
| JP7304693B2 (ja) * | 2018-12-19 | 2023-07-07 | 東京エレクトロン株式会社 | レジスト組成物およびレジストパターン形成方法 |
| JPWO2022196258A1 (enExample) * | 2021-03-15 | 2022-09-22 | ||
| JP2023131576A (ja) * | 2022-03-09 | 2023-09-22 | 東京応化工業株式会社 | レジスト組成物、レジストパターン形成方法、化合物、及び高分子化合物 |
| WO2024062998A1 (ja) * | 2022-09-22 | 2024-03-28 | 東洋合成工業株式会社 | ポリマー、該ポリマーを含有するレジスト組成物、それを用いた部材の製造方法及びパターン形成方法 |
| CN117326999B (zh) * | 2023-09-12 | 2025-11-18 | 辽宁靖帆新材料有限公司 | 一种二苯基[4-(苯硫基)苯基]全氟丁基磺酸锍盐的合成方法 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10182634A (ja) * | 1996-12-25 | 1998-07-07 | Nippon Kayaku Co Ltd | 光重合開始剤、これを含有するエネルギー線硬化性組成物及びその硬化物 |
| JPH10204083A (ja) * | 1997-01-20 | 1998-08-04 | Nippon Kayaku Co Ltd | 新規スルホニウム塩、光重合開始剤、エネルギー線硬化性組成物及びその硬化物 |
| JP6071718B2 (ja) | 2013-04-10 | 2017-02-01 | キヤノン株式会社 | 感光性ネガ型樹脂組成物 |
| US10025187B2 (en) | 2014-02-21 | 2018-07-17 | Tokyo Electron Limited | Photosensitization chemical-amplification type resist material, method for forming pattern using same, semiconductor device, mask for lithography, and template for nanoimprinting |
| WO2017188297A1 (ja) | 2016-04-28 | 2017-11-02 | 東洋合成工業株式会社 | レジスト組成物及びそれを用いたデバイスの製造方法 |
| JP6847121B2 (ja) | 2016-10-17 | 2021-03-24 | 東洋合成工業株式会社 | 組成物及びそれを用いたデバイスの製造方法 |
-
2018
- 2018-04-17 JP JP2018078963A patent/JP7079647B2/ja active Active
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