JP2019175885A - 成膜方法及び成膜装置 - Google Patents
成膜方法及び成膜装置 Download PDFInfo
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Abstract
Description
前記真空容器内にシリコンを含む原料ガスを供給して前記基板に吸着させる原料吸着工程と、
供給されたガスをプラズマ化して前記基板に供給するために前記真空容器内に設けられるプラズマ形成領域に窒化ガスを供給し、前記基板に吸着された原料ガスを窒化する窒化工程と、
前記原料吸着工程と前記窒化工程とを交互に繰り返し行い、前記基板にシリコン含有窒化膜を形成する工程と、
前記原料吸着工程及び前記窒化工程を行う前に、前記シリコン含有窒化膜の応力を設定する工程と、
前記シリコン含有窒化膜の応力と前記プラズマ形成領域における窒化時間に対応するパラメータとの第1の対応関係、及び設定された前記シリコン含有窒化膜の応力に基づいた長さで前記窒化工程を行う窒化時間調整工程と、
を含むことを特徴とする。
前記真空容器内にシリコンを含む原料ガスを供給して前記基板に吸着させるための原料ガス供給部と、
供給されたガスをプラズマ化して前記基板に供給するために真空容器内に設けられるプラズマ形成領域と、
プラズマ形成領域に窒化ガスを供給し、前記基板に吸着された原料ガスを窒するための窒化ガス供給部と、
前記基板に前記原料ガスの供給とプラズマ化された前記窒化ガスの供給とが交互に繰り返し行われてシリコン含有窒化膜が形成されるように、制御信号を出力する制御部と、
前記シリコン含有窒化膜の応力と前記プラズマ形成領域における窒化時間に対応するパラメータとの第1の対応関係が記憶される記憶部と、
が設けられ、
前記制御部は、設定された前記シリコン含有窒化膜の応力と、前記第1の対応関係と、に基づいた長さで前記基板にプラズマ化された窒化ガスが供給されるように制御信号を出力することを特徴とする。
以下、プラズマ形成ユニット4Bについて説明する。プラズマ形成ユニット4Bは、ガスを回転テーブル22上に供給すると共に、このガスにマイクロ波を供給して、回転テーブル22上にプラズマを発生させる。プラズマ形成ユニット4Bは、上記のマイクロ波を供給するためのアンテナ41を備えており、当該アンテナ41は、誘電体板42と金属製の導波管43とを含む。
また、図4に示すように例えば反応領域R2における回転テーブル22の外側における真空容器21の底部には、排気口59が開口している。この排気口59は真空ポンプなどの図示しない排気機構に接続されており、当該排気口59からの排気量は調整自在とされる。
以下、本発明に関連して行われた評価試験について説明する。
(評価試験1)
複数のウエハWに対して図1(a)〜図2(d)で説明した一連の処理を行い、SiN膜15にパターンを形成した。このSiN膜15については、成膜装置2を用いてウエハW毎に異なる応力を有するように成膜しており、具体的に当該応力が+50MPa、−200MPaとなるように成膜を行った。そして、SiN膜15のパターン形成後のウエハWを、DHF(希釈されたフッ化水素酸)を用いて洗浄し、TEM(透過型電子顕微鏡)を用いて各ウエハWの縦断側面を撮像した。
R1、R3 改質領域
R2 反応領域
W ウエハ
15 SiN膜
2 成膜装置
21 回転テーブル
23 回転機構
3 ガス給排気ユニット
4A、4B、4C プラズマ形成ユニット
60 制御部
Claims (8)
- 真空容器の内部に設けられる載置台に基板を載置する工程と、
前記真空容器内にシリコンを含む原料ガスを供給して前記基板に吸着させる原料吸着工程と、
供給されたガスをプラズマ化して前記基板に供給するために前記真空容器内に設けられるプラズマ形成領域に窒化ガスを供給し、前記基板に吸着された原料ガスを窒化する窒化工程と、
前記原料吸着工程と前記窒化工程とを交互に繰り返し行い、前記基板にシリコン含有窒化膜を形成する工程と、
前記原料吸着工程及び前記窒化工程を行う前に、前記シリコン含有窒化膜の応力を設定する工程と、
前記シリコン含有窒化膜の応力と前記プラズマ形成領域における窒化時間に対応するパラメータとの第1の対応関係、及び設定された前記シリコン含有窒化膜の応力に基づいた長さで前記窒化工程を行う窒化時間調整工程と、
を含むことを特徴とする成膜方法。 - 前記窒化時間調整工程の代わりに、前記シリコン含有窒化膜の応力と前記プラズマ形成領域に供給する水素ガスの流量との第2の対応関係、及び設定された前記シリコン含有窒化膜の応力に基づいた流量で前記プラズマ形成領域に水素ガスを供給する水素ガス流量調整工程を含むことを特徴とする請求項1記載の成膜方法。
- 前記窒化時間調整工程及び前記水素ガス流量調整工程の両方を含むことを特徴とする請求項1または2記載の成膜方法。
- 前記第2の対応関係は、
前記プラズマ形成領域へ供給する水素ガスの流量が0または0以外の流量から選択されるように設定されていることを特徴とする請求項2または3記載の成膜方法。 - 前記載置台である回転テーブルを回転させることで前記基板を公転させる工程が含まれ、
前記原料吸着工程は、前記プラズマ形成領域から前記回転テーブルの回転方向に離れた原料ガスの供給領域に対して公転する前記基板を通過させる工程を含み、
前記窒化工程は、前記プラズマ形成領域に対して、公転する前記基板を通過させる工程を含み、
前記窒化時間に対応するパラメータは、前記回転テーブルの回転数であることを特徴とする請求項4記載の成膜方法。 - 内部に基板が載置される載置台を備える真空容器と、
前記真空容器内にシリコンを含む原料ガスを供給して前記基板に吸着させるための原料ガス供給部と、
供給されたガスをプラズマ化して前記基板に供給するために真空容器内に設けられるプラズマ形成領域と、
前記プラズマ形成領域に窒化ガスを供給し、前記基板に吸着された原料ガスを窒化するための窒化ガス供給部と、
前記基板に前記原料ガスの供給とプラズマ化された前記窒化ガスの供給とが交互に繰り返し行われてシリコン含有窒化膜が形成されるように、制御信号を出力する制御部と、
前記シリコン含有窒化膜の応力と前記プラズマ形成領域における窒化時間に対応するパラメータとの第1の対応関係が記憶される記憶部と、
を備え、
前記制御部は、予め設定された前記シリコン含有窒化膜の応力と、前記第1の対応関係と、に基づいた長さで前記基板にプラズマ化された窒化ガスが供給されるように制御信号を出力することを特徴とする成膜装置。 - 前記第1の対応関係が記憶される記憶部が設けられる代りに、
前記プラズマ形成領域に水素ガスを供給する水素ガス供給部と、
前記シリコン含有窒化膜の応力と前記プラズマ形成領域に供給する水素ガスの流量との第2の対応関係が記憶された記憶部と、が設けられ、
前記制御部は、予め設定された前記シリコン含有窒化膜の応力と、前記第2の対応関係と、に基づいた流量で前記プラズマ形成領域に水素ガスが供給されるように制御信号を出力することを特徴とする請求項6記載の成膜装置。 - 前記記憶部には、第1の対応関係及び第2の対応関係が記憶され、
前記制御部は、設定された前記シリコン含有窒化膜の応力に基づいた長さで前記基板にプラズマ化された窒化ガスが供給され、且つ設定された前記シリコン含有窒化膜の応力に基づいた流量で前記プラズマ形成領域に水素ガスが供給されるように制御信号を出力することを特徴とする請求項6または7記載の成膜装置。
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