JP2019163764A5 - - Google Patents

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Publication number
JP2019163764A5
JP2019163764A5 JP2019029323A JP2019029323A JP2019163764A5 JP 2019163764 A5 JP2019163764 A5 JP 2019163764A5 JP 2019029323 A JP2019029323 A JP 2019029323A JP 2019029323 A JP2019029323 A JP 2019029323A JP 2019163764 A5 JP2019163764 A5 JP 2019163764A5
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JP
Japan
Prior art keywords
vacuum pump
stiffness
rotor
bearing ring
pump according
Prior art date
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Application number
JP2019029323A
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English (en)
Japanese (ja)
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JP2019163764A (ja
JP7208817B2 (ja
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Publication date
Priority claimed from EP18159918.4A external-priority patent/EP3536965B1/de
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Publication of JP2019163764A publication Critical patent/JP2019163764A/ja
Publication of JP2019163764A5 publication Critical patent/JP2019163764A5/ja
Application granted granted Critical
Publication of JP7208817B2 publication Critical patent/JP7208817B2/ja
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JP2019029323A 2018-03-05 2019-02-21 真空ポンプ、および真空ポンプの作動のための方法 Active JP7208817B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP18159918.4 2018-03-05
EP18159918.4A EP3536965B1 (de) 2018-03-05 2018-03-05 Vakuumpumpe, wobei der träger eines wälzlagers eine veränderbare steifigkeit und/oder dämpfungswirkung hat

Publications (3)

Publication Number Publication Date
JP2019163764A JP2019163764A (ja) 2019-09-26
JP2019163764A5 true JP2019163764A5 (https=) 2022-08-31
JP7208817B2 JP7208817B2 (ja) 2023-01-19

Family

ID=61563275

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2019029323A Active JP7208817B2 (ja) 2018-03-05 2019-02-21 真空ポンプ、および真空ポンプの作動のための方法

Country Status (2)

Country Link
EP (1) EP3536965B1 (https=)
JP (1) JP7208817B2 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3808988B1 (de) * 2020-03-27 2024-01-10 Pfeiffer Vacuum Technology AG Vakuumpumpe und verfahren zum überwachen einer vakuumpumpe
FR3149936B1 (fr) * 2023-06-15 2026-02-06 Pfeiffer Vacuum Pompe à vide turbomoléculaire

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2519651B2 (de) * 1975-05-02 1979-05-31 Teldix Gmbh, 6900 Heidelberg Magnetische Lageranordnung
JPH01294995A (ja) * 1988-05-20 1989-11-28 Hitachi Ltd 真空ポンプ
JPH03213695A (ja) * 1990-01-17 1991-09-19 Hitachi Ltd ターボ形真空ポンプ
JPH07135345A (ja) * 1993-11-09 1995-05-23 Casio Comput Co Ltd 圧電素子
DE102007052479A1 (de) * 2007-11-02 2009-05-07 Oerlikon Leybold Vacuum Gmbh Pumpen-Lageranordnung
DE102011005494B4 (de) * 2011-03-14 2012-12-06 Aktiebolaget Skf Lageranordnung
DE102013113986A1 (de) * 2013-12-13 2015-06-18 Pfeiffer Vacuum Gmbh Rotierendes System
DE102015100048B4 (de) * 2015-01-06 2018-02-08 Pfeiffer Vacuum Gmbh Anordnung zur Lagerung einer Welle einer Vakuumpumpe
CN105508498B (zh) * 2015-12-19 2018-01-02 东北大学 一种抑制旋转机械转子振动的方法
GB2564417A (en) * 2017-07-07 2019-01-16 Edwards Ltd Damper
EP3444478B1 (de) * 2017-08-18 2024-10-16 Pfeiffer Vacuum Gmbh Vakuumpumpe

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