JP7208817B2 - 真空ポンプ、および真空ポンプの作動のための方法 - Google Patents

真空ポンプ、および真空ポンプの作動のための方法 Download PDF

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Publication number
JP7208817B2
JP7208817B2 JP2019029323A JP2019029323A JP7208817B2 JP 7208817 B2 JP7208817 B2 JP 7208817B2 JP 2019029323 A JP2019029323 A JP 2019029323A JP 2019029323 A JP2019029323 A JP 2019029323A JP 7208817 B2 JP7208817 B2 JP 7208817B2
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Prior art keywords
vacuum pump
rotor
stiffness
setting
actuator
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Japanese (ja)
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JP2019163764A5 (https=
JP2019163764A (ja
Inventor
アドリーアン・ヴィルト
ダーニエール・ジーベン
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プファイファー・ヴァキューム・ゲーエムベーハー
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F04D27/0292—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/059—Roller bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
    • F04D29/668—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps damping or preventing mechanical vibrations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/005—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion using electro- or magnetostrictive actuation means

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
JP2019029323A 2018-03-05 2019-02-21 真空ポンプ、および真空ポンプの作動のための方法 Active JP7208817B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP18159918.4 2018-03-05
EP18159918.4A EP3536965B1 (de) 2018-03-05 2018-03-05 Vakuumpumpe, wobei der träger eines wälzlagers eine veränderbare steifigkeit und/oder dämpfungswirkung hat

Publications (3)

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JP2019163764A JP2019163764A (ja) 2019-09-26
JP2019163764A5 JP2019163764A5 (https=) 2022-08-31
JP7208817B2 true JP7208817B2 (ja) 2023-01-19

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ID=61563275

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JP2019029323A Active JP7208817B2 (ja) 2018-03-05 2019-02-21 真空ポンプ、および真空ポンプの作動のための方法

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EP (1) EP3536965B1 (https=)
JP (1) JP7208817B2 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3808988B1 (de) * 2020-03-27 2024-01-10 Pfeiffer Vacuum Technology AG Vakuumpumpe und verfahren zum überwachen einer vakuumpumpe
FR3149936B1 (fr) * 2023-06-15 2026-02-06 Pfeiffer Vacuum Pompe à vide turbomoléculaire

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007052479A1 (de) 2007-11-02 2009-05-07 Oerlikon Leybold Vacuum Gmbh Pumpen-Lageranordnung
EP3043074A1 (de) 2015-01-06 2016-07-13 Pfeiffer Vacuum GmbH Anordnung zur lagerung einer welle einer vakuumpumpe

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2519651B2 (de) * 1975-05-02 1979-05-31 Teldix Gmbh, 6900 Heidelberg Magnetische Lageranordnung
JPH01294995A (ja) * 1988-05-20 1989-11-28 Hitachi Ltd 真空ポンプ
JPH03213695A (ja) * 1990-01-17 1991-09-19 Hitachi Ltd ターボ形真空ポンプ
JPH07135345A (ja) * 1993-11-09 1995-05-23 Casio Comput Co Ltd 圧電素子
DE102011005494B4 (de) * 2011-03-14 2012-12-06 Aktiebolaget Skf Lageranordnung
DE102013113986A1 (de) * 2013-12-13 2015-06-18 Pfeiffer Vacuum Gmbh Rotierendes System
CN105508498B (zh) * 2015-12-19 2018-01-02 东北大学 一种抑制旋转机械转子振动的方法
GB2564417A (en) * 2017-07-07 2019-01-16 Edwards Ltd Damper
EP3444478B1 (de) * 2017-08-18 2024-10-16 Pfeiffer Vacuum Gmbh Vakuumpumpe

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007052479A1 (de) 2007-11-02 2009-05-07 Oerlikon Leybold Vacuum Gmbh Pumpen-Lageranordnung
EP3043074A1 (de) 2015-01-06 2016-07-13 Pfeiffer Vacuum GmbH Anordnung zur lagerung einer welle einer vakuumpumpe

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Publication number Publication date
EP3536965B1 (de) 2021-09-22
EP3536965A1 (de) 2019-09-11
JP2019163764A (ja) 2019-09-26

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