JP2019094573A5 - - Google Patents
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- Publication number
- JP2019094573A5 JP2019094573A5 JP2019048122A JP2019048122A JP2019094573A5 JP 2019094573 A5 JP2019094573 A5 JP 2019094573A5 JP 2019048122 A JP2019048122 A JP 2019048122A JP 2019048122 A JP2019048122 A JP 2019048122A JP 2019094573 A5 JP2019094573 A5 JP 2019094573A5
- Authority
- JP
- Japan
- Prior art keywords
- frame
- mask
- vapor deposition
- deposition mask
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 238000007740 vapor deposition Methods 0.000 claims 18
- 239000010410 layer Substances 0.000 claims 12
- 238000000034 method Methods 0.000 claims 8
- 238000005304 joining Methods 0.000 claims 5
- 238000004519 manufacturing process Methods 0.000 claims 5
- 230000002093 peripheral effect Effects 0.000 claims 5
- 239000002184 metal Substances 0.000 claims 4
- 238000009713 electroplating Methods 0.000 claims 3
- 238000003466 welding Methods 0.000 claims 3
- 238000000059 patterning Methods 0.000 claims 2
- 239000010409 thin film Substances 0.000 claims 2
- 238000000427 thin-film deposition Methods 0.000 claims 2
- 239000012790 adhesive layer Substances 0.000 claims 1
- 238000005323 electroforming Methods 0.000 claims 1
- 238000000638 solvent extraction Methods 0.000 claims 1
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019048122A JP7122278B2 (ja) | 2019-03-15 | 2019-03-15 | 蒸着マスクおよびその製造方法 |
| JP2022126458A JP2022167910A (ja) | 2019-03-15 | 2022-08-08 | 蒸着マスク |
| JP2024085697A JP7766744B2 (ja) | 2019-03-15 | 2024-05-27 | 蒸着マスク |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019048122A JP7122278B2 (ja) | 2019-03-15 | 2019-03-15 | 蒸着マスクおよびその製造方法 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017224428 Division | 2017-11-22 | 2017-11-22 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022126458A Division JP2022167910A (ja) | 2019-03-15 | 2022-08-08 | 蒸着マスク |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2019094573A JP2019094573A (ja) | 2019-06-20 |
| JP2019094573A5 true JP2019094573A5 (enExample) | 2020-10-08 |
| JP7122278B2 JP7122278B2 (ja) | 2022-08-19 |
Family
ID=66971039
Family Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019048122A Active JP7122278B2 (ja) | 2019-03-15 | 2019-03-15 | 蒸着マスクおよびその製造方法 |
| JP2022126458A Pending JP2022167910A (ja) | 2019-03-15 | 2022-08-08 | 蒸着マスク |
| JP2024085697A Active JP7766744B2 (ja) | 2019-03-15 | 2024-05-27 | 蒸着マスク |
Family Applications After (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022126458A Pending JP2022167910A (ja) | 2019-03-15 | 2022-08-08 | 蒸着マスク |
| JP2024085697A Active JP7766744B2 (ja) | 2019-03-15 | 2024-05-27 | 蒸着マスク |
Country Status (1)
| Country | Link |
|---|---|
| JP (3) | JP7122278B2 (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7122278B2 (ja) * | 2019-03-15 | 2022-08-19 | マクセル株式会社 | 蒸着マスクおよびその製造方法 |
| TWI707965B (zh) * | 2019-09-27 | 2020-10-21 | 旭暉應用材料股份有限公司 | 金屬遮罩 |
| CN112575286B (zh) * | 2019-09-27 | 2022-09-23 | 旭晖应用材料股份有限公司 | 金属遮罩 |
| JP2021161509A (ja) * | 2020-04-01 | 2021-10-11 | 株式会社ジャパンディスプレイ | 蒸着マスクの作製方法 |
| JP7606319B2 (ja) * | 2020-10-19 | 2024-12-25 | 株式会社ジャパンディスプレイ | 蒸着マスクの製造方法 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003231964A (ja) * | 2001-12-05 | 2003-08-19 | Toray Ind Inc | 蒸着マスクおよびその製造方法並びに有機電界発光装置およびその製造方法 |
| KR100708654B1 (ko) * | 2004-11-18 | 2007-04-18 | 삼성에스디아이 주식회사 | 마스크 조립체 및 이를 이용한 마스크 프레임 조립체 |
| KR101135544B1 (ko) * | 2009-09-22 | 2012-04-17 | 삼성모바일디스플레이주식회사 | 마스크 조립체, 이의 제조 방법 및 이를 이용한 평판표시장치용 증착 장치 |
| KR102702151B1 (ko) * | 2017-07-31 | 2024-09-04 | 맥셀 주식회사 | 증착 마스크 |
| JP7122278B2 (ja) * | 2019-03-15 | 2022-08-19 | マクセル株式会社 | 蒸着マスクおよびその製造方法 |
| JP7049400B2 (ja) * | 2020-06-22 | 2022-04-06 | マクセル株式会社 | 蒸着マスク |
-
2019
- 2019-03-15 JP JP2019048122A patent/JP7122278B2/ja active Active
-
2022
- 2022-08-08 JP JP2022126458A patent/JP2022167910A/ja active Pending
-
2024
- 2024-05-27 JP JP2024085697A patent/JP7766744B2/ja active Active
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